• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.155.2-155.2
• /
• 2014

Plasma Enhanced Atomic Layer Deposition(PEALD)와 Atomic Layer Deposition(ALD) Techniques는 '정확한 두께 조절' 및 '우수한 균일도'를 가지는 신뢰할 수 있는 진공 기술이다. 본 연구에서는 다공성 구조를 가지는 기판을 대상으로 PEALD와 ALD Techniques을 이용한 $Al_2O_3$ 형성 공정의 증착 특성을 비교하였다. 각 공정은 공통적으로 Tris-Methyl-Aluminium(TMA)을 첫번째 전구체로 사용하였고 purge gas로는 Nitrogen를 사용하였다. 그리고 두번째 전구체로 PEALD 공정에서는 Oxygen Plasma를 사용하였고 ALD 공정에서는 Water를 사용하였다. 복잡한 다공성 구조를 가지는 기판은 $TiO_2$ Nano-Particle paste과 colloidal Silver paste를 소결시켜 제작하여 사용하였다. 각 공정의 차이점을 비교하기 위해서 배기단에 Capacitor Diaphram Gauge(CDG)와 Residual Gas Analyzer(RGA)를 통해서 압력과 잔류 가스를 모니터하였다. 그리고 각 공정을 통해서 porous한 Nano-Particles Network에 형성된 $Al_2O_3$막의 특성을 비교하기 위해서 FE-SEM과 EDX를 통해서 관찰하였다. 또한 좀 더 자세한 비교 분석을 위해서 $Al_2O_3$ 막이 형성된 porous한 Nano-Particles Networks의 각 각의 particles들을 분산시켜 TEM과 AFM를 통해서 관찰하였다. 나아가 전기적 물성의 차이점을 비교하기 위해서 IV 및 CV를 측정하였다. 위의 일련의 비교 실험을 통해서 'PEALD과 ALD을 이용한 다공성 기판의 증착 특성'에 대하여 고찰하였다.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.19 no.4
• /
• pp.548-552
• /
• 2010

The air suction filter of the power plant decrease the dust and impurities of suction air that reduce the life and efficiency of the boiler. The suction efficiency of the air filter falls with the dust and impurities when the time of use comes to be long. Therefore, the various contaminant of the filter must remove periodically. This paper presents a developed quick exhaust valve to use in the thermo-electric power plant. to removing contaminants on the filter, the blowing is done shortly by air pressure. The Air flowed out to the out side from the inside of the filter. The performance test of the developed valve is done by making a test-bench according to JIS and KS standards. The efficiency is found higher than the existing related valve.

• Journal of Chest Surgery
• /
• v.29 no.7
• /
• pp.785-788
• /
• 1996

Pericardial abscess due to liver abscess is a very rare disease, the result of which is usually fatal when untreated. But a combination of antibiotics therapy and pericardial drainage has broug t good result. A 32-year-old man was admitted to the emergency room because of fever and chilling sensation. Chest X-ray showed cardiomegaly and a mass lesion In the left lobe of liver on ultrasonography. The echocardiography revealed impending cardiac tamponade. Pus drainage of the liver abscess through per- foration of right diaphram and pericardiotomy were performed. The pericardium was thickened and 600 ml of purulent fluid and necrotic debris were drained. Fibrin clots were firmly attached to the undelying myocradium. Histological examination of the pericardium showed acute inflammation with microabsscess and Escherichia soli was cultured from pericardial pus. He was discharged after 4 weeks on antibiotics, but Doppler echocardiograpy revealed a slightly thickened pericardium with a mild constrictive physiology.

• Journal of the Korean Geotechnical Society
• /
• v.16 no.4
• /
• pp.43-50
• /
• 2000

This paper presents the measured performance of in-situ walls using the measured data collected from various deep excavation sites in urban area. A variety of in-situ wall systems from 57 sites were considered, including H-pile walls, soil cement walls, cast-in-place pile walls, and diaphram walls. The examination included lateral wall movements as well as apparent earth pressure distributions. The measured data were thoroughly analyzed to investigate the effects of various components of in-situ wall system, such as types of wall and supporting system, on the lateral wall movement as well as on the apparent earth pressure distribution. The results wee then compared with the current design/analysis methods, and information is presented in chart formes to provide tools that can be used for design and analysis. Using the measured data, a semi-empirical equation for predicting deep excavation induced maximum lateral wall movement is suggested.

• Korean Journal of Digital Imaging in Medicine
• /
• v.2 no.1
• /
• pp.74-82
• /
• 1996

This paper were studied the evaluation in compare with the conventional and AMBER of analog images, PACS and CR of digital images which were collected every ten sampling chest images with the J.J.Vucicuh chest evaluated chart, and were measured the chest phantom surface dose and the density of several part in chest images. The evaluated numbers were total 22 persons who were 6 persons of the M.D., 6 of the radiotechnological professors and 10 of the radiotechnologists. The obtained results summarized as following : 1. Approaching the optimum standard density of the several part in chest images drew near at the lung round region density in PACS images, the sternum region density in CR and AMBER images, the heart region density in CR AMBER images, the diaphram region density in AMBER and conventional images. 2. The evaluation measured surface dose were appeared orderly lesser dose at the AMBER images (spine 21 mR, lung 2mR, heart 12mR, apex 6mR) than the conventional images(32 mR), CR images(38mR) and PACS images(81mR). 3. The anatomical physical evaluation marks were taken the highest points at CR images(88.3), and orderly PACS images(82), AMBER images(79.2) and conventional images(65.2). 4. It is exposured with lesser surface dose at the analog images, but analog images leaves much room for image quality improvement, and digital images demand for lesser exposure surface dose, although excellent image quality.

• Journal of Korean Society of Steel Construction
• /
• v.16 no.1 s.68
• /
• pp.11-20
• /
• 2004

This paper focused on square steel tubular column to H-beam connections (concrete filled tubular) with an outside-type diaphragm. Based on the yield line theory and the nonlinear static FEM analysis the specification equations were evaluated by comparing them with previous result of the simplified tensile experiment[please check. The yield line theory applied to the mechanical model theory revised by K. Morita, the nonlinear static FEM analysis using abaqus/standard, the ultimate strength equation in the specification equation using the factor for long-time loading, and the yield ratio according to material. The allowable strength in the specification equations applied the safety factors of 2.2 and 2.6 in the cases with and without filled concrete, respectively. Therefore, the evaluation of strength(for the previous result of the simplified tensile experiment in this study) was considered possible through the yield line theory, the nonlinear static FEM analysis, and the specification equations. Likewise, the specification equations were seen to be an underestimate of the previous result of the simplified tensile experiment. The strength and displaced mesh in the FEM analysis approximated the previous result of the simplified tensile experiment.

• The korean journal of orthodontics
• /
• v.27 no.4 s.63
• /
• pp.599-605
• /
• 1997

The propose of this study was to evaluate the effect of cellular activity on PDL cells dependent on intermittent and continuous compressive force by determining the alkaline phosphatase activity. An intermittent and continuous compressive forces were applied on PDL cells at the confluent stage. The alkaline phosphatase activity was measured on control and experimental groups every 24, 48, 72hours. The experimental group were consist of continuous and intermittent compressive group which were compressed by $300g/cm^2$ of diaphram pump. The intermittent compressive group was connected by timer which was worked on 10 minutes and off 10minutes. The results were as follows ; 1. The alkaline phosphatase activity of intermittent compressive group was lower than control group at 24 hours(P<0.05). 2. The alkaline phosphatase activity between each groups showed no significant differences at 48hours. 3. The alkaline phosphatase activity of continuous compresssive group was significantly higher than control group at 72 hours(P<0.01).