• Tribology and Lubricants
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• 제16권3호
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• pp.188-193
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• 2000

An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon(Si-DLC) film slid on a steel ball. The films were deposited on Si(100) wafers by a radio-frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig was performed in vacuum, dry air and ambient air conditions. It was observed that coefficient of friction decreased as the environment changed from vacuum, to dry air. Chemical analyses of debris suggested that low and stable friction is closely related to the formation of silicon-rich oxide debris and the rolling action.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 1997년도 춘계학술발표회논문집(2)
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• pp.223-230
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• 1997

최근들어 그 활용도가 점점 증대되고 있는 DLU(Diamond-like Carbon) /Diamond 박막(thin film)의 합성기술을 개발하여 원자력분야에 응용하고자 시도하였다. 이를 위하여 13.56 MHz의 고주파(RF: radio-frequency)를 사용하는 플라즈마 화학증착(PECVD: Plasma Enhanced Chemical Vapor Deposition) 장치를 직접 제작하여 탄소함유(CH$_4$, $CO_2$...등) 기체로부터 기본적인 DLC 박막증착시험을 수행하였다. 실험은 진공증착기(vacuum chamber)내의 압력(pressure), 탄소함유 기체의 조성비, 그리고 바이어스전압(negative self-bias voltage)둥을 변화시키면서 수행하였다. 증착속도(deposition rate)는 증착층의 두께를 알파스템($\alpha$-step)으로 측정하여 결정하였으며, 이로부터 증착속도가 압력 및 바이어스 전압의 증가에 따라 증가함을 알 수 있었다. 또한 바이어스 전압 300V 이상에서 $CO_2$량 증가가 증착속도를 촉진시킨다는 사실도 확인하였다. 그리고 EPMA(electron probe micro-analyser) 및 Raman 스펙트럼분석을 통하여 증착층의 구조가 DLC 임을 확인하였다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2002년도 춘계 학술발표강연 및 논문개요집
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• pp.26-26
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• 2002

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제26회 학술발표회 초록집
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• pp.105-106
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• 2004

• 반도체디스플레이기술학회지
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• 제2권1호
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• pp.1-5
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• 2003

Plasma generator based on non-self-sustained low-pressure arc discharge has been examined as a tool for deposition of highly-adhesive hydrogenated amorphous diamond-like carbon(DLC) films. Since the discharge is stable in wide range of gas pressures and currents, this plasma source makes possible to realize both plasma-immersion ion implantation(PIII) and plasma-immersion ion deposition(PIID) in a unified vacuum cycle. The plasma parameters were measured as functions of discharge current. Discharge and substrate bias voltage parameters have been determined for the PIII and PIID modes. For PIID it has been demonstrated that hard and well-adherent DLC coating are produced at 200-500 eV energies per deposited carbon atom. The growth rates of DLC films in this case are about 200-300 nm/h. It was also shown that short(∼60$\mu\textrm{s}$) high-voltage(> 1kV) substrate bias pulses are the most favorable for achieving high hardness and good adhesion of DLC, as well as for reducing of residual intrinsic stress are.

• 한국표면공학회지
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• 제36권2호
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• pp.148-154
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• 2003

Short ($\tau$=40 $mutextrm{s}$) and high-voltage ($U_{sub}$=2~8 kV) negative substrate bias pulses were used to assist pulsed magnetron sputtering DLC films deposition. Space- and time-resolved probe measurements of the plasma characteristics have been performed. It was shown that in case of high-voltage substrate bias spatial non-uniformity of the magnetron discharge plasma density greatly affected DLC deposition process. By Raman spectroscopy it was found that maximum percentage of s $p^3$-bonded carbon atoms (40 ~ 50%) in the coating was attained at energy $E_{c}$ ~700 eV per deposited carbon atom. Despite rather low diamond-like phase content these coatings are characterized by good adhesion due to ion mixing promoted by high acceleration voltage. Short duration of the bias pulses is also important to prevent electric breakdowns of insulating DLC film during its growth.wth.

• Tribology and Lubricants
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• 제35권1호
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• pp.1-8
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• 2019

Demand for plastic gears are increasing in many industries due to their low production cost, light weight, applicability without lubricant, corrosion resistance and high resilience. Despite these benefits, utilizing plastic gears is limited due to their poor material properties. In this work, DLC coating was applied to improve the tribological properties of polyamide66 gear. 0 V, 40 V, and 70 V of negative bias voltages were selected as a deposition parameter in DC magnetron sputtering system. Pin-on-disk experiment was performed in order to investigate the wear characteristics of the gears. The results of the pin-on-disk experiment showed that DLC coated polyamide66 with 40 V of negative bias voltage had the lowest friction coefficient value (0.134) and DLC coated PA66 with 0 V of negative bias voltage showed the best wear resistance ($9.83{\times}10^{-10}mm^3/N{\cdot}mm$) among all the specimens. Based on these results, durability tests were conducted for DLC coated polyamide66 gears with 0 V of negative bias voltage. The tests showed that the temperature of the uncoated polyamide66 gear increased to about $37^{\circ}C$ while the DLC coated gear saturated at about $25^{\circ}C$. Also, the power transmission efficiency of the DLC coated gear increased by about 6% compared to those without coating. Weight loss of the polyamide66 gears were reduced by about 73%.

• 한국표면공학회지
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• 제52권1호
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• pp.16-22
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• 2019

The structural change of DLC coatings during long-term wear test and dicing test under the low loading condition was investigated. DLC coatings were applied for the precision injection molds of a modified SNCM steel for the extension of life and the micro-diamond blades for the high cutting efficiency and the increase in life. A ball-on-disc wear tests in the mold steel and a dicing tests in the micro-diamond blades were conducted to understand degradation of DLC coatings. The degradation of DLC coatings for the injection mold steel and the micro-diamond blades during the wear and dicing tests were studied with Raman Spectroscopy. Raman peaks were divided two bands(D band and G band) to study the degradation process of DLC structure. By the wear test, polished condition of wear marks were observed to be maintained until 10 hrs of wear test period is given, but small striation marks appeared in 20 hours wear test. It was observed that $I_D/I_G$ ratios changed as the degradation of DLC coatings is proceeded during the wear tests and the dicing tests. It is suggested that the change in $I_D/I_G$ value possibly reflected from the composition of $sp^2$ and $sp^3$ bondings in DLC layers relevant to the change in mechanical and physical property.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.225-225
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• 2012

DLC (Diamind-Like Carbon) 코팅은 1970년대 이온주입기술을 통하여 개발된 것이 처음으로 알려져 있으며, 다이아몬드 구조인 SP3 구조와 그라파이트 구조인 SP2 구조가 혼재되어 있으면서 제조 방법에 따라 수소와 Si 및 다양한 금속을 내재시킬 수 있는 코팅 물질이다. DLC는 높은 경도, 내마모성, 윤활성, 표면조도 등 뛰어난 기계적 특성과 전기절연성, 화학적 안정성 그리고 높은 광학적 투과성을 가져 산업적 활용 잠재력이 높은 재료로 평가되고 있으며, 이외에도 낮은 공정 온도에서 증착할 수 있고, 고경도와 낮은 마찰계수를 가지고 있는 장점이 있다. 그러나, DLC가 열적으로 불안정하기 때문에 사용되는 환경이 $500^{\circ}C$ 이상이 되면 DLC는 자체의 성질을 잃고 거의 흑연에 가까운 물질이 되어버리는 문제가 있고, 또한 높은 압축응력과 기재와의 낮은 밀착력이 단점으로 나타나고 있다. 이에 본 연구는 그런 단점을 보완하고자 PECVD (Plasmas Enhanced Chemical Vapor Deposition) 방법으로 DLC박막에 여러 가지 첨가원소(F,Si,0)를 사용하여 증착시킨 후 400, 500, $600^{\circ}C$에서 1시간동안 열처리를 진행하였으며, 그에 따른 내열 특성을 평가하였다. 또한 염수분무 테스트를 통한 박막의 내식 특성을 평가하였다. DLC박막의 구조는 Raman Spectra을 통해, Sp3 (like diamond) peak와 Sp2 (like graphite) peak 의 혼재 여부를 분석하였고, FE-SEM을 이용하여 막의 표면 및 단면을 관찰하였다. 스크래치 테스트를 통해 DLC박막의 밀착력을 측정하였으며, 볼 온 디스크 타입의 Tribo-meter을 이용하여 마찰계수 변화를 관찰하였다. 또한 나노인덴터를 이용하여 미소경도를 측정하였다. 그 결과 일반 DLC 막에 비해 첨가원소가 함유된 DLC 박막에서 내식성 및 내열특성이 향상되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2005년도 제28회 학술발표회 초록집
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• pp.134-134
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• 2005