Real time control of the growth of Ge-Sb-Te multi-layer film as an optical recording media using in-situ ellipsometry (In-situ ellipsometry를 사용한 광기록매체용 Ge-Sb-Te 다층박막성장의 실시간 제어)
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- Korean Journal of Optics and Photonics
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- v.13 no.3
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- pp.215-222
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- 2002