• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.05b
• /
• pp.34-37
• /
• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.

• Journal of Radiation Industry
• /
• v.12 no.4
• /
• pp.297-302
• /
• 2018

The wedge filter has two movements, fixed and dynamic. In this study, the depth dose distribution was analyzed to determine the stability of the dose distribution and dose volume histograms obtained by evaluating the usability of the critical normal tissue dose around the tumor dose. The depth dose was analyzed from the dose distribution from a Linac (6 MV and 10 MV irradiation field of energy $20{\times}20cm^2$, wedge filter with a SSD of 100 cm and $15^{\circ}$, $30^{\circ}$, $45^{\circ}$ Y1-in (Left -7 cm), Y2-out(Right +7 cm). To analyze the fluctuations of the depth dose, a fixed wedge and dynamic wedge toe portion was examined according to the energy and angle because the size of the fluctuations was included in the error bound and did not show significant differences. The neck, breast, and pelvic dosimetry in tumor tissue are measured more commonly with a dynamic wedge than a fixed wedge presumably due to the error range. On the other hand, dosimetry of the surrounding normal tissue is more common using a fixed wedge than with a dynamic wedge.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
• /
• v.15 no.2
• /
• pp.109-116
• /
• 2022

In this paper, we propose a band rejection filter (BRF) with a state variable filter (SVF) structure to effectively remove the influence of 60 Hz line frequency noise introduced into the sensor system. The conventional BRF of the SVF structure uses an additional operational amplifier (OPAMP) to add a low pass filter (LPF) output and a high pass filter (HPF) output or an input signal and a band pass filter. Therefore, the notch frequency and the notch depth that determine the signal attenuation of the BRF greatly depend on the tolerance of the resistors used to obtain the sum or difference of the signals. On the other hand, in the proposed BRF, since the BRF output is formed naturally within the SVF structure, there is no need for a combination between each port. The notch frequency of the proposed BRF is 59.99 Hz, and it can be confirmed that it is not affected at all by the tolerance of the resistor through the Monte Carlo simulation results. The notch depth also has an average of -42.54dB and a standard deviation of 0.63dB, confirming that normal operation as a BRF is possible. Also, with the proposed BRF, noise filtering was applied to the electrocardiogram (ECG) signal that interfered with 60 Hz noise, and it was confirmed that the 60 Hz noise was appropriately suppressed.

• Progress in Medical Physics
• /
• v.4 no.1
• /
• pp.55-71
• /
• 1993

Measured and calculated the TMR and SMR factors from percent depth dose underpartial attenuators which cover the whole part of the radiation beam with variousfilter thickness from 0 to 50 mm. This study was performed for x-ray beams generated with a 6 MV linear acceleratorat source to surface distance of 100cm in a water phantom for Lipowitz metal. TMR(0,d,t) was derived from non-linear polynomial regression with field sizedifferencies and a given filter thickness. In this experiments, the TMR(0,10,50) of 50mm of filter thickness was showed13.6 % higher than that of open field and SMR(5,10,50) was 38.5% smaller than thatof open field in same depth.

• Journal of Korean Society of Water and Wastewater
• /
• v.26 no.5
• /
• pp.659-668
• /
• 2012

In Korea, almost every water treatment plant suffers from seasonal problem of algae and turbidity which result from eutrophication and heavy rainfall. To relieve this problem, experimental investigation was performed to study the applicability of a floating-media and sand filter to preliminary water treatment in terms of algae and turbidity removal. Experimental results using pure-cultured algae influent showed that the shape of algae species as well as filtration velocity affects the removal efficiency. From the experiments using natural river water, it was concluded that algae removal is more sensitive to floating-media depth but turbidity more sensitive to sand depth. As the filtration velocity increased, the removal of turbidity decreased but that of algae was not affected. The floating-media and sand filter removed more than 30 % of TP, TN, turbidity, Chl-a and CODcr, and less than 20 % of DOC and $UV_{254}$.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.15 no.5
• /
• pp.1155-1163
• /
• 2011

In this paper, we propose a new pre-processing algorithm applied to depth map to improve the coding efficiency. Now, 3DV/FTV group in the MPEG is working for standard of 3DVC(3D video coding), but compression method for depth map images are not confirmed yet. In the proposed algorithm, after dividing the histogram distribution of a given depth map by EM clustering method based on GMM, we classify the depth map into several layered images. Then, we apply different mean shift filter to each classified image according to the existence of background or foreground in it. In other words, we try to maximize the coding efficiency while keeping the boundary of each object and taking average operation toward inner field of the boundary. The experiments are performed with many test images and the results show that the proposed algorithm achieves bits reduction of 19% ~ 20% and computation time is also reduced.

• Journal of the Semiconductor & Display Technology
• /
• v.15 no.4
• /
• pp.103-106
• /
• 2016

3D technology is main factor in Augmented Reality. Depth map is essential to make cubic effect using 2d image. There are a lot of ways to construct Depth map. Among them, stereo matching is mainly used. This paper presents how to generate depth map using stereo matching. For stereo matching, existing Dynamic programming method is used. To make accurate stereo matching, High-Boost Filter is applied to preprocessing method. As a result, when depth map is generated, accuracy based on Ground Truth soared.

• Journal of information and communication convergence engineering
• /
• v.11 no.2
• /
• pp.139-146
• /
• 2013

This paper proposes a new spatial filtering approach for increasing the depth-of-field (DOF) of imaging systems, which is very useful for obtaining sharp images for a wide range of axial positions of the object. Many different techniques have been reported to increase the depth of field. However the main advantage in our method is its simplicity, since we propose the use of purely absorbing beam-shaping elements, which allows a high focal depth with a minimum modification of the optical architecture. In the filter design, we have used the analogy between the axial behavior of a system with spherical aberration and the transverse impulse response of a 1D defocused system. This allowed us the design of a ring-shaded filter. Finally, experimental verification of the theoretical statements is also provided.

• 열병합발전
• /
• s.68
• /
• pp.14-18
• /
• 2009

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.20 no.7
• /
• pp.1369-1375
• /
• 2016

In this paper, we present a depth extraction method of integral imaging using correlation between elemental images with phase only filter. Integral imaging is a passive three-dimensional (3D) imaging system records ray information of 3D objects through lenslet array by 2D image sensor, and displays 3D images by using the similar lenslet array. 2D images by lenslet array have different perspectives. These images are referred to as elemental images. Since the correlation can be calculated between elemental images, the depth information of 3D objects can be extracted. To obtain high correaltion between elemental images effectively, in this paper, we use phase only filter. Using this high correlation, the corresponding pixels between elemental images can be found so that depth information can be extracted by computational reconstruction technique. In this paper, to prove our method, we carry out optical experiment and calculate Peak Sidelobe Ratio (PSR) as a correlation metric.