• Title/Summary/Keyword: depth dose distribution

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Proton implantation mechanism involved in the fabrication of SOI wafer by ion-cut process (Ion-cut에 의한 SOI웨이퍼 제조에서의 양성자조사기구)

  • 우형주;최한우;김준곤;지영용
    • Journal of the Korean Vacuum Society
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    • v.13 no.1
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    • pp.1-8
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    • 2004
  • The SOI wafer fabrication technique has been developed by using ion-cut process, based on proton implantation and wafer bonding techniques. It has been shown by TRIM simulation that 65 keV proton implantation is required for the standard SOI wafer (200 nm SOI, 400 nm BOX) fabrication. In order to investigate the optimum proton dose and primary annealing condition for wafer splitting, the surface morphologic change has been observed such as blistering and flaking. As a result, effective dose is found to be in the 6∼$9\times10^{16}$ $H^{+}/\textrm{cm}^2$ range, and the annealing at $550^{\circ}C$ for 30 minutes is expected to be optimum for wafer splitting. The depth distribution of implanted hydrogen has been experimentally confirmed by ERD and SIMS measurements. The microstructure evolution in the damaged layer was also studied by X-TEM analysis.

Calculation of Photon Spectra from the Tungsten Target for 10 MeV Electron Beam (10 MeV의 전자선이 텅스텐 표적에 충돌하여 생성되는 광자선 스펙트럼의 계산)

  • 이정옥;정동혁;문성록;강정구;김승곤
    • Progress in Medical Physics
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    • v.10 no.1
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    • pp.55-62
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    • 1999
  • In an effort to study the characteristics of x-rays utilized in radiation therapy, we calculated the energy distribution and the mean energy of x-rays generated from a tungsten target bombarded by 6, 10, and 15 MeV electron beams, using a Monte Carlo technique. The average photon energies calculated as a function of the beam radius lied in 1.4 ∼ 1.6, 2.1 ∼ 2.5 and 2.8 ∼ 3.3 MeV ranges for 4, 10, and 15 MV electron beams, respectively, which turned out to have no strong dependence on the radius. Using the energy distributions of 6,10, and 15 MV x-rays obtained for the target distance of 100 cm, percentage depth doses were determined using Monte Carlo calculations. For the case 10 MV, a comparison was made between our calculation and measurement performed by others. The calculated percentage depth dose appeared somewhat smaller than the measured one except in the surface region. We conclude that this is due to the fact that the beam hardening effect resulting from the flattening filter was not properly allowed for in our Monte Carlo calculations.

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A study on the BAC pilot plant in the Duk-san water works (덕산(德山) 정수장(淨水場)에서의 BAC Pilot plant에 관한 연구(硏究))

  • Lee, Sang-Bong;Kim, Dong-Youn;Lim, Jung-A;Lee, Won-Gwon
    • Journal of Korean Society of Water and Wastewater
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    • v.9 no.2
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    • pp.97-107
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    • 1995
  • Today a conventional water treatment system has many problems. The ozone/GAC process, sometimes termed Biological Activated Carbon(BAC), appeared to be effective for the removal of soluble organic matters in the drinking water. The water quality of Nak-dong river in Pusan, generally shows BDOC 30-40% and NBDOC 60-70%. The pilot plant installed at the Duk-san water works that was been largest treatability(1,650,000ton/day) in Pusan. A experimental water in the pilot plant made use of the water after sand-filteration. Following results are drawn from this study. Initial adsorption velocity($DOC/DOC_o/T$) in the pure adsorption of GAG had a 0.0225, it's velocity changed to 0.006 after ozone added and the optimum ozone dose ranged of $1.4-2.0mgO_3/L$. A experimental water in the pilot plant composed with humic material(78%). Humic material composed with humic acid(20%) and fulvic acid(56%), and it's rate changed to 18 and 50% respectively after ozone added. DOC constantly decreased in the EBCTs and removal efficieny in the 15min of EBCT was 45-50%. It showed the largest removal rate of BDOC in the EBCT 5 and among the season, characteristics of removal varied. The HPC distributed over $10^6-10^7CFU/cm^3$ in the bed depth and among the season, distribution of HPC were differential.

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The Evaluation of Performance Limiting Factors for the Optimization of Drinking Water Treatment (정수장 최적화를 위한 성능제한인자 평가에 관한 연구)

  • Kim, Jeong Hyun;Bae, Chul Ho;Park, No Suk;Moon, Yong Taik;Lee, Sun Ju;Kown, Soon Buhm;Ahn, Hyo Won
    • Journal of Korean Society of Water and Wastewater
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    • v.19 no.1
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    • pp.78-91
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    • 2005
  • Performance limiting factors (PLFs) derived from 161 drinking water treatment plants (DWTPs), assessed by International Technical Diagnosis & Assistance Center, were analyzed and evaluated in more detail in this study. In order to conduct study, 161 DWTPs were divided into five categories depending on their capacity, and into twelve groups according to processes and facilities. From the results of analysis, PLFs and their distribution ratio derived from each category were significantly different. Filtration was the most important performance limiting process in all DWTPs of five categories, and the PLFs in filtration were backwashing velocity, media configuration, bed depth, and formation of mud-ball. The PLFs in coagulation-flocculation process were found out to be coagulant dosage, mixing speed, mechanical problems, and others in the order of frequency of occurrence. Also, insufficient disinfection ability that is resulted from insufficient hydraulic detention time and improper chlorine dose and injection point, is the most significant among PLFs in a clear well. In the case of sedimentation, inappropriate baffle structure and excessive upward velocity were PLFs. In addition, the results showed that high turbid water and low alkalinity in a rainy season, ferric and manganese ions, and ammonia nitrogen have been contributed significantly on the performance of DWTPs.

Monte Carlo Simulation on Light Distribution in Turbid Material (혼탁매질에서 광분포에 관한 Monte Carlo 시뮬레이션)

  • Kim, Ki-Jun;Sung, Ki-Chun
    • Journal of the Korean Applied Science and Technology
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    • v.15 no.4
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    • pp.11-20
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    • 1998
  • The propagation of light radiation in a turbid medium is an important problem that confronts dosimetry of therapeutic laser delivery and the development of diagnostic spectroscopy. Scattered light is measured as a function of the position(distance r, depth z) between the axis of the incident beam and the detection spot. Turbid sample yields a very forward-directed scattering pattern at short range of position from source to detector, whereas the thicker samples greatly attenuated the on-axis intensity at long range of position. The portions of scattered light reflected from or transmitted throughphantom depend upon internal reflectance and absorption properties of the phantom. Monte Carlo simulation method for modelling light transport in tissue is applied. It uses the photon is moved a distance where it may be scattered, absorbed, propagated, internally reflected, or transmitted out of tissue. The photon is repeatedly moved until it either escape from or is absorbed by the phantom. In order to obtain an optimum therapeutic ratio in phantom material, optimum control the light energy fluence rate is essential. This study is to discuss the physical mechanisms determining the actual light dose in phantom. Permitting a qualitative understanding of the measurements. It may also aid in designing the best model for laser medicine and application of medical engineering.

Estimation of Jaw and MLC Transmission Factor Obtained by the Auto-modeling Process in the Pinnacle3 Treatment Planning System (피나클치료계획시스템에서 자동모델화과정으로 얻은 Jaw와 다엽콜리메이터의 투과 계수 평가)

  • Hwang, Tae-Jin;Kang, Sei-Kwon;Cheong, Kwang-Ho;Park, So-Ah;Lee, Me-Yeon;Kim, Kyoung-Ju;Oh, Do-Hoon;Bae, Hoon-Sik;Suh, Tae-Suk
    • Progress in Medical Physics
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    • v.20 no.4
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    • pp.269-276
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    • 2009
  • Radiation treatment techniques using photon beam such as three-dimensional conformal radiation therapy (3D-CRT) as well as intensity modulated radiotherapy treatment (IMRT) demand accurate dose calculation in order to increase target coverage and spare healthy tissue. Both jaw collimator and multi-leaf collimators (MLCs) for photon beams have been used to achieve such goals. In the Pinnacle3 treatment planning system (TPS), which we are using in our clinics, a set of model parameters like jaw collimator transmission factor (JTF) and MLC transmission factor (MLCTF) are determined from the measured data because it is using a model-based photon dose algorithm. However, model parameters obtained by this auto-modeling process can be different from those by direct measurement, which can have a dosimetric effect on the dose distribution. In this paper we estimated JTF and MLCTF obtained by the auto-modeling process in the Pinnacle3 TPS. At first, we obtained JTF and MLCTF by direct measurement, which were the ratio of the output at the reference depth under the closed jaw collimator (MLCs for MLCTF) to that at the same depth with the field size $10{\times}10\;cm^2$ in the water phantom. And then JTF and MLCTF were also obtained by auto-modeling process. And we evaluated the dose difference through phantom and patient study in the 3D-CRT plan. For direct measurement, JTF was 0.001966 for 6 MV and 0.002971 for 10 MV, and MLCTF was 0.01657 for 6 MV and 0.01925 for 10 MV. On the other hand, for auto-modeling process, JTF was 0.001983 for 6 MV and 0.010431 for 10 MV, and MLCTF was 0.00188 for 6 MV and 0.00453 for 10 MV. JTF and MLCTF by direct measurement were very different from those by auto-modeling process and even more reasonable considering each beam quality of 6 MV and 10 MV. These different parameters affect the dose in the low-dose region. Since the wrong estimation of JTF and MLCTF can lead some dosimetric error, comparison of direct measurement and auto-modeling of JTF and MLCTF would be helpful during the beam commissioning.

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Application of an imaging plate to relative dosimetry of clinical x-ray beams (Imaging Plate를 이용한 의료용 광자선의 선량측정)

  • 임상욱;여인환;김대용;안용찬;허승재;윤병수
    • Progress in Medical Physics
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    • v.11 no.2
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    • pp.117-122
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    • 2000
  • The IP(imaging plate) has been widely used to measure the two-dimensional distribution of incident radiation since it has a high sensitivity, reusability, a wide dynamic range, a high position resolution. Particularly, the easiness of acquiring digitized image using IP poses a strong merit because recent trend of data handling prefers image digitization. In order to test its usefulness in photon beam dosimetry, we measured the off-axis ratio(OAR) on portal planes and percent depth dose(PDD) within a phantom using IP, and compared the results with the data based on EGS4 Monte Carlo particle transport code, ion-chambers, conventional films. For the measurement, we used 6 MV X-rays, various field sizes. As a result, IP showed significant deviation from ion-chamber measurement: a significant overresponse, 100% greater than that of ion-chamber measurement at deep part of the phantom. Filtration of low-energy scattered photons at deep part of the phantom using 0.5 mm thick lead sheets did improve the result, only to the unacceptable extent. However, portal dose measurement showed possibilities of If as a dosimeter by showing errors less than 5%, as compared with film measurement.

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A Monte Carlo Simulation Study of a Therapeutic Proton Beam Delivery System Using the Geant4 Code (Geant4 몬테카를로 코드를 이용한 양성자 치료기 노즐의 전산모사)

  • Shin, Jungwook;Shim, Hyunha;Kwak, Jungwon;Kim, Dongwook;Park, Sungyong;Cho, Kwan Ho;Lee, Se Byeong
    • Progress in Medical Physics
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    • v.18 no.4
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    • pp.226-232
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    • 2007
  • We studied a Monte Carlo simulation of the proton beam delivery system at the National Cancer Center (NCC) using the Geant4 Monte Carlo toolkit and tested its feasibility as a dose verification framework. The Monte Carlo technique for dose calculation methodology has been recognized as the most accurate way for understanding the dose distribution in given materials. In order to take advantage of this methodology for application to external-beam radiotherapy, a precise modeling of the nozzle elements along with the beam delivery path and correct initial beam characteristics are mandatory. Among three different treatment modes, double/single-scattering, uniform scanning and pencil beam scanning, we have modeled and simulated the double-scattering mode for the nozzle elements, including all components and varying the time and space with the Geant4.8.2 Monte Carlo code. We have obtained simulation data that showed an excellent correlation to the measured dose distributions at a specific treatment depth. We successfully set up the Monte Carlo simulation platform for the NCC proton therapy facility. It can be adapted to the precise dosimetry for therapeutic proton beam use at the NCC. Additional Monte Carlo work for the full proton beam energy range can be performed.

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Dosimetry and Three Dimensional Planning for Stereotactic Radiosurgery with SIEMENS 6-MV LINAC (6-MV선형가속기를 이용한 입체방사선수술의 선량측정 및 3차원적 치료계획)

  • Choi Dong-Rak;Cho Byong Chul;Suh Tae-Suk;Chung Su Mi;Choi Il Bong;Shinn Kyung Sub
    • Radiation Oncology Journal
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    • v.11 no.1
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    • pp.175-181
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    • 1993
  • Radiosurgery requires integral procedure where special devices and computer systems are needed for localization, dose planning and treatment. The aim of this work is to verify the overall mechanical accuracy of our LINAC and develop dose calculation algorithm for LINAC radiosurgery. The alignment of treatment machine and the performance testing of the entire system were extensively carried out and the basic data such as percent depth dose, off-axis ratio and output factor were measured. A three dimensional treatment planning system for stereotactic radiosurgery has been developed. We used an IBM personal computer with C programming language (IBM personal system/2, Model 80386, IBM Co., USA) for calculating the dose distribution. As a result, deviations at isocenter on gantry and table rotation for our treatment machine were acceptable since they were less than 2 mm. According to the phantom experiments, the focusing isocenter were successful by the error of less than 2 mm. Finally, the mechanical accuracy of our three dimensional planning system was confirmed by film dosimetry in sphere phantom.

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A Study on the Variation of Transmission Factors, Output Factors and Percent Depth Doses by Wedge Filters for 4~10 MV X-Ray Beams (4~10 MV X-선의 쐐기 (wedge) 필터의 투과율과 출력계수, 선축상 선량분포의 변화에 관한 연구)

  • 강위생
    • Progress in Medical Physics
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    • v.8 no.2
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    • pp.3-17
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    • 1997
  • Because a wedged beam consists of attenuated primary photons and scattered radiations from wedge, the spectrum of the wedged beam does not coincide with that of an open beam with same geometry. The aims of current report are to get exact information about whether effects of 15-60$^{\circ}$ wedge for 4 -10 MV photon beams should be considered for dose calculation or not, and to suggest a reference condition for measurement of wedge transmission factor. Percent depth dose of both open and wedged fields with angles of 15, 30, 45, 60$^{\circ}$ for beams of 4 MV(Clinac 4/100, Varian), two 6 MV(Clinac 6/100 and Clinac 2100C, Varian), 10 MV(Clinac 2100C, Varian) X-rays were measured to 30cm deep in water using ionization chambers. Hardening factors of photon beams were calculated with measured PDDs. Both field size factors and transmission factors of wedge filters were measured at d$_{max}$ in water. Beam hardening factors of wedged fields of 4 and 6 MV X-ray were larger than 1 for all wedge angles, field sizes and depths deeper than d$_{max}$ Beam hardening factors for wedge angles 15, 30, 45, 60$^{\circ}$ for 10$\times$10cm were respectively 1.010, 1.014, 1.023 and 1.034 for 4MV X-ray, 1.005, 1.008, 1.019, and 1.024 for 6MV X-ray of Clinac 6/100, 1.011, 1.021, 1.032, 1.036 for 6MV X-ray of Clinac 2100C, and 1.008, 1.012, 1.012 and 1.012 for 10MV X-ray. Beam hardening factors of 10MV X-ray were 1 within 1.2% difference for all wedge angles, depths and field sizes. It was made clear that for 6MV X-rays, the beam hardening factor depends on treatment machine. The relationship of the factor and depth was linear. Field size factor at d$_{max}$ was independent of wedge angle except for the field of 15$\times$15cm. and maximum difference of the field size factors for the field size was 1.4% for 4MV X-ray. When the wedge factor is determined, dependence of the factor on field size is negligible at d$_{max}$ but should be considered at deeper depth. Calculating dose distribution or MU, the beam hardening factor should be applied for 4~6MV X-ray beams, but might not be considered for 10MV beam. When wedge transmission factor was determined at d$_{max}$ or in air, field size factors for open field are also applicable to wedged fields, but otherwise, field size factor for each wedge or wedge factor depending on field size should be applied.

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