• Title/Summary/Keyword: deposition rate

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Sedimentary Environments of Pre-Holocene Kanweoldo Deposit in Cheonsu Bay, Western Coast of Korea (한국 서해 천수만 선현세 간월도 퇴적층의 퇴적환경)

  • Jung, Hoi-Soo;Um, In-Kwon;Lim, Dong-Il
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.7 no.1
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    • pp.32-42
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    • 2002
  • The late Quaternary deposit of Cheonsu Bay, up to 20 m in thickness above the Jurassic granite basement, consists of two sedimentary units: an upper Holocene mud and sandy mud deposit (Unit M1), and a lower late Pleistocene sand and mud deposit (Unit M2; 'Kanweoldo Deposit&apos). Unit M1 is a typical Holocene tidal-flat deposit of Cheonsu Bay, showing a coarsening upward, retrogradational facies trend. This retrograding facies trend is probably due to a relative low sedimentation rate during Holocene transgression. Overlain unconformably by Unit M1, Unit M2 deposit reaches up to 14 m in thickness and is mainly composed of muddy sediment with yellow to gray color. This unit is characterized by a variety of tide-influenced signatures such as rhythmic bedding, flaser bedding, crab burrow fossil, marine dinoflagellate assemblage and authigenic glauconite mineral, indicating very similar depositional environment to those of Unit M1 deposit. It suggests that Unit M2 was probably accumulated under the tidal-flat environment during a pre-Holocene sea-level highstand. In particular, the uppermost 3-4 m of Unit M2 appears to have undergone subaerial exposure and subsequent weathering during the sea-level lowstand after deposition. Therefore, stratigraphic unconformity between Holocene and late Pleistocene sediments is highlighted by the desiccated and weathered surface of Unit M2.

Anti-Reflection Coating Application of SixOy-SixNy Stacked-Layer Fabricated by Reactive Sputtering (반응성 스퍼터링으로 제작된 SixOy-SixNy 적층구조의 반사방지 코팅 응용)

  • Gim, Tzang-Jo;Lee, Boong-Joo;Shina, Paik-Kyun
    • Journal of the Korean Vacuum Society
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    • v.19 no.5
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    • pp.341-346
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    • 2010
  • In this paper, anti-reflection coating was investigated for decreasing the reflection in visible range of 400~650 [nm] through four staked layers of $Si_xO_y$ and $Si_xN_y$ thin films prepared by reactive sputtering method. Si single crystal of 6 [inch] diameter was used as a sputtering target. Ar and $O_2$ gases were used as sputtering gases for reactive sputtering for the $Si_xO_y$ thin film, and Ar and $N_2$ gases were used for reactive sputtering for the $Si_xN_y$ thin film. DC pulse power of 1900 [W] was used for the reactive sputtering. Refractive index and deposition rate were 1.50 and 2.3 [nm/sec] for the $Si_xO_y$, and 1.94 and 1.8 [nm/sec] for the $Si_xN_y$ thin film, respectively. Considering the simulation of the four layer anti-reflection coating structure with the above mentioned films, the $Si_xO_y-Si_xN_y$ stacked four-layer structure was prepared. The reflection measurement result for that structure showed that a "W" shaped anti-reflection was obtained successfully with a reflection of 1.7 [%] at 550 [nm] region and a reflection of 1 [%] at 400~650 [nm] range.

Development of Large-area Plasma Sources for Solar Cell and Display Panel Device Manufacturing

  • Seo, Sang-Hun;Lee, Yun-Seong;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.148-148
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    • 2011
  • Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H, ${\mu}c$-Si:H, Si3N4, and SiO2 take a significant portion of processes. In order to achieve higher deposition rate (DR), good uniformity in large-area reactor, and good film quality (low defect density, high film strength, etc.), the application of VHF (>40 MHz) CCP is indispensible. However, the electromagnetic wave effect in the VHF CCP becomes an issue to resolve for the achievement of good uniformity of plasma and film. Here, we propose a new electrode as part of a method to resolve the standing wave effect in the large-area VHF CCP. The electrode is split up a series of strip-type electrodes and the strip-type electrodes and the ground ones are arranged by turns. The standing wave effect in the longitudinal direction of the strip-type electrode is reduced by using the multi-feeding method of VHF power and the uniformity in the transverse direction of the electrodes is achieved by controlling the gas flow and the gap length between the powered electrodes and the substrate. Also, we provide the process results for the growths of the a-Si:H and the ${\mu}c$-Si:H films. The high DR (2.4 nm/s for a-Si:H film and 1.5 nm/s for the ${\mu}c$-Si:H film), the controllable crystallinity (~70%) for the ${\mu}c$-Si:H film, and the relatively good uniformity (1% for a-Si:H film and 7% for the ${\mu}c$-Si:H film) can be obtained at the high frequency of 40 MHz in the large-area discharge (280 mm${\times}$540 mm). Finally, we will discuss the issues in expanding the multi-electrode to the 8G class large-area plasma processing (2.2 m${\times}$2.4 m) and in improving the process efficiency.

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Effects of irradiation on TGF-${\beta}_1$ mRNA expression and calcific nodule formation in MC3T3-E1 osteoblastic cell line (방사선조사가 MC3T3-E1 골모세포주의 TGF-${\beta}_1$ mRNA 발현과 석회화결절 형성에 미치는 영향)

  • Song, Ju-Seop;Kim, Kyoung-A;Koh, Kwang-Joon
    • Imaging Science in Dentistry
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    • v.38 no.3
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    • pp.125-132
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    • 2008
  • Purpose : To investigate the effects of irradiation on transforming growth factor ${\beta}_1$ (TGF-${\beta}_1$) mRNA expression and calcific nodule formation in MC3T3-E1 osteoblastic cell line. Materials and Methods : Cells were cultured in alpha-minimum essential medium ($\alpha$-MEM) supplemented with 10% fetal bovine serum and antibiotics. When the cells reached the level of 70-80% confluence, culture media were changed with $\alpha$-MEM supplemented with 10% FBS, 5 mM $\beta$-glycerol phosphate, and $50\;{\mu}g/mL$ ascorbic acid. Thereafter the cells were irradiated with a single dose of 2, 4, 6, 8 Gy at a dose rate of 1.5 Gy/min. The expression pattern of TGF-${\beta}_1$ mRNA, calcium content and calcific nodule formation were examined on day 3, 7, 14, 21, 28, respectively, after the irradiation. Results : The amount of TGF-${\beta}_1$ mRNA expression decreased significantly on day 7 after irradiation of 4, 6, 8 Gy. It also decreased on day 14 after irradiation of 6, 8 Gy. and decreased on day 21 after irradiation of 8 Gy. The amount of calcium deposition decreased significantly on day 7 after irradiation of 4, 8 Gy (P < 0.01) and showed a decreased tendency on day 14, 21 after irradiation of 4, 6, 8 Gy. The number of calcific nodules was decreased on day 7 after irradiation of 4, 8 Gy. Conclusion: Irradiation with a single dose of 4, 6, 8 Gy influences negatively the bone formation at the molecular level by affecting the TGF-${\beta}_1$ mRNA expression that was associated with proliferation and the production of extracellular matrix in MC3T3-E1 osteoblastic cell line.

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A study on magnetron source design and characteristics for super high rate deposition (초고속 증착용 마그네트론원 설계 및 특성에 관한 연구)

  • 빈진호;남경훈;한전건
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2001.06a
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    • pp.8-8
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    • 2001
  • 초고속 증착은 짧은 시간에 박막 형성을 가능하게 하므로 window glass 코팅등의 대면적 코팅에 있어서 비용을 절감 시키고, 대량생산을 가능하게 만들기 때문에 관심이 집중되고 있다. 고속증착 공정으로는 high current arc, laser arc, hollow cathode discharge ion plating 그리고 마그네트론 스퍼터링법 등이 있다. 특별히 마그네트론 스퍼터링법은 3m이상의 넓이에 코팅을 할때 두께가 매우 균일하며, 증착율은 evaporation 공정에 비해 경제적, 기능적인 면에서 효율적이다. 그리고 증착된 박막은 매우 조밀하고 좋은 밀착력을 갖고 있으며, 고융점 금속을 포함하여 금속 합금 및 혼합물의 비율을 조정 및 금속 산화물, 질화물, 탄화물 등과 같은 금속의 증착도 stoichiometry를 조정하여 박막을 합성 시키는데 있어서 효과적이다. 이러한 초고속 증착을 만들기 위한 마그네트론 스퍼터링법의 요건은 마그네트론 원이 높은 타켓 power density를 가져야 하며, 타켓에서 효율적으로 플라즈마를 구속하여 스퍼터 되는 이온의 양을 최대화 시킬 수 있어 한다. 따라서 본 실험에서는 초고속 증착을 위해서 직경 50mm 타켓의 UBM magnetron원을 설계 제작하였다. 고밀도의 플라즈마를 형성시키기 위해서, Poisson simulation c code를 이용하여 자기장의 방향, 세기 및 밀도를 측정 하였고, 자기장 측정기(Gauss meter)를 이용하여 실제 자장을 측정 비교 분석하였다. 상기의 data를 바탕으로 여러 형상의 마그네트론원을 설계, 제작하였고. 마그네트론 원의 특성 분석을 위해 I-V 방전 특성을 평가하였고 substrate ion current density와 박막의 증착율을 측정하였다.duty-on 시간의 증가에 따라 $Cr_2N$ 상의 형성이 점점 많아져 80% duty-on 시간 경우에는 거의 CrN과 $Cr_2N$ 상이 공존하는 것으로 나타났다. 또한 duty-on 시간이 증가할수록 회절피크의 세기가 증가하여 결정화가 더 많이 진행되어짐을 알 수 있었다. 마찬가지로 바이어스 펄스이 주파수에 다른 결정성의 변화도 펄스의 주파수가 증가할수록 박막이 결정성이 좋아지고 $Cr_2N$ 상이 쉽게 형성되었다. 증착 진공도에 따른 결정성은 상대적으로 질소의 농도가 높은 낮은 진공도에서는 CrN 상이 주로 형성되었으며, 반대로 높은 진공도에서는 $Cr_2N$ 상이 많이 만들어졌다. 즉 $1.3{\times}10^{-2}Torr$의 증착 진공도에서는 CrN 상만이 보이는 반면 $9.0{\tiems}1-^{-2}Torr$ 진공도에서부터 $Cr_2N$ 상이 형성되기 시작하여 $5.0{\tiems}10^{-2}Torr$ 진공도에서는 두개의 상이 혼재되어 있음을 알 수 있었다. 박막의 내마모성을 조사한 결과 CrN 박막의 마찰 계수는 초기에 급격하게 증가한 후 0.5에서 0.6 사이의 값으로 큰 변화를 보이지 않았으며, $Cr_2N$ 박막도 비슷한 거동을 보였다.차 이, 목적의 차이, 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$

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Electrochemical determination of chloramphenicol using a glassy carbon electrode modified with dendrite-like Fe3O4 nanoparticles

  • Giribabu, Krishnan;Jang, Sung-Chan;Haldorai, Yuvaraj;Rethinasabapathy, Muruganantham;Oh, Seo Yeong;Rengaraj, Arunkumar;Han, Young-Kyu;Cho, Wan-Seob;Roh, Changhyun;Huh, Yun Suk
    • Carbon letters
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    • v.23
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    • pp.38-47
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    • 2017
  • In this study, magnetite ($Fe_3O_4$) nanoparticles were electrochemically synthesized in an aqueous electrolyte at a given potential of -1.3 V for 180 s. Scanning electron microscopy revealed that dendrite-like $Fe_3O_4$ nanoparticles with a mean size of < 80 nm were electrodeposited on a glassy carbon electrode (GCE). The $Fe_3O_4/GCE$ was utilized for sensing chloramphenicol (CAP) by cyclic voltammetry and square wave voltammetry. A reduction peak of CAP at the $Fe_3O_4/GCE$ was observed at 0.62 V, whereas the uncoated GCE exhibited a very small response compared to that of the $Fe_3O_4/GCE$. The electrocatalytic ability of $Fe_3O_4$ was mainly attributed to the formation of Fe(VI) during the anodic scan, and its reduction to Fe(III) on the cathodic scan facilitated the sensing of CAP. The effects of pH and scan rate were measured to determine the optimum conditions at which the $Fe_3O_4/GCE$ exhibited the highest sensitivity with a lower detection limit. The reduction current for CAP was proportional to its concentration under optimized conditions in a range of $0.09-47{\mu}M$ with a correlation coefficient of 0.9919 and a limit of detection of $0.09{\mu}M$ (S/N=3). Moreover, the fabricated sensor exhibited anti-interference ability towards 4-nitrophenol, thiamphenicol, and 4-nitrobenzamide. The developed electrochemical sensor is a cost effective, reliable, and straightforward approach for the electrochemical determination of CAP in real time applications.

Pd/Pd3Fe Alloy Catalyst for Enhancing Hydrogen Production Rate from Formic Acid Decomposition: Density Functional Theory Study (개미산 분해 반응에서 수소 생산성 증대를 위한 Pd/Pd3Fe 합금 촉매: 범밀도 함수 이론 연구)

  • Cho, Jinwon;Han, Jonghee;Yoon, Sung Pil;Nam, Suk Woo;Ham, Hyung Chul
    • Korean Chemical Engineering Research
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    • v.55 no.2
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    • pp.270-274
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    • 2017
  • Formic acid has been known as one of key sources of hydrogen. Among various monometallic catalysts, hydrogen can be efficiently produced on Pd catalyst. However, the catalytic activity of Pd is gradually reduced by the blocking of active sites by CO, which is formed from the unwanted indirect oxidation of formic acid. One of promising solutions to overcome such issue is the design of alloy catalyst by adding other metal into Pd since alloying effect (such as ligand and strain effect) can increase the chance to mitigate CO poisoning issue. In this study, we have investigated formic acid deposition on the bimetallic $Pd/Pd_3Fe$ core-shell nanocatalyst using DFT (density functional theory) calculation. In comparison to Pd catalyst, the activation energy of formic acid dehydrogenation is greatly reduced on $Pd/Pd_3Fe$ catalyst. In order to understand the importance of alloying effects in catalysis, we decoupled the strain effect from ligand effect. We found that both strain effect and ligand effect reduced the binding energy of HCOO by 0.03 eV and 0.29 eV, respectively, compared to the pure Pd case. Our DFT analysis of electronic structure suggested that such decrease of HCOO binding energy is related to the dramatic reduction of density of state near the fermi level.

Impacts of wave and tidal forcing on 3D nearshore processes on natural beaches. Part II: Sediment transport

  • Bakhtyar, R.;Dastgheib, A.;Roelvink, D.;Barry, D.A.
    • Ocean Systems Engineering
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    • v.6 no.1
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    • pp.61-97
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    • 2016
  • This is the second of two papers on the 3D numerical modeling of nearshore hydro- and morphodynamics. In Part I, the focus was on surf and swash zone hydrodynamics in the cross-shore and longshore directions. Here, we consider nearshore processes with an emphasis on the effects of oceanic forcing and beach characteristics on sediment transport in the cross- and longshore directions, as well as on foreshore bathymetry changes. The Delft3D and XBeach models were used with four turbulence closures (viz., ${\kappa}-{\varepsilon}$, ${\kappa}-L$, ATM and H-LES) to solve the 3D Navier-Stokes equations for incompressible flow as well as the beach morphology. The sediment transport module simulates both bed load and suspended load transport of non-cohesive sediments. Twenty sets of numerical experiments combining nine control parameters under a range of bed characteristics and incident wave and tidal conditions were simulated. For each case, the general morphological response in shore-normal and shore-parallel directions was presented. Numerical results showed that the ${\kappa}-{\varepsilon}$ and H-LES closure models yield similar results that are in better agreement with existing morphodynamic observations than the results of the other turbulence models. The simulations showed that wave forcing drives a sediment circulation pattern that results in bar and berm formation. However, together with wave forcing, tides modulate the predicted nearshore sediment dynamics. The combination of tides and wave action has a notable effect on longshore suspended sediment transport fluxes, relative to wave action alone. The model's ability to predict sediment transport under propagation of obliquely incident wave conditions underscores its potential for understanding the evolution of beach morphology at field scale. For example, the results of the model confirmed that the wave characteristics have a considerable effect on the cumulative erosion/deposition, cross-shore distribution of longshore sediment transport and transport rate across and along the beach face. In addition, for the same type of oceanic forcing, the beach morphology exhibits different erosive characteristics depending on grain size (e.g., foreshore profile evolution is erosive or accretive on fine or coarse sand beaches, respectively). Decreasing wave height increases the proportion of onshore to offshore fluxes, almost reaching a neutral net balance. The sediment movement increases with wave height, which is the dominant factor controlling the beach face shape.

Phase transformation and magnetic properties of NiFe thin films on Si(100) wafer and SiO2/Si(100) substrate by co-sputtering (Si(100) wafer와 SiO2/Si(100) 기판에 동시 스퍼터링법으로 증착된 NiFe 합금 박막의 상변화 및 자기적 특성)

  • Kang, Dae-Sik;Song, Jong-Han;Nam, Joong-Hee;Cho, Jeong-Ho;Chun, Myoung-Pyo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.20 no.5
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    • pp.216-220
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    • 2010
  • Ni-Fe alloys have various applications such as thin film inductor, thin film transformer, magnetic head's shield case, etc. Magnetic properties of Ni-Fe thin films depend on the process parameters such as thickness, contents, deposition rate, substrates, etc. In this study, NiFe films with a thickness of about 150nm were deposited on Si(100) wafer and $SiO_2$/Si(100) substrate at room temperature by a DC magnetron co-sputtering using Fe and Ni targets. Their phase formation and magnetic properties as a function of annealing temperature were investigated with XRD, FE-SEM and VSM. The assputtered films have BCC structure. With increasing annealing temperature, NiFe thin film for $SiO_2$/Si(100) substrate transformed completely from BCC to FCC phase above $500^{\circ}C$, but some BCC phase remained above $500^{\circ}C$ on Si(100) wafer. For samples annealed at $450^{\circ}C$, squareness ratio of NiFe thin film shows peak value and its saturation magnetization is around 0.0118 emu, which means that the optimum annealing temperature of NiFe thin film seems to be $450^{\circ}C$. The saturation magnetization of films decreased rapidly above the annealing temperature of $500^{\circ}C$ due to phase transformation from BCC to FCC phase.

Nano-scale Information Materials Using Organic/Inorganic Templates (유기/무기 나노 템플레이트를 이용한 나노 정보소재 합성 연구)

  • Lee, Jeon-Kook;Jeung, Won-Young
    • Journal of the Korean Magnetics Society
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    • v.14 no.4
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    • pp.149-161
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    • 2004
  • The fusion of nano technology and information technology is essential to sustain the present growth rate and to induce new industry in this ever-growing information age. Considering Korean industry whose competitiveness lies heavily on information related technologies, this field will be inevitable for future. Nano materials can be described as novel materials whose size of elemental structure has been engineered at the nanometer scale. Materials in the nanometer size range exhibit fundamentally new behavior, as their size falls below the critical length scale associated with any given property. " Bottom-up' techniques involve manipulating individual atoms and molecules. Bottom-up process usually implies controlled or directed self assembly of atoms and molecules into nano structures. It resembles more closely the processes of biology and chemistry, where atoms and molecules come together to create structures such as crystals or living cells. Nano scale sensors are included in the electronics area since the diverse sensing mechanisms are often housed on a semiconductor substrate and usually give rise to an electronic signal. The application of nano technology to the chemical sensors should allow improvements in functionality such as gas sensing. In this presentation, we will discuss about the nano scale information materials and devices fabricated by using the organic/inorganic nano templates.