• Title/Summary/Keyword: deposition parameter

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Post Annealing Effect on the Characteristics of Al2O3 Thin Films Deposited by Aerosol Deposition on 4H-SiC (4H-SiC기판 위에 Aerosol Deposition으로 증착된 Al2O3박막의 후열처리 효과)

  • Yu, Susanna;Kang, Min-Seok;Kim, Hong-Ki;Lee, Young-Hie;Koo, Sang-Mo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.8
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    • pp.486-490
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    • 2014
  • $Al_2O_3$ films on silicon carbide were fabricated by Aerosol deposition with annealing temperature at $800^{\circ}C$ and $1,000^{\circ}C$. The effect of thermal treatment on physical properties of $Al_2O_3$ thin films has been investigated by XRD (X-ray diffraction), AFM (atomic force microscope), SEM (scanning electron microscope), and AES (auger electron spectroscopy). Also electrical properties have been investigated by Keithley 4,200 semiconductor parameter analyzer to explain the interface trapped charge density ($D_{it}$), flatband voltage ($V_{FB}$) and leakage current ($I_o$). $Al_2O_3$ films become crystallized with increasing temperature by calculating full width at half maximum (FWHM) of diffraction peaks, also surface morphology is observed by topography measurement in non-contact mode AFM. $D_{it}$ was $2.26{\times}10^{-12}eV^{-1}.cm^{-2}$ at $800^{\circ}C$ annealed sample, which is the lowest value in all samples. Also the sample annealed at $800^{\circ}C$ has the lowest leakage current of $4.89{\times}10^{-13}A$.

Comparisons of the Change in Soft Contact Lenses Parameters and the Cleaning Efficiency after Eyeliner Deposition (아이라이너 침착에 의한 소프트 콘택트렌즈 파라미터의 변화 및 세척효과의 비교)

  • Park, Mijung;Kim, Sa Hyun;Ku, Bo Kyoung;Kim, So Ra
    • Journal of Korean Ophthalmic Optics Society
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    • v.18 no.2
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    • pp.107-115
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    • 2013
  • Purpose: This study was conducted to investigate the change of soft contact lens parameters after eyeliner deposition and compare the cleaning efficiency and the recovery rate of lens parameters by different cleaning methods. Methods: The eyeliner was deposited on three types of soft contact lenses made of different materials for 1 hour, 4 hours and 6 hours and those lenses were washed by the eyeglasses ultrasonic cleaning and by hands. The changes in visible light transmittance, diameter and surface of those lenses were compared before and after cleaning of the lens. Results: The visible light transmittance of soft contact lenses decreased along with the deposition time of eyeliner. The patterns of the eyeliner deposition on soft contact lens appeared differently depending on the physical properties of the lens material. Thus, the largest eyeliner deposition was found on narafilcon A lens. The diameters of hilafilcon B and etafilcon A lenses were decreased, however, the diameter of narafilcon A lens was increased. The cleaning efficiency of the eyeliner deposition was greater with the multipurpose solution by hands than with the eyeglasses ultrasonic cleaner. However, the recovery of lens parameters such as the lens diameter, visible light transmittance and lens surface due to the eyeliner deposition to its original state was limited. Conclusions: From these results, it is suggested to minimize eye makeup when wearing soft contact lens. Furthermore, the reduced wearing time and shorter cycle of lens replacement may be needed by considering a change of lens parameter when the repeat eye makeup is applied.

Investigating the Au-Cu thick layers Electrodeposition Rate with Pulsed Current by Optimization of the Operation Condition

  • Babaei, Hamid;Khosravi, Morteza;Sovizi, Mohamad Reza;Khorramie, Saeid Abedini
    • Journal of Electrochemical Science and Technology
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    • v.11 no.2
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    • pp.172-179
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    • 2020
  • The impact of effective parameters on the electrodeposition rate optimization of Au-Cu alloy at high thicknesses on the silver substrate was investigated in the present study. After ensuring the formation of gold alloy deposits with the desired and standard percentage of gold with the cartage of 18K and other standard karats that should be observed in the manufacturing of the gold and jewelry artifacts, comparing the rate of gold-copper deposition by direct and pulsed current was done. The rate of deposition with pulse current was significantly higher than direct current. In this process, the duty cycle parameter was effectively optimized by the "one factor at a time" method to achieve maximum deposition rate. Particular parameters in this work were direct and pulse current densities, bath temperature, concentration of gold and cyanide ions in electrolyte, pH, agitation and wetting agent additive. Scanning electron microscopy (SEM) and surface chemical analysis system (EDS) were used to study the effect of deposition on the cross-sections of the formed layers. The results revealed that the Au-Cu alloy layer formed with concentrations of 6gr·L-1 Au, 55gr·L-1 Cu, 24 gr·L-1 KCN and 1 ml·L-1 Lauryl dimethyl amine oxide (LDAO) in the 0.6 mA·cm-2 average current density and 30% duty cycle, had 0.841 ㎛·min-1 Which was the highest deposition rate. The use of electrodeposition of pure and alloy gold thick layers as a production method can reduce the use of gold metal in the production of hallow gold artifacts, create sophisticated and unique models, and diversify production by maintaining standard karats, hardness, thickness and mechanical strength. This will not only make the process economical, it will also provide significant added value to the gold artifacts. By pulsating of currents and increasing the duty cycle means reducing the pulse off-time, and if the pulse off-time becomes too short, the electric double layer would not have sufficient growth time, and its thickness decreases. These results show the effect of pulsed current on increasing the electrodeposition rate of Au-Cu alloy confirming the previous studies on the effect of pulsed current on increasing the deposition rate of Au-Cu alloy.

Change of crystallization and properties of YBCO thin film by phase transition of $CeO_2$ ($CeO_2$의 상전이에 따른 YBCO 박막의 결정성 및 특성의 변화)

  • Kim, Sung-Min;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1590-1592
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    • 1999
  • We have fabricated good quality superconducting $YBa_2Cu_3O_{7-{\delta}}$ thin films on Hastelloy(Ni-Cr-Mo alloys) with $CeO_2$ buffer layers by in-situ pulsed laser deposition in a multi-target processing chamber. Using one of electrical properties of YBCO superconducting which the resistance approaches to zero dramatically on transition temperature, we have researched to make power transmission line, we have deposited YBCO thin film on flexible metallic substrate. However, it is difficult to make films on flexible metallic substrates due to both interdiffusion problem between metallic substrate and superconducting layer and non-crystallization of YBCO on amorphous substrate. From early research, two ways-using textured metallic substrate and buffer layer-were proposed to overcome theses difficulties. We have chosen $CeO_2$ as a buffer layer which has cubic structure of $5.41{\AA}$ lattice parameter and only 0.2% of lattice mismatch with $3.82{\AA}$ of a-axis lattice parameter of YBCO on (110) direction of $CeO_2$. In order to enhance the crystallization of YBCO films on metallic substrates we deposited $CeO_2$ buffer layers at varying temperature $700^{\circ}C$ to $800^{\circ}C$ and $O_2$ pressure. By X-ray diffraction, we found that each domination of (200) and (111) orientations were strongly relied upon the deposition temperature in $CeO_2$ layer and the change of the domination of orientation affects the crystallization of YBCO upper layer.

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Effect of Deposition Parameter on Ionic Conductivity of RF Magnetron Sputtered Li$_2$O-B$_2$O$_3$-SiO$_2$ Solid Electroiyte Films (RF 마그네트론 스퍼터링법으로 증착된 Li$_2$O-B$_2$O$_3$-SiO$_2$ 계 비정질 박막 고체전해질의 증착변수에 따른 이온전도 특성에 관한 연구)

  • 노남석;권혁상
    • Journal of the Korean institute of surface engineering
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    • v.27 no.2
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    • pp.65-73
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    • 1994
  • Effects of deposition parameter on the ionic conductivity and structural change of the Lithium borosili-cate solid electrolyte films, prepared by rf sputtering using 7$LI_2O-3B_2O_3-1SiO_2$ single phase target and also a mosaic target enriched with $LI_2O$, were analyzed by measuring AC impedance and IR absorption spectra for the films. Thed solid electrolyte film deposited from the single phase target exhibited very low ionic conductivi-ty of $10^{-10}{\Omega}^{-1}cm{-1}$ at room temperature, a result of low $Li^+$ ion content(7.52 at%) in the film. The $Li^+$ con-ductivity for the films deposited from the mosaic target, however, significantly increased to $10^{-7}{\Omega}^{-1}cm{-1}$ due to both an increased $Li^+$content (14.75 at %) and a structural change of the films. The increased ionic conduc-tivity of the film appears to be associated with an easiness of ionic mobility by structural change of glassy film from a some close packed network structure to a open one. These structural changes of film were found to be closely related to the increase in the peak intensity at~$960cm^{-1}$ of IR absorption spectra for the glassy films. With increasing either argon pressure from 3 to 21 mtorr or rf power from 2 to 3 W/$cm^2$, the $Li^+$ conduc-tivity for the films significantly increased to an order of $10^{-6}{\Omega}^{-1}cm{-1}$ due to an increase in openness of film structure, as confirmed by both an increase in the IR absorption peak intensity at ~$960cm^{-1}$ and a resultant reduction of activation energy for mobility of $Li^+$ ion.

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A Study on the Band Characteristics of ZnSe Thin Film with Zinc-blende Structure (Zinc Blende 구조를 가지는 ZnSe 결정의 밴드 특성에 관한 연구)

  • Park, Jeong-Min;Kim, Hwan-Dong;Yoon, Do-Young
    • Journal of the Korean Electrochemical Society
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    • v.14 no.3
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    • pp.145-151
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    • 2011
  • ZnSe, as a II-VI compound semiconductor which has a wide band gap in the visible region is applicable to the various fields such as laser diode, display and solar cell. By using the electrochemical deposition method, ZnSe thin film was synthesized on the ITO glass substrate. The synthesis of ZnSe grains and their structure having zinc blende shape were verified through the analysis of XRD and SEM. UV spectrophotometric method determined the band gap as the value of 2.76 eV. Applying the DFT (Density Functional Theory) in the molecular dynamics, the band structure of ZnSe grains was analyzed. For ZnSe grains with zinc blende structure, the band structure and its density of state were simulated using LDA (Local Density Approximation), PBE (Perdew Burke Ernzerhof), and B3LYP (Becke, 3-parameter, Lee-Yang-Parr) functionals. Among the calculations of energy band gap upon each functional, the simulated one of 2.65 eV based on the B3LYP functional was mostly near by the experimental measurement.

Resistance Switching Mechanism of Metal-Oxide Nano-Particles Memory on Graphene Layer

  • Lee, Dong-Uk;Kim, Dong-Wook;Kim, Eun-Kyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.318-318
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    • 2012
  • A graphene layer is most important materials in resent year to enhance the electrical properties of semiconductor device due to high mobility, flexibility, strong mechanical resistance and transparency[1,2]. The resistance switching memory with the graphene layer have been reported for next generation nonvolatile memory device[3,4]. Also, the graphene layer is able to improve the electrical properties of memory device because of the high mobility and current density. In this study, the resistance switching memory device with metal-oxide nano-particles embedded in polyimide layer on the graphene mono-layer were fabricated. At first, the graphene layer was deposited $SiO_2$/Si substrate by using chemical vapor deposition. Then, a biphenyl-tetracarboxylic dianhydride-phenylene diamine poly-amic-acid was spin coated on the deposited metal layer on the graphene mono-layer. Then the samples were cured at $400^{\circ}C$ for 1 hour in $N_2$ atmosphere after drying at $135^{\circ}C$ for 30 min through rapid thermal annealing. The deposition of aluminum layer with thickness of 200 nm was done by a thermal evaporator. The electrical properties of device were measured at room temperature using an HP4156a precision semiconductor parameter analyzer and an Agilent 81101A pulse generator. We will discuss the switching mechanism of memory device with metal-oxide nano-particles on the graphene mono-layer.

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Study on Corrosion Properties of Additive Manufactured 316L Stainless Steel and Alloy 625 in Seawater

  • Jung, Geun-Su;Park, Yong-Ha;Kim, Dae-Jung;Lim, Chae-Seon
    • Corrosion Science and Technology
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    • v.18 no.6
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    • pp.258-266
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    • 2019
  • The objective of this study was to evaluate corrosion resistance of additive manufactured 316L stainless steel and alloy 625 powders widely used in corrosion resistance alloys of marine industry in comparison with cast alloys. Directed Energy Deposition (DED) method was used in this work for sample production. DED parameter adjustment was also studied for optimum manufacturing and for minimizing the influence of defects on corrosion property. Additive manufactured alloys showed lower corrosion resistance in seawater compared to cast alloys. The reason for the degradation of anti-corrosion property was speculated to be due to loss of microstructural integrity intrinsic to the additive manufacturing process. Application of heat treatment with various conditions after DED was attempted. The effect of heat treatments was analyzed with a microstructure study. It was found that 316L and alloy 625 produced by the DED process could recover their expected corrosion resistance when heat treated at 1200 ℃.

Effect of Annealing on a-Si:H Thin Films Fabricated by RF Magnetron Sputtering (RF 스퍼터를 이용하여 제작된 a-Si:H 박막의 어닐링 효과에 관한 연구)

  • Kim, Do-Yun;Kim, In-Soo;Choi, Se-Young
    • Korean Journal of Materials Research
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    • v.19 no.2
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    • pp.102-107
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    • 2009
  • The effect of annealing under argon atmosphere on hydrogenated amorphous silicon (a-Si:H) thin films deposited at room temperature and $300^{\circ}C$ using Radio Frequency (RF) magnetron sputtering has been investigated. For the films deposited at room temperature, there was not any increase in hydrogen content and optical band gap of the films, and as a result, quality of the films was not improved under any annealing conditions. For the films deposited at $300^{\circ}C$, on the other hand, significant increases in hydrogen content and optical band gap were observed, whereas values of microstructure parameter and dark conductivity were decreased upon annealing below $300^{\circ}C$. In this study, it was proposed that the Si-HX bonding strength is closely related to deposition temperature. Also, the improvement in optical, electrical and structural properties of the films deposited at $300^{\circ}C$ was originated from thermally activated hydrogen bubbles, which were initially trapped at microvoids in the films.

Modeling of RF Sputtering Process for ZnO Thin film Deposition using Neural Network (신경회로망을 이용한 RF 스퍼터링 ZnO 박막 증착 프로세스 모델링)

  • Lim, Keun-Young;Lee, Sang-Keuk;Park, Choon-Bae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.7
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    • pp.624-630
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    • 2006
  • ZnO deposition parameters are not independent and have a nonlinear and complex property. To propose a method that could verify and predict the relations of process variables, neural network was used. At first, ZnO thin films were deposited by using RF magnetron sputtering process with various conditions. Si, GaAs, and Glass were used as substrates. The temperature, work pressure, and RF power of the substrate were $50\sim500^{\circ}C$, 15 mTorr, and $180\sim210W$, respectively : the purity of the target was ZnO 4 N. Structural properties of ZnO thin films were estimated by using XRD (0002) peak intensity. The structure of neural network was a form of 4-7-1 that have one hidden layer. In training a network, learning rate and momentum were selected as 0.2, 0.6 respectively. A backpropagation neural network were performed with XRD (0002) peak data. After training a network, the temperature of substrate was evaluated as the most important parameter by sensitivity analysis and response surface. As a result, neural network could capture nonlinear and complex relationships between process parameters and predict structural properties of ZnO thin films with a limited set of experiments.