• Title/Summary/Keyword: deposition model

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An experimental study of the deposition of inorganic salts from seeded combustion gases by optical methods (광학적 방법에 의한 연소 개스에 포함된 알칼리 금속 염의 부착에 관한 실험적 연구)

  • 김상수;우성구
    • Journal of the korean Society of Automotive Engineers
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    • v.7 no.2
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    • pp.55-63
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    • 1985
  • This study is focused on deposition process leading to inefficiency and hot corrosion in fossil fuel-fired furnaces and engines. An improved understanding of the coupled thermodynamics, kinetics, and transport processes governing the deposition rate of inorganic oxides and salts from hot gases containing these compounds can suggest more efficient test strategies and control measures. Accordingly, an optical re-evaporation method for accurately measuring the growth rate of deposits under laboratory burner conditions has been developed. To demonstrate the technique and provide data suitable for theoretical model development, a deliberately simple chemical system and target geometry are used. Potassium sulfate(K$_{2}$SO$_{4}$)is introduced into a premixed propane-air flat flame at atmospheric pressure. The growth rate of $K_{2}$SO$_{4}$ on an electrically heated Pt ribbon is measured by re-evaporation technique.

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Effect of Partial Pressure of the Reactant Gas on the Kinetic Model and Mechanical Properties of the Chemical Vapor Deposited Silicon Carbide (화학증착된 실리콘 카바이드 박막의 속도론적 모델 및 기계적 성질에 미치는 반응가스 분압의 영향)

  • 어경훈;소명기
    • Journal of the Korean Ceramic Society
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    • v.28 no.6
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    • pp.429-436
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    • 1991
  • Silicon carbide has been grown by a chemical vapor deposition (CVD) technique using CH3SiCl3 and H2 gaseous mixture onto a graphite substrate. Based on the thermodynamic equilibrium studies and the suggestion that the deposition rate of SiC is controlled by surface reaction theoretical kinetic equation for CVD of silicon carbide has been proposed. The proposed theoretical kinetic equation for CVD of silicon carbide agreed well with the experimental results for the variation of the deposition rate as a function of the partial pressure of reactant gases. The Vikers microhardness of the SiC layer was about 3000∼3400 kg/$\textrm{mm}^2$ at room temperature.

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Analysis of Temperature Distribution and Residual Stress in Deposition Process of Metal Droplet by Using Laser Beam (레이저를 이용한 금속액적 적층시 온도분포와 잔류응력 해석)

  • Yun Jin-Oh;Yang Young-Soo
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.3 s.168
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    • pp.187-193
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    • 2005
  • The temperature distribution of the deposited droplet was predicted by using the finite element analysis and it was assumed that the droplet was axisymmetrical model. The analysis of residual stress was performed with the temperature data, which is obtained from the result. Axisymmetric droplet is deposited three times to consider the actual phenomenon of droplet deposition. The analysis of the temperature distribution is respectively performed whenever the axisymmetric droplet is laminated and the residual stresses of the laminated axisymmetric droplet are calculated with the value of the temperature distribution.

Numerical Simulation for Local Circulation of Urban Area and Deposition Phenomenon (도시지역의 국지순환과 침적현상에 관한 수치모의)

  • 이화운;오은주;노순아;반수진
    • Journal of Korean Society for Atmospheric Environment
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    • v.19 no.6
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    • pp.773-787
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    • 2003
  • There are variations in the temperature Held due to urban heat island and anthropogenic heating so that regional scale meteorological field is changed. Therefore we simulate and predict the regional climate change according to surface characteristics through regional meteorological model. This study investigates the regional meteorological field by urbanization that influences in local circulation system using CSU-RAMS and simulates dry deposition velocity (V$_{d}$) using PNU/DEM which includes surface characteristics (such as albedo, surface hydrology and rough-ness length etc.) with calculated meteorological field. During the summer, horizontal distributions of V$_{d}$ were simulated using CSU-RAMS and PNU/DEM at Busan metropolitan area. The estimated values of V$_{d}$ were larger in forest and agricultural areas than water areas since ozone with low water solubility is destroyed slowly at wet surface or water.water.

The Behavior of TiN Thin Film Growth According to Substrate Surface Conditions in PECVD Process (모재표면오건에 따른 TiN 박막의 Morphology변화)

  • 노경준;이정일
    • Korean Journal of Crystallography
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    • v.3 no.1
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    • pp.53-66
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    • 1992
  • Extensive research has been perform성 on the property-microstructure-process condition relations of thin films. The various proposed models are mainly based on physical vapor deposition processes. Especially the study on the surface condition of substrates in Zone 1 with low surface mobility has not been sufficient. In this study, therefore, we discussed the mochological changes of TiN films deposited by plusma enhanced chemical vapor deposition process with substrates of different composition and micro-rorghness, and compared it with the Structure Zone Model. We could find out that the growth rate of films increased and micro-grain size decreased with the increase in micro-roughness, but it does not improve the mechanical properties because of many imperfections like voids, micro-cracks, stacking faults, etc. This means that, in these deposition conditions, the increase in shadowing diffect is more effective than the increase in nucleation sites on the growth of films due to the increase in substrate roughness.

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3-D Numerical Prediction Modeling of Air Pollution in Coastal Urban Region - II. Movement and Diffusion Prediction of Air Pollutants - (연안도시지역에서 대기오염의 3차원 수치예측모델링 -II. 대기오염물질의 이동과 화산예측-)

  • gyeong-Mee Won;Hwa-Woon Lee
    • Journal of Environmental Science International
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    • v.10 no.5
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    • pp.343-350
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    • 2001
  • To investigate air quality away from the coastal urban source region, we used a hybrid Eulerian - Lagrangian method which can describe the formation, transport, transform and deposition processes in complex terrain, with inclusion of shipping sources that were considered to be important emission in the coastal urban region. The result of the Eulerian advection - diffusion prediction was quite similar to that of the Lagrangian particle diffusion prediction. It showed that pollutants emitted from Sasang and Janglim industrial complexes can affect Hwamyeong and the coastal, respectively. During the daytime the concentration was low due to large deposition flux and terrain effect.

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Numerical study on heat transfer and densification for SiC composites during thermal gradient chemical vapour infiltration process

  • Ramadan, Zaher;Im, Ik-Tae
    • Carbon letters
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    • v.25
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    • pp.25-32
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    • 2018
  • In this study, a thermal-gradient chemical vapor infiltration (TG-CVI) process was numerically studied in order to enhance the deposition uniformity within the preform. The computational fluid dynamics technique was used to solve the governing equations for heat transfer and gas flow during the TG-CVI process for two- and three-dimensional (2-D and 3-D) models. The temperature profiles in the 2-D and 3-D models showed good agreement with each other and with the experimental results. The densification process was investigated in a 2-D axisymmetric model. Computation results showed the distribution of the SiC deposition rate within the preform. The results also showed that using two-zone heater gave better deposition uniformity.

Neural network based modeling of PL intensity in PLD-grown ZnO Thin Films (펄스 레이저 증착법으로 성장된 ZnO 박막의 PL 특성에 대한 신경망 모델링)

  • Ko, Young-Don;Kang, Hong-Seong;Jeong, Min-Chang;Lee, Sang-Yeol;Myoung, Jae-Min;Yun, Ii-Gu
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.252-255
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    • 2003
  • The pulsed laser deposition process modeling is investigated using neural networks based on radial basis function networks and multi-layer perceptron. Two input factors are examined with respect to the PL intensity. In order to minimize the joint confidence region of fabrication process with varying the conditions, D-optimal experimental design technique is performed and photoluminescence intensity is characterized by neural networks. The statistical results were then used to verify the fitness of the nonlinear process model. Based on the results, this modeling methodology can be optimized process conditions for pulsed laser deposition process.

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PECVD of Blanket $TiSi_2$ on Oxide Patterned Wafers (산화막 패턴 웨이퍼 위에 플라즈마 화학증착법을 이용한 균일 $TiSi_2$ 박막형성에 관한 연구)

  • Lee, Jaegab
    • Journal of the Korean Vacuum Society
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    • v.1 no.1
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    • pp.153-161
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    • 1992
  • A plasma has been used in a high vaccum, cold wall reactor for low temperature deposition of C54 TiSi2 and for in-situ surface cleaning prior to silicide deposition. SiH4 and TiCl4 were used as the silicon and titanium sources, respectively. The deposited films had low resistivities in the range of 15~25 uohm-cm. The investigation of the experimental variables' effects on the growth of silicide and its concomitant silicon consumption revealed that and were the dominant species for silicide formation and the primary factors in silicon consumption were gas composition ratio and temperature. Increasing silane flow rate from 6 to 9 sccm decreased silicon consumption from 1500 A/min to less than 30 A/min. Furthermore, decreasing the temperature from 650 to $590^{\circ}C$ achieved blanket silicide deposition with no silicon consumption. A kinetic model of silicon consumption is proposed to understand the fundamental mechanism responsible for the dependence of silicon consumption on SiH4 flow rate.

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