• Title/Summary/Keyword: deposition cross section

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Electronic and Optical Properties of amorphous and crystalline Tantalum Oxide Thin Films on Si (100)

  • Kim, K.R.;Tahir, D.;Seul, Son-Lee;Choi, E.H.;Oh, S.K.;Kang, H.J.;Yang, D.S.;Heo, S.;Park, J.C.;Chung, J.G.;Lee, J.C.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.382-382
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    • 2010
  • $TaO_2$ thin films as gate dielectrics have been proposed to overcome the problems of tunneling current and degradation mobility in achieving a thin equivalent oxide thickness. An extremely thin $SiO_2$ layer is used in order to separate the carrier in MOSFETchannel from the dielectric field fluctuation caused by phonons in the dielectric which decreases the carrier mobility. The electronic and optical properties influenced the device performance to a great extent. The atomic structure of amorphous and crystalline Tantalum oxide ($TaO_2$) gate dielectrics thin film on Si (100) were grown by utilizing atomic layer deposition method was examined using Ta-K edge x-ray absorption spectroscopy. By using X-ray photoelectron spectroscopy and reflection electron energy loss spectroscopy (REELS) the electronic and optical properties was obtained. In this study, the band gap (3.400.1 eV) and the optical properties of $TaO_2$ thin films were obtained from the experimental inelastic scattering cross section of reflection electron energy loss spectroscopy (REELS) spectra. EXAFS spectra show that the ordered bonding of Ta-Ta for c-$TaO_2$ which is not for c-$TaO_2$ thin film. The optical properties' e.g., index refractive (n), extinction coefficient (k) and dielectric function ($\varepsilon$) were obtained from REELS spectra by using QUEELS-$\varepsilon$(k, $\omega$)-REELS software shows good agreement with other results. The energy-dependent behaviors of reflection, absorption or transparency in $TaO_2$ thin films also have been determined from the optical properties.

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Morphological changes of the beach and dune of The Taeanhaean National Park using VRS/RTK GPS - a case of Hakampo and Anmyeon beach - (VRS/RTK GPS 측량을 통한 태안해안국립공원 해빈과 해안사구의 지형변화 - 학암포와 안면 해안을 사례로 -)

  • PARK, Jung Won;OH, Sun Kwan;SEO, Seung Jik;SEO, Jong Cheol
    • Journal of The Geomorphological Association of Korea
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    • v.19 no.2
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    • pp.161-172
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    • 2012
  • The Taeanhaean National Park is located on the middle of the west coast of Korean peninsula. Due to the relatively high wave energy, large tidal range which is about 7m, and extremely complex coastal line, various coastal land-forms such as mud-flats, sand beaches, sand dunes, sea cliffs etc. are well distributed in this area, and thus various coastal ecosystems are well preserved. However, because of reckless sand diggings and construction of artificial structures in the coastal zone, the natural flowing and exchange of coastal deposits were disturbed and the erosion in the beach and the dune has been seriously accelerated. To understand of the causes of these problems, we tried three times periodical measuring with VRS/RTK GPS instrument at the Hakampo and Anmyeon beach. According to seasonal changes of the coast-line, beach area and cross-section of study sites, generally erosion process was dominated in the summer and deposition process was followed after summer.

Seasonal changes in coastal dunes and its implication, Sohwang-ri, in Chungnam Province (보령 소황리 전사구의 계절별 지형변화 특성과 그 의의)

  • JUNG, Pil Mo;CHOI, Kwang Hee;KIM, Yoonmi
    • Journal of The Geomorphological Association of Korea
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    • v.19 no.4
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    • pp.109-122
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    • 2012
  • Topographic changes in the foredune in Sohwang-ri, Boryeong, Chungnam Province was analyzed over the last two years. Seven cross-sections and one permanent plot ($20m{\times}50m$) were periodically studied based on erosion and deposition measurement, in addition to vegetation monitoring and measurement of wind using an automatic weather station. The sand dunes usually grew from late winter to spring and the growth occurred in a period of strong northwesterly winds. From March to April, heavy sedimentation was observed on the front section of the foredune and sand piled up to ca. 30cm to the ca. 25m landward from the high tide line. It is likely that increased wind force and growth of vegetation played a major role in transportation and sedimentation of sand. Meanwhile, the lower part of the sand dunes was eroded when typhoon and spring tide caused a rise in sea level. The transition zone of beach and dune was usually affected by sea water but some frontal slopes were entirely influenced, resulting in dune scarps. The eroded scarps were naturally restored to their original state as time passed.

Analysis Trap and Device Characteristic of Silicon-Al2O3-Nitride-Oxide-Silicon Memory Cell Transistors using Charge Pumping Method (Charge Pumping Method를 이용한 Silicon-Al2O3-Nitride-Oxide-Silicon Flash Memory Cell Transistor의 트랩과 소자)

  • Park, Sung-Soo;Choi, Won-Ho;Han, In-Shik;Na, Min-Gi;Lee, Ga-Won
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.7
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    • pp.37-43
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    • 2008
  • In this paper, the dependence of electrical characteristics of Silicon-$Al_2O_3$-Nitride-Oxide-Silicon (SANOS) memory cell transistors and program/erase (P/E) speed, reliability of memory device on interface trap between Si substrate and tunneling oxide and bulk trap in nitride layer were investigated using charge pumping method which has advantage of simple and versatile technique. We analyzed different SANOS memory devices that were fabricated by the identical processing in a single lot except the deposition method of the charge trapping layer, nitride. In the case of P/E speed, it was shown that P/E speed is slower in the SANOS cell transistors with larger capture cross section and interface trap density by charge blocking effect, which is confirmed by simulation results. However, the data retention characteristics show much less dependence on interface trap. The data retention was deteriorated as increasing P/E cycling number but not coincides with interface trap increasing tendency. This result once again confirmed that interface trap independence on data retention. And the result on different program method shows that HCI program method more degraded by locally trapping. So, we know as a result of experiment that analysis the SANOS Flash memory characteristic using charge pumping method reflect the device performance related to interface and bulk trap.

Studies on Effects of Channel Bed Fixation by Erosion Control Dams in Torrential Streams (황폐계류(荒廢溪流)에 있어서 사방시설물(砂防施設物)에 의한 하도고정(河道固定)에 관한 연구(硏究))

  • Chun, Kun Woo
    • Journal of Korean Society of Forest Science
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    • v.79 no.3
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    • pp.269-277
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    • 1990
  • In planning the disaster prevention by the erosion control facilities, it is essential to focus on the microtopography of the channel bed and the chronological process of sedimental movement in the torrential streams. For this purpose, the microtopographical change of the channel bed and the effects of the erosion control facilities in the mountain torrents were analyzed by the experimental channel and the field survey of the torrents where low-dam series had been constructed in the channel. The results of this experiment showed that the effects of construction of the low-dam series on the channel bed fixiation were the prevention of the local scouring in the experimental channel and the expansion of flow channel width and deposit space. The results are summarized as follows : 1. When the low-dam series were constructed over the whole channel bed (L'/L=1), the conning water and the sediment were seperated, simultaneously resulting in deposition of sediment and reduction of the tractive force for the running water. Therefore, the F.A. (Fluctuation area in cross-section: value was decreased to about 65% compared with that of non-work (L'/L=0). 2. The efficiencies of the low-dam series on the channel width were increased with an increment in length of working space. After the construction of low-dam series on the whole channel bed (L'/L=1), flow channel width was increased to about 1.53 times compared with that of non-work (L'/L=0). 3. It needs a deposition area to store the sediment with decrease in tractive force. The low-dam series in the experimental channel widened the deposition area about 2.10 times compared with that of non-work.

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A Structural Analysis of the Spent Nuclear Fuel Disposal Canister with the Spent Nuclear Fuel Basket Array Change for the Pressurized Water Reactor(PWR) (고준위폐기물 다발의 배열구조변화에 따른 가압경수로(PWR)용 고준위폐기물 처분용기의 구조해석)

  • Kwon, Young-Joo
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.23 no.3
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    • pp.289-301
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    • 2010
  • A structural model of the SNF(spent nuclear fuel) disposal canister for the PWR(pressurized water reactor) for about 10,000 years long term deposition at a 500m deep granitic bedrock repository has been developed through various structural safety evaluations. The SNF disposal baskets of this canister model have the array type of which four square cross section baskets stand parallel to each other and symmetrically with respect to the center of the canister section. However whether this developed structural model of the SNF disposal canister is best is not determinable yet, because the SNF disposal canister with this parallel array has a limitation in shortening the diameter for the weight reduction due to the shortest distance between the outer corner of the square section and the outer shell. Therefore, the structural safety evaluation of the SNF disposal canister with the rotated basket array which is also symmetric with respect to the canister center planes is very necessary. Even though such a canister model has not been found as yet in the literature, the structural analysis of the canister with the rotated basket array for the PWR is required for the comparative study of the structural safety of canister models. Hence, the structural analysis of the canister with the rotated basket array in which each basket is rotated with a certain amount of degrees around the center of the basket itself and arrayed symmetrically with respect to the center planes is carried out in this paper. The structural analysis result shows that the SNF disposal canister with the rotated basket array in which the SNF disposal basket is rotated as 30~35 degrees around the center of the basket itself is structurally more stable than the previously developed SNF disposal canister with the parallel basket array.

Fossil Scaphopods from the Hagjeon Formation and the Duho Formation, the Cenozoic Pohang Basin, Korea (신생대 제3기 포항분지의 학전층과 두호층에서 산출된 굴족류 화석)

  • Kong, Dal Yong;Lee, Seong Joo
    • Korean Journal of Heritage: History & Science
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    • v.45 no.1
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    • pp.218-231
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    • 2012
  • A total of 126 fossil scaphopods (121 specimens from the Hagjeon Formation and 5 specimens from the Duho Formation) were found from the Cenozoic strata, Hagjeon and Duho Formations, Pohang Basin, Korea. Five species belonging two genera (Fissidentalium yokoyamai, F. sp. A, B, and Rhabdus sp. A, B) were classified: the most dominant species is Fissidentalium yokoyamai. The species of Fissidentalium yokoyamai is characterized by curved shell (accuration=3.90%) and very closely spaced longitudinal ribs on shell surfaces, while the species of Rhabdus is a nearly straight shell characterized by concentric growth lines without longitudinal ribs. Identification of two genera is somewhat easy due to such morphological differences but classification at generic level is hard because diagnostic features (e.g., cross section and apical structure) are lost in the most specimens. Consequently, except for Fissidentalium yokoyamai, the rest were classified temporarily as F. sp. A, B, and Rhabdus sp. A, B. Two types of preservation state were recognized: one is three-dimensionally preserved specimen (3D specimen) and the other is compressed specimen. Internal parts of the 3D specimen is filled with clastic sediments identical to the surrounding sediments of the shells, which is not observed in the compressed specimens. It is, thus, concluded that the 3D fossils were originally empty but internal cavity were immediately filled with the sediments, which may have protect from the compaction due to pressure during deposition of the gravelly to coarse sandstone of the Hagjeon Formation.

The Fabrication and Characteristic for Narrow-band Pass Color-filter Deposited by Ti3O5/SiO2 Multilayer (Ti3O5/SiO2 다층박막를 이용한 협대역 칼라투과필터 제작 및 특성연구)

  • Park, Moon-Chan;Ko, Kyun-Chae;Lee, Wha-Ja
    • Journal of Korean Ophthalmic Optics Society
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    • v.16 no.4
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    • pp.357-362
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    • 2011
  • Purpose: The narrow-band pass color-filters with a 500 nm central wavelength and 12 nm FWHM using $Ti_3O_5/SiO_2$ mutilayer were fabricated, and their characteristics and structures were studied. Methods: the optical constants, n and k, of the $Ti_3O_5$ and $SiO_2$ thin films were obtained from the transmittances of their thin film. The narrow-band pass color-filters were designed with these optical constants and the AR coating of the filter was also designed. $Ti_3O_5/SiO_2$ multilayer filters were made by electron beam evaporation apparatus and the transmittaces of the filters were measured by spectrophotometer. the number of layers and the thicknesses of filters were calculated from the cross section of filters by SEM image and the composition of filters was analysed by XPS analysis. Results: The optimization of AR coating for the narrow-band pass color-filter was [air$|SiO_2(90)|Ti_3O_5(36)|SiO_2(5)|Ti_3O_5(73)|SiO_2(30)|Ti_3O_5(15)|$ glass], and the optimization of filter layer for the color filter was [air$|SiO_2(192)|Ti_3O_5(64)|SiO_2(102)|Ti_3O_5(66)|SiO_2(112)|Ti_3O_5(74)|SiO_2(120)|Ti_3O_5(68)|SiO_2(123)|Ti_3O_5(80)|SiO_2(109)|Ti_3O_5(70)|SiO_2(105)|Ti_3O_5(62)|SiO_2(99)|Ti_3O_5(63)|SiO_2(98)|Ti_3O_5(51)|SiO_2(60)|Ti_3O_5(42)|SiO_2(113)|Ti_3O_5(88)|SiO_2(116)|Ti_3O_5(68)|SiO_2(89)|Ti_3O_5(49)|SiO_2(77)|Ti_3O_5(48)|SiO_2(84)|Ti_3O_5(51)|SiO_2(85)|Ti_3O_5(48)|SiO_2(59)|Ti_3O_5(34)|SiO_2(71)|Ti_3O_5(44)|SiO_2(65)|Ti_3O_5(45)|SiO_2(81)|Ti_3O_5(52)|SiO_2(88)|$ glass]. It was known that the color-filters fabricated by the simulation data were composed of 41 layers by SEM image and the top layer of filters was $SiO_2$ layer and the filters were composed of $SiO_2$/$Ti_3O_5$ multilayer by XPS analysis. It was also known that the mixed thin film of TiO2 and $Ti_3O_5$ was made during the deposition of the $Ti_3O_5$ material. Conclusions: The narrow-band pass color-filters with a 500 nm central wavelength and 12 nm FWHM using $Ti_3O_5/SiO_2$ mutilayer of 41 layer were fabricated, and it was known that the mixed form of TiO2 and $Ti_3O_5$ thin film was made during the deposition of the $Ti_3O_5$ material.

Leaf epidermal structure of the Allium L. and its taxonomic significance (부추속(Allium L.) 잎 표피의 구조와 이의 분류학적 중요성)

  • Choi, Hyeok-Jae;Jang, Chang-Gee;Ko, Sung-Chul;Oh, Byoung-Un
    • Korean Journal of Plant Taxonomy
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    • v.34 no.2
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    • pp.97-118
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    • 2004
  • A comparative anatomical and ultrastructural study was undertaken to investigare on the leaf epidermis by light microscopy (LM) and scanning electron microscopy (SEM). On the basis of results from this study, it was grasped major characters of taxa and variation range of each character on the level of species, section and subgenus respectively. The shape of leaf epidermal cell was oblong to linear, which was varied by each taxon. Epidermal cell of taxa in sects. Microscordum, Anguinum, and Rhizirideum, which had wide leaf blade, oblong instead of linear shape in others examined taxa in this study. The leaf of taxa in sect. Anguinum was hypostomatic, while the rest of taxa had amphistomatic leaf. This was also one of characters which could discriminate taxa of sect. Anguinum from others. The guard cell in investigated taxa had not so much variation in the respect of its size. The number of stomata per unit area reduced by increasing size of epidermal cell, the fewest number of stomata per unit area was found in the taxa of sect. Anguinum. The type of stomatal apparatus of observed all taxa was anomocytic. It was found to know ultrastructural variation in the epidermal cell, like as patterns of sculpture on the cell wall, and features of deposition of wax by SEM. There were no depositions of wax in the taxa of sect. Microscordum and Anguinum, but fine thread-like structures which were parallel or cross to axis was found on the surface of epidermal cell respectively. The patterns of sculpture on the cell were prominent straight in sects. Recticulato-bulbosa and Rhizirideum, discontinuous line in the sect. Oreiprason. The epicuticular wax had been deposited on the surface of its epidermal cell in all taxa except sects. Microscordum and Anguinum.

Bathymetric and Topographic Changes of the Gomso-Bay Tidal Flat, West Coast of the Korean Peninsula (한반도 서해안 곰소만 갯벌의 수심 및 지형 변화)

  • Jin Ho Chang;Yong-Gil Kim;Myong Sun Lee
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.29 no.6
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    • pp.552-561
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    • 2023
  • The seafloor topography of Gomso Bay on the west coast of Korea was investigated using subtidal bathymetry and tidal-flat altimetry. Gomso Bay consists of 80% tidal flats and 20% subtidal zone, and is divided into an outer bay and an inner bay by the Jujincheon esturary channel. The outer bay tidal flat, has few tidal channels, has a concave topographic profile, and is characterized by the development of chenier and intertidal sand bars, giving it the appearance of gently sloping, dissipative beaches. The inner bay tidal flat has wide upper and middle tidal flats with a well-developed tidal channel system without cheniers. Moreover, the topographical cross-section between these tidal channels is convex upward, and shows the characteristics of a depositional environment greatly influenced by tidal channels and tidal action. An analysis of the horizontal movement of the tidal flat environment over the past 37 years investigating changes in the iso-depth lines in the Gomso-Bay tidal flat between 1981 and 2018 revealed that the Gomso-Bay tidal flat retreated gradually landward. As a result of analyzing the erosion and sedimentation characteristics of Gomso Bay, assuming that most of the water depth changes were due to changes in the elevation of the sea floor and sea level, an average of 1 cm (0 mm/y) of sediment was eroded in the outer bay over the past 37 years (1981-2018), In the inner bay, an average of 50 cm (14 mm/y) was deposited. Notably, the high tidal flats of the outer bay were largely eroded. Monitoring photographs of the coast showed that most of the erosion of the high tidal flats in the outer bay occurred in a short period around 1999 (probably 1997-2002), and that the erosion resulted from the erosion of sand dunes and high-tide beaches caused by temporarily greatly raised high tide levels and storms.