• Title/Summary/Keyword: deposition area

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Analysis of Particle Deposition onto a Heated or Cooled, Horizontal Free-Standing Wafer Surface (가열 또는 냉각되는 수평웨이퍼 표면으로의 입자침착에 관한 해석)

  • 유경훈;오명도;명현국
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.19 no.5
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    • pp.1319-1332
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    • 1995
  • Numerical analysis was performed to characterize the particle deposition behavior on a horizontal free-standing wafer with thermophoretic effect under the turbulent flow field. A low Reynolds number k-.epsilon. turbulence model was used to analyze the turbulent flow field around the wafer, and the temperature field for the calculation of the thermophoretic effect was predicted from the energy equation introducing the eddy diffusivity concept. The deposition mechanisms considered were convection, diffusion, sedimentation, turbulence and thermophoresis. For both the upper and lower surfaces of the wafer, the averaged particle deposition velocities and their radial distributions were calculated and compared with the laminar flow results and available experimental data. It was shown by the calculated averaged particle deposition velocities on the upper surface of the wafer that the deposition-free zone, where the deposition velocite is lower than 10$^{-5}$ cm/s, exists between 0.096 .mu.m and 1.6 .mu.m through the influence of thermophoresis with positive temperature difference of 10 K between the wafer and the ambient air. As for the calsulated local deposition velocities, for small particle sizes d$_{p}$<0.05 .mu.m, the deposition velocity is higher at the center of the wafer than at the wafer edge, whereas for particle size of d$_{p}$ = 2.0 .mu.m the deposition takes place mainly on the inside area of the wafer. Finally, an approximate model for calculating the deposition velocities was recommended and the calculated deposition velocity results were compared with the present numerical solutions, those of Schmidt et al.'s model and the experimental data of Opiolka et al.. It is shown by the comparison that the results of the recommended model agree better with the numerical solutions and Opiolka et al.'s data than those of Schmidt's simple model.

The Research of Beach Deformation after Construction of the Jetties

  • Park, Sang-Kil;Han, Chong-Soo;Roh, Tae-Young;Park, O-Young;Ahn, Ik-Seong;Lee, Ji-Hun
    • International Journal of Ocean System Engineering
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    • v.1 no.4
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    • pp.185-191
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    • 2011
  • This research was described the prevention of coastal topographical change and sediment diffusive concentration incoming from small estuary after construction jetties. This structure is constructed to decrease sediment deposition incoming from the upstream river due to the urbanization and industrial development and to minimize effects on the coastal ecosystem. The physical modeling and numerical modeling for waves were conducted to analyze the configuration of Imrang sand beach deformation without and with construction of jetty. The specification of the installed jetty, which is able to control sedimentation concentration was decided based on the prediction of the Imrang beach area changes by space and time. As a result, the jetties constructed in the estuary retarded the rate of sand sediment, so that the effect area of sand sedimentation was obviously decreased. In addition, the measured field data indicated that the sediment deposition inside of dikes could be controlled and the right side area of jetties could be preserved without sediment deposition.

Parametric Study of Methanol Chemical Vapor Deposition Growth for Graphene

  • Cho, Hyunjin;Lee, Changhyup;Oh, In Seoup;Park, Sungchan;Kim, Hwan Chul;Kim, Myung Jong
    • Carbon letters
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    • v.13 no.4
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    • pp.205-211
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    • 2012
  • Methanol as a carbon source in chemical vapor deposition (CVD) graphene has an advantage over methane and hydrogen in that we can avoid optimizing an etching reagent condition. Since methanol itself can easily decompose into hydrocarbon and water (an etching reagent) at high temperatures [1], the pressure and the temperature of methanol are the only parameters we have to handle. In this study, synthetic conditions for highly crystalline and large area graphene have been optimized by adjusting pressure and temperature; the effect of each parameter was analyzed systematically by Raman, scanning electron microscope, transmission electron microscope, atomic force microscope, four-point-probe measurement, and UV-Vis. Defect density of graphene, represented by D/G ratio in Raman, decreased with increasing temperature and decreasing pressure; it negatively affected electrical conductivity. From our process and various analyses, methanol CVD growth for graphene has been found to be a safe, cheap, easy, and simple method to produce high quality, large area, and continuous graphene films.

Effect of cement dust on soil physico-chemical properties around cement plants in Jaintia Hills, Meghalaya

  • Lamare, R. Eugene;Singh, O.P.
    • Environmental Engineering Research
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    • v.25 no.3
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    • pp.409-417
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    • 2020
  • Investigation was carried out to assess the effect of cement dust deposition on the physico-chemical properties of soil near some cement plants in Jaintia Hills, Meghalaya. Soil samples were collected and analysed and compared with the control site. Comparison of various soil physico-chemical parameters revealed that cement dust emanating from cement plants has changed the soil quality in the surrounding areas of cement plants. The normal soil pH in the area is generally acidic. However, due to the continuous deposition of cement dust soil pH was found slightly alkaline near the cement plants. The higher values of soil parameters such as electrical conductivity and bulk density were also noticed near the cement plants. However, lower values of water holding capacity, soil moisture content, soil organic carbon and total nitrogen content were found compared to the control sites. The effect of cement dust deposition on soil is more in areas nearer to the cement plants. At present the changes may not be so serious but if this trend continues, soil properties of a vast area around the cement plants are likely to change leading to multiple effects on flora, fauna and socio-economy of the area.

Enhancement of In Vivo Bone Regeneration Efficacy of Human Mesenchymal Stem Cells

  • Kang, Sun-Woong;Lee, Jae-Sun;Park, Min Sun;Park, Jung-Ho;Kim, Byung-Soo
    • Journal of Microbiology and Biotechnology
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    • v.18 no.5
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    • pp.975-982
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    • 2008
  • We investigated whether transplantation of osteogenically differentiated bone marrow-derived mesenchymal stem cells (BMMSCs) and the use of an hydroxyapatite (HAp) scaffold can enhance the in vivo bone formation efficacy of human BMMSCs. Three months after implantation to the subcutaneous dorsum of athymic mice, transplantation of osteogenically differentiated human BMMSCs increased the bone formation area and calcium deposition to 7.1- and 6.2-folds, respectively, of those of transplantation of undifferentiated BMMSCs. The use of the HAp scaffold increased the bone formation area and calcium deposition to 3.7- and 3.5-folds, respectively, of those of a polymer scaffold. Moreover, a combination of transplantation of osteogenically differentiated BMMSCs and HAp scaffold further increased the bone formation area and calcium deposition to 10.6- and 9.3-folds, respectively, of those of transplantation of undifferentiated BMMSCs seeded onto polymer scaffolds. The factorial experimental analysis showed that osteogenic differentiation of BMMSCs prior to transplantation has a stronger positive effect than the HAp scaffold on in vivo bone formation.

Graphene Growth with Solid Precursor-Polyethylene (고체 전구체-폴리에틸렌을 이용한 그래핀 성장)

  • Ryu, Jongseong;An, Sung Jin
    • Korean Journal of Materials Research
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    • v.29 no.5
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    • pp.304-310
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    • 2019
  • Chemical vapor deposition method using $CH_4$ gaseous hydrocarbons is generally used to synthesize large-area graphene. Studies using non-gaseous materials such as ethanol, hexane and camphor have occasionally been conducted. In this study, large-area graphene is synthesized via chemical vapor deposition using polyethylene as a carbon precursor. In particular, we used a poly glove, which is made of low-density polyethylene. The characteristics of the synthesized graphene as functions of the growth time of graphene and the temperature for vaporizing polyethylene are evaluated by optical microscopy and Raman spectroscopy. When the polyethylene vaporizing temperature is over $150^{\circ}C$, large-area graphene with excellent quality is synthesized. Raman spectroscopy shows that the D peak intensity increased and the 2D peak intensity decreased with increasing growth time. The reason for this is that sp3 bonds in the graphene can form when the correct amount of carbon source is supplied. The quality of the graphene synthesized using polyethylene is similar to that of graphene synthesized using methane gas.

Recent Studies on Area Selective Atomic Layer Deposition of Elemental Metals (단일 원소 금속의 영역 선택적 원자층 증착법 연구 동향)

  • Min Gyoo Cho;Jae Hee Go;Byung Joon Choi
    • Journal of Powder Materials
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    • v.30 no.2
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    • pp.156-168
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    • 2023
  • The semiconductor industry faces physical limitations due to its top-down manufacturing processes. High cost of EUV equipment, time loss during tens or hundreds of photolithography steps, overlay, etch process errors, and contamination issues owing to photolithography still exist and may become more serious with the miniaturization of semiconductor devices. Therefore, a bottom-up approach is required to overcome these issues. The key technology that enables bottom-up semiconductor manufacturing is area-selective atomic layer deposition (ASALD). Here, various ASALD processes for elemental metals, such as Co, Cu, Ir, Ni, Pt, and Ru, are reviewed. Surface treatments using chemical species, such as self-assembled monolayers and small-molecule inhibitors, to control the hydrophilicity of the surface have been introduced. Finally, we discuss the future applications of metal ASALD processes.

A Study on Nano/micro Pattern Fabrication of Metals by Using Mechanical Machining and Selective Deposition Technique (기계적 가공과 무전해 선택적 증착기술을 이용한 나노/마이크로 금속패턴 제작에 관한 연구)

  • Cho S.H.;Youn S.W.;Kang C.G.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1507-1510
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    • 2005
  • This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

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Risk analysis of red water and turbid water based on seasonal water usage (계절별 수도사용량에 따른 적수 및 탁수발생 위험도 분석)

  • Han, Jin Woo;Lee, Sang Mok;Kwon, Hyuk Jae
    • Journal of Korea Water Resources Association
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    • v.56 no.7
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    • pp.451-460
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    • 2023
  • In this study, the risk of red water and turbid water occurrence was analyzed by classifying it into detachment risk and deposition risk. First, risk factors for red water and turbid water were determined, and hydraulic analysis was conducted considering seasonal water consumption. The applied area was Cheongju City, and the risk analysis was conducted across 13 areas, and the areas with high deposition risk and high detachment risk were selected. The high risk of both detachment and deposition can be judged as an area with a very high probability of causing water quality problems. The areas with the highest deposition risk and detachment risk are the old towns of Nae deok1-dong and Yul1yang-dong, which are the oldest areas in Cheongju City with an age of more than 30 service years of pipe installation. By analyzing the risk of deposition and detachment, it will be possible to strengthen the maintenance function of the water supply network to provide the safe water to citizens and increase their confidence for tap water.

Development of Automatic Filet Welding Torch System with High Speed Rotating Arc Sensor

  • Lee, W.K.;Lee, G.Y.;Kim, J.H.;Kim, S.B.
    • 제어로봇시스템학회:학술대회논문집
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    • 2001.10a
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    • pp.94.1-94
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    • 2001
  • Arc sensor gives important groove information during welding. Automatic seam tracking control system with arc sensor has significant characteristics such that bead formation is given as decentralization of penetration and formation of concave bead profile and that a turning point of transverse weaving with constant arc length control is decided whether or not torch height reaches to a specified setting level. Furthermore, the rotating action of the arc prevents hanging of weld bead and forms flat bead surface under high speed welding condition. The variation of groove and deposition area can be detected from the trace of weaving. The area and width of weaving trace has close correlation with the area of groove and deposition. In this paper, main object of this system is to realize an adaptive microprocessor based controller ...

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