• 제목/요약/키워드: depositing layer number

검색결과 11건 처리시간 0.032초

코팅 조건에 따른 BST 박막의 표면 이미지 특성 (The Surface Image Properties of BST Thin Film by Depositing Conditions)

  • 홍경진;기현철;오수홍;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 센서 박막재료 반도체재료 기술교육
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    • pp.107-110
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    • 2002
  • The optical memory devices of BST thin films to composite $(Ba_{0.7}\;Sr_{0.3})TiO_{3}$ using sol-gel method were fabricated by changing of the depositing layer number on $Pt/Ti/SiO_{2}/Si$ substrate. The structural properties of optical memory devices to be ferroelectric was investigated by fractal analysis and 3-dimension image processing. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was $2500[\AA]$, $3500[\AA]$ and $3800[\AA]$. BST thin films exhibited the most pronounced grain growth. The surface morphology image was roughness with coating numbers. The thin films increasing with coating numbers shows a more textured and complex configuration.

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BST 박막 소자의 유전특성 (The Dielectric Characteristics of BST Thin Film Devices)

  • 홍경진;민용기;신훈규;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.660-663
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    • 2001
  • The devices of BST thin films to composite (Ba$\_$0.7/ Sr$\_$0.3/)TiO$_3$using sol-gel method were fabricated by changing of the depositing layer number on Pt/Ti/SiO$_2$/Si substrate. The thin film capacitor to be ferroelectric devices was investigated by structural and electrical properties. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was 2500[${\AA}$], 3500[${\AA}$], 3800[${\AA}$]. The dielectric factor of thin film when the coating numbers were 3, 4 and 5 times was 190, 400 and 460 on frequency 1[MHz]. The dielectric loss of BST thin film was linearly increased by increasing of the specimen area.

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두께 변화에 따른 BST 박막의 특성 (The Properties of BST Thin Films by Thickness)

  • 홍경진;민용기;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.455-458
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    • 2001
  • The thin films of high pemitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)$TiO_3$ thin films as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Ti/$SiO_2/Si$ substrate at 4,000 [rpm] for 10 seconds. The devices of BST thin films to composite $(Ba_{0.7},Sr_{0.3})TiO_3$ were fabricated by changing of the depositing layer number on $Pt/Ti/SiO_2/Si$ substrate. The thin film capacitor to be ferroelectric devices was investigated by structural and electrical properties. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was $2500[\AA]$, $3500[\AA]$, $3800[\AA]$. The dielectric factor of thin film when the coating numbers were 3, 4 and 5 times was 190, 400 and 460 on frequency l[MHz]. The dielectric loss of BST thin film was linearly increased by increasing of the specimen area.

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두께 변화에 따른 BST 박막의 특성 (The Properties of BST Thin Films by Thickness)

  • 홍경진;민용기;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.455-458
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    • 2001
  • The thin films of high permitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)TiO$_3$ thin films as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Ti/SiO$_2$/Si substrate at 4,700 [rpm] for 10 seconds. The devices of BST thin films to composite (Ba$\_$0.7/Sr$\_$0.3/)TiO$_3$ were fabricated by changing of the depositing layer number on Pt/Ti/SiO$_2$/Si substrate. The thin film capacitor to be ferroelectric devices was investigated by structural and electrical properties. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was 2500[${\AA}$], 3500[${\AA}$], 3800[${\AA}$]. The dielectric factor of thin film when the coating numbers were 3, 4 and 5 times was 190, 400 and 460 on frequency 1[MHz]. The dielectric loss of BST thin film was linearly increased by increasing of the specimen area.

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유기전하 이동착물 Langmuir-Blodgett막의 누적조건 및 누적확인에 관한 연구 (Deposition condition and Confirmation of Organic Charge Transfer complex Langmuir-Blodgett Film)

  • 정순욱
    • 한국응용과학기술학회지
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    • 제14권1호
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    • pp.89-93
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    • 1997
  • In this research, ultra-thin films of organic charge transfer complex were deposited on to ordinary microscope slide-glass subtrates with a Langmuir-Blodgett technique. ${\pi}$-A isotherm characteristics of these complex were studied in order to find optimum conditions of deposition by varying temperature of subphase, compression speed, and spreading amount. Transfer ratio of these films were studied during the process of deposition. The UV-visible absorbance spectra of LB films were measured to find state of deposition by varing layer number. The observed optimum conditions of surface, pressure, spreading amount, and dipping speed for depositing LB films(Y-type) were 38m/Nm, $150{\mu}l$ and 5mm/min, respectively. Since the tansfer ratio is close to 100%, the monolayer on the subphase seems to be well transferred to the solid substrate. The thickness of the film was well-controlled as the UV-vis absorbance of films were changed linear according to the number of layers.

SAW 디바이스를 이용한 LB초박막의 특성연구 (Research of the characteristics of LB Film using SAW Device)

  • 김종민;김기영;장상목;신훈규;권영수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1994년도 춘계학술대회 논문집
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    • pp.90-93
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    • 1994
  • A surface acoustic wave(SAW) sensor for the detection of odorants has been constructed by depositing various phospholipids and fatty acids onto the surface of the SAW device. Applying the Langmuir-Blodgett technique. it was possible to deposit the optimal number of layer which was found to be between 10 and 20. The characteristics of a SAW device operating at 310 MHz deposited with phosphatidyl choline were analysed. Menthone, amylacetate, acetion, and other organic gases sho7\\\\`ed different affinities to the coated lipids. An explanation is given for differant odorant affinities based on the monolayer properties of phospholipids. The identification of odorants depending on the type of lipid used for coating is discussed in terms of a comparison of their normalized resonant frequency chi It pat terns. Using a number of different lipid-coated SAW devices. odorants can be identified by a computerized pattern recognition algorithm.

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Langmuir-Blodgett(LB)법을 이용한 (N-docosyl pyridinium)-TCNQ(1:2) 착체의 초박막 제작 (Fabrication of Ultra Thin Films with (N-docosyl pyridinium)-TCNQ(1:2) Complex by the Langmuir-Blodgett(LB) Method)

  • 강훈;김용태;정순욱;손병청;강도열
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1988년도 추계학술대회 논문집
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    • pp.54-57
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    • 1988
  • A film is fabricated by depositing several slices ultra thin films on a slide glass. The UV-absorbance outcomed on a multi-layered bulky ultra thin film with (N-docosyl pyridinium)-TCNQ (1:2) complex results tat the quantity of UV-absorbances becomes more linearly according to the number of layer becomes higher. In addition, it is found that the capacitance of this film gets smaller as the number of layer gets higher. Finally, the conductivity of this film is measured by the direction of the long axis of the TCNQ radical anion, and is resulted in a remarkably low value (about 1.66∼3.78 x 10$\^$-14/S/cm).

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코팅 용액의 조성 최적화 및 코발트-크롬 금속스텐트의 화학적 표면개질을 통한 친수성 천연 고분자 코팅층의 표면 거칠기 개선 (Improving Smoothness of Hydrophilic Natural Polymer Coating Layer by Optimizing Composition of Coating Solution and Modifying Chemical Properties of Cobalt-Chrome Stent Surface)

  • 김대환;금창헌
    • 한국키틴키토산학회지
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    • 제23권4호
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    • pp.256-261
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    • 2018
  • Recently, the number of cardiovascular disease-related deaths worldwide has increased. Therefore, the importance of percutaneous cardiovascular intervention and drug-eluting stents (DES) has been highlighted. Despite the great clinical success of DES, the re-endothelialization at the site of stent implantation is retarded owing to the anti-proliferative effect from the coated drug, resulting in late thrombosis or very late restenosis. In order to solve this problem, studies have been actively carried out to excavate new drugs that promote rapid re-endothelialization. In this study, we introduced hydrophilic drug, tauroursodeoxycholate (TUDCA), that improves the proliferation of endothelial progenitor cells and promotes apoptosis of vascular smooth muscle cells. In addition, we utilized shellac, which is a natural resin from lac bug to coat TUDCA on the surface of the metal. When using conventional coating method including biodegradable polymers and organic solvents, phase separation between polymer and drug occurred in the coating layer that caused incomplete incorporation of drug into the polymer layer. However, when using shellac as a coating polymer, no phase separation was observed and drug was fully covered with the polymer matrix. In addition, by adjusting the composition of coating solution and modifying the hydrophilicity of the metal surface using oxygen plasma, the surface roughness decreased due to the increased affinity between coating solution and metal surface. This result provides a method of depositing a hydrophilic drug layer on the stent.

투자율이 높은 NiFe 코어를 이용한 마이크로 트랜스포머 제작 (Fabrication of the Micromachined Transformer using High Permeability NiFe Core)

  • 조세준;차두열;이재혁;이수진;장성필
    • 한국전기전자재료학회논문지
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    • 제23권3호
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    • pp.194-198
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    • 2010
  • Recently as the electronic devices are getting to be more and more smaller, transformers are needed to be micro fabricated using MEMS technology. In this paper transformers have been fabricated and measured by depositing insulation layer to reduce the loss of eddy current and in the middle core a high permeability permalloy was designed based on the turns ratio between primary coil and secondary coil which are 1:1 transformers. (the number of turns of primary coil and secondary coil: 3/3, 5/5, 7/7). The size of the transformers including ground shield are $1mm{\times}1.5mm$, $1mm{\times}1.95mm$, $1mm{\times}2.35mm$ respectively. The line width, pitch and the height of post are 50um. Based on the measured data from the micro fabricated transformers, the 3/3 turns in the primary coil and secondary coil showed the lowest insertion loss with 1.5 dB at 480 MHz and the 7/7 turns in the primary coil and secondary coil showed the highest insertion loss with 2.5 dB at 280 MHz. Also confirmed that the bandwidth goes up as the number of turns goes down. There was some difference between the actual measured data and the HFSS simulation result. It looks as if it is an error of the difference between oxidation of copper or the permeability of SU-8.

메칠멜캅탄 가스센서용 TiO2/전해질폴리머 박막 제조 (Fabrication of TiO2/polyelectrolyte thin film for a methyl mercaptan gas sensor)

  • 김진호;황종희;이미재;김세기;임태영
    • 한국결정성장학회지
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    • 제20권5호
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    • pp.221-226
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    • 2010
  • 메칠멜캅탄($CH_3SH$) 가스를 검출하는 수정진동자(QCM) 가스센서를 QCM의 전극에 $TiO_2$ 나노입자와 전해질 폴리머를 증착하여 제조하였다. LBL-SA법에 의해 제조된 $TiO_2$/PSS 박막은 높은 비표면적을 나타내었고, 가스센서의 감도를 증가시켰다. 1.0 ppm의 농도를 갖는 메칠멜캅탄에 노출된 TEA 혹은 $TiO_2$/PSS 막이 증착된 QCM의 주파수 변이는 각각 약 9 Hz, 2 Hz 였다. ($TiO_2$/PSS) 박막의 증착수가 늘어남에 따라 제조된 박막의 비표면적이 증가하게 되어 QCM 센서의 주파수 변이도 점차적으로 증가하였다. 추가적으로 메칠멜캅탄 가스의 농도가 0.5 ppm에서 2.0 ppm으로 높아짐에 따라 QCM 센서의 주파수 변화도 증가되었다. 본 연구에서는, ($TiO_2$/PSS) 박막이 증착된 QCM 센서의 표면구조의 변화와 센서 특성을 측정하였다.