• 대한소아치과학회지
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• 제25권1호
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• pp.209-224
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• 1998

The purpose of this study was to compare the amount of calcium fluoride deposited on the enamel and dentin surface and to obtain information on the morphological change and crystallographic details of mineral deposition after 12,000ppm APF application in vitro. The bovine enamel and dentin blocks were randomly assigned to eight groups according to artificial caries lesion formation and difference of fluoride application time. The fluoride concentration and morphological characteristics on the treated enamel and dentin surface were investigated by using fluoride quantitative analysis and SEM. The powdered enamel and dentin of the intact bovine incisors were prepared for the X-ray diffraction analysis. The following results were obtained. 1. The amounts of KOH-soluble fluoride on the carious enamel and dentin surface after 24h APF application were higher than after only 5min APF application(p<0.05), but in the case of the sound enamel and dentin surface were similar after 5min and 24h application (P>0.05). The fluoride content was highly increased in the carious dentin as compared with sound dentin after APF application(P<0.05). 2. The carious enamel surface after APF application, the demineralized enamel surface were recovered a more dense enamel surface and precipitation of crystal was observed a distintive surface layer of spherical globules of about 1 m diameter. In the case of the fluorided carious dentin surface, precipitation of calcium fluoride-like material was deposited both inside the dentinal tubules as well as in the intertubular regions. 3. The crystallographic structure of powdered enamel and dentin after 24h APF application had large crystallities of apatite and CaF2 diffraction peaks in the enamel as compared with dentin. The diffraction data collected from the 27.50-29.50(2) angular range of the powdered enamel, the (105) apatite, (225) apatite and (111) CaF2 peaks of the enamel crystallities were detected after 24h APF application.

• 한국재료학회지
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• 제3권2호
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• pp.158-165
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• 1993

실리콘박막의 상부에 고상반응에 의해 형성된 TiS$i_2$ 박막의 응집 거동에 미치는 기판 실리콘의 영향을 조사했다. 폴리실리콘과 어몰퍼스실리콘을 증착상태 또는 어닐링한 상태엣 TiS$i_2$를 형성시키고 90$0^{\circ}C$열처리에 따른 TiS$i_2$의 면저항값의 변화를 조사하고 XRD, SEM 및 TEM에 의한 실리콘의 조직관찰을 행했다. TiS$i_2$응집은 어몰퍼스실리콘 위의 경우가 더욱 심했다. 폴리실리콘을 어닐링하면 TiS$i_2$의 응집은 억제되며 고온에서 어닐링할수록 그 효과가 현저했다. 이는 폴리실리콘의 입도 변화보다는 증착시 존재하는 결함들이 열처리에 의해 감소된 때문이다. 폴리실리콘의 경우는 어닐링 전후에 상관없이 (110)집합조직인 주상정 조직을 갖고 있다. 어몰퍼스실리콘을 결정화시킨 경우는 (111)집합조직를 갖는 등축정 조직을 나타내었다. 실리콘의 표면에너지가 낮은 (111)면이TiS$i_2$ 막의 하부 폴리실리콘에 많이 존재할수록 응집은 촉진된다.

• 한국지반신소재학회논문집
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• 제16권2호
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• pp.109-119
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• 2017

본 연구에서는 낙동강 하구 델타지역에 위치한 연구지역의 상부퇴적사질토층이 샌드매트와 같은 수평배수재로서의 통수능 기능을 수행할 수 있는지를 검토하였다. 상부퇴적사질토에 대한 입도분포분석 및 투수시험 결과 일부 기준을 만족시키지 못하는 것으로 나타나 수치해석연구가 추가로 수행되었다. 델타지역 연약지반위에 샌드매트 1m 포설할 때와 연약지반위에 퇴적사질토층이 1, 2, 3, 4m 두께로 형성된 경우에 대한 압밀해석을 실시하였다. 그 결과 두께가 2m 이상이 되면 델타지역 퇴적사질토층은 샌드매트처럼 수평배수층으로 기능을 수행할 수 있는 것으로 나타났다. PVD를 설치한 경우 퇴적사질토층의 수평배수층 역할이 더욱 증가되었다. 본 연구를 통해 낙동강 델타 지역의 상부퇴적사질토층의 수평배수재로서의 기능이 확인되었다.

• 지질공학
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• 제24권1호
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• pp.9-21
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• 2014

서해 경기만의 덕적도 서부에 발달하고 있는 사퇴해역에서 획득된 고해상 탄성파탐사자료, 해저면측사탐사자료, 표층퇴적물 및 주상코어시료에 대한 정밀분석과 연구가 실시되었다. 탄성파탐사 자료에 의하면 사퇴의 층서는 3개의 퇴적단위(sequence I, II, III)로 구분되어진다. 최상부 퇴적단위 I은 $^{14}C$ 연대측정 자료에 의하면 5,000~6,000 yr BP경 본 해역이 해침을 받은 후 강한 왕복성 조류에 의하여 형성된 것으로 사료된다. 퇴적단위 II는 주상코어 자료에 의하면 니질이 주로 분포하는 고 조간대 니질퇴적층으로 추정된다. 퇴적단위 III은 중생대에 관입한 화강암으로 분포된 음향기반암 상부에 플라이스토세 말기로 추정되는 육성퇴적층인 자갈 내지는 조립질 퇴적물이 부정합으로 퇴적된 것으로 판단된다. 해저면측사탐사 자료에 의하면 사퇴 정상의 해저면은 모래파가 발달되어 있으며, 이는 대체로 조류의 방향과 일치하는 $N20^{\circ}W$ 방향이다. 사퇴 정상부에서 멀어지면 모래물결자국이 발달하고, 경사면에서는 균질한 사질로 분포한다. 표층퇴적물과 주상퇴적물(시료 VC-1, 2, 3)은 특정 내부 구조를 갖지 않는 비교적 균질한 중립토 내지 세립토(Mz, 1-$2{\phi}$)로 분포하는 특징을 보인다.

• 센서학회지
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• 제6권5호
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• pp.400-406
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• 1997

DC 마그네트론 스퍼터링 반응성 스퍼터링으로 각각 증착된 알루미늄산화막과 그 위에 증착된 Pt 박막의 열처리 온도에 따른 전기적, 물리적 특성을 4침 탐침기, 주사전자현미경 및 X선 회절법을 이용하여 분석하였다. $600^{\circ}C$ 이하의 열처리 조건에서는 알루미늄산화막은 Pt 박막과 화학적 반응 없이 Pt 박막의 $SiO_{2}$에 대한 부착특성을 개선시켰으며 그 위에 증착된 Pt 박막의 전기적 특성도 열처리 온도가 증가함에 따라 개선되었다. 그러나 $700^{\circ}C$ 이상의 열처리 온도에서는 알루미늄산화막이 절연특성이 저하되고 그 위에 증착된 Pt 박막과 반응하여 Pt 박막의 전 기적 특성도 저하되었다. Pt-RTD 온도센서를 이용한 Pt 미세발열체의 발열특성 분석에서 활성영역이 작을 수록 발열체의 발인특성이 개선되었으며 활성영역 면적이 $200{\mu}m{\times}200{\mu}m$의 구조를 갖는 Pt 미세발열체는 소비전력 1.5watts에 $400^{\circ}C$ 정도의 양호한 발열특성을 나타냈다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.200-200
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• 2010

In recent times, metal oxide semiconductors thin films transistor (TFT), such as zinc and indium based oxide TFTs, have attracted considerable attention because of their several advantageous electrical and optical properties. There are many deposition methods for fabrication of ZnO-based materials such as chemical vapor deposition, RF/DC sputtering and pulsed laser deposition. However, these vacuum process require expensive equipment and result in high manufacturing costs. Also, the methods is difficult to fabricate various multicomponent oxide semiconductor. Recently, several groups report solution processed metal oxide TFTs for low cost and non vacuum process. In this study, we have newly developed solution-processed TFTs based on Ti-related multi-component transparent oxide, i. e., InTiO as the active layer. We propose new multicomponent oxide, Titanium indium oxide(TiInO), to fabricate the high performance TFT through the sol-gel method. We investigated the influence of relative compositions of Ti on the electrical properties. Indium nitrate hydrate [$In(NO^3).xH_2O$] and Titanium isobutoxide [$C_{16}H_{36}O_4Ti$] were dissolved in acetylacetone. Then monoethanolamine (MEA) and acetic acid ($CH_3COOH$) were added to the solution. The molar concentration of indium was kept as 0.1 mol concentration and the amount of Ti was varied according to weighting percent (0, 5, 10%). The complex solutions become clear and homogeneous after stirring for 24 hours. Heavily boron (p+) doped Si wafer with 100nm thermally grown $SiO_2$ serve as the gate and gate dielectric of the TFT, respectively. TiInO thin films were deposited using the sol-gel solution by the spin-coating method. After coating, the films annealed in a tube furnace at $500^{\circ}C$ for 1hour under oxygen ambient. The 5% Ti-doped InO TFT had a field-effect mobility $1.15cm^2/V{\cdot}S$, a threshold voltage of 4.73 V, an on/off current ratio grater than $10^7$, and a subthreshold slop of 0.49 V/dec. The 10% Ti-doped InO TFT had a field-effect mobility $1.03\;cm^2/V{\cdot}S$, a threshold voltage of 1.87 V, an on/off current ration grater than $10^7$, and a subthreshold slop of 0.67 V/dec.

• 한국농공학회지
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• 제16권1호
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• pp.3293-3301
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• 1974

An experimental work was conducted by using a laboratory-made model dryer to investigate the effect of the rate of natural forced-air on the drying rate of rough rice which was deposited in the deep-bed. The dryer consisted of 8 cylinderical containers with grain holding screen at their bottoms, each of which having 30cm in diameter and 15cm in height. The containers were sacked vertically with keeping them air-tight by using paper tape during dryer operation. Two separate layers of containers were operated in the same time to have two replications. The moisture contents of grains within each bins after predetermined period of dryer operation were determined indirectly by measuring the weight of the individual containers. The air-rates were maintained at 6 levels, or 5, 8, 10, 15, 18 and 20 millimenters of static head of water. The roomair conditions during dryer operation were maintained in the range of 10-l5$^{\circ}C$ in temperature and 40-60% in relative humidity. The results of the study are summarized as follows: 1. Drying characteristics of the grains in the bottom layers were approximately the same regardless of airdelivery rates, giving the average drying rate as about 0.35 percent per hour after 40-hour drying period, during which moisture content (w. b.) reduced from 24 percent to about 10 percent. 2. After about 40-hour drying period, the mean drying rates increased from 0.163 percent per hour to 0.263 percent per hour as air-flow rates increased from 5mm to 87.16mm of static head of water. In the same time, the moisture differences of grains between lower and upper layers varied from 12.7 percent at the air rate of 5mm of water head to 7.5 percent at the air-flow rate of 20mn of water head. Thus, the greater the air-flow rate was, the more overall improvement in drying performance was. Additionally, from the result of ineffectiveness of drying grain positioned at 70cm depth or above by the air rate of 5mm of static head of water it may be suggested in practical application that the height of grain deposit would be maintained adequately within the limits of air-rates that may be actually delivered. 3. Drying after layer-turning operation was continued for about 30 hours to test the effectiveness of reducing moisture differences in the thick layers. As a result of this layer-turning operation, moisture distribution through layers approached to narrow ranges, giving the moisture range as about 7 percent at air-flow rate of 5mm head of water, about 3 percent at 10mm head about 2 percent at 15mm head, and less than 1 percent at 20mm head. In addition, from the desirable results that drying rate was rapid in the lower layers and dully in the upper layers, layer-turning operation may be very effective in natural air drying with deep-layer grain deposit, especially when the forced air was kept in low rate. 4. Even though the high rate of air delivery is very desirable for deep-layer natural-air drying of rough rice, it can be happened that the required air delivery rate could not be attained because of limitation of power source available on farms. To give a guide line for the practical application, the power required to perform the drying with the specified air rate was analyzed for different sizes of drying bin and is given in Table (5). If a farmer selects a motor of which size is 1 or {{{{1 { 1} over {2 } }}}} H.P. and air-delivery rate which ranges from 8~10mm of head, the diameter of grain bin may be suggested to choose about 2.4m, also power tiller or other moderate size of prime motor may be recommended when the diameter of grain bin is about 5.0m or more for about 120cm grain deposit.

• Transactions on Electrical and Electronic Materials
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• 제16권2호
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• pp.90-94
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• 2015

In this study, the characterizations of oxide contact hole etching are investigated with C₄F₈/O₂/Ar and CH₂F₂/C₄F₈/O₂/ Ar plasma. As the percent composition of C₄F₈ in a C₄F₈/O₂/Ar mixture increases, the amount of polymer deposited on the etched surface also increases because the C_xF_y polymer layer retards the reaction of oxygen atoms with PR. Adding CH₂F₂ into the C₄F₈/O₂/Ar plasma increases the etch rate of the oxide and the selectivity of oxide to PR. The profile of contact holes was close to 90°, and no visible residue was seen in the SEM image at a C₄F₈/(C₄F₈+O₂) ratio of 58%. The changes of chemical composition in the chamber were analyzed using optical emission spectroscopy, and the chemical reaction on the etched surface was investigated using X-ray photoelectron spectroscopy.

• 한국전기전자재료학회논문지
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• 제23권8호
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• pp.655-659
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• 2010

Nanoporous titanium dioxide ($TiO_2$) is very attractive material for various applications due to the high surface to volume ratio. In this study, we have fabricated nanoporous $TiO_2$ thin films on Si by anodic oxidation. 500-nm-thick titanium (Ti) films were deposited on Si by using electron beam evaporation. Nanoporous structures in the Ti films were obtained by anodic oxidization using ethylene glycol electrolytes containing 0.3 wt% $NH_4F$ and 2 vol% $H_2O$ under an applied bias of 5 V. The diameter of nanopores in the Ti films linearly increased with anodization time and the whole Ti layer could become nanoporous after anodizing for 3 hours, resulting in vertically aligned nanotubes with the length of 200~300 nm and the diameter of 50~80 nm. Upon annealing at $600^{\circ}C$ in air, the anodized Ti films were fully crystallized to $TiO_2$ of rutile and anatase phases. We believe that our method to fabricate nanoporous $TiO_2$ films on Si is promising for applications to thin-film gas sensors and thin-film photovoltaics.

• 열처리공학회지
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• 제24권2호
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• pp.87-91
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• 2011

Single layer Sn doped $In_2O_3$ (ITO) films and ITO 50 nm / Au 10 nm / ITO 40 nm (IAI) multilayer films were prepared with electron beam assisted magnetron sputtering on glass substrates. The effects of the Au interlayer, post-deposition atmosphere annealing and intense electron irradiation on the methanol gas sensitivity were investigated at room temperature. As deposited ITO films did not show any diffraction peaks in the XRD pattern, while the IAI films showed the diffraction peak for $In_2O_3$ (400). In this study, the gas sensitivity of ITO and IAI films increased proportionally with the methanol vapor concentration and an intense electron beam irradiated IAI film shows the higher sensitivity than the others film. From the XRD pattern, it is supposed that increased crystallization promotes the gas sensitivity. This approach is promising in gaining improvement in the performance of IAI gas sensors used for the detection of methanol vapor at room temperature.