• 제목/요약/키워드: deposited layer

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Fabrication and Characteristics of C(IG)(SeS)2 Absorbers by Selenization and Sulfurization

  • Son, Young-Ho;Jung, Myoung-Hyo;Choi, Seung-Hoon;Choi, Jung-Kyu;Kim, Jin-Ha;Lee, Dong-Min;Park, Joong-Jin;Lee, Jang-Hee;Jung, Eui-Chun;Kim, Jung-Hun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.361-361
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    • 2011
  • Cu(InGa)(SeS2) (CIGS) thin film solar cells have recently reached an efficiency of 20%. Recent studies suggest a double graded band gap structure of the CIGS absorber layer to be a key issue in the production of high efficiency thin film solar cell using by sputtering process method. In this study, Cu(InGa)(SeS2) absorbers were manufactured by selenization and surfulization, we have deposited CIG precusor by sputtering and Se layer by evaporation before selenization. The objective of this study is to find out surfulization effects to improve Voc and to compare with non-surfulization Cu(InGa)Se2 absorbers. Even if we didn't analysis Ga depth profile of Cu(InGa)(SeS2) absorbers, we confirmed increasing of Eg and Voc through surlization process. In non-surfulization Cu(InGa)Se2 absorbers, Eg and Voc are 0.96eV and 0.48V. Whereas Eg and Voc of Cu(InGa)(SeS2) absorbers are 1.16eV and 0.57V. And the efficiency of 9.58% was achieved on 0.57cm2 sized SLG substrate. In this study, we will be discussed to improve Eg and Voc through surfulization and the other method without H2S. gas.

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Multi-coating법으로 제조된 두꺼운 PZT막의 두께 변화에 따른 미세구조 및 전기적 특성 (Microstructures and Electrical Properties of Thick PZT Films with Thickness Variation Fabricated by Multi-coating Method)

  • 박준식;장연태;박효덕;최승철;강성군
    • 한국재료학회지
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    • 제12권3호
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    • pp.211-214
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    • 2002
  • Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

니켈-흑연 복합분말의 니켈코팅층에 미치는 코팅 촉매제의 영향

  • 김동진;정헌생;윤기병
    • 한국재료학회지
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    • 제3권5호
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    • pp.521-528
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    • 1993
  • 니켈-흑연 복합분말은 고온 고압하에서 수소개스를 사용하여 ammoniacal황산니켈염 수용액으로 부터 니켈이온을 흑연코어표면에 석출시켜 제조하였으며, SEM. X-선 회절분석, 입도 및 화학분석 등을 이용하여 환원속도 및 니켈코팅층의 특성에 미치는 코팅 촉매제 Anthraquinone$(C_6H_4COC_6H_4 CO)$ 의 영향을 조사하였다. 코팅촉매제의 입도 및 첨가량 변호에 따라 수소개스 주입 후 환원반응이 시작되기 까지 필요한 잠복기는 22~70분 정도 이었으며, 흑연코어 표면의 니켈코팅층은 포도송이 모양(botryoidal)인 미립의 니켈 nodule(2-4$\mu\textrm{m}$)로 형성되었다. 또한 코팅촉매제의 첨가량이 증가함에 따라 코팅용액중 니켈이온의 환원속도는 증가하여 0.2gr/$\ell$첨가시 4.5gr/$\ell$/min를 나타내었다.

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Inconel 690 오버레이용접부의 고온균열 발생에 미치는 용접금속의 화학조성 및 용접조건의 영향 (The Influence of Chemical Compositions of Weld Metal and Welding Conditions on Hot Cracking by Hot Cracking Test)

  • 양병일;지병하;김정태;박광식;최해수;박화순
    • Journal of Welding and Joining
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    • 제20권3호
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    • pp.74-83
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    • 2002
  • In order to investigate the hot cracking phenomena of the Inconel 690 overlay welds, the hot cracking test(modified Varestraint test) was performed by varying augmented strain and welding speed in GTAW. A total of five kinds of specimens was used in the hot cracking test. The specimens used were two kinds of one layer specimens that were composed of just Inconel 690 deposited metal and three kinds of double layer specimens that were composed with as upper part of Inconel 690 weld metal and lower part of SA508 cl.3 or STS 309L. The main results are as fo11ows: In the welds composed of just Inconel 690, as the augmented strain was more increased and the welding speed was more decreased, the extent of cracking was more increased. And these cracks were mainly solidification cracks, and liquation cracks were also observed partially in HAZ. And hot cracking susceptibily of Inconel 690 welds by using filler metals containing Nb were higher than that of the welds with Nb free. The hot cracking susceptibility of Inconel 690 weld metal was increased with dilution of SA 508 cl.3 and STS 309L, and the influence of SA 508 cl.3 was higher than that of 575 309L. The results of calculation of $TSC\Delta$ and $TLC\Delta$ in Inconel 690 weld metal changed by dilution with base metal or neighboring welds were agreed well with the results of hot cracking test in this study. Therefore, it was expected that the hot cracking was considerably decreased or prevented by using proper welding conditions such as lower heat input, filler metals, base metal and neighboring welds.

Simple and Clean Transfer Method for Intrinsic Property of Graphene

  • 최순형;이재현;장야무진;김병성;최윤정;황종승;황성우;황동목
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.659-659
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    • 2013
  • Recently, graphene has been intensively studied due to the fascinating physical, chemical and electrical properties. It shows high carrier mobility, high current density, and high thermal conductivity compare with conventional semiconductor materials even it has single atomic thickness. Especially, since graphene has fantastic electrical properties many researchers are believed that graphene will be replacing Si based technology. In order to realize it, we need to prepare the large and uniform graphene. Chemical vapor deposition (CVD) method is the most promising technique for synthesizing large and uniform graphene. Unfortunately, CVD method requires transfer process from metal catalyst. In transfer process, supporting polymer film (Such as poly (methyl methacrylate)) is widely used for protecting graphene. After transfer process, polymer layer is removed by organic solvents. However, it is impossible to remove it completely. These organic residues on graphene surface induce quality degradation of graphene since it disturbs movement of electrons. Thus, in order to get an intrinsic property of graphene completely remove of the organic residues is the most important. Here, we introduce modified wet graphene transfer method without PMMA. First of all, we grow the graphene from Cu foil using CVD method. And then, we deposited several metal films on graphene for transfer layer instead of PMMA. Finally, we fabricate graphene FET devices. Our approaches show low defect density and non-organic residues in comparison with PMMA coated graphene through Raman spectroscopy, SEM and AFM. In addition, clean graphene FET shows intrinsic electrical characteristic and high carrier mobility.

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방사광 가속기의 광전자 분광법을 이용한 전면 발광 유기발광 다이오드에서의 열중착 산화구리와 유기물 사이의 계면 dipole 에너지 및 정공 주입 효율에 대한 연구

  • 김성준;홍기현;김기수;이일환;이종람
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 춘계학술회의 초록집
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    • pp.8-10
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    • 2010
  • We report the enhancement of hole injection using thermally evaporated $CuO_x$ layer between Ag anode and 4,4'-Bis[N-(1-naphthyl)-N-phenylamino]biphenyl ($\alpha$-NPD) in top-emitting organic light-emitting diode (TEOLED). The operation voltage at the current density of $1mA/cm^2$ of TEOLEDs decreased from 6.2 V to 5.0 V as the $CuO_x$ layer inserted between Ag and $\alpha$-NPD. $\alpha$-NPD was deposited in situ on Ag/$CuO_x$ and Ag anodes, and their interface dipole energies were quantitatively determined using synchrotron radiation photoemission spectroscopy. The dipole energy of Ag/$CuO_x$ was lower by 0.05 eV even though Ag/$CuO_x$ had a higher work function. The work function of Ag/$CuO_x$ is higher by 0.53 eV than that of Ag, resulting in a decrease of the turn-on voltage via reduction of hole injection barrier.

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Morphologies of Brazed NiO-YSZ/316 Stainless Steel Using B-Ni2 Brazing Filler Alloy in a Solid Oxide Fuel Cell System

  • Lee, Sung-Kyu;Kang, Kyoung-Hoon;Hong, Hyun-Seon;Woo, Sang-Kook
    • 한국분말재료학회지
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    • 제18권5호
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    • pp.430-436
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    • 2011
  • Joining of NiO-YSZ to 316 stainless steel was carried out with B-Ni2 brazing alloy (3 wt% Fe, 4.5 wt% Si, 3.2 wt% B, 7 wt% Cr, Ni-balance, m.p. 971-$999^{\circ}C$) to seal the NiO-YSZ anode/316 stainless steel interconnect structure in a SOFC. In the present research, interfacial (chemical) reactions during brazing at the NiO-YSZ/316 stainless steel interconnect were enhanced by the two processing methods, a) addition of an electroless nickel plate to NiO-YSZ as a coating or b) deposition of titanium layer onto NiO-YSZ by magnetron plasma sputtering method, with process variables and procedures optimized during the pre-processing. Brazing was performed in a cold-wall vacuum furnace at $1080^{\circ}C$. Post-brazing interfacial morphologies between NiO-YSZ and 316 stainless steel were examined by SEM and EDS methods. The results indicate that B-Ni2 brazing filler alloy was fused fully during brazing and continuous interfacial layer formation depended on the method of pre-coating NiO-YSZ. The inter-diffusion of elements was promoted by titanium-deposition: the diffusion reaction thickness of the interfacial area was reduced to less than 5 ${\mu}m$ compared to 100 ${\mu}m$ for electroless nickel-deposited NiO-YSZ cermet.

실리카 광도파로용 SiON 후막 특성에서 RF Power와 $SiH_4$/($N_2$O+$N_2$) Ratio가 미치는 영향 (The Effect of RF Power and $SiH_4$/($N_2$O+$N_2$) Ratio in Properties of SiON Thick Film for Silica Optical Waveguide)

  • 김용탁;조성민;서용곤;임영민;윤대호
    • 한국세라믹학회지
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    • 제38권12호
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    • pp.1150-1154
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    • 2001
  • 플라즈마 화학기상증착(PECVD)법을 이용하여 실리카 광도파막의 코어로 이용되는 규소질산화막(SiON)을 Si 웨이퍼 위에 SiH$_4$,$N_2$O, $N_2$가스를 혼합하여 저온(32$0^{\circ}C$)에서 증착하였다. Prism coupler 측정을 통해 SiON 굴절률 1.4663~1.5496을 얻었으며, SiH$_4$/($N_2$O+$N_2$) 유량비와 rf power가 각각 0.33과 150W에서 8.67$mu extrm{m}$/h의 증착률을 나타내었다. 또한 SiH$_4$/($N_2$O+$N_2$) 유량비가 감소함에 따라 SiON막의 roughness는 41~6$\AA$까지 감소하였다.

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다양한 방법으로 성장된 ZnO layer의 Deep level emission에 대한 비교 분석 (A comparative analysis of deep level emission in the ZnO layers deposited by various methods)

  • 안철현;김영이;김동찬;공보현;한원석;최미경;조형균;이종훈;김홍승
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.102-103
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    • 2008
  • Magnetron Sputtering, MOCVD, Thermal Evaporation에 의해 성장된 ZnO layer에 대한 Dependency Temperature Photoluminescence (PL)를 이용하여 비교 분석을 통해 Deep level emission에 대해 연구하였다. Sputter에 의해 성장된 ZnO 박막은 Violet, Green, Orange-red 영역의 $Zn_i$, $V_o$, $O_i$의 defect에 의한 Deep level emission을 보였고, MOCVD에 의해 성장된 박막은 비교적 산소양이 낮은 성장 조건에서는 blue-green 영역에서, 산소양이 높은 조건에서의 박막은 Orange-red 영역의 Deep level emission을 보였다. Blue-green 영역에서의 emission은 온도가 증가함에 따라 다른 Barrier를 보였는데, 이는 $V_{Zn}$$V_o$에 의한 것임을 알 수 있었다. 한편, ZnO nanorods는 $V_o$에 의한 Green 영역에서의 Deep level emission을 보였다.

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ZnS/$Na_3AlF_6$/ZnS/Cr 다층 박막의 광학적 두께 변화에 따른 광특성 (The optical properties of ZnS/$Na_3AlF_6$/ZnS/Cr multi-layered thin film with different optical thickness)

  • 김준식;장강재;장건익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.535-536
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    • 2008
  • Multi-layered thin films of ZnS/$Na_3AlF_6$/ZnS/Cr were deposited on glass substrate by evaporation process. ZnS and $Na_3AlF_6$ were selected as high and low refractive index material, and additionally Cr was chosen as mid reflective layer respectively. The multi-layered thin films were prepared in terms of different optical thickness and different staking sequence and layers. The optical properties were systematically characterized with different optical thickness of $Na_3AlF_6$ especially $0.25\lambda$ and $0.5\lambda$. In order to expect the experimental result, the simulation program, the Essential Macleod Program(EMP) was adopted. Based on the results taken by spectrophotometer at viewing angle $45^{\circ}$, the ZnS/$Na_3AlF_6$/ZnS/Cr multi-layered thin film shows purple colour range in $0.25\lambda$, bluish green in $0.5\lambda$, red purple in $0.75\lambda$, and purple in $1.0\lambda$ respectively.

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