• Journal of the Semiconductor & Display Technology
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• v.11 no.3
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• pp.7-11
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• 2012

Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

• Textile Coloration and Finishing
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• v.33 no.4
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• pp.309-316
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• 2021

Due to the rigid nature of the silicon carbide fiber(SiC), fiber damage occurs from the friction during the carding process. This damage not only lowers the spun yarn yield, but also lowers the heat resistance of the spun yarn, so that ultra-high heat resistant yarn cannot be manufactured. Therefore, in the carding process where the most friction between fiber and machine(wire, etc.) occurs, some factors were modified and tested, and as a result of measuring the change in physical properties, fiber damage decreased due to the wire angle or wire density, resulting in improved yield. The test method used to measure the yield of SiC fiber was the carbonization method, and the content of SiC fibers was calculated using the remaining amount after carbonization. Carbonization test was performed at air condition, 700℃, and for 2 hours. Analysis by SEM-EDX showed that the carbide was consistent with the composition of the SiC fiber.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.1045-1048
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• 2003

In this paper, we studied plasma damage of MIS capacitor with $Al_2$O$_3$ dielectric film. Using capacitor pattern with the same area but different perimeters, we tried to separate etching damage mechanism and to optimize the dry etching process. After etching both metal and dielectric layer by the same condition, leakage current and C-V measurements were carried out for Pt/A1$_2$O$_3$/Si structures. The flatband voltage shift was appeared in the C-V plot, and it was caused by the variation of the fixed interface charge and the interface trapped charge. From I-V measurement, it was found the leakage current along the periphery could not be ignored. Finally, we established the process condition of RF power 300W, 100mTorr, Ar/Cl$_2$ gas 60sccm as an optimal etching condition.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.5
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• pp.65-71
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• 2011

This study analyzes about front axle through the analyses of stress, fatigue and vibration. Maximum equivalent stress is shown with the frequency of 60Hz in case of the harmonic vibration analysis applied with force. Among the cases of nonuniform fatigue loads, 'SAE bracket history' with the severest change of load becomes most unstable but 'Sample history' becomes most stable. In case of 'Sample history' with the average stress of 0 to $-2{\times}10^5MPa$ and the amplitude stress of 0 to $-2{\times}10^5MPa$, the possibility of maximum damage becomes 3%. This stress state can be shown with 6 times more than the damage possibility of 'SAE Bracket history' or 'SAE transmission'. The structural result of this study can be effectively utilized with the design of front axle by investigating prevention and durability against its damage.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.5
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• pp.21-28
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• 2012

This study analyzes about automotive engine tension bearing through the structural analyses of fatigue and vibration. Maximum equivalent stress is shown at the lower of tensioner. Among the cases of nonuniform fatigue loads, 'SAE bracket history' with the severest change of load becomes most unstable but 'Sample history' becomes most stable. In case of 'Sample history' with the average stress of 0 to $-10^{6}MPa$, the possibility of maximum damage becomes 3%. This stress state can be shown with 6 times more than the damage possibility of 'SAE Bracket history' or 'SAE transmission'. The structural result of this study can be effectively utilized with the design of tension bearing by investigating prevention and durability against its damage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.793-796
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• 2003

This study dealt with the manufacturing process of self-healing microcapsules for damage repair in polymeric composites. The microcapsule was consisted with a DCPD (dicyclopentadiene) as the healing agent and a urea-formaldehyde resin as the wall section. The size distribution of microcapsules were measured by a particle size analyzer using a laser diffraction technique. Thermal stability of microcapsules was investigated by using a TGA under continuous and isothermal heating conditions. According to the results, these microcapsules were verified to be to thermally stable and have a great potential to be applicable for damage repair in polymeric composites.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.2
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• pp.137-143
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• 2012

This study analyzes flywheel through the analyses of stress, fatigue and vibration. Maximum equivalent stress is 15.271MPa at the mid round shape and maximum deformation is 0.02264mm at the outer teeth. Among the cases of nonuniform fatigue loads, 'SAE bracket history' with the severest change of load becomes most unstable but 'Sample history' becomes most stable. In case of 'Sample history' with the average stress of -$10^4$MPa and the amplitude stress of 1000 to 2900MPa, the possibility of maximum damage becomes 30%. This stress state can be 20 times greater than the damage possibility of 'SAE bracket history' or 'SAE transmission'. The range of natural frequencies becomes 200 to 820Hz and the values of these deformations are not more than 10mm. The structural result of this study can be effectively utilized with the design of flywheel by investigating prevention and durability against its damage.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.1
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• pp.1-8
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• 2013

This study investigates life and damage due to structural and fatigue load at speaker placer with wall hanger type. As the small stress and deformation are shown at the models of A, B and C shapes on structural analysis, there is no problem at installing speaker placer. As the largest stress is happened at the middle part of joint on the models of A, B and C shapes, this part must be considered at the design. A shape is thought to have most fatigue damage among 3 shape models. C shape model has most excellent, but A model has least at fatigue durability. This study result is applied with the design of speaker placer and it can be useful at predicting prevention and durability against its damage.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.1-9
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• 1999

This paper presents a newly enhanced damage model in Monte Carlo (MC) simulation for the accurate prediction of 3-Dimensional (3D) as-implanted impurity and point defect profiles induced by ion implantation in (100) crystal silicon. An empirical electronic energy loss model for B, BF2, As, P and Si self implant over the wide energy range has been proposed for the ULSI device technology and development. Our model shows very good agreement with the SIMS data over the wide energy range. In the damage accumulation, we considered the self-annealing effects by introducing our proposed non-linear recomvination probability function of each point defect for the computational efficiency. For the damage profiles, we compared the published RBS/channeling data with our results of phosphorus implants. Our damage model shows very reasonable agreement with the experiments for phosphorus implants.

• Journal of the Society of Naval Architects of Korea
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• v.46 no.1
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• pp.69-77
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• 2009

Loss of human lives and properties including environmental damage due to large scale accidents requires change of our perception to marine safety. IMO is trying to re-establish overall marine safety system through long term plan such as GBS. Along this line, current regulation based safety evaluation is in process of changing into performance based methods, and for this transition, simulation based safety evaluation during design stage considering damage is highly necessary. In this paper, first, damage scenario is developed from IMO regulations and accident case studies. Then an integrated and simulation based safety evaluation prototype system considering both damage stability and structural safety is developed for the use during ship design process.