• Title/Summary/Keyword: damage process

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A Study of Chemical Mechanical Polishing on Shallow Trench Isolation to Reduce Defect (CMP 연마를 통한 STI에서 결함 감소)

  • 백명기;김상용;김창일;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.501-504
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    • 1999
  • In the shallow trench isolation(STI) chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control within- wafer-non-uniformity, and the possible defects such as nitride residue and pad oxide damage. These defects after STI CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI filling and STI CMP were discussed. It is represented that the nitride residue can be occurred in the condition of high post CMP thickness and low trench depth. In addition there are remaining oxide on the moat surface after reverse moat etch. It means that reverse moat etching process can be the main source of nitride residue. Pad oxide damage can be caused by over-polishing and high trench depth.

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A Boundary Element Analysis for Damage and Failure Process of Brittle Rock using ERACOD (FRACOD를 이용한 취성 암석의 손상 및 파괴에 대한 경계요소 해석)

  • ;Baotang Shen;Ove Stephansson
    • Tunnel and Underground Space
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    • v.14 no.4
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    • pp.248-260
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    • 2004
  • Damage in brittle rock due to stress increase starts from initiation of microcracks, and then results in failure by forming macro failure planes due to propagation and coalescence of these discrete cracks. Conventionally, continuum approaches using macro-failure criteria or a number of elasto-plastic models have been major solution to implement rock damage and failure. However, actual brittle failure processes can be better described in phenomenological approach if initiation and propagation of discrete fractures are explicitly considered. This study presents damage and failure process of rock using a boundary element code, FRACOD, which has been developed to model fracturing process of rocks. Through a series of numerical uniaxial compressive tests, the feasibility of the developed model was verified, and realistic rock failure process was reproduced considering scale effects in rocks. In addition, the fracturing process and the corresponding rock damage in the vicinity of deep shaft in rock mass were presented as an application of this approach. This approach will be expected to contribute to finding better engineering solutions for the analysis of stability problems in brittle rock masses.

A Research on Process of Estimation about Frequency and Loss of Risk by distribution of Probability (확률분포에 의한 리스크 빈도수와 손실규모 추정 프로세스 연구)

  • Lee, Young-Jai;Lee, Seong-Il
    • Journal of Information Technology Applications and Management
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    • v.15 no.2
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    • pp.67-82
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    • 2008
  • Risk that breed large size disaster is happening variously for cause at social. natural a management. Incidence and damage scale are trend that increase rapidly than past. In these circumstance, to keep operational continuity of organization, area, society, risk management action that establish systematic counter measure estimating and analyze occurrence possibility and expectation damage of risk is essential indispensable issue and the best countermeasure. Risk management action does by main purpose establish optimum disaster reduction countermeasure. To deduce various countermeasure, process that estimate and analyze occurrence possibility and expectation damage of risk is essential indispensable issue. Therefore, this paper studies process design that can presume risk occurrence frequency and damage scale through distribution of probability.

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Development of a novel fatigue damage model for Gaussian wide band stress responses using numerical approximation methods

  • Jun, Seock-Hee;Park, Jun-Bum
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.12 no.1
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    • pp.755-767
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    • 2020
  • A significant development has been made on a new fatigue damage model applicable to Gaussian wide band stress response spectra using numerical approximation methods such as data processing, time simulation, and regression analysis. So far, most of the alternative approximate models provide slightly underestimated or overestimated damage results compared with the rain-flow counting distribution. A more reliable approximate model that can minimize the damage differences between exact and approximate solutions is required for the practical design of ships and offshore structures. The present paper provides a detailed description of the development process of a new fatigue damage model. Based on the principle of the Gaussian wide band model, this study aims to develop the best approximate fatigue damage model. To obtain highly accurate damage distributions, this study deals with some prominent research findings, i.e., the moment of rain-flow range distribution MRR(n), the special bandwidth parameter μk, the empirical closed form model consisting of four probability density functions, and the correction factor QC. Sequential prerequisite data processes, such as creation of various stress spectra, extraction of stress time history, and the rain-flow counting stress process, are conducted so that these research findings provide much better results. Through comparison studies, the proposed model shows more reliable and accurate damage distributions, very close to those of the rain-flow counting solution. Several significant achievements and findings obtained from this study are suggested. Further work is needed to apply the new developed model to crack growth prediction under a random stress process in view of the engineering critical assessment of offshore structures. The present developed formulation and procedure also need to be extended to non-Gaussian wide band processes.

A decentralized approach to damage localization through smart wireless sensors

  • Jeong, Min-Joong;Koh, Bong-Hwan
    • Smart Structures and Systems
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    • v.5 no.1
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    • pp.43-54
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    • 2009
  • This study introduces a novel approach for locating damage in a structure using wireless sensor system with local level computational capability to alleviate data traffic load on the centralized computation. Smart wireless sensor systems, capable of iterative damage-searching, mimic an optimization process in a decentralized way. The proposed algorithm tries to detect damage in a structure by monitoring abnormal increases in strain measurements from a group of wireless sensors. Initially, this clustering technique provides a reasonably effective sensor placement within a structure. Sensor clustering also assigns a certain number of master sensors in each cluster so that they can constantly monitor the structural health of a structure. By adopting a voting system, a group of wireless sensors iteratively forages for a damage location as they can be activated as needed. Since all of the damage searching process occurs within a small group of wireless sensors, no global control or data traffic to a central system is required. Numerical simulation demonstrates that the newly developed searching algorithm implemented on wireless sensors successfully localizes stiffness damage in a plate through the local level reconfigurable function of smart sensors.

Structural Analysis on Durability of Pedal (페달의 내구성에 대한 구조 해석)

  • Cho, Jae-Ung;Han, Moon-Sik
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.10 no.4
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    • pp.88-95
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    • 2011
  • In this study, the deformation, stress, vibration, fatigue life and the probability of damage are analyzed at the pedal applied by the force of 300N. The maximum stress at the lower of pedal is shown as 20.801MPa. And the maximum displacement is 0.85mm at the maximum response frequency as 3800Hz. Among the cases of nonuniform fatigue loads, 'SAE bracket history' with the severest change of load becomes most unstable but 'Sample history' becomes most stable. In case of 'Sample history' with the average stress of 0 to $-10^{5}MPa$ and the amplitude stress of 0 to $10^{5}MPa$, the possibility of maximum damage becomes 0.6%. This stress state can be shown with 5 times more than the damage possibility of 'SAE bracket history' or 'SAE transmission'. The structural result of this study can be effectively improved with the design of pedal by investigating durability against its damage.

Fracture Analysis of Concrete using Plastic-Damage Model (소성-손상 모델을 이용한 콘크리트의 파괴해석)

  • 남진원;송하원;김광수
    • Proceedings of the Computational Structural Engineering Institute Conference
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    • 2004.10a
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    • pp.534-541
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    • 2004
  • The modeling of crack initiation and propagation is very important for the failure analysis of concrete. The cracking process in concrete is quite different from that of other materials, such as metal and glass, in that it is not a sudden onset of new free surface but a continuous forming and connecting of microcracks. The failure process of concrete by cracking causes irreversible deformations and stiffness degradation. Those phenomenon can be modeled using plasticity and damage theory in macroscopic aspect. In this study, a plastic-damage model based on homogenized crack model considering velocity discontinuity and damage variable which is a function of plastic strain is proposed for fracture analysis of concrete. Finally, the plastic-damage model is verified with experimental data.

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Structural Durability Analysis of Tie Rod (타이로드의 구조적 내구성 해석)

  • Han, Moon-Sik;Cho, Jae-Ung
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.5
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    • pp.68-75
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    • 2012
  • This study aims at the structural analysis of vibration and fatigue according to the tie rod configuration. The maximum displacement amplitude is happened at 156Hz by harmonic vibration analysis, this tie rod model can be broken as the weakest state. Among the cases of nonuniform fatigue loads, 'SAE bracket history' with the severest change of load becomes most unstable but 'Sine wave' becomes most stable. In case of 'Sine wave' with the average stress of 0MPa and the amplitude stress of 570MPa, the possibility of maximum damage becomes 70%. This stress state can be shown with 140 times more than the damage possibility of 'SAE bracket history' or 'SAE transmission'. The structural result of this study can be effectively utilized with the design on tie rod by investigating prevention and durability against its damage.

Analysis on Fatigue Fracture at Cam Shaft (캠축에서의 피로파괴해석)

  • Cho, Jae-Ung;Han, Moon-Sik
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.7 no.4
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    • pp.102-108
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    • 2008
  • This study investigates the fatigue life and the damage possibility of cam shaft by the fatigue tool of Ansys. Among nonconstant fatigue loads, the case of 'SAE Bracket History' which is severest at the variation of load tends to be most unstable. The maximum relative damage in case of 'SAE Bracket History' is occurred near the average stress '0' and this case can be shown to have the possibility to take more damage than other cases. The case of 'Sample History' which becomes a little slow at the variation of load tends to be most stable. But there is most damaged possibility of 5% as 7 times at the range of mean stress from 0Pa to -104MPa and amplitude stress from 0MPa to 104MPa than the case of 'SAE Bracket History' or 'SAE Transmission'.

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Fatigue and Damage Tolerance Evaluation of Composite Helicopter Rotor Blades (복합재 헬리콥터 로터 블레이드의 피로 및 손상허용 평가 방안)

  • Kee, Young-Jung;Paek, Seung Kil
    • Journal of Aerospace System Engineering
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    • v.8 no.3
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    • pp.41-46
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    • 2014
  • Fatigue evaluations for the rotor blades of commercial or military rotorcraft have been carried out using the safe life concept since 1950s. Particularly, in the case of a rotor blade made of a composite material, a highly reliable fatigue life could be predicted by evaluation the cumulative damage using combination of fatigue life curve and load spectrum. However, there is a limit in adequately evaluating the strength reducing phenomena caused by damages or defects generated during the manufacturing process or impact damage induced by operational usages, using only the safe life concept. In this study, the fatigue evaluation process based on the damage tolerance concept is described and illustrated by means of successful application to substantiate the retirement time of composite rotor blades.