• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.463-463
• /
• 2012

ITRS (international technology roadmap for semiconductors)에 따르면 MOS(metal-oxide-semiconductor)의 CD (critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/$SiO_2$를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두된다고 보고하고 있다. 일반적으로 high-k dielectric를 식각시 anisotropic 한 식각 형상을 형성시키기 위해서 plasma를 이용한 RIE (reactive ion etching)를 사용하고 있지만 PIDs (plasma induced damages)의 하나인 PIED (plasma induced edge damage)의 발생이 문제가 되고 있다. PIED의 원인으로 plasma의 direct interaction을 발생시켜 gate oxide의 edge에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 high-k dielectric의 식각공정에 HDP (high density plasma)의 ICP (inductively coupled plasma) source를 이용한 원자층 식각 장비를 사용하여 PIED를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. One-monolayer 식각을 위한 1 cycle의 원자층 식각은 총 4 steps으로 구성 되어 있다. 첫 번째 step은 Langmuir isotherm에 의하여 표면에 highly reactant atoms이나 molecules을 chemically adsorption을 시킨다. 두 번째 step은 purge 시킨다. 세 번째 step은 ion source를 이용하여 발생시킨 Ar low energetic beam으로 표면에 chemically adsorbed compounds를 desorption 시킨다. 네 번째 step은 purge 시킨다. 결과적으로 self limited 한 식각이 이루어짐을 볼 수 있었다. 실제 공정을 MOS의 high-k dielectric에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU (North Carolina State University) CVC model로 구한 EOT (equivalent oxide thickness)는 변화가 없으면서 mos parameter인 Ion/Ioff ratio의 증가를 볼 수 있었다. 그 원인으로 XPS (X-ray photoelectron spectroscopy)로 gate oxide의 atomic percentage의 분석 결과 식각 중 발생하는 gate oxide의 edge에 trap의 감소로 기인함을 확인할 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.210-210
• /
• 2011

The effects of CH2F2 and N2 gas flow rates on the etch selectivity of silicon nitride (Si3N4) layers to extreme ultra-violet (EUV) resist and the variation of the line edge roughness (LER) of the EUV resist and Si3N4 pattern were investigated during etching of a Si3N4/EUV resist structure in dual-frequency superimposed CH2F2/N2/Ar capacitive coupled plasmas (DFS-CCP). The flow rates of CH2F2 and N2 gases played a critical role in determining the process window for ultra-high etch selectivity of Si3N4/EUV resist due to disproportionate changes in the degree of polymerization on the Si3N4 and EUV resist surfaces. Increasing the CH2F2 flow rate resulted in a smaller steady state CHxFy thickness on the Si3N4 and, in turn, enhanced the Si3N4 etch rate due to enhanced SiF4 formation, while a CHxFy layer was deposited on the EUV resist surface protecting the resist under certain N2 flow conditions. The LER values of the etched resist tended to increase at higher CH2F2 flow rates compared to the lower CH2F2 flow rates that resulted from the increased degree of polymerization.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.38 no.8
• /
• pp.747-757
• /
• 2010

The ice accreted on the airfoil is one of the critical drivers that causes the degradation of aerodynamic performance as well as aircraft accidents. Hence, an efficient numerical code to predict the accreted ice shape is crucial for the successful design of de-icing and anti-icing devices. To this end, a numerical code has been developed for the prediction of glaze ice accretion shape on 2D airfoil. Constant Source-Doublet method is used for the purpose of computational efficiency and heat transfer in the icing process is accounted for by Messinger model. The computational results are thoroughly compared against available experiments and other computation codes such as LEWICE and TRAJICE. The direction and thickness of ice horn are shown to yield similar results compared to the experiments and other codes. In addition, the effects of various parameters - temperature, free-stream velocity, liquid water contents, and droplet diameter - on the ice shape are systematically analyzed through parametric studies.

• KOREAN JOURNAL OF CROP SCIENCE
• /
• v.36 no.4
• /
• pp.319-323
• /
• 1991

To determine how closely related to field lodging for several characters affecting the field lodging for several characters affecting field lodging, and to obtain the basic information for selection of lodging resistance genotype, an experiment was conducted with 10 varieties from May to Oct., 1990 at the experimental field in Sunchon Xational University. Culm length, dry weight per unit culm length (W/1), bending moment per unit culm diameter (W1/d), lodging index (L), bending load ratio (W1/P), and index of critical lodging load(W$_{s}$$^{2}$/1$^4$) were the most closely related characters to field lodging. Culm length showed highly significant positive correlation coefficient with field lodging(r=0.7607), but it may be undesirable to judge lodging resistance of genotype by culm length itself without consideration of culm stiffness. Considering the difficulty and time-consuming to measure the character, clum length, W/1, W1/d, and W$_{s}$$^{2}$/1$^4$ were easy to measure and hence would be the most useful variables to judge the lodging resistance of genotype. Culm diameter, cross sectional area of culm, thickness of culm wall, and the second inertia moment of cross section of culm were not correlated with field lodging at all. Breaking strength of culm showed significantly negative correlation coefficient (r=-0.3986) with field lodging.ing.

• Journal of Dental Rehabilitation and Applied Science
• /
• v.28 no.2
• /
• pp.191-200
• /
• 2012

The patients' demand for treatment of unesthetic anterior teeth is steadily growing. Accordingly, several treatment options such as porcelain laminate veneers(PLV) have been proposed to restore the esthetic appearance of the dentition. Porcelain laminate veneers are considered minimally invasive, but they also require removal of sound enamel. One critical step in the porcelain laminate veneer technique is the achievement of sufficient ceramic thickness, and several different strategies for tooth preparation can be found in the literature. This clinical report describes a step-by-step protocols for preparation of these restorations used with the silicone index from diagnostic wax-up and the acrylic resin mock-up. Conservative use of porcelain laminate veneers provided satisfactory esthetic outcomes and preserved sound tooth structure.

• Journal of the Korean Society for Railway
• /
• v.17 no.2
• /
• pp.114-122
• /
• 2014

An asphalt trackbed is to be adapted in Korea to provide better bearing capacity and stability to the track and a comfortable ride to passengers. The dynamic modulus of Hot Mixed Asphalt(HMA) mixes is a critical design input parameter to determine the thickness of the asphalt trackbed. In this study, impact resonant tests and ultrasonic test methods are designed to obtain the dynamic modulus. These test methods are also verified to check the etffectiveness of constructing a master curve of the dynamic modulus over a wide range of frequencies and temperatures. The test results are compared to the computed dynamic modulus using AASHTO 2002 and the KPRP's proposed model. It can be concluded that the proposed simple test methods are effective to obtain the dynamic moduli of the asphalt mixes for the design of an asphalt trackbed foundation.

• Journal of Ginseng Research
• /
• v.44 no.4
• /
• pp.655-663
• /
• 2020

Background: Korean Red Ginseng is known to exhibit immune-enhancing and anti-inflammatory properties. The immune-enhancing effects of the nonsaponin fraction (NSF) of Korean Red Ginseng have been studied in many reports. However, the gastroprotective effect of this fraction is not fully understood. In this study, we demonstrate the activities of NSF for gastrointestinal protection and its related critical factor. Methods: The in vitro and in vivo regulatory functions of NSF on cyclooxygenase-1 (COX-1) messenger RNA and protein levels were examined by reverse transcription polymerase chain reaction and immunoblotting analyses. Gastroprotective effects of NSF were investigated by histological score, gastric juice pH, and myeloperoxidase activity on indomethacin-induced, cold stress-induced, and acetylsalicylic acid-induced gastritis and dextran sulfate sodium-induced colitis in in vivo mouse models. Results: NSF did not show cytotoxicity, and it increased COX-1 messenger RNA expression and protein levels in RAW264.7 cells. This upregulation was also observed in colitis and gastritis in vivo models. In addition, NSF treatment in mice ameliorated the symptoms of gastrointestinal inflammation, including histological score, colon length, gastric juice pH, gastric wall thickness, and myeloperoxidase activity. Conclusion: These results suggest that NSF has gastroprotective effects on gastritis and colitis in in vivo mouse models through COX-1 upregulation.

• Korean Journal of Optics and Photonics
• /
• v.12 no.4
• /
• pp.312-319
• /
• 2001

We proposed a B-RWG LD (Buried-ridge waveguide laser diode) having more merits than a conventional RWG-LD. It's ridge width is controlled easily, it has the advantage of being more planar than the RWG-LD and it is possible to control refractive index with growth layer thickness. Before fabricating the device, we designed the optimal device for single mode, high efficiency and high power operation. From theoretical analysis, we have to control the $d_2, d_3$ layer thicknesses for lateral effective index difference, $\Delta_{nL}$ to be higher than critical value, and simultaneously consider the ridge width for single mode and low threshold current operation. As a result, it is possible to make a single mode LD having the ridge width of $6~9{\mu}m$ if the lateral effective index difference was controlled properly. perly.

• Journal of the Computational Structural Engineering Institute of Korea
• /
• v.27 no.3
• /
• pp.191-198
• /
• 2014

In this paper, structural integrity evaluation of reactor pressure vessel bottom head without penetration nozzles in core melting accident has been performed. Considering the analysis results of thermal load, weight of molten core debris and internal pressure, thermal load is the most significant factor in reactor vessel bottom head. The failure probability was evaluated according to the established failure criteria and the evaluation showed that the equivalent plastic strain results are lower than critical strain failure criteria. Thermal-structural coupled analyses show that the existence of elastic zone with a lower stress than yield strength is in the middle of bottom head thickness. As a result of analysis, the elastic zone became narrow and moved to the internal wall as the internal pressure increases, and it is evaluated that the structural integrity of reactor vessel is maintained under core melting accident.

• Korean Journal of Health Education and Promotion
• /
• v.15 no.1
• /
• pp.195-204
• /
• 1998

The purpose of this study was to develop cardiovascular health related percent body-fat standards that may be applied to epidemiologic investigations of the prevalence and incidence of obesity in adolescents, pediatric health screenings, and youth fitness tests. The subjects included 102 males and 80 females aged 19～22years. All subject were Honam University Students Total body fat was derived from body density which was estimated from age and the triceps and subscapular skinfold thickness measured with Lang calipers to the nearst l.0mm. Serum total cholesterol and lipoprotein cholesterol fraction(HDL-CLDL-C) were measured from blood obtained from fore arm vein after blood pressure measurement. In analyses to determine critical fat levels associated with elevated CDD(Chronic Degenerative Disease) risk factors;male and female were grouped by level of percent fat as follows: male, 〈 10%, 10-14.9%, 15-19.9%, 20-24.9%, and $\geq$ 25%;female, 〈 20%, 20-24.9%, 25-29.9%, 30-34.9%, and $\geq$ 35%. As the results of the data, the conclusions were as follows: 1. A dose respones effect was observed between blood pressure and percent body fat in males and females; in contrast, total cholesterol and lipoprotein ratios were relatively independant of percent fat among the lower four fatness group in males and the lower three fatness groups in females. 2. The percentage of subjects in the uppermost quintile for S-Bp, D-Bp, TC, LDL/H was significantly(P〈.05) greater than expected by change alone(20%) in males with $\geq$ 25% fat and in females with $\geq$ 30% fat females with $\geq$35% had even greater representation in the uppermost quintile of all CDD risk factors compared to females with 30-34.9% fat.