• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.84-84
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• 2000

수소화된 비정질 실리콘(a-Si:H)과 미세결정질 실리콘 ($\mu$c-Si:H)은 저온.건식 공정인 PECVD로 값싼 유리 기판을 사용하여 넓은 면적에 증착이 가능하다는 큰 장점으로 인해 광전소자(photovoltaic device)와 박막 트랜지스터(TFTs)등에 폭넓게 응용되어 왔으며 최근에는 nm 크기의 실리콘 결정(nc-Si)에서 가시광선 영역의 발광 현상이 발견됨에 따라 광소자로서의 특성을 제어하기 위해서는 성장 조건과 공정 변수에 따른 구조 변화에 대한 연구가 선행되어야 한다. 본 연구에서는 UHV-ECR-PECVD 법을 이용하여 H2로 희석된 SiH4로부터 a-Si:H과 $\mu$c-Si:H를 증착하였다. 그림 1은 SiH4 20sccm/H2 50sccm/25$0^{\circ}C$에서 기판의 DC bias를 변화시키면서 박막을 증착시킬 때 나타나는 박막의 구조 변화를 raman spectrum의 To phonon peak의 위치와 반가폭의 변화로 나타낸 것이다. 비정질 실리콘 박막은 DC bias를 증가시킴에 따라 무질서도가 증가하다가 어떤 critical DC bias에서 최대치를 이룬후 다시 질서도가 증가한다. 이온의 충격력에 의해 박막내에 응력이 축적되면 박막의 에너지 상태가 높아지고 이 축적된 응력이 ordering에 대한 에너지 장벽을 넘을 수 있을 만큼 커지게 되면 응력이 풀리면서 ordering이 가능해지는 것으로 생각된다. 그림 2는 수소 결합 형태의 변화이다. 박막의 무질서도가 증가할 경우 알려진 바와 같이 2000cm-1근처의 peak은 감소하고 2100cm-1 부근이 peak이 증가하는 현상을 보였다. 본 논문에서는 여러 공정 변수, 특히 DC bias에 따르는 박막의 구조 변화와 다른 성장 조건(온도, 유량비)이 critical DC bias나 결정화, 결정성 등에 미치는 영향에 대한 분석결과를 보고하고자 한다.등을 이용하여 광학적 밴드갭, 광흡수 계수, Tauc Plot, 그리고 파장대별 빛의 투과도의 변화를 분석하였으며 각 변수가 변화함에 따라 광학적 밴드갭의 변화를 정량적으로 조사함으로써 분자결합상태와 밴드갭과 광 흡수 계수간의상관관계를 규명하였고, 각 변수에 따른 표면의 조도를 확인하였다. 비정질 Si1-xCx 박막을 증착하여 특성을 분석한 결과 성장된 박막의 성장률은 Carbonfid의 증가에 따라 다른 성장특성을 보였고, Silcne(SiH4) 가스량의 감소와 함께 박막의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다. 이것은 quinua 대체량 증가에 따른 반죽의 안정성이 저하되어 버린 것으로 생각되어진다. 더욱이 lipase를 첨가하면 반죽이 분화하는 경향이 보여졌지만 첨가량 75ppm에 있어서 상당히 비용적의 증대가 보였다. 이것은 lipase의 가수분해에 의해

• Journal of Digital Convergence
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• v.11 no.2
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• pp.127-135
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• 2013

For the successful implementation of IT projects, individual consultant's competency in the project is very important. Especially, 3 key factors which are 1) Learning-by-Doing, 2) Learning-from-Others, and 3) Learning-by-Investment with individual consultant's competency, are required for solving various critical issues which can be occurred during implementing IT project. The objective of this research is to examine the effects of these learning processes on decision performance of consultants. Prior to setup the research model, we conducted 3 times in-depth interviews with IT consultants who have over 20 years IT project experiences. Through interviews with IT project expert, we tried to validate our research model and develop survey questionnaires. Over 100 consultants, who are working at SI companies those of Samsung SDS, LG CNS, SK C&C and other small SI companies, were participated to survey. In the contrary of our thoughts before conducted experiment, we got the interesting result from pilot experiment. Most influenced learning process was Learning-by-Doing and less influenced learning process was Learning-from-Others.

• Journal of Korean Academy of Nursing
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• v.30 no.5
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• pp.1121-1132
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• 2000

Service quality is, unlike goods quality, an abstract and elusive term. However, quality is very important to marketers and consumers in that it has many strategic benefits in contributing to profitability of marketing activities and consumers' problem-solving activities. The main purpose of this study is 1) to explore the differences of perception between consumers and providers about nursing service quality. 2) to identify the useful tool between two tools measuring nursing service quality. To achieve these purposes of the study, the questionnaire was developed and distributed to 210 nurses who worked at seven subjected hospitals in Seoul. Also, 280 people who had a direct experience with the subjected hospital nursing services at the time of screening were involved. They were randomly selected at the seven subjected hospitals during August to September of 1998. Among them, 165 responses from nurses and 229 responses from others resulted in worthy finds. The measurement instrument for a nursing services quality evaluation was modified from the SERVQUAL model originated from Parasuraman, Zeithaml, and Berry (1988). The reliability coefficient of the scale was calculated and showed high degree of internal consistency (Cronbachs' Alpha = .9353). For data analysis, SPSS/PC was used for descriptive statistics, t-test, ANOVA and regression analysis. The results were as follows : 1) In the perception about nursing services quality, there were gap between consumers and providers. Especially the critical attributes in point of perception nursing services quality, naming satisfy, hygiene and performance factors, are very different contents. 2) In the comparison analysis of the usefulness tools it was turned out that SEVPERF model is more appropriate than SERVQUAL model. And in the analysis to identify the construct validity of the tool, it is turned out that the relationship between the constructing factors of the tool and the general satisfaction is significant.

• Steel and Composite Structures
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• v.26 no.2
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• pp.197-211
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• 2018

The study presents the earthquake performance of the Bosphorus Bridge under multi-point earthquake excitation considering the spatially varying site-specific earthquake motions. The elaborate FE model of the bridge is firstly established depending on the new considerations of the used FEM software specifications, such as cable-sag effect, rigid link and gap elements. The modal analysis showed that singular modes of the deck and the tower were relatively effective in the dynamic behavior of the bridge due to higher total mass participation mass ratio of 80%. The parameters and requirements to be considered in simulation process are determined to generate the spatially varying site-specific ground motions. Total number of twelve simulated ground motions are defined for the multi-support earthquake analysis (Mp-sup). In order to easily implement multi-point earthquake excitation to the bridge, the practice-oriented procedure is summarized. The results demonstrated that the Mp-sup led to high increase in sectional forces of the critical components of the bridge, especially tower base section and tensile force of the main and back stay cables. A close relationship between the dynamic response and the behavior of the bridge under the Mp-sup was also obtained. Consequently, the outcomes from this study underscored the importance of the utilization of the multi-point earthquake analysis and the necessity of considering specifically generated earthquake motions for suspension bridges.

• Journal of Agricultural Extension & Community Development
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• v.22 no.2
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• pp.191-203
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• 2015

The purposes of this study are to explain the background and significance of the 'Farmers' upstairs'(農民上樓) phenomenon which has been currently promoted as part of the "New Socialist Countryside Construction" in contemporary China, and its positive and negative aspects, and analyze the limitations of 'Farmers' upstairs'phenomenon. 'Farmers' upstairs'means the building of concentrated farmhouses by means of reconstruction of scattered farmhouses here and there, simultaneously by installing cultural, social welfare, and environmental facilities where rural farmer also could enjoy the convenience of urban living. It brings, however, the positive effects such as the improvement of living conditions of rural farmers, the simultaneously expanding of urban construction land and agricultural land, and the new influx of population from urban areas, whiles the negative effectives such as the forced demolition of farmhouses by governments or real estate developers with very lower compensation costs for the demolition of farmhouses, the gap from the standard of living, and above all, the inconvenience caused by the living in a multi-stories building in the rural villages. As a result, it is pointed out that the ongoing 'Farmers' upstairs', promoted as a kind of rural movement beyond a phenomenon, has similarities with the Rural Cooperative Movement(農村合作化運動) of Mao Zedong era(1953-61), namely the People's Commune Movement(人民公社運動) finally failed.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.191.2-191.2
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• 2015

Details of carrier dynamics in self-assembled quantum dots (QDs) with a particular attention to nonradiative processes are not only interesting for fundamental physics, but it is also relevant to performance of optoelectronic devices and the exploitation of nanocrystals in practical applications. In general, the possible processes in such systems can be considered as radiative relaxation, carrier transfer between dots of different dimensions, Auger nonradiactive scattering, thermal escape from the dot, and trapping in surface and/or defects states. Authors of recent studies have proposed a mechanism for the carrier dynamics of time-resolved photoluminescence CdTe (a type II-VI QDs) systems. This mechanism involves the activation of phonons mediated by electron-phonon interactions. Confinement of both electrons and holes is strongly dependent on the thermal escape process, which can include multi-longitudinal optical phonon absorption resulting from carriers trapped in QD surface defects. Furthermore, the discrete quantized energies in the QD density of states (1S, 2S, 1P, etc.) arise mainly from ${\delta}$-functions in the QDs, which are related to different orbitals. Multiple discrete transitions between well separated energy states may play a critical role in carrier dynamics at low temperature when the thermal escape processes is not available. The decay time in QD structures slightly increases with temperature due to the redistribution of the QDs into discrete levels. Among II-VI QDs, wide-gap CdZnTe QD structures characterized by large excitonic binding energies are of great interest because of their potential use in optoelectronic devices that operate in the green spectral range. Furthermore, CdZnTe layers have emerged as excellent candidates for possible fabrication of ferroelectric non-volatile flash memory. In this study, we investigated the optical properties of CdZnTe/ZnTe QDs on Si substrate grown using molecular beam epitaxy. Time-resolved and temperature-dependent PL measurements were carried out in order to investigate the temperature-dependent carrier dynamics and the activation energy of CdZnTe/ZnTe QDs on Si substrate.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.5
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• pp.150-156
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• 2009

The removal of tiny particles adhered to surfaces is one of the crucial prerequisite for a further increase in IC fabrication, large area displays and for the process in nanotechnology. Various cleaning techniques (wet chemical cleaning, scrubbing, pressurized jets and ultrasonic processes) currently used to clean critical surfaces are limited to removal of micrometer-sized particles. Therefore the removal of sub-micron sized particles from silicon wafers is of great interest. For this purpose various cleaning methods are currently under investigation. In this paper, we report on experiments on the cleaning effect of 100nm sized fluorescence particles on silicon wafer using the plasma shockwave occurred by femtosecond laser. The plasma shockwave is main effect of femtosecond laser cleaning to remove particles. The removal efficiency was dependent on the gap distance between laser focus and surface but in some case surface was damaged by excessive laser intensity. These experiments demonstrate the feasibility of femtosecond laser cleaning using 100nm size fluorescence particles on wafer.

• Tunnel and Underground Space
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• v.15 no.1 s.54
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• pp.39-46
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• 2005

The RMR ratings, one by horizontal pre-boring in a tunnel and another by tunnel face mapping, are compared at the fault zone in a tunnel. Generally. the horizontal pre-borings were so effective as to forecast reasonably the supporting patterns after tunnel excavation. But the maximum difference in RMR ratings estimated by two methods was about 50 at a certain section of a tunnel. The differences were analyzed on each parameter of the RMR system: the rating differences were 24 in the condition of discontinuities, 15 in the RQD and 13 in the uniaxial compressive strength of rock. To minimize the gap between RMR by pre-borings and by face mappings, it is necessary to select the horizontal pre-boring location where tunnel stability could be critical and to evaluate in detail the sub-parameters of the condition of discontinuities.

• Journal of the Korean Vacuum Society
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• v.20 no.5
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• pp.322-326
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• 2011

Etch process of silicon dioxide layer by using capacitively coupled plasma (CCP) is currently being used to manufacture semiconductor devices with nano-scale feature size below 50 nm. In typical CCP plasma etcher system, plasmas are generated by applying the RF power on upper electrode and ion bombardment energy is controlled by applying RF power to the bottom electrode with the Si wafer. In this case, however, etch results often drift due to heating of the electrode during etching process. Therefore, controlling the temperature of the upper electrode is required to obtain improvement of etch repeatability. In this work, we report repeatability improvement during the silicon dioxide etching under extreme process conditions with very high RF power and close gap between upper and bottom electrodes. Under this severe etch condition, it is difficult to obtain reproducible oxide etch results due to drifts in etch rate, critical dimension, profile, and selectivity caused by unexpected problems in the upper electrode. It was found that reproducible etch results of silicon dioxide layer could be obtained by controlling temperature of the upper electrode. Methods of controlling the upper electrode and the correlation with etch repeatability will be discussed in detail.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.226-226
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• 2013

Si is a dominant solar material, which is the second most abundant element in the earth giving a benefit in the aspect in cost with low toxicity. However, the inherent limit of Si has an indirect band gap of 1.1 eV resulting in the limited optical absorption. Therefore, a critical issue has been raised to increase the utilization of the incident light into the Si absorber. The enhancement of light absorption is a crucial to improve the performances and thus relieves the cost burden of Si photovoltaics. For the optical aspect, an efficient design of a front surface, where the incident light comes in, has been intensively investigated to improve the performance of photon absorption. Lambertian light trapping can be attained when the light active surface is ideally rough to increase the optical length by about 50 compared to a planar substrate. This suggests that an efficient design may reduce thickness of the Si absorber from the conventional 100~300 ${\mu}m$ to less than 3 ${\mu}m$. Theoretically, a hole-array structure satisfies an equivalent efficiency of c-Si with only one-twelfth mass and one-sixth thickness. Various approaches have been applied to improve the incident light utilization in a Si absorber using textured structures, periodic gratings, photonic crystals, and nanorod arrays. We have designed hole and pillar structured Si absorbers. Four-different Si absorbers have been simultaneously fabricated on an identical Si wafer with hole arrays or pillar arrays at a fixed depth of 2 ${\mu}m$. We have found that the significant enhanced solar cell performances both for the hole arrayed and pillar arrayed Si absorbers compared to that of a planar Si wafer resulting from the effective improvement in the quantum efficiencies.