• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.565-566
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• 2006

Slurry used in metal chemical mechanical polishing normally consists of an oxidizer, a complexing agent, a corrosion inhibitor and an abrasive. This paper investigates effects of citric acid as a complexing agent for Cu CMP with $H_2O_2$ as an oxidizer. In order to study chemical effects of a citric acid, x-ray photoelectron spectroscopy were performed on Cu sample after Cu etching test. XPS results reveal that CuO, $Cu(OH)_2$ layer decrease but Cu/$Cu_2O$ layer increase on Cu sample surface. To investigate nanomechanical properties of Cu sample surface, nanoindentation was performed on Cu sample. Results of nanoindentation indicate wear resistance of Cu Surface decrease. According to decrease of wear resistance on Cu surface, removal rate increases from $285\;{\AA}/min$ to $8645\;{\AA}/min$ in Cu CMP.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.448-448
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• 2010

Magnetic random access memory (MRAM) has made a prominent progress in memory performance and has brought a bright prospect for the next generation nonvolatile memory technologies due to its excellent advantages. Dry etching process of magnetic thin films is one of the important issues for the magnetic devices such as magnetic tunneling junctions (MTJs) based MRAM. CoFeB is a well-known soft ferromagnetic material, of particular interest for magnetic tunnel junctions (MTJs) and other devices based on tunneling magneto-resistance (TMR), such as spin-transfer-torque MRAM. One particular example is the CoFeB - MgO - CoFeB system, which has already been integrated in MRAM. In all of these applications, knowledge of control over the etching properties of CoFeB is crucial. Recently, transferring the pattern by using milling is a commonly used, although the redeposition of back-sputtered etch products on the sidewalls and the low etch rate of this method are main disadvantages. So the other method which has reported about much higher etch rates of >$50{\AA}/s$ for magnetic multi-layer structures using $Cl_2$/Ar plasmas is proposed. However, the chlorinated etch residues on the sidewalls of the etched features tend to severely corrode the magnetic material. Besides avoiding corrosion, during etching facets format the sidewalls of the mask due to physical sputtering of the mask material. Therefore, in this work, magnetic material such as CoFeB was etched in an ICP etching system using the gases which can be expected to form volatile metallo-organic compounds. As the gases, carbon monoxide (CO) and ammonia ($NH_3$) were used as etching gases to form carbonyl volatiles, and the etched features of CoFeB thin films under by Ta masking material were observed with electron microscopy to confirm etched resolution. And the etch conditions such as bias power, gas combination flow, process pressure, and source power were varied to find out and control the properties of magnetic layer during the process.

• Journal of the Architectural Institute of Korea Structure & Construction
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• v.35 no.12
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• pp.149-156
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• 2019

Recently, skyscraper building and apartment fires, which were rapidly spread out from a low floor to a rooftop, have become a frequent occurrence in mass media. This fire problems have a fatal disadvantage that the exterior wall finish of the building emits toxic gas in case of fire by using dry bit method or organic insulating material. Therefore, in order to remedy these problems, many exterior wall finishing construction methods have been proposed, but the current trend is to use existing construction methods due to problems such as economy, weight, and durability. On the other hand, in countries such as Germany and Japan, ceramic sidings are used as exterior finishing material for buildings, which is environmentally friendly, excellent natural beauty, long life, easy maintenance and high-quality exterior materials. However, those ceramic sidings have still the problems such as manufacturing cost and weight problem because of boosting the sintering temperature up to 1,350℃ or more. Also, conventional CRC, MgO, FRP sidings which are composed of pulp, glass fiber and organic materials, have been reports of deformation due to ultraviolet rays, discoloration, corrosion and scattering, surface rupture, lifting and peeling. Therefore, in this study as an alternative to solve this problem, halosite nano kaolin produced in Sancheong in Korea and frit flux were used to satisfy the required properties as ceramic siding using low temperature sintering (below 1,000℃) and lightweight materials such as pearlite. This study aims to design the optimal formulation and process of materials and to study the characteristics of nano-coated ceramic siding material development and to present relevant basic data. The findings show that ceramic siding for nanocoated building materials is excellent as a natural ceramic siding building material. The fire resistance of natural minerals and nano particle refining technology satisfy the bending strength of 80kgf / cm2, the volume ratio of 2.0 and the absorption rate of less than 10.0%.

• Composites Research
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• v.35 no.3
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• pp.161-174
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• 2022

SiC fiber-reinforced SiC matrix composite is a promising accident-tolerant fuel cladding material to improve the safety of light water nuclear reactors. Compared to the current zirconium alloy fuel cladding as well as metallic accident-tolerant fuel cladding, SiC composite fuel cladding has exceptional accident-tolerance such as excellent structural integrity and extremely low corrosion rate during severe accident of light water nuclear reactors, which reduces reactor core temperature and delays core degradation processes. In this paper, we introduce the concept, technical issues, and properties of SiC composite accident-tolerant fuel cladding during operation and accident scenarios of light water nuclear reactors.

• Nuclear Engineering and Technology
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• v.54 no.9
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• pp.3272-3282
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• 2022

To improve the safety and life extension qualities of nuclear fuel rods which is currently made of zirconium (Zr) alloy, research on the application of chromium (Cr) coating was conducted. Cr coating has advantages such as increased corrosion resistance and reduced oxidation rate, but non-destructive thickness evaluation studies are needed to ensure the reliability of the steps taken to provide uniform coating thickness. Eddy current testing (ECT) is a representative non-destructive technique for such as thickness evaluation and surface defect inspection. To inspect changes in thickness at micron scale, the Swept Frequency Eddy Current Testing (SFECT) method was applied to select a frequency range sensitive to changes in thickness. The coating thickness was evaluated using changes in signals, such as that for impedance. In this study, basic research was performed to evaluate the thickness of the Cr coating on a rod using an encircling sensor and the SFECT technique. The sensor design parameters were determined through simulation, after which the new sensor was manufactured. A sensor capable of measuring the thickness of a non-uniformly Cr-coating rod was selected through an experiment evaluating the performance of the manufactured sensor. This was done using the impedance-difference of a Cr-coating rod and a Zr alloy rod. The possibility of evaluation of the Cr coating thickness was confirmed by comparing the experimental results with the selected sensor and the signals of the measured Cr-coating rod. All simulation results were verified experimentally.

• Structural Engineering and Mechanics
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• v.81 no.5
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• pp.565-574
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• 2022

The infrastructures such as offshore, bridges, power plant, oil and gas piping and aircraft operate in a harsh environment during their service life. Structural integrity of engineering components used in these industries is paramount for the reliability and economics of operation. Two regression models based on the concept of Gaussian process regression (GPR) and Minimax probability machine regression (MPMR) were developed to predict stress intensity factor range (𝚫K). Both GPR and MPMR are in the frame work of probability distribution. Models were developed by using the fatigue crack growth data in MATLAB by appropriately modifying the tools. Fatigue crack growth experiments were carried out on Eccentrically-loaded Single Edge notch Tension (ESE(T)) specimens made of API 5L X65 Grade steel in inert and corrosive environments (2.0% and 3.5% NaCl). The experiments were carried out under constant amplitude cyclic loading with a stress ratio of 0.1 and 5.0 Hz frequency (inert environment), 0.5 Hz frequency (corrosive environment). Crack growth rate (da/dN) and stress intensity factor range (𝚫K) values were evaluated at incremental values of loading cycle and crack length. About 70 to 75% of the data has been used for training and the remaining for validation of the models. It is observed that the predicted SIF range is in good agreement with the corresponding experimental observations. Further, the performance of the models was assessed with several statistical parameters, namely, Root Mean Square Error (RMSE), Mean Absolute Error (MAE), Coefficient of Efficiency (E), Root Mean Square Error to Observation's Standard Deviation Ratio (RSR), Normalized Mean Bias Error (NMBE), Performance Index (ρ) and Variance Account Factor (VAF).

• KSCE Journal of Civil and Environmental Engineering Research
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• v.26 no.4A
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• pp.639-645
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• 2006

FRP (Fiber Reinforced Polymer) is an excellent new constructional material in resistibility to corrosion, high intensity, resistibility to fatigue, and plasticity. FBG (Fiber Bragg Grating) sensor is widely used at present as a smart sensor due to lots of advantages such as electric resistance, small-sized material, and high durability. However, with insufficiency of measuring displacement, FBG sensor is used only as a sensor measuring physical properties like strain or temperature. In this study, FRP and FBG sensors are to be hybridized, which could lead to the development of a smart FRP rod. Moreover, developing the estimated model for deflection with neural network method, with the data measured through FBG sensor, could make conquest of a disadvantage of FBG sensor - uniquely used for sensing strain. Artificial neural network is MLP (Multi-layer perceptron), trained within error rate of 0.001. Nonlinear object function and back-propagation algorithm is applied to training and this model is verified with the measured axial displacement through UTM and the estimated numerical values.

• Plant Journal
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• v.18 no.4
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• pp.58-65
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• 2023

In this study, to increase the methane content of biogas supplied from Nanji Water Regeneration Center and to purify impurities, a three-stage membrane purification process was designed and installed to demonstrate operation. The methane concentration of biomethane produced in the 2 Nm3/h purification process was set to three cases: 95%, 96.5%, and 98%, and the membrane area ratio of the membrane was 1:1, 1:2, 1:1:1, The optimum conditions for the membrane area of the separator were derived by changing to five of 1:2:1 and 1:2:2. 3 stage separation membrane process of 30 Nm3/h was installed to reflect the optimum condition of 2 Nm3/h, and biomethane production of 98% or more of methane concentration was demonstrated. As a result of the operation of the 2 Nm³/h refining device, the methane recovery rate at the 98% methane concentration was 95.6% when the membrane area ratio was 1:1 as the result of the two-stage operation of the separator, and the recovery rate of methane at 1:2 was increased to 96.8%. The methane recovery rate of the membrane three-stage operation was highest at 96.8% when the membrane area ratio was operated at 1:2:1. The carbon dioxide removal rate was 16.4 to 96.4% and the 2:2 to 95.7% film area ratio in the two-step process. In the three-step process, the film area ratio was 1:2:1 to 95.4%, and the two-step process showed higher results than the three-step process. In the 30 Nm3/h scale biogas purification demonstration operation, the methane concentration after purification was 98%, the recovery rate of methane was 97.1%, the removal rate of carbon dioxide was 95.7%, and hydrogen sulfide, the cause of corrosion, was not detected, and the membrane area ratio was 1:2:1 demonstration operation, biomethane production with a methane concentration of 98% or higher was possible.

• Korean Journal of Soil Science and Fertilizer
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• v.45 no.2
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• pp.287-292
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• 2012

This study was to build the database by collecting the results of legal leak test and self-test conducted by the owners of soil contamination facilities at soil-related specialized agency to grip objective status on soil contamination facilities and evaluate classification results. The results of the study showed that the unsuitable rate of business unit is 53.6%, the business with leak that could cause actual pollution is 25.7%, the unsuitable rate of the voluntary self-test is 57.3%, that of the compulsory inspection is 17.2% depending on the test motivation, that of the direct-test is 58.9%, and that of the indirect-test is 22.5% depending on the test methods. There was a significant difference between the test motivation conducted and the test methods applied. From the results of the unsuitable reasons obtained we could assume that about 20% of the whole target tanks became potential sources with natural defects occurred when such tanks were made, and 2.2% of the whole tankers examined that persisting period was caused by progressing corrosion below the minimum thickness.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.30 no.2
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• pp.66-72
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• 2020

The difference of plasma resistance between the CAS glass bulk and coating films were compared. Plasma resistance was confirmed by analyzing the etch rate and the microstructure of the surface when the CAS glass bulk and the glass coating film were etched with CF₄/O₂/Ar plasma gas. CAS glass coating film was etched up to 25 times faster than the glass bulk. A statistically high correlation between the surface roughness and the etching rate of the coating film was derived, and thus, the high surface roughness of the coating film was determined to cause rapid etching. In addition, cristobalite crystals that has a low Ca content and a high Si content, was foamed on the glass coating film. Therefore, the CAS glass coating film is considered to have low plasma resistance compared to the glass bulk.