Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching
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Na, Hyein
(Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology)
Park, Jewon (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) Park, Jae-Hyuk (IONES. Co. Ltd.) Kim, Dae-Gun (IONES. Co. Ltd.) Choi, Sung-Churl (Division of Materials Science and Engineering Hanyang University) Kim, Hyeong-Jun (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) |
1 |
T. Nam, H. Lee, T. Choi, S. Seo, C.M. Yoon, Y. Choi, H. Jeong, H.K. Lingam, V.R. Chitturi, A. Korolev, J.H. Ahn and H. Kim, "Low-temperature, high-growth-rate ALD of |
2 | R. Pierron, S. Lecler, J. Zelgowski, P. Pfeiffer and F. Mermet, "Etching of semiconductors and metals by the Photonic Jet with shaped optical fiber tips", Appl. Surf. Sci. 418 (2017) 452. DOI |
3 |
K.C. Yang, Y.J. Shin, H.W. Tak, W. Lee, S.B. Lee and G.Y. Yeom, "Effects of superimposed dual-frequency (13.56/2 MHz) inductively coupled plasma source on the uniformity of |
4 |
S.J. Park, J.K. Lee, Y.S. Oh, S. Kim, H. Kim and S. Lee, "The effects of water addition on the color and crystalline phase of |
5 |
J.K. Lee, S.J. Park, S. Kim, H. Kim and S.M. Lee, "Fragmentation behavior of |
6 |
J.H. Choi, H. Na, J. Park and H.J. Kim, "Plasma corrosion resistance of aluminosilicate glasses containing Ca, Y and B under fluorocarbon plasma with |
7 |
J.H. Choi, H.B. Park, H. Na and H.J. Kim, "Plasma corrosion resistance of |
8 |
H. Na, J. Park, S.C. Choi and H.J. Kim, "The Effect of composition of Plasma Resistance of |
9 |
H. Na, J. Park, S.C. Choi and H.J. Kim, "A study of sintering behavior of spray coating in |
10 | S. Satsuka, T. Sakaino and K. Takahashi, "Glass handbook", ed. 3 (Asakura Shoten, Tokyo, 1975) p. 888. |
11 | Y. Masayuki, "For the first time to make glass", Ceramics Basic Lecture/Tokyo Institute of Technology School of Engineering, Department of Inorganic Materials Engineering, ed. 4 (Uchida Old Crane Field, Tokyo, 1991). |
12 | G.H. Hwang, H.J. Jeon and Y.S. Kim, "Physical properties of barrier ribs of plasma display panels: 1, Formation of pores during sintering of lead borosilicate glass frits", J. Am. Ceram. Soc. 85 (2002) 2956. DOI |
13 | K.H. Jun, "Study on the bloating mechanism for artificial lightweight aggregate of surface reforming", Department of Material Science & Engineering Graduate School Kyonggi University (2012). |
14 | A. Karamanov and M. Pelino, "Sinter-crystallisation in the diopside-albite system Part I. Formation of induced crystallisation porosity", J. Eu. Ceram. Soc. 26 (2006) 2511. DOI |
15 |
E.D. Zanotto and A. Galhardi, "Experimental test of the general theory of transformation kinetics: Homogeneous nucleation in a |
16 | M.O. Prado and E.D. Zanotto, "Glass sintering with concurrent crystallization", C. R. Chimie 5 (2002) 773. DOI |
17 | E.M. Rabinovich, "Preparation of glass by sintering", J. Mate. Sci. 20 (1985) 4259. DOI |
18 |
J.B. Parise, A.Y. Haeri, D.J. Weidner, J.D. Jorgensen and M.A. Saltzberg, "Pressure-induced phase transition and pressure dependence of crystal structure in low ( |
19 | S.H. Abd E Rahim, A.A. Melegy and E.M.A. Hamzawy, "Wollastonite-pseudoollastonite from silica fume, limestone and glass cullet composite", Inter Ceram (2017) 232. |
20 |
F. Pei, "Influence of low magnesia content on the |
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