Structural, Optical, and Electrical Properties of IGZO Thin Film Sputtered with Various RF Powers (RF 파워 변화에 따른 IGZO 박막의 구조적, 광학적, 전기적 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.28 no.10
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- pp.620-624
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- 2015