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CFD Study for the Design of Coolant Path in Cryogenic Etch Chuck

  • Jo, Soo Hyun;Han, Ji Hee;Kim, Jong Oh;Han, Hwi;Hong, Sang Jeen
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.2
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    • pp.92-97
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    • 2021
  • The importance of processes in cryogenic environments is increasing in a way to address problems such as critical dimension (CD) narrow and bottlenecks in micro-processing. Accordingly, in this paper, we proceed with the design and analysis of Electrostatic Chuck(ESC) and Coolant in cryogenic environments, and present optimal model conditions to provide the temperature distribution analysis of ESC in these environments and the appropriate optimal design. The wafer temperature uniformity was selected as the reference model that the operating conditions of the refrigerant of the liquid nitrogen in the doubled aluminum path were excellent. Design of simulation (DOS) was carried out based on the wheel settings within the selected reference model and the classification of three mass flow and diameter case, respectively. The comparison between factors with p-value less than 0.05 indicates that the optimal design point is when five turns of coolant have a flow rate of 0.3 kg/s and a diameter of 12 mm. ANOVA determines the interactions between the above factor, indicating that mass flow is the most significant among the parameters of interests. In variable selection procedure, Case 2 was also determined to be superior through the two-Sample T-Test of the mean and variance values by dividing five coolant wheels into two (Case 1 : 2+3, Case 2: 3+2). Finally, heat transfer analysis processes such as final difference method (FDM) and heat transfer were also performed to demonstrate the feasibility and adequacy of the analysis process.

Study on flow characteristics in LBE-cooled main coolant pump under positive rotating condition

  • Lu, Yonggang;Wang, Zhengwei;Zhu, Rongsheng;Wang, Xiuli;Long, Yun
    • Nuclear Engineering and Technology
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    • v.54 no.7
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    • pp.2720-2727
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    • 2022
  • The Generation IV Lead-cooled fast reactor (LFR) take the liquid lead or lead-bismuth eutectic alloy (LBE) as the coolant of the primary cooling circuit. Combined with the natural characteristics of lead alloy and the design features of LFR, the system is the simplest and the number of equipment is the least, which reflects the inherent safety characteristics of LFR. The nuclear main coolant pump (MCP) is the only power component and the only rotating component in the primary circuit of the reactor, so the various operating characteristics of the MCP are directly related to the safety of the nuclear reactor. In this paper, various working conditions that may occur in the normal rotation (positive rotating) of the MCP and the corresponding internal flow characteristics are analyzed and studied, including the normal pump condition, the positive-flow braking condition and the negative-flow braking condition. Since the corrosiveness of LBE is proportional to the fluid velocity, the distribution of flow velocity in the pump channel will be the focus of this study. It is found that under the normal pump condition and positive-flow braking conditions, the high velocity region of the impeller domain appears at the inlet and outlet of the blade. At the same radius, the pressure surface is lower than the back surface, and with the increase of flow rate, the flow separation phenomenon is obvious, and the turbulent kinetic energy distribution in impeller and diffuser domain shows obvious near-wall property. Under the negative-flow braking condition, there is obvious flow separation in the impeller channel.

Calculation of Required Coolant Flow Rate for Photovoltaic-thermal Module Using Standard Meteorological Data and Thermal Analysis (표준기상 데이터와 열해석을 이용한 태양광열 모듈의 필요 냉각수량 산출)

  • Lee, Cheonkyu;Jeong, Hyo Jae
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.18-22
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    • 2022
  • Photovoltaics (PV) power generation efficiency is affected by meteorological factors such as temperature and wind speed. In general, it is known that the power generation amount decreases because photovoltaics panel temperature rises and the power generation efficiency decreases in summer. Photovoltaics Thermal (PVT) power generation has the ad-vantage of being able to produce heat together with power, as well as preventing the reduction in power generation efficien-cy and output due to the temperature rise of the panel. In this study, the amount of heat collected by season and time was calculated for photovoltaics thermal modules using the International Weather for Energy Calculations (IWEC) data provided by the American Society of Heating, Refrigerating and Air-Conditioning Engineers (ASHRAE). Based on this, we propose a method of predicting the temperature of the photovoltaics panel using thermal analysis and then calculating the flow rate of coolant to improve power generation efficiency. As the results, the photovoltaics efficiencies versus time on January, April, July, and October in Jeju of the Republic of Korea were calculated to the range of 15.06% to 17.83%, and the maxi-mum cooling load and flow rate for the photovoltaics thermal module were calculated to 121.16 W and 45 cc/min, respec-tively. Though this study, it could be concluded that the photovoltaics thermal system can be composed of up to 53 modules with targeting the Jeju, since the maximum capacity of the coolant circulation pump of the photovoltaics thermal system applied in this study is 2,400 cc/min.

An Experimental Study on the Performance of Fin-Tube Heat Exchanger under Frosting Condition (착상조건하에서 핀-관 열교환기 성능에 관한 실험적 연구)

  • Lee, K.S.;Pak, H.Y.;Lee, T.H.;Lee, N.G.;Lee, S.Y.;Lee, M.R.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.7 no.2
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    • pp.319-328
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    • 1995
  • In this study, the experiment with 2rows-2columns fin-tube heat exchanger under forced convection and frosting condition is performed. The influence of each operating condition(the temperature of air, the humidity of air, the velocity of air, the temperature of coolant) on the growth of frost layer, air-side pressure drop, and characteristics of heat transfer is investigated. The experimental results show that the frost thickness increases rapidly in the early stage of frost formation and increases linearly after sometime. The frost thickness increases with the increase of the inlet air humidity and velocity and the decrease of inlet air temperature and coolant temperature. It is also found that the total energy transfer rate increases with the increase of inlet air temperature and velocity and with the decrease of inlet air humidity and coolant temperature.

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Evaluation of Piping Failure Probability of Reactor Coolant System in Kori Unit 1 Considering Stress Corrosion Cracking (응력부식균열을 고려한 고리 1호기 원자로냉각재계통의 배관 파손확률 평가)

  • Park, Jeong Soon;Choi, Young Hwan;Park, Jae Hak
    • Transactions of the Korean Society of Pressure Vessels and Piping
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    • v.6 no.1
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    • pp.43-49
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    • 2010
  • The piping failure probability of the reactor coolant system in Kori unit 1 was evaluated considering stress corrosion cracking. The P-PIE program (Probabilistic Piping Integrity Evaluation Program) developed in this study was used in the analysis. The effect of some variables such as oxygen concentration during start up and steady state operation, and operating temperature, which are related with stress corrosion cracking, on the piping failure probabilities was investigated. The effects of leak detection capability, the size of big leak, piping loops, and reactor types on the piping failure probability were also investigated. The results show that (1) LOCA (loss of coolant accident) probability of Kori unit 1 is extremely low, (2) leak probability is sensitive to oxygen concentration during steady state operation and operating temperature, while not sensitive to the oxygen concentration during start up, and (3) the piping thickness and operating temperature play important roles in the leak probabilities of the cold leg in 4 reactor types having same inner diameter.

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Analysis for the Behavior of Thermal Stratification in Safety Injection Piping of Nuclear Power Plant (원전 안전주입배관에서의 열성층 유동해석)

  • Park, M.H.;Kim, K.K.;Youm, H.K.;Kim, T.Y.;Lee, S.K.;Kim, K.H.
    • Proceedings of the KSME Conference
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    • 2001.06d
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    • pp.110-114
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    • 2001
  • A numerical analysis has been perfonned to estimate the effect of turbulent penetration and thermal stratified flow in the branch lines piping. This phenomenon of thermal stratification are usually observed in the piping lines of the safety related systems and may be identified as the source of fatigue in the piping system due to the thermal stress loading which are associated with plant operating modes. The turbulent penetration length reaches to $1^{st}$ valve in safety injection piping from reactor coolant system (RCS) at normal operation for nuclear power plant when a coolant does not leak out through valve. At the time, therefore, the thermal stratification does not appear in the piping between RCS piping and $1^{st}$ valve of safety injection piping. When a coolant leak out through the $1^{st}$ valve by any damage, however, the thermal stratification can occur in the safety injection piping. At that time, the maximum temperature difference of fluid between top and bottom in the piping is estimated about $50^{\circ}C$.

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Effects of Port Fuel Injection Characteristics upon HC Emission in SI Engines (연료 분사 특성이 가솔린 엔진 HC 배출특성에 미치는 영향)

  • Woo, Young-Min;Bae, Choong-Sik;Lee, Yong-Pyo
    • Proceedings of the KSME Conference
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    • 2001.06d
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    • pp.796-801
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    • 2001
  • During cold operation period, fuel injection system directly contributes the unburned hydrocarbon formation in spark ignition engines. The relationship between injection parameters and HC emission behavior was investigated through a series of experiments. Spray behavior of port fuel injectors was characterized through a quantitative evaluation of mass concentration of liquid fuel by a patternator and PDA. 6-hole injector was found to produce finer spray than single hole one. Using a purpose-built test rig, the wall wetting fuel was measured, which was mostly affected by wall temperature. Varying coolant temperature($20{\sim}80^{\circ}C$), HC emissions were measured in a production engine. With respect to the different types of injectors, HC emission was also measured. In the 6-hole injector application, the engine produced less HC emission in low coolant temperature region. Though it produces much more amount of wetting fuel, it has the advantages of finer atomization quality. In high coolant temperature region, there was little effect between different types of injectors. The control schemes to reduce HC emissions during cold start could be suggested from the findings that the amount of fuel supply and HC emission could be reduced by utilizing fine spray and high intake wall temperature.

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Thermal Behavior Analysis on the Cylinder Block of an Automotive Gasoline Engine (자동차용 가솔린 기관의 실린더 블록에 대한 열적 거동 해석)

  • 손병진;김창헌
    • Transactions of the Korean Society of Automotive Engineers
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    • v.6 no.5
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    • pp.211-221
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    • 1998
  • Thermal behavior on the cylinder block of a 4-cylinder, 4-stroke 2.0L SOHC gasoline engine was numerically and experimentally analyzed. The numerical calculation was performed using the finite element method. The cylinder block was modelled as a three dimensional finite element by considering its geometry. The physical domain was devided into hexahedron elements. 16 thermocouples were installed at points of 2mm inside from cylinder wall near top ring of piston in cylinder block, which points have suffered major thermal loads and suggested as proper measurement points for engine design by industrial engineers. Under full load and 9$0^{\circ}C$ coolant temperature condition, temperature behavior of cylinder block according to engine speed were analyzed. The results showed that temperature rose gradually to conform to a function of 2nd~4th order of engine speed at intake side, exhaust and siamese side, respectively. As engine load was changed from 100 to 50% by 25% step, temperature curve also conformed to 2nd~7th order function of engine speed. Temperature differences by load condition were similar among 100, 75% and 50%. Under full load and coolant temperature of 11$0^{\circ}C$, temperature behavior were also analyzed and the result also showed conformance to 2n d~7th order function of engine speed. Temperature curve was transferred in parallel upwards corresponding coolant temperature rise.

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A Preliminary Analysis of Large Loss-of-Coolant Induced by Emergency Core Coolant Pipe Break in CANDU-600 Nuclear Power Plant

  • Ion, Robert-Aurelian;Cho, Yong-Jin;Kim, In-Goo;Kim, Kyun-Tae;Lee, Jong-In
    • Proceedings of the Korean Nuclear Society Conference
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    • 1996.05b
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    • pp.435-440
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    • 1996
  • Large Loss-of-Coolant Accidents analyzed in Final Safety Analysis Reports are usually covered by Reactor Inlet Header. Reactor Outlet Header and Primary Pump Suction breaks as representative cases. In this study we analyze the total (guillotine) break of an Emergency Core Cooling System (ECCS) pipe located at the ECCS injection point into the Primary Heat Transport System (PHTS). It was expected that thermal-hydraulic behaviors in the PHT and ECC systems are different from those of a Reactor Inlet Header break, having an equivalent break size. The main purpose of this study is to get insights on the differences occurred between the two cases and to assess these differences from the phenomenon behavior point of view. It was also investigated whether the ECCS line break analysis results could be covered by header break analysis results. The study reveals that as the intact loop has almost the same behavior in both analyzed cases. broken loop behavior is different mostly regarding sheath temperature in the critical core pass and pressure decrease in the broken Reactor Inlet Header. Differences are also met in the ECCS behavior and in event sequences timings.

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Design of a Heat Release System for Fuel Cell Vehicles (연료전지 자동차 열방출 시스템의 설계)

  • Kim, Sung-Chul;Park, Min-Su;Jung, Seung-Hun;Yoon, Seok-Ho;Kim, Min-Soo
    • 한국신재생에너지학회:학술대회논문집
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    • 2005.11a
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    • pp.545-548
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    • 2005
  • There is a close relation between the heat generation in the fuel cell stack and the fuel cell performance. In PEM fuel Gell vehicles, the stack coolant temperature is about $65^{\circ}C$, which is far lower than that for general automobile engine. Therefore, it is hard to release heat generated in the stack by using a radiator of limited size because of the reduced temperature difference between the coolant and the ambient air. In this study, indirect stack cooling system using $CO_2$ heat pump was designed and its stack cooling performance in releasing heat to the ambient was investigated. This work focuses on a series of processes that grasp the relation among the fuel cell power, the radiator capacity and the stack temperature. The purpose of this work is to find out a way to properly release sufficient amount of heat through the finite sized radiator, so that the stack power general ion can not be deteriorated due to the stack temperature increase. The optimization between the compressor power consumption and the fuel cel1 output power can be carried out to maximize the performance of fuel cell system.

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