• 제목/요약/키워드: continuous deposition

검색결과 188건 처리시간 0.028초

잉크젯 프린팅을 이용한 유기태양전지용 기능성 잉크의 적층 (Stacking of functional inks for organic solar cell using inkjet printing)

  • 김명기;황준영;이상호;강희석;강경태;김종석;조영준
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2008년도 춘계학술대회 논문집
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    • pp.398-401
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    • 2008
  • Inkjet printing is commonly used in the controlled deposition of solutions of functional materials in specific locations on a substrate, and it can provide easy and fast deposition of polymer films over a large area. which could become a way to manufacturer low cost solar cells. In the present study, inkjet printing technology is adopted to deposit functional layers of PEDOT/PSS solutions and P3HT/PCBM blends for organic solar cell. The results show that merging of separately deposited ink droplets into a continuous, pinhole-free organic thin film could be achieved by a balance between ink property and substrate treatment. As a result, a power conversion efficiency of 2.0% has been accomplished a solar cells applying inkjet technology.

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Remote PECVD (RPECVD) SiO$_2$ 막의 형성 및 특성 (Foramtion and Characterization of SiO$_2$ films made by Remote Plasma Enhanced Chemical vapour Deposition)

  • 유병곤;구진근;임창완;김광호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1994년도 추계학술대회 논문집
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    • pp.171-174
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    • 1994
  • The drive towards ultra-large-scale integrated circuits a continuous intermetal dielectric films for multi layer interconection. Optimum condition of remote plasma enhanced chemical vapour deposition(RPECVD) was achieved by orthogonal array method. Chracteristics of SiO$_2$ films deposited by using remote PECVD with N$_2$O gas were investigated. Etching rate of SiO$_2$ films in P-echant was about 6[A/s] that was the same as the thermal oxide. The films a showed high breakdown voltage of 7(MV/cm) and a resistivity of Bx10$\^$13/[$\Omega$cm] at 7(MV/cm). The interface Trap density of SiO$_2$ has been shown excel lent properties of 5x10$\^$10/[/$\textrm{cm}^2$eV]. It was observed that the dielectric constant dropped to a value of 4. 29 for 150 [W] RF power.

$A1_2O_3-SiO_2$ Dielectric Films from Metal Alkoxides

  • Soh, Deawha;Natalya, Korobova
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2004년도 춘계종합학술대회
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    • pp.687-690
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    • 2004
  • The preparation of A1203-SiO2 thin films from less than one micron to several tens of microns in thickness had been Prepared from metal alkoxide sols. Two methods, dip-withdrawal and electrophoretic deposition, were employed for thin films and sheets formation. The requirements to be satisfied by the solution for preparing uniform and strong films and by the factors affecting thickness and other properties of the films were examined. For the preparation of thin, continuous A12O3-SiO2 films, therefore, metal-organic-derived precursor solutions contained Si and Al in a chemically polymerized form has been developed and produced in a clear liquid state.

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RABiTS 위에 PLD 방법으로 증착된 YBCO 초전도 박막 선재의 제조 (Manufacturing of YBCO coated conductor deposited on RABiTS by pulsed laser deposition method)

  • 고락길;;정준기;하홍수;김호섭;송규정;박찬;문승현;유상임;김영철
    • Progress in Superconductivity
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    • 제6권1호
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    • pp.74-78
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    • 2004
  • YBCO coated conductor is one of the most promising materials as a new generations wire especially for practical power applications. In this work, $YBa_2$$Cu_3$$O_{7}$ -$\delta$/(YBCO) coated conductors (CC) were deposited by pulsed laser deposition (PLD) from buffer layers to superconducting layer on hi-axially textured metal tape. The oxide multilayer buffered substrate of architectures of $CeO_2$/$YSZ/Y_2$$O_3$ was fabricated by PLD at steady status. Then YBCO layer was deposited on RABiTS substrate by stationary and reel-to-reel (R2R) continuous process and we compared with deposition conditions of both processes. The degree of texture of each layer was investigated using X-ray diffraction including $\theta$-2$\theta$ scans, $\omega$-scans and $\Phi$-scans analysis. Their surface morphology was observed by scanning electron microscopy (SEM). The FWHM of the X-ray $\Phi$-scans and $\Phi$-scans indicated that YBCO and buffer layers closely replicate the in-plane and out-of-plane texture of metal tape. Critical current (Ic) at 77 K, self-field of 75.8 A/cm-width, critical temperature (Tc) of 85 K, and critical current density (Ic) of 3.7 MA/$\textrm{cm}^2$ were measured from coated conductor deposited by stationary process. And coated conductor deposited by R2R continuous process had Ic of 57.5 A/cm-width, Tc of 86.5 K and Jc of 2.0 MA/$\textrm{cm}^2$. The film also exhibits a homogeneous and dense surface morphology.

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YBCO Coated Conductors by Continuous PVD Methods

  • Ko, Rock-Kil;Park, Chan;Chung, Jun-Ki;Kim, Ho-Soup;Ha, Hong-Soo;Park, Yu-Mi;Shi, Dong-Qi;Choi, Soo-Jeong;Song, Kyu-Jeong;Moon, Seung-Hyun;Yoo, Sang-Im;Kim, Young-Cheol
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 2004년도 High Temperature Superconductivity Vol.XIV
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    • pp.93-93
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    • 2004
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ZnO:Al,In 박막의 구조적 및 전기적 특성 (Structural and electrical properties of ZnO:Al, In thin film)

  • 박경일;서무룡;홍범표;김정규;전춘배;박기철
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 하계종합학술대회논문집
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    • pp.395-397
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    • 1998
  • NH$_{3}$ gas sensitive ZnO:Al, In thin films were prepared by the heat treatment following continuous deposition of very thin In layer and ZnO:Al layer to obtain the modified surface morphology for good sensitivity. Dependence of the structural electrical and optical properties of them on heat treatment temperature was investigated by x-ray diffraction, SEM, 4-point probe method and spectrophotometer.

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Formation of a MnSixOy barrier with Cu-Mn alloy film deposited using PEALD

  • Moon, Dae-Yong;Hwang, Chang-Mook;Park, Jong-Wan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.229-229
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    • 2010
  • With the scaling down of ultra large integrated circuits (ULSI) to the sub-50 nm technology node, the need for an ultra-thin, continuous and conformal diffusion barrier and Cu seed layer is increasing. However, diffusion barrier and Cu seed layer formation with a physical vapor deposition (PVD) method has become difficult as the technology node is reduced to 30 nm and beyond. Recent work on self-forming barrier processes using PVD Cu alloys have attracted great attention due to the capability of conformal ultra-thin barrier formation using a simple technique. However, as in the case of the conventional barrier and Cu seed layer, PVD of the Cu alloy seed layer will eventually encounter the difficulty in conformal deposition in narrow line trenches and via holes. Atomic layer deposition (ALD) has been known for its good step coverage and precise thickness control, and is a candidate technique for the formation of a thin conformal barrier layer and Cu seed layer. Conformal Cu-Mn seed layers were deposited by plasma enhanced atomic layer deposition (PEALD) at low temperature ($120^{\circ}C$), and the Mn content in the Cu-Mn alloys were controlled form 0 to approximately 10 atomic percent with various Mn precursor feeding times. Resistivity of the Cu-Mn alloy films decreased by annealing due to out-diffusion of Mn atoms. Out-diffused Mn atoms were segregated to the surface of the film and interface between a Cu-Mn alloy and $SiO_2$, resulting in self-formed $MnO_x$ and $MnSi_xO_y$, respectively. No inter-diffusion was observed between Cu and $SiO_2$ after annealing at $500^{\circ}C$ for 12 h, indicating an excellent diffusion barrier property of the $MnSi_xO_y$. The adhesion between Cu and $SiO_2$ was enhanced by the formation of $MnSi_xO_y$. Continuous and conductive Cu-Mn seed layers were deposited with PEALD into 32 nm $SiO_2$ trench, enabling a low temperature process, and the trench was perfectly filled using electrochemical plating (ECD) under conventional conditions. Thus, it is the resultant self-forming barrier process with PEALD Cu-Mn alloy film as a seed layer for plating Cu that has further potential to meet the requirement of the smaller than 30 nm node.

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$CO_2$/NOx-free 50kW 매체순환식 가스연소기 산화-환원 연속반응 실증 (Continuous Operation of $CO_2$/NOx-free 50kW Checmial-Looping Combustor)

  • 류호정;진경태;이창근
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2004년도 제28회 KOSCO SYMPOSIUM 논문집
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    • pp.227-234
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    • 2004
  • For gaseous fuel combustion with inherent $CO_2$ capture and low NOx emission, chemical-looping combustion(CLC) may yield great advantages of savings of energy to $CO_2$ separation and suppressing the effect on environment. In chemical-looping combustor, fuel is oxidized by metal oxide medium (oxygen carrier particle) in a reduction reactor. Reduced particles are transported to oxidation reactor and oxidized by air and recycled to reduction reactor. The fuel and the air are never mixed, and the gases from reduction reactor, $CO_2$ and $H_2O$, leave the system as separate stream. The $H_2O$ can be easily separated by condensation and pure $CO_2$ is obtained without any loss of energy for separation. The purpose of this study is to demonstrate inherent $CO_2$ separation and no NOx emission and to confirm high $CO_2$ selectivity, no side reaction (i.e., carbon deposition, hydrogen generation) by continuous reduction and oxidation experiment in a 50kWtb chemical-looping combustor. NiO/bentonite particle was used as a bed material and $CH_4$ and air were used as reacting gases for reduction and oxidation respectively.

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연속 ECR-CVD 조업하에 RF-magnetron-sputter의 싸이클조업을 통해 PET위에 올려진 구리박막의 특성 (Characteristic of Copper Films on PET Substrate Deposited by Cyclic Operation of RF-magnetron-sputtering Coupled with Continuous Operation of ECR-CVD)

  • 명종윤;전법주;변동진;이중기
    • 한국재료학회지
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    • 제15권7호
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    • pp.465-472
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    • 2005
  • Preparation of copper film on PET substrate was carried out by cyclic operation of RF-magnetron­sputtering under continuous operation of ECR-CVD. The purpose of this study is aimed to an increase in deposition rate with keeping excellent adhesion between copper film and PET. In order to optimize the sputtering time under continuous ECR-CVD, cyclic operation concept is employed. By changing parameters of cyclic operation such as split of e and cycle time of A, the characteristics and thickness of the deposited copper film are controlled. As $\theta$ value increase, film thickness could confirm to increase and its surface resistivity value decreases. The highest adhesive strength appears at $\theta=0.33$ and cycle time of 30 min. The uniformity of copper film shows $5\%$ in our experimental range.

Cloning and Expression of the Duck Leptin Gene and the Effect of Leptin on Food Intake and Fatty Deposition in Mice

  • Dai, Han Chuan;Long, Liang Qi;Zhang, Xiao Wei;Zhang, Wei Min;Wu, Xiao Xiong
    • Asian-Australasian Journal of Animal Sciences
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    • 제20권6호
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    • pp.850-855
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    • 2007
  • Leptin is the adipocyte-specific product of the obese gene and plays a major role in food intake and energy metabolism. Leptin research was mainly focused on mammalian species, but understanding of leptin and its function in poultry is very poor. In this study, the duck leptin gene was amplified using the reverse transcription-polymerase chain reaction (RT-PCR) from duck liver RNA. The cDNA fragment was inserted into the pET-28a expression vector, and the resulting plasmid was expressed in Escherichia coli BL21 (DE3). Experimental mice were given an intraperitoneal injection of 10 mg/kg leptin dissolved in phosphate buffered saline (PBS), while the control mice were injected with PBS. The effect of leptin on food intake, body weight and fatty deposition in mice was detected. Sequence analysis revealed that duck leptin had a length of 438 nucleotides which encoded a peptide with 146 amino acid residues. The sequence shares highly homology to other animals. The coding sequence of duck leptin was 84 and 86% identical to human and pig leptin nucleotides sequence. Highest identity was with the rat coding sequence (95%). The identity of the amino acid sequence was 84, 82 and 96% respectively compared to that of the human, pig and rat. Results of SDS-PAGE analysis indicated that a fusion protein was specifically expressed in E. coli BL21 (DE3). The purified product was found to be biologically active during tests. Continuous administration of recombinant duck leptin inhibited food intake. Despite the decrease of food intake, leptin significantly induced body weight and fatty deposition. These changes were accompanied by a significant down-secretion of plasma glucose, cholesterol, triglyceride and insulin levels in mice. The observations provide evidence for an inhibitory effect of leptin in the regulation of food intake and for a potential role of duck leptin in the regulation of lipogenesis.