• Journal of the Semiconductor & Display Technology
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• v.5 no.2 s.15
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• pp.47-49
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• 2006

Various methods of making thin film is being used in semiconductor manufacturing process. The most common method in this field includes CVD(Chemical Vapor Deposition) and PVD(Physical Vapor Deposition). Thin film is deposited on both the backside and the frontside of wafers. The thin film deposited on the backside has poor thickness profile, and can contaminate wafers in the following processes. If wafers with the thin film remaining on the backside are immersed in batch type process tank, the thin film fall apart from the backside and contaminate the nearest wafer. Thus, it is necessary to etch the backside of the wafer selectively without etching the frontside, and chemical injection nozzle positioned under the wafer can perform the backside etching. In this study, the backside chemical injection nozzle with optimized chemical injection profile is built for single wafer tool. The evaluation of this nozzle, performed on $Si_3N_4$ layer deposited on the backside of the wafer, shows the etching rate uniformity of less than 5% at the etching rate of more than $1000{\AA}$.

• Journal of environmental and Sanitary engineering
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• v.18 no.4
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• pp.6-14
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• 2003

A spring water quality was depend on the aquifer soil status. However, water quality was rapidly contaminated by artificial affects. In the contaminate components, the heavy metals were significantly important because the heavy metals influence the plants and the animals. But, it is difficult to find out how the heavy metal can affect in the water quality. According to the group analysis and the factor analysis, water quality management was advanced. The experimental area was divided into three region and six factor. The six factor could not define the overall water quality, however this method were one of the useful methods.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2004.04a
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• pp.252-254
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• 2004

In the past several years phytoremediation, defined as the use of plants for removing contaminants from media such as soils or water, has attracted a great deal of interest as a potentially useful remediation technology. In this study, we have attempted to asses the effectiveness of phytoremeidation of disel contaminate soils using hybrid poplar species. 3 poplar species had removed disel from soil effectively and toxic effect was also observed over 2500mg/kg disel contaminated soil, which indicating reducing disel removal.

• Proceedings of the KIEE Conference
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• 2009.04a
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• pp.169-171
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• 2009

In recent years, environmental concerns have been raised on the use of poorly biodegradable fluids in electrical apparatus in regions where spills from leaks and equipment failure could contaminate the surroundings. For development of the environmental-friendly pole transformer using vegetable oil, we discussed the insulation construction of the transformer and the dielectric characteristics of the Nomex insulation paper in vegetable oil. Based on the experimental data, the insulation of the transformer is designed.

• Proceedings of the Korea Concrete Institute Conference
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• 2003.05a
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• pp.59-64
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• 2003

As the economy of a country develops, the necessity for social overhead capital such as railroad, highway and other transportation infrastructures becomes an utmost issue as the volume of traffic increases. As the standard of living has been raised the needs for ecological road pavement also increase. As a matter of fact, the concrete and asphalt pavement have been constructed without considering the harmony with nature. The Road Compound pavement is constructed with local soils from optimum mixture proportions that did not contaminate the surroundings and represent the ecological pavement.

• Proceedings of the Korean Geotechical Society Conference
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• 1999.03a
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• pp.543-550
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• 1999

Hazardous substances produced from industrial sectors have caused serious contamination of soils and groundwater. The hydrophobic organic compounds in the subsurface are hard to be decomposed, and as they soil on the soil or last as a NAPL they might contaminate the groundwater for a long time. Although we recognize the danger of contaminated subsurface, very little was known about the effective remediation technique. This paper focuses on the remediation of the p-Cresol which contaminated subsurface by applying the surfactant-enhanced description technique. Sorption characteristics of soils and organic compounds are studied, and the applications of surfactant solution are studied for effective rededication. The results from this study could be used as some data for surfactant-enhanced rededication. The flexible-wall permeameter tests are performed in which in-situ remediation is simulated. Results show that triton X-100 at 2% solution disrobes p-Cresol 1.7 times as much as water description in the flexible-wall permeameter tests.

• Proceedings of the Korea Concrete Institute Conference
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• 2002.10a
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• pp.211-216
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• 2002

Recently, the more the PET bottles are needed, the more waste PET bottles were produced. So, if there was no suitable recycling, that was contaminate our environment and use up the natural resources. This paper deals with the artificial lightweight aggregate(ALA), made of waste PET bottles, and the properties of concrete replaced with ALA. As a result of experiment, it is shown that the specific gravity of PBLA is 1.39, the unit volume weight is 844 kg/$cm^3$, and absorbing rate is 0. In absorbing rate test, the rate is 10 % increased by replacing of 20 % PBLA and the mixture rate for water and cement is 44.6 % and 51.2 %, in case target strength for 240kgf/$cm^2$, and 270kg/$cm^2$, by added PBLA 75 % and 50 % respectively. So, to obtain a certain target strength, appropriate W/C ratio is required the replacement ratio of PBLA.

• Journal of Advanced Marine Engineering and Technology
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• v.10 no.4
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• pp.67-77
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• 1986

The information on the heat transfer characteristics, flow pattern and pressure drop, are very important for the desing of general heat exchanger, refrigerating system, air conditioning system and energy recovery system. In these systems, water or lubricating oil contained in working fluid affects greatly the flow and heat transfer condition and this phenomena must be considered in the practical design. An experiment has been performed for studying the flow and heat transfer characteristics of the forced convective horizontal flow of R-113 under the range of the liquid single phase state to the boiling flow state. Basic experimental results are obtained in the case that water or lubricating oil does not contaminate in the test fluid. Experimental results are as follows; (1) The local heat transfer coefficients in the nucleate boiling region and transition boiling region are almostly ten times as large as that of liquid single phase flow. (2) The measured heat transfer coefficient in the present experimental range is relatively agreed well with the predicted value from the various experimental results for the boiling flow.

• Journal of Food Hygiene and Safety
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• v.1 no.1
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• pp.57-66
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• 1986

Campylobacter jejuni has been recognized as one of the causes of human gastroenteritis. The feces of a variety of reservoir animals contain c. jejuni as commensals in the intestinal tracts, and are fundamental source of contamination. The intestinal organisms contaminate carcasses, equipment tools hands of the processing line workers and air of the processing facility. Once the contamination happens in the slaughterhouses or the meat processing facilities, it is very difficult to keep the carcasses free from the infection of c. jejuni. Various disinfectants are effective in minimizing the number of Campylobacter infections in the processing facilities by washing contaminated carcasses, tools, and hands. Direct contact with infected animals has been incriminated in transmission of infection caused by C. jejuni. Freezing, cooling with dry air and gamma irradiation are an effective way for preserving the meat and eliminating the transmission, but broad and enforced studies are needed for the practical use.

• Progress in Superconductivity
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• v.4 no.2
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• pp.162-167
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• 2003

The critical current value of Bi-2223/Ag tape can be influenced by various factors. In particular, it was known that properties of precursor powders could affect the formation of Bi -2223 and grain growth rate of the same. Since, moistures and organic matters can easily contaminate the precursor powders of Bi-2223 tapes and degrade properties of superconductors, the precursor powders should be kept in optimal conditions to minimize contamination. In this study, the effect of moisture and organic matters has been investigated. A Bi-2223/Ag tape contaminated with a large amount of moisture and organic matter has been characterized by low critical current values and bubbling. It has been found that as the quantity of moisture increases, the Bi-2223 phases are formed at lower temperature and the amount of non-superconducting phase increases.