• 반도체디스플레이기술학회지
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• 제2권3호
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• pp.7-11
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• 2003

In this research, the etching characteristics of via contact and deep contact hole have been studied using multi-pole inductively coupled plasma(MICP) etching system. We investigated Plasma density of MICP source using the Langmuir probe and etching characteristics with RF frequency, wall temperature, chamber gap, and gas chemistry containing Carbon and Fluorine. As the etching time increases, formation of the polymer increases. To improve the polymer formation, we controlled the temperature of the reacting chamber, and we found that temperature of the chamber was very effective to decrease the polymer thickness. The deep contact etch profile and high selectivity(oxide to photoresist) have been achieved with the optimum mixed gas ratio containing C and F and the temperature control of the etching chamber.

• 마이크로전자및패키징학회지
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• 제22권4호
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• pp.71-76
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• 2015

최근 Light Emitting Diode (LED)의 효율을 높이기 위한 연구가 활발히 진행 되고 있다. 특히 소자 측면에서는 수평형 LED, 수직형 LED, via-hole 구조의 수직형 LED 등의 다양한 구조가 제시되었다. 본 논문에서는 시뮬레이션을 통해 via-hole 구조의 수직형 LED의 새로운 전극 디자인을 제시하였다. 기존 Via-hole 구조의 수직형 LED의 n-contact hole 주변에 전류가 밀집되는 문제점을 해결하면서 유효 발광면적을 극대화 시켜 소자 전체에 균일한 전류를 주입할 수 있는 소자 디자인에 대해 평가하였다. 시뮬레이션 결과를 바탕으로 최적의 전극 디자인을 실제 디바이스로 제작하여 기존의 via-hole 구조의 수직형 LED와 비교 분석하였다. 최적화된 디자인이 적용된 via hole type 수직형 LED의 경우 기존 디자인에 비해 350 mA 주입시 약 0.2 V의 Forward Voltage 감소하였지만 광 출력은 비슷하여 최종적으로 4.2%의 WPE (Wall plug efficiency)가 향상됨을 보였다.

• Tribology and Lubricants
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• 제32권1호
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• pp.9-17
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• 2016

Contact between solid surfaces is one of the most important factors that influence dynamic behavior in micro/nanoscale. Although numerous theories and experimental results on contact behavior have been proposed, a thorough investigation for nanomaterials is still not available owing to technical difficulties. Therefore, molecular dynamics simulation was performed to investigate the contact behavior of nanomaterials, and the application of conventional contact theories to nanoscale was assessed in this work. Particularly, the contact characteristics of cylindrical nanowires were examined via simulation and contact theories. For theoretical analysis, various contact models were utilized and work of adhesion, Hamaker constant and elastic modulus those are required for calculation of the models were obtained from both indentation simulation and tensile simulation. The contact area of the cylindrical nanowire was assessed directly through molecular dynamics simulation and compared with the results obtained from the theories. Determination of the contact area of the nanowires was carried out via simulation by counting each atom, which is within the equilibrium length. The results of the simulation and theoretical calculations were compared, and it was estimated that the discrepancy in the results calculated between the simulation and the theories was less than 10 except in the case of the smallest nanowires. As the result, it was revealed that contact models can be effectively utilized to assess the contact area of nanomaterials.

• ETRI Journal
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• 제35권4호
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• pp.571-577
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• 2013

The fabrication of a thin-film transistor backplane and a liquid-crystal display using printing processes can eliminate the need for photolithography and offers the potential to reduce the manufacturing costs. In this study, we prepare contact via structures through a poly(methyl methacrylate) polymer insulator layer using inkjet printing. When droplets of silver ink composed of a polymer solvent are placed onto the polymer insulator and annealed at high temperatures, the silver ink penetrates the interior of the polymer and generates conducting paths between the top and bottom metal lines through the partial dissolution and swelling of the polymer. The electrical property of various contact via-hole interconnections is investigated using a semiconductor characterization system.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.201-201
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• 2010

볼로미터 제작 공정 중 One step via 공정 시 via hole 모양에 의해 정기적 연결 및 구조적 안정성에 문제를 해결하기 위하여 다른 via 식각 방식으로 공정을 진행하였으며 그에 따른 via 공정 차이에 대한 결과를 연구하였다.

• 한국전기전자재료학회논문지
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• 제15권1호
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• pp.7-14
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• 2002

In this paper, neutral networks are used to build models of oxide film etched In CHF$_3$/CF$_4$ with a magnetically enhanced reactive ion etcher(MERIE). A statistical 2$\^$4-1/ experimental design plus one center point was used to characterize relationships between process factors and etch responses. The factors that were varied include radio frequence(rf) power, pressure, CHF$_3$ and CF$_4$ flow rates. Resultant 9 experiments were used to train neural networks and trained networks were subsequently tested on its appropriateness using additionally conducted 8 experiments. A total of 17 experiments were thus conducted for this modeling. The etch responses modeled are dc bias voltage, etch rate and etch uniformity A qualitative, good agreement was obtained between predicted and observed behaviors.

• 한국입자에어로졸학회지
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• 제9권1호
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• pp.1-6
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• 2013

New evaluation method for the particle size and morphology via change of ground particle during a grinding process was investigated. The grinding experiments were carried by a planetary ball mill. The relationship between the particle outline of the scanning electron microscopy photograph and measurement line, the measurement contact number was evaluated. The value of contact number decreased with the increase in the particle size of the ground sample, and varied with the experimental conditions. The value of contact number, which is related to the particle size of the raw sample, changed at the various experimental conditions.

• 한국노년학
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• 제40권3호
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• pp.413-428
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• 2020

본 연구는 '2017년도 노인 실태조사'에 응답한 65세 이상 노인 8,942명을 대상으로 ICT를 활용한 자녀·손자녀 접촉빈도, 디지털 리터러시 등의 특성이 인지기능에 미치는 영향을 파악하기 위한 이차자료 분석 연구로, 다중 회귀분석을 활용하였다. 연구 결과 노인의 인지기능에 가장 큰 영향을 미치는 요인은 디지털 리터러시로 나타났다. 또한 ICT를 활용한 손자녀와의 접촉빈도는 디지털 리터러시 및 인지기능과 유의한 상관관계가 있으며 인지기능에 긍정적 영향을 주는 요인임이 새롭게 밝혀졌다. 이를 토대로 노인을 대상으로 한 정보화 교육 및 활용의 중요성과 이를 통한 세대 간 의사소통 활성화의 필요성에 대해 논의하였다.

• 대한금속재료학회지
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• 제49권11호
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• pp.905-909
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• 2011

The formation of front metal contact silicon solar cells is required for low cost, low contact resistance to silicon surfaces. One of the available front metal contacts is Ni/Cu plating, which can be mass produced via asimple and inexpensive process. A selective emitter, meanwhile, involves two different doping levels, with higher doping (${\leq}30{\Omega}/sq$) underneath the grid to achieve good ohmic contact and low doping between the grid in order to minimize the heavy doping effect in the emitter. This study describes the formation of a selective emitter and a nickel silicide seed layer for the front metallization of silicon cells. The contacts were thickened by a plated Ni/Cu two-step metallization process on front contacts. The experimental results showed that the Ni layer via SEM (Scanning Electron Microscopy) and EDX (Energy dispersive X-ray spectroscopy) analyses. Finally, a plated Ni/Cu contact solar cell displayed efficiency of 18.10% on a $2{\times}2cm^2$, Cz wafer.

• 한국가족관계학회지
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• 제22권2호
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• pp.119-145
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• 2017

Objectives: Grounded in a life-course perspective, this study examined the effects of non-coresident children's transitions to marriage and parenthood on the frequency of contact with their parents. Gender of adult children and the educational levels of both adult children and their parents were evaluated as potential moderators of the transition-contact linkages. Method: The analytic sample consisted of adult children aged between 20 and 50 whose parents participated in four waves of the Korean Longitudinal Study of Ageing (2006, 2008, 2010, 2012). For analysis, fixed effects regression models were estimated using the xtreg procedure in Stata. Results: First, transition to marriage was associated with a decrease in face-to-face contact, whereas a greater increase in contact with parents via phone, mail, email etc. occurred only among newly married with less than college education compared to the newlywed with college degrees. Second, transition to parenthood was associated with an increase in contact via phone, mail, email etc. In addition, a greater increase in face-to-face contact was found with parents who completed high school or more education compared to those with less than high school education. Conclusions: The findings suggest that adult children's transitions to marriage and parenthood may bring about increases in contact with their parents, particularly for adult children with less than college education and parents with more than high school education.