• Electrical & Electronic Materials
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• v.10 no.1
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• pp.8-14
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• 1997

The UV/O$_{3}$ dry cleaning has been well known in removing organic molecules. The UV/O$_{3}$ dry cleaning method was performed to clean the Si wafer surfaces and contact holes contaminated by organic molecules such as residual PR. During the cleaning process, the Si surfaces were analyzed with X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and ellipsometer. When the UV/O$_{3}$ dry cleaning at 200'C was performed for 3 minutes, the residual photoresist was almost removed on Si wafer surfaces, but Si surfaces were oxidized. For UV/O$_{3}$ application of contact hole cleaning, the contact string were formed using the equipment of ISRC (Inter-university Semiconductor Research Center). Before Al deposition, UV/O$_{3}$ (at 200.deg. C) dry cleaning was performed for 3 minutes. After metal annealing, the specific contact resistivity was measured. Because UV/O$_{3}$ dry cleaning removed organic contaminants in contact holes, the specific contact resistivity decreased. Each contact hole size was different, but the specific contact resistivities were all much the same. Thus, it is expected that the UV/O$_{3}$ dry cleaning method will be useful method of removal of the organic contaminants at smaller contact hole cleaning.

• Journal of Sensor Science and Technology
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• v.14 no.2
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• pp.131-135
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• 2005

This paper describes the ohmic contact formation of single crystalline 3C-SiC thin films heteroepitaxially grown on Si(001) wafers. In this work, a TiW (Titanium-tungsten) film as a contact matieral was deposited by RF magnetron sputter and annealed with the vacuum and RTA (rapid thermal anneal) process respectively. Contact resistivities between the TiW film and the n-type 3C-SiC substrate were measured by the C-TLM (circular transmission line model) method. The contact phases and interface the TiW/3C-SiC were evaulated with XRD (X-ray diffraction), SEM (scanning electron microscope) and AES (Auger electron spectroscopy) depth-profiles, respectively. The TiW film annealed at $1000^{\circ}C$ for 45 sec with the RTA play am important role in formation of ohmic contact with the 3C-SiC substrate and the contact resistance is less than $4.62{\times}10^{-4}{\Omega}{\cdot}cm^{2}$. Moreover, the inter-diffusion at TiW/3C-SiC interface was not generated during before and after annealing, and kept stable state. Therefore, the ohmic contact formation technology of single crystalline 3C-SiC using the TiW film is very suitable for high temperature MEMS applications.

• Design & Manufacturing
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• v.14 no.2
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• pp.21-27
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• 2020

Recently, LCD (Liquid Crystal Display) has been replaced by OLDE (Organic Light Emitting Diode) in high resolution display industry. In the process of OLDE production, it inspects defective products by sending a signal using a probe during OLED panel inspection. At this time, the cause of the detection of failure is divided into two. One is the self-defect of the OLED panel and the other is the poor contact occurring in the process of contact between the two. The second case is unknown at the time of testing, which increases the time for retesting. To this end, we made a system that can identify in real time whether the probe is in contact during the inspection. A contact probe unit was designed for the system, and a stage system was implemented. An inspection system was constructed through S / W and circuit configuration for actual inspection. Finally, a system that can check contact and non-contact in real time was constructed.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.11
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• pp.121-126
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• 2021

In this study, the effect of thermal contact resistance between pin-channel tubes on the heat transfer characteristics was analytically examined around the channel tubes with the pins attached to two consecutive arranged channel pipes. The numerical results showed that the heat transfer coefficient decreased geometrically as the thermal contact resistance increased, and the corresponding temperature change on the contact surface increased as the thermal contact resistance increased. The thinner the pin, the more pronounced the geometric drop in the heat transfer coefficient. It was confirmed that the higher the height of the pin, the higher was the heat transfer coefficient, however, the greater the size of the thermal contact resistance, the smaller was the heat transfer coefficient. It was found that the temperature change in the inner wall of the channel tube did not significantly affect the heat transfer characteristics owing to the thermal contact resistance. Furthermore, the velocity of air at the entrance of the channel tube was proportional to the heat transfer coefficient due to a decrease in the convective heat resistance corresponding to an increase in the flow rate.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.2
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• pp.37-46
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• 2018

Present research is to evaluate and improve the sealing performance of the duct cap assembly for the ice dispensers through structural analysis. The nonlinear contact problems to check the sealing performance were analyzed using ANSYS software. The results of the analyses related to the sealing performance: the displacement distribution, the contact condition between the cap-silicon and the case, and the pressure distribution on the contact surface, were examined and discussed. Based on the results of the existing design of the duct cap assembly, two cases of the design modifications to improve the sealing performance were introduced. By examining the results of the two cases, a final design improvement plan was proposed and analyzed. It is shown that the sealing performance of the proposed final design is much more favorable than the existing design. The method of structural analysis and design improvement of the duct cap assembly presented in this paper will help improve the sealing performance of the ice dispenser duct caps.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.833-836
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• 2007

Load/Unload technology has more benefits than the conventional CSS technology. However, it remains unsolved technical problem on the unloading process. While the slider climbs up the ramp at the outer edge of the disk, the possibility of the slider-disk contact by lift-off force and rebound of the slider increases. This paper focuses on no slider-disk contact. To prevent the slider-disk contact, we apply the disk bump on disk outer edge proceeding unload. Firstly, in the simulation, the bump dimension is determined by changing bump design parameters. Secondly, dynamic stability of slider have to be checked on disk bump before unload analysis, and unload analysis is performed by applying stable bump shapes to unload simulation. Thirdly, we select optimal bump shape to improve unload performance by unload analysis. Finally, in the experiment, the disk bump is mechanically manufactured by pressing disk surface using diamond tip. That is variously processed by changing pressing pressure. After confirming bump shape by nano-scanner, proper bump shape is applied to real experimental unload process. Through this investigation, we propose the optimal bump design to prevent the slider-disk contact, and then we can realize improved unloading performance.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.4
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• pp.65-70
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• 2020

While the demand for robots in the manufacturing industry has dramatically increased, the industrial robots' functionality is mainly determined by the effector attached to the end of their arms. They need a flexible gripping system that can act as a human hand and easily grasp a variety of objects, which requires resilient sensors. This study clarifies the electrical output characteristics of elastic tactile sensors according to contact terminals because the output characteristics of the tactile sensors vary greatly, depending on the contact material and the method of contact with the conductive wire. Our research considers the Three Roll Mill and Paste Mixer as the dispersion medium, and a nickel- and gold-plated brass electrode as the contact terminal.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.6
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• pp.101-108
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• 2013

An aircraft fuel hose is a kind of high pressure hose, and generally consists of a nipple, a socket, an inner tube, and a reinforcement layer to increase the tensile strength. Especially the nipple supports the other components in manufacturing stages such as the swaging or crimping processes however, the nipple also serves to prevent leakage in cases of hose engagement with a hydraulic system. To ensure the seal of the hose assembly, a beam seal fitting with metal-to-metal contact is usually adopted at the end of a nipple. Therefore, the geometry of the beam is an important parameter to be determined to make sure there is sufficient contact force. This study aims to investigate the effects of beam seal geometry on the contact force by changing the inclined angle and the thickness of the beam. The results reveal that the proper thickness and inclined angle of the beam seal are 0.45 mm and $8.5^{\circ}$, respectively.

• Journal of the Korean Society of Clothing and Textiles
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• v.31 no.7
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• pp.1107-1118
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• 2007

Relationship marketing research has traditionally focused on the relationship among customer satisfaction, trust, and customer commitment, while assuming that the causal relationship of customer $satisfaction{\rightarrow}trust{\rightarrow}commitment$ is well understand. However, recently many scholars argue that customer satisfaction, trust, commitment can not explain long-term orientation fully, and suggest the need for more extensive researches investigating the determinants of long-term relational retention. The purpose of this study was to explained the relationship development process through the mediation effect of contact intensity and relationship termination cost between customer satisfaction and trust, and between trust and commitment, and an analysis the causal relationship among these variables. The results were as follows. First, the customer satisfaction had both direct and indirect effects on trust mediated by contact intensity. Second, the trust had both direct and indirect effects on commitment mediated by relationship termination cost. Third, the commitment influenced long-term orientation. Finally, the empirical results confirmed that the model add to the concept of mediation with contact intensity and relationship termination cost plays a strong, central role in explaining relationship development process between customer and fashion retail stores.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.10
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• pp.111-116
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• 2020

Flexible tactile sensors, which are primarily used as grippers in robots, are mainly used to handle highly elastic or highly flexible objects. That is, flexible grippers are used when an object cannot be sufficiently controlled by applying a specific output force or taking a specific grabbing action. This is because a flexible tactile sensor needs to measure the pressure applied directly to held objects while deforming according to the shape of the object to be handled. CNT-based sensors used to be made from a highly flexible polymer to give flexibility and it is known that the sensors are greatly affected by the contact resistance of the terminal that connects the sensor to an electrical circuit; therefore, this paper clarifies the contact resistance of MWCNTs-based flexible tactile sensors and terminals. The effects of main and plating materials for terminals are investigated and the combinations of main and plating materials that exhibit contact resistance are measured in a typical industrial environment.