• Title/Summary/Keyword: contact element

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Fluid-Structure Interaction Modeling and Simulation of CMP Process for Semiconductor Manufacturing

  • Sung, In-Ha;Yang, Woo-Yul;Kwark, Ha-Slomi;Yeo, Chang-Dong
    • 정보저장시스템학회논문집
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    • 제7권2호
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    • pp.60-64
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    • 2011
  • Chemical mechanical planarization is one of the core processes in fabrication of semiconductors, which are increasingly used for information storage devices like solid state drives. For higher data capacity in storage devices, CMP process is required to show ultimate precision and accuracy. In this work, 2-dimensional finite element models were developed to investigate the effects of the slurry particle impact on microscratch generation and the phenomena generated at pad-particle-wafer contact interface. The results revealed that no plastic deformation and corresponding material removal could be generated by simple impact of slurry particles under real CMP conditions. From the results of finite element simulations, it could be concluded that the pad-particle mixture formed in CMP process would be one of major factors leading to microscratch generation.

가선계의 동특성 해석 (A Study on the Dynamic Characteristics of Catenary)

  • 최병두;김정수
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 1998년도 창립기념 춘계학술대회 논문집
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    • pp.525-532
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    • 1998
  • In this study, dynamic characteristics of catenary that supplies electrical power to high-speed trains is investigated. A particular emphasis is placed on the effect of droppers on the dynamic response of the contact wire, a dropper is an element that connects the contact wire with the messenger wire so as to maintain near uniform compliance, Finite element model compressing 3 spans is constructed. For the linear model, droppers are modeled as linear springs with various stiffness values. Modal analysis is performed to obtain the natural frequencies and modes and the variation in the modal density distribution for changing stiffness values are noted. Impulse response is also obtained through computer simulation. In practice, dropper is a nonlinear element with low stiffness in compression and high stiffness in tension. Hence, dropper can be modeled as a nonlinear spring with hi-directional stiffness values. Impulse and harmonic responses are obtained for the nonlinear model through simulation. The responses aye also compared with the linear cases.

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3D Finite element analysis of end - plate steel joints

  • Drosopoulos, G.A.;Stavroulakis, G.E.;Abdalla, K.M.
    • Steel and Composite Structures
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    • 제12권2호
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    • pp.93-115
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    • 2012
  • This paper presents a numerical investigation of the mechanical behaviour of extended end - plate steel connections including comparison with full size experiments. Contact and friction laws have been taken into account with nonlinear, three dimensional finite element analysis. Material and geometric nonlinearities have been implemented to the model, as well. Results are then compared with experimental tests conducted at the Jordan University of Science and Technology. According to the most significant observation of the analysis, a separation of the column flange from the extended end - plate occurs. Other important structural parameters of the connection, like the impact of some column stiffeners on the overall response, local buckling of the column and friction of the beam to column interface, have been examined as well.

3차원 유한요소법을 이용한 비접촉 전력 전달 장치 특성 해석 (Characteristic analysis of contact-less energy transmission system using 3D finite element method)

  • 우경일;박한석;조윤현
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 B
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    • pp.803-805
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    • 2004
  • This paper proposes the calculation method of magnetic coupling coefficient of the contact-less energy transmission system by 3D finite element method with a variation of the secondary core positions. The primary, secondary self and leakage inductances and the capacitances of a resonant circuit are calculated by the finite element analysis results. From these values, the magnetic coupling coefficients are obtained. The secondary voltages and currents at the secondary core positions are calculated by using the resonant circuit and compared.

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슬래브 두께에 따른 표준실험동의 중량충격음 특성 (Heavy-weight Floor Impact Sound Characteristics of Standard Laboratory by Slab Thickness)

  • 정영;송희수;전진용;김진수
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2004년도 추계학술대회논문집
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    • pp.103-108
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    • 2004
  • In this study, examined heavy-weight floor impact sound to structure that have slab thickness of 4 form at a standard laboratory through noise and vibration measured. The results show that the nature Natural frequency increased according to change of thickness of each slab by finite element analysis, and acceleration value decreased. Results of measurements of noise and vibration at a standard laboratory, the slab 210, 240mm structures was construed result such as finite element analysis but the slab 150, 180mm structures is construed that influence in vibration acceleration level because edge condition has condition that contact to ground. Therefore, in modelling process for analysis, is thought that need that condition analyzes examining element influencing about structure that contact to ground.

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Modeling of post-tensioned one-way and two-way slabs with unbonded tendons

  • Kim, Uksun;Huang, Yu;Chakrabarti, Pinaki R.;Kang, Thomas H.K.
    • Computers and Concrete
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    • 제13권5호
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    • pp.587-601
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    • 2014
  • A sophisticated finite element modeling approach is proposed to simulate unbonded post-tensioned concrete slabs. Particularly, finite element contact formulation was employed to simulate the sliding behavior of unbonded tendons. The contact formulation along with other discretizing schemes was selected to assemble the post-tensioned concrete system. Three previously tested unbonded post-tensioned two-way and one-way slabs with different reinforcement configurations and boundary conditions were modeled. Numerical results were compared against experimental data in terms of global pressure-deflection relationship, stiffness degradation, cracking pattern, and stress variation in unbonded tendons. All comparisons indicate a very good agreement between the simulations and experiments. The exercise of model validation showcased the robustness and reliability of the proposed modeling approach applied to numerical simulation of post-tensioned concrete slabs.

2차원 평면응력 상태에서 되풀이 소성역이 피로균열 열림 현상에 미치는 영향에 관한 연구 (An Evaluation on the Effect of Reversed Plastic Zone on the Fatigue Crack Opening Behavior under 2-D Plane Stress)

  • 최현창
    • 대한기계학회논문집A
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    • 제29권8호
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    • pp.1078-1084
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    • 2005
  • The relationship between fatigue crack opening behavior and the reversed plastic zone sizes is studied. An elastic-plastic finite element analysis (FEA) is performed to examine the opening behavior of fatigue crack, where the contact elements are used in the mesh of the track tip area. The smaller element size than reversed plastic zone size is used fer evaluating the distribution of reversed plastic zone. In the author's previous results the FEA could predict the crack opening level, which crack tip elements were in proportion to the theoretical reversed plastic zone size. It is found that the calculated reversed plastic zone size is related to the theoretical reversed plastic zone size and crack opening level. The calculated reversed plastic zone sizes are almost equal to the reversed plastic zone considering crack opening level obtained by experimental results. It can be possible to predict the crack opening level from the reversed plastic zone size calculated by finite element method. We find that the experimental crack opening levels correspond with the opening values of contact nodes on the calculated reversed plastic zone of finite element simulation.

THEORETICAL ANALYSIS FOR STUDYING THE FRETTING WEAR PROBLEM OF STEAM GENERATOR TUBES IN A NUCLEAR POWER PLANT

  • LEE CROON YEOL;CHAI YOUNG SUCK;BAE JOON WOO
    • Nuclear Engineering and Technology
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    • 제37권2호
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    • pp.201-206
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    • 2005
  • Fretting, which is a special type of wear, is defined as small amplitude relative motion along the contacting interface between two materials. The structural integrity of steam generators in nuclear power plants is very much dependent upon the fretting wear characteristics of Inconel 690 U-tubes. In this study, a finite element model that can simulate fretting wear on the secondary side of the steam generator was developed and used for a quantitative investigation of the fretting wear phenomenon. Finite element modeling of elastic contact wear problems was performed to demonstrate the feasibility of applying the finite element method to fretting wear problems. The elastic beam problem, with existing solutions, is treated as a numerical example. By introducing a control parameter s, which scaled up the wear constant and scaled down the cycle numbers, the algorithm was shown to greatly reduce the time required for the analysis. The work rate model was adopted in the wear model. In the three-dimensional finite element analysis, a quarterly symmetric model was used to simulate cross tubes contacting at right angles. The wear constant of Inconel 690 in the work rate model was taken as $K=26.7{\times}10^{-15}\;Pa^{-1}$ from experimental data obtained using a fretting wear test rig with a piezoelectric actuator. The analyses revealed donut-shaped wear along the contacting boundary, which is a typical feature of fretting wear.

복합평판구조물의 고주파수 대역 유체/구조 연성 소음진동예측을 위한 에너지흐름유한요소해석 (Energy Flow Finite Element Analysis for High Frequency Acoustic and Vibrational Prediction of Complicated Plate Structures Considering Fluid-Structure Interaction)

  • 윤태흠;박영호
    • 대한조선학회논문집
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    • 제60권1호
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    • pp.20-30
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    • 2023
  • In this paper, the Energy Flow Finite Element Analysis (EFFEA) was performed to predict the acoustic and vibrational responses of complicated plate structures considering improved Fluid-Structure Interaction (FSI). For this, a new power transfer relationship was derived at the area junction where two different fluids are in contact on both sides of the plate. In order to increase the reliability of EFFEA of complicated plate structures immersed in a high-density fluid, the corrected flexural wavenumber and group velocity considering fluid-loading effect were derived. As the specific acoustic impedance of the fluid in contact with the plate increases, the flexural wavenumber of the plate increases. As a result, the flexural group velocity is reduced, and the spatial damping effect of the flexural energy density is increased. Additionally, for the EFFEA of arbitary-shaped built-up structures, the energy flow finite element formulation for the acoustic tetrahedral element was newly performed. Finally, for validation of the derived theory and developed software, numerical applications of complicated plate structures submerged in seawater or air were successfully performed.

반치환 슬관절의 설계 평가를 위한 굴곡각도에 따른 곡률반경과 접촉응력의 상관도 분석 (The Correlation Analysis through the Contact Stress and the Curvature Radius according to Flexion Angle for the Design of Unicompartment Knee Replacement)

  • 이용경;유의식;김재원;임도형;정태곤;김정성
    • 대한의용생체공학회:의공학회지
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    • 제37권6호
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    • pp.215-221
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    • 2016
  • Conformity between the femoral component and tibial insert within the knee replacement may be measured in frontal or sagittal view, and shows differences in the curvature radius of the femoral component depending on the flexion angle, i.e., curvature radius has a complex effect on contact stress. Therefore, it is essential to confirm how the curvature radius effects contact stress, and provide an important variable to reduce contact stress. This study correlated contact stress with curvature radius measured in frontal and the sagittal views and confirmed the effect of curvature radius for assessment of the Newly Designed Unicompartment Knee Replacement (NDUKR). Finite element models were constructed for NDUKR and $Zimmer^{(R)}$ Unicompartment High Flex Knee Replacement system (ZUKR), incorporating the curvature radius as measured in either frontal or sagittal view. The femoral component had 1200N of compressive load applied approximately 1.65xbody weight. Contact stress was predicted at flexion angles $0^{\circ}C$, $30^{\circ}C$, $60^{\circ}C$, $90^{\circ}C$ and $120^{\circ}C$, for NDUKR: 42, 47.7, 47.7, 51.2, and 54.1 MPa, and ZUKR: 41.2, 49.5, 53.2, 54.3, and 57.4 MPa, respectively. Correlation analysis showed the influence of curvature radius measured from the sagittal view was larger than for frontal view.