[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.9797/TSISS.2011.7.2.060

Fluid-Structure Interaction Modeling and Simulation of CMP Process for Semiconductor Manufacturing

Sung, In-Ha (Dept. of Mechanical Engineering, Hannam University)
Yang, Woo-Yul (Dept. of Mechanical Engineering, Hannam University)
Kwark, Ha-Slomi (Dept. of Mechanical Engineering, Hannam University)
Yeo, Chang-Dong (Dept. of Mechanical Engineering, Texas Tech University)

Publication Information

Transactions of the Society of Information Storage Systems / v.7, no.2, 2011 , pp. 60-64 More about this Journal

Abstract

Chemical mechanical planarization is one of the core processes in fabrication of semiconductors, which are increasingly used for information storage devices like solid state drives. For higher data capacity in storage devices, CMP process is required to show ultimate precision and accuracy. In this work, 2-dimensional finite element models were developed to investigate the effects of the slurry particle impact on microscratch generation and the phenomena generated at pad-particle-wafer contact interface. The results revealed that no plastic deformation and corresponding material removal could be generated by simple impact of slurry particles under real CMP conditions. From the results of finite element simulations, it could be concluded that the pad-particle mixture formed in CMP process would be one of major factors leading to microscratch generation.

Keywords

Chemical mechanical polishing; Contact stress; Finite element analysis; Fluid-structure interaction (FSI); Tribology;

Citations & Related Records

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