• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.502-505
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• 2005

To overcome some of the limitations in the conventional photolithography technique, MC-SPL which has advantages such as flexibility and high speed was developed in the past. To make a fine pattern using MC-SPL, there are many variables to control, for example, applied load, scribing speed, chemical etching condition, and etc. In this work, the effect of contact load on the width of the pattern was investigated. The load not only influences the width of the pattern but it also affects the wear of the probe tip. It was found that it is beneficial to load the tip in two stages. Futhermore, the experimental results showed that the pattern width was more sensitive to the initial contact force.

• 한국안광학회지
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• 제10권2호
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• pp.119-126
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• 2005

2개사 칼라콘택트렌즈에 대한 물성적 특성을 평가 비교하였다. 제조된 인공누액을 사용하여 단백질 침착율과 습윤성, 주사전자현미경과 원자간력현미경을 이용하여 렌즈의 표면 거칠기를 관찰하였다. 결과는 다른 특성들은 일반 소프트콘택트렌즈와 비교해서 큰 차이를 보이지 않았으나 주사전자현미경적 관찰에서 건조시 심한 균열을 보였다. 원자간력현미경적 관찰에서 렌즈 표면요철은 발견되지 않아 표면거칠기는 일반 소프트콘택트렌즈와 차이가 없었다. 렌즈 앞면과 뒷면에 대한 염료 침착을 확인한 결과 염료는 렌즈내부에 존재함을 알 수 있었다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.61-62
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• 2002

In order to clarify the contact mechanism between specimen surface and probe tip in the surface observation by the AFM (atomic force microscope) or the FFM (friction force microscope), several molecular dynamics simulations have been performed. In the simulation, a 3-dimensional simulation model is proposed where the specimen and the probe are assumed to consist of mono-crystal line copper and a carbon atom respectively and the effect of cantilever stiffness is also taken into considered. The surface observation process on a well-defined Cu{100} is simulated. The influences of cantilever stiffness on the reactive force images and the behavior of probe tip were evaluated. As a resuIt, several phenomena similar to those observed by the actual surface observation experiment, such as double-slip behavior and dispersion in the stick-slip wave period were observed.

• Applied Science and Convergence Technology
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• 제23권2호
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• pp.97-102
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• 2014

A vacuum chamber for a commercial atomic force microscope (AFM) is designed and fabricated. Only minimal modifications were made to an existing microscope in an effort to work in a vacuum environment, while most of the available AFM functionalities were kept intact. The optical alignment needed for proper AFM operations including a SLD (superluminescent diode) and a photodiode can be made externally without breaking the vacuum. A vacuum level of $5{\times}10^{-3}$ torr was achieved with a mechanical pump. An enhancement of the quality factor was observed along with a shift in the resonance frequency of a non-contact-mode cantilever in a vacuum. Topographical data of a calibration sample were also obtained in air and in a low vacuum using the non-contact mode and the results were compared.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.264-267
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• 2003

Pitch measurements of 150 nm pitch one-dimensional grating standards were carried out using an contact mode atomic force microscopy(C-AFM) with a high resolution three-axis laser interferometer. It was called as 'Nano-metrological AFM' In Nano-metrological AFM, Three laser interferometers were aligned well to the end of AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$-stablilzed He-Ne laser at a wavelength of 633 nm. So, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM has a traceability to the length standard directly. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement(GUM). The Primary source of uncertainty in the pitch-measurements was derived from repeatability of pitch-measurement, and its value was approx 0.186 nm. Expanded uncertainty(k=2) of less than 5.23 nm was obtained. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• Tribology and Lubricants
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• 제21권5호
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• pp.209-215
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• 2005

Nano/micro friction with the contact area was studied on Si-wafer (100) and diamond-like carbon (DLC) film. Borosilicate balls of radii $0.32{\mu}m,\;0.5{\mu}m,\;1.25{\mu}m\;and\;2.5{\mu}m$ mounted on the top of AFM tip (NPS) were used for nano-scale contact and Soda Lime glass balls of radii 0.25mm, 0.5mm, 1mm were used for micro-scale contact. At nano-scale, the friction between ball and surface was measured with the applied normal load using an atomic force microscope (AFM), and at micro scale it was measured using ball-on flat type micro-tribotester. All the experiments were conducted at controlled conditions of temperature $(24\pm1^{\circ}C)$ and humidity $(45\pm5\%)$. Friction was measured as a function of applied normal load in the range of 0-160nN at nano scale and in the range of $1000{\mu}N,\; 1500{\mu}N,\;3000{\mu}N\;and\;4800{\mu}N$ at micro scale. Results showed that the friction at nano scale increased with the applied normal load and ball size for both kinds of samples. Similar behavior of friction with the applied normal load and ball size was observed for Si-wafer at micro scale. However, for DLC friction decreased with the ball size. This difference of in behavior of friction in DLC nano- and microscale was attribute to the difference in the operating mechanisms. The evidence of the operating mechanisms at micro-scale were observed using scanning electron microscope (SEM). At micro-scale, solid-solid adhesion was dominant in Silicon-wafer, while plowing in DLC. Contrary to the nano scale that shows almost a wear-less situation, wear was prominent at micro-scale. At nano- and micro-scale, effect of contact area on the friction was discussed with the different applied normal load and ball size.

• 한국안광학회지
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• 제15권3호
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• pp.207-212
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• 2010

목적: 불화규소 아크릴레이트 RGP 콘택트렌즈(Boston EO, Boston XO)를 공기 중에서 플라즈마로 처리하여 표면의 성분, 형상, 습윤성의 변화를 연구하였다. 방법: 성분과 결합구조는 X-선광전자분광분석기(XPS), 형상과 거칠기는 원자현미경(AFM)으로 관찰하였으며, 습윤성의 변화는 접촉각을 측정하여 평가하였다. 결과: 플라즈마 처리에 의해 표면에서 불소는 크게 감소하고, 산소와 실리콘은 증가하였다. 산소를 포함하는 친수성기(C-O, Si-O)가 증가하고, 소수성인 표면이 감소하였으며, 접촉각이 증가하였다. 그러나 불소의 치환으로 생성된 C-O는 습윤성을 증진하지 않았다. 결과: 플라즈마 처리한 다음 6개월이 지나면 표면조성에는 큰 변화가 없으나, 접촉각이 다시 증가하였다. 결론: 불소의 함량이 높은 RGP 콘택트렌즈의 플라즈마 처리에 의한 습윤성 증가는 활성화된 표면과 Si-O의 증가, 소수성 표면의 감소에 의한 것으로 판단된다.

• 한국정밀공학회지
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• 제24권6호
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• pp.96-104
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• 2007

Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.357-361
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• 1997

In this work surface damage of head and disk of head disk drive was analysed using an Atomic Force Microscpoe. The initial damage of the disk occurred by generation of extermely small wear particles. Also it was show that wear particles tend to pile up near the front side of the slider. The surface damage mechanism of drag test and contact-start-stop test was found to be quite similar.

• 한국정밀공학회지
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• 제15권9호
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• pp.167-174
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• 1998

In this work the surface damage of head and disk of a hard disk drive was analysed using an Atomic Force Microscope. The initial damage of the disk occurred by generation of extremely small wear particles. Also it was shown that wear particles tend to pile up near the front side of the slider. The surface damage mechanism of drag test and contact-start-stop test was found to be quite similar.