• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.41.2-41.2
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• 2011

Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Metal Oxide Semiconductor) based electronic devices become much faster speed and smaller size than ever before. However, very narrow interconnect line width causes some drawbacks. For example, deposition of conformal and thin barrier is not easy moreover metallization process needs deposition of diffusion barrier and glue layer. Therefore, there is not enough space for copper filling process. In order to overcome these negative effects, simple process of copper metallization is required. In this research, Cu-V thin alloy film was formed by using RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane $SiO_2$/Si bi-layer substrate with smooth and uniform surface. Cu-V film thickness was about 50 nm. Cu-V layer was deposited at RT, 100, 150, 200, and $250^{\circ}C$. XRD, AFM, Hall measurement system, and XPS were used to analyze Cu-V thin film. For the barrier formation, Cu-V film was annealed at 200, 300, 400, 500, and $600^{\circ}C$ (1 hour). As a result, V-based thin interlayer between Cu-V film and $SiO_2$ dielectric layer was formed by itself with annealing. Thin interlayer was confirmed by TEM (Transmission Electron Microscope) analysis. Barrier thermal stability was tested with I-V (for measuring leakage current) and XRD analysis after 300, 400, 500, 600, and $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However V-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Thus, thermal stability of vanadium-based thin interlayer as diffusion barrier is good for copper interconnection.

• Radiation Oncology Journal
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• 제27권1호
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• pp.1-9
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• 2009

방사선치료후 발생할 수 있는 골 손상은 골반 부전골절, 방사선 골 괴사, 무혈성 괴사, 골 육종 등이다, 특히 최근 방사선치료후의 골탄성도의 변화로 발생하는 골반 부전골절에 관하여 많은 보고가 있었다. 과거 방사선치료 후의 골 손상 특히 골절의 빈도는 선형가속기를 이용한 메가볼트 방사선치료 바뀌면서 현저히 줄어 들어서 매우 낮은 것으로 보고 되었으나 최근에는 $8{\sim}20%$로 보고가 되고 있다. 따라서 골반 부전골절의 임상적 의미와 중요성과 예방 및 치료에 대하여 관심이 증가되고 있다. 저자는 자궁경부암 치료 후 관찰한 골반 부전골절, 골 괴사, 무혈성 괴사, 및 2차성 골육종등 골반골 변화와 손상에 관하여 저자의 경험과 문헌고찰을 통하여 보고 하고자 한다.

• Radiation Oncology Journal
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• 제32권3호
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• pp.125-131
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• 2014

Purpose: We reviewed treatment outcomes and prognostic factors for patients with salivary ductal carcinoma (SDC) treated with surgery and postoperative radiotherapy from 2005 to 2012. Materials and Methods: A total of 16 patients were identified and 15 eligible patients were included in analysis. Median age was 61 years (range, 40 to 71 years) and 12 patients (80%) were men. Twelve patients (80%) had a tumor in the parotid gland, 9 (60%) had T3 or T4 disease, and 9 (60%) had positive nodal disease. All patients underwent surgery and postoperative radiotherapy. Postoperative radiotherapy was delivered using 3-dimensional conformal radiotherapy or intensity-modulated radiotherapy. Locoregional failure-free survival (LRFFS), distant failure-free survival (DFFS), progression-free survival (PFS), and overall survival (OS) were calculated using the Kaplan-Meier method. Differences in survival based on risk factors were tested using a log-rank test. Results: Median total radiotherapy dose was 60 Gy (range, 52.5 to 63.6 Gy). Four patients received concurrent weekly chemotherapy with cisplatin. Among 10 patients who underwent surgery with neck dissection, 7 received modified radical neck dissection. With a median follow-up time of 38 months (range, 24 to 105 months), 4-year rates were 86% for LRFFS, 51% for DFFS, 46% for PFS, and 93% for OS. Local failure was observed in 2 patients (13%), and distant failure was observed in 7 (47%). The lung was the most common involved site of distant metastasis. Conclusion: Surgery and postoperative radiotherapy in SDC patients resulted in good local control, but high distant metastasis remained a major challenge.

• Radiation Oncology Journal
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• 제31권4호
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• pp.216-221
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• 2013

Purpose: The purpose of this retrospective study was to evaluate the efficacy and feasibility of short-course hypofractionated radiotherapy (RT) for the palliation of uterine cervical cancer. Materials and Methods: Seventeen patients with cancer of the uterine cervix, who underwent palliative hypofractionated 3-dimensional conformal radiotherapy between January 2002 and June 2012, were retrospectively analyzed. RT was delivered to symptomatic lesions (both the primary mass and/or metastatic regional lymph nodes). The total dose was 20 to 25 Gy (median, 25 Gy) in 5 Gy daily fractions. Results: The median follow-up duration was 12.2 months (range, 4 to 24 months). The median survival time was 7.8 months (range, 4 to 24 months). Vaginal bleeding was the most common presenting symptom followed by pelvic pain (9 patients). The overall response rates were 93.8% and 66.7% for vaginal bleeding control and pelvic pain, respectively. Nine patients did not have any acute side effects and 7 patients showed minor gastrointestinal toxicity. Only 1 patient had grade 3 diarrhea 1 week after completion of treatment, which was successfully treated conservatively. Late complications occurred in 4 patients; however, none of these were of grade 3 or higher severity. Conclusion: Short-course hypofractionated RT was effective and well tolerated as palliative treatment for uterine cervical cancer.

• Radiation Oncology Journal
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• 제37권2호
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• pp.82-90
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• 2019

Purpose: To evaluate the results of hypofractionated radiotherapy (HFX) for early glottic cancer. Materials and Methods: Eighty-five patients with cT1-2N0M0 squamous cell carcinoma of the glottis who had undergone HFX, performed using intensity-modulated radiotherapy (IMRT, n = 66) and three-dimensional conformal radiotherapy (3D CRT, n = 19) were analyzed. For all patients, radiotherapy was administered at 60.75 Gy in 27 fractions. Forty-three patients received a simultaneous integrated boost (SIB) of 2.3-2.5 Gy per tumor fraction. Results: The median follow-up duration was 29.9 months (range, 5.5 to 76.5 months). All patients achieved complete remission at a median of 50 days after the end of radiotherapy (range, 14 to 206 days). The 5-year rates for locoregional recurrence-free survival was 88.1%, and the 5-year overall survival rate was 86.2%. T2 stage was a prognostic factor for locoregional recurrence-free survival after radiotherapy (p = 0.002). SIB for the tumor did not affect disease control and survival (p = 0.191 and p = 0.387, respectively). No patients experienced acute or chronic toxicities of ≥grade 3. IMRT significantly decreased the dose administered to the carotid artery as opposed to 3D CRT (V₃₅, p < 0.001; V₅₀, p < 0.001). Conclusions: Patients treated with HFX achieved acceptable locoregional disease control rates and overall survival rates compared with previous HFX studies. A fraction size of 2.25 Gy provided good disease control regardless of SIB administration.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2008년도 춘계 학술발표회 초청강연 및 논문집
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• pp.1466-1483
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• 2008

This paper discusses the development of an up-to-date computerized CPT (Cone Penetration Test) based soil engineering classification system to provide geotechnical engineers with a handy tool for their daily design activities. Five CPT soil engineering classification systems are incorporated in this effort. They include the probabilistic region estimation and fuzzy classification methods, both developed by Zhang and Tumay, the Schmertmann, the Douglas and Olsen, and the Robertson et al. methods. In the probabilistic region estimation method, a conformal transformation is used to determine the soil classification index, U, from CPT cone tip resistance and friction ratio. A statistical correlation is established between U and the compositional soil type given by the Unified Soil Classification System (USCS). The soil classification index, U, provides a soil profile over depth with the probability of belonging to different soil types, which more realistically and continuously reflects the in-situ soil characterization, which includes the spatial variation of soil types. The CPT fuzzy classification on the other hand emphasizes the certainty of soil behavior. The advantage of combining these two classification methods is realized through implementing them into visual basic software with three other CPT soil classification methods for friendly use by geotechnical engineers. Three sites in Louisiana were selected for this study. For each site, CPT tests and the corresponding soil boring results were correlated. The soil classification results obtained using the probabilistic region estimation and fuzzy classification methods are cross-correlated with conventional soil classification from borings logs and three other established CPT soil classification methods.

• Journal of Radiation Protection and Research
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• 제40권3호
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• pp.147-154
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• 2015

The scatter photons and photoneutrons from high energy photon beams (more than 10 MV) will increase the undesired dose to the patient and the staff working in linear accelerator room. This undesired dose which is found at out-of-field area can increase the probability of secondary malignancy. The purpose of this study is to determine the equivalent dose of scatter photons and neutrons generated by 3 different treatment techniques: 3D-conformal, intensity modulated radiation therapy (IMRT) and volumetric modulated arc therapy (VMAT). The measurement was performed using two types of the optically stimulation luminescence detectors (OSL and OSLN) in the Alderson Rando phantom that was irradiated by 3 different treatment techniques following the actual prostate cancer treatment plans. The scatter photon and neutron equivalent dose were compared among the 3 treatments techniques at the surface in the out-of-field area and the critical organs. Maximum equivalent dose of scatter photons and neutrons was found when using the IMRT technique. The scatter neutrons showed average equivalent doses of 0.26, 0.63 and $0.31mSv{\cdot}Gy^{-1}$ at abdominal surface region which was 20 cm from isocenter for 3D, IMRT and VMAT, respectively. The scattered photons equivalent doses were 6.94, 10.17 and $6.56mSv{\cdot}Gy^{-1}$ for 3D, IMRT and VMAT, respectively. For the 5 organ dose measurements, the scattered neutron and photon equivalent doses in out of field from the IMRT plan were highest. The result revealed that the scatter equivalent doses for neutron and photon were higher for IMRT. So the suitable treatment techniques should be selected to benefit the patient and the treatment room staff.

• 대한전자공학회논문지
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• 제27권10호
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• pp.68-77
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• 1990

본 논문에서는 CAD 시스템의 신경망을 이용한 자동 입력기 구축을 위한 논리 심볼 인식방법을 제시한다. 손으로 작성한 도면을 인식하기 위해 특징 추출과 log mapping, 그리고 패턴 인식의 다단계 과정을 거친다. 각 논리 심볼의 현태 정보를 추출하기 위해 억제 가중치를 학습할 수 있는 경쟁 학습법을 제안하고 회전과 크기의 변화를 병진된 결과로 나타내는 log mapping을 하고 형태가 변한 심볼을 인식할 수 있도록 겹쳐지는 수용야(Receptive field)를 준비하여 error back propagation을 이용한 다층망으로 심볼을 인식한다.

• 비파괴검사학회지
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• 제27권1호
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• pp.15-22
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• 2007

인장하중을 받는 판재의 원형 구멍 주위의 응력분포를 해석하기 위하여 하이브리드 방법을 이용하였다. 하이브리드 법의 입력데이터로 원형구멍 중심으로부터 임의의 거리에 있는 직선상에서 광탄성 위상이 동법으로 측정된 등색 프린지 차수를 사용하였다. 응력장 변화를 살펴보기 위하여 급수형 등각사상 복소수 응력함수에서 항의 수를 달리 할 경우에 대해 시험하였다. 정성적인 비교를 할 수 있도록 실험으로부터 얻은 실제의 등색 프린지 차수를 응력-광 법칙으로 생성된 이론적인 프린지 차수와 비교하였다. 정량적인 비교를 위하여 입력된 모든 지점의 등색프린지 차수와 응력함수로 계산된 프린지 차수의 상대오차의 표준편차를 응력함수의 항의 수에 따라 분석하였다. 하이브리드법 결과는 유한요소법에 의한 계산값에 매우 근접하였다. 본 연구에 적용된 기법은 광탄성 위상이동법을 이용하여 일 직선상의 등색프린지 차수를 간단히 측정할 수 있으므로 활용 가능성이 많을 것으로 예측된다.

• 공업화학
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• 제29권1호
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• pp.18-21
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• 2018

본 연구에서는 대용량 구조 촉매의 제조 및 활용 가능성을 확인하고자 셀 밀도가 높은 세라믹 허니컴 구조체와 온도조절 화학기상증착법을 활용하여 촉매를 제조하고 건식 개질 반응에 대한 촉매 활성을 평가하였다. 셀 밀도 600 cpsi 코디어라이트 허니컴(CDR)을 대상으로 니켈을 코팅한 NiO/CDR 촉매는 코팅 조건과 시간을 조절함으로써 허니컴 구조체 셀 내부까지 충분한 균일 증착이 가능하였다, $800^{\circ}C$, 공간속도 $10,000h^{-1}$과 $CH_4$와 $CO_2$를 1 : 1로 주입한 조건에서 $CH_4$는 약 83%, $CO_2$는 약 90% 이상의 우수한 전환율을 보여 건식 개질 반응에 효과적으로 적용이 가능하다는 것을 확인하였다. 이 결과를 토대로 대면적, 대용량 촉매 제조 시 온도조절 화학기상증착법이 매우 유용하게 활용될 수 있음을 확인하였다.