• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.41.2-41.2
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• 2011

Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Metal Oxide Semiconductor) based electronic devices become much faster speed and smaller size than ever before. However, very narrow interconnect line width causes some drawbacks. For example, deposition of conformal and thin barrier is not easy moreover metallization process needs deposition of diffusion barrier and glue layer. Therefore, there is not enough space for copper filling process. In order to overcome these negative effects, simple process of copper metallization is required. In this research, Cu-V thin alloy film was formed by using RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane $SiO_2$/Si bi-layer substrate with smooth and uniform surface. Cu-V film thickness was about 50 nm. Cu-V layer was deposited at RT, 100, 150, 200, and $250^{\circ}C$. XRD, AFM, Hall measurement system, and XPS were used to analyze Cu-V thin film. For the barrier formation, Cu-V film was annealed at 200, 300, 400, 500, and $600^{\circ}C$ (1 hour). As a result, V-based thin interlayer between Cu-V film and $SiO_2$ dielectric layer was formed by itself with annealing. Thin interlayer was confirmed by TEM (Transmission Electron Microscope) analysis. Barrier thermal stability was tested with I-V (for measuring leakage current) and XRD analysis after 300, 400, 500, 600, and $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However V-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Thus, thermal stability of vanadium-based thin interlayer as diffusion barrier is good for copper interconnection.

• Radiation Oncology Journal
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• v.27 no.1
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• pp.1-9
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• 2009

There has been recent interest in radiation-induced bone injury in clinical conditions, especially for pelvic insufficiency fracture (PIF). A PIF is caused by the effect of normal or physiological stress on bone with demineralization and decreased elastic resistance. Pelvic radiotherapy (RT) can also contribute to the development of a PIF. A PIF has been regarded as a rare complication with the use of megavoltage equipment. However, recent studies have reported the incidence of PIFs as $8.2{\sim}20%$ after pelvic RT in gynecological patients, an incidence that was higher than previously believed. The importance of understanding a PIF lies in the potential for misdiagnosis as a bony metastasis. If patients complain of pelvic pain after whole-pelvis radiation therapy, the presence of a PIF must be considered in the differential diagnosis. The use of multibeam arrangements and conformal RT to reduce the volume and dose of irradiated pelvic bone can be helpful to minimize the risk of fracture. In addition to a PIF, osteonecrosis and avascular necrosis of the femoral head can develop after radiation therapy. Osteoradionecrosis of the pelvic bone is a clinical diagnostic challenge that must be differentiated from an osseous metastasis. A post-radiation bone sarcoma can result as a long-term sequela of pelvic irradiation for uterine cervical cancer.

• Radiation Oncology Journal
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• v.32 no.3
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• pp.125-131
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• 2014

Purpose: We reviewed treatment outcomes and prognostic factors for patients with salivary ductal carcinoma (SDC) treated with surgery and postoperative radiotherapy from 2005 to 2012. Materials and Methods: A total of 16 patients were identified and 15 eligible patients were included in analysis. Median age was 61 years (range, 40 to 71 years) and 12 patients (80%) were men. Twelve patients (80%) had a tumor in the parotid gland, 9 (60%) had T3 or T4 disease, and 9 (60%) had positive nodal disease. All patients underwent surgery and postoperative radiotherapy. Postoperative radiotherapy was delivered using 3-dimensional conformal radiotherapy or intensity-modulated radiotherapy. Locoregional failure-free survival (LRFFS), distant failure-free survival (DFFS), progression-free survival (PFS), and overall survival (OS) were calculated using the Kaplan-Meier method. Differences in survival based on risk factors were tested using a log-rank test. Results: Median total radiotherapy dose was 60 Gy (range, 52.5 to 63.6 Gy). Four patients received concurrent weekly chemotherapy with cisplatin. Among 10 patients who underwent surgery with neck dissection, 7 received modified radical neck dissection. With a median follow-up time of 38 months (range, 24 to 105 months), 4-year rates were 86% for LRFFS, 51% for DFFS, 46% for PFS, and 93% for OS. Local failure was observed in 2 patients (13%), and distant failure was observed in 7 (47%). The lung was the most common involved site of distant metastasis. Conclusion: Surgery and postoperative radiotherapy in SDC patients resulted in good local control, but high distant metastasis remained a major challenge.

• Radiation Oncology Journal
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• v.31 no.4
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• pp.216-221
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• 2013

Purpose: The purpose of this retrospective study was to evaluate the efficacy and feasibility of short-course hypofractionated radiotherapy (RT) for the palliation of uterine cervical cancer. Materials and Methods: Seventeen patients with cancer of the uterine cervix, who underwent palliative hypofractionated 3-dimensional conformal radiotherapy between January 2002 and June 2012, were retrospectively analyzed. RT was delivered to symptomatic lesions (both the primary mass and/or metastatic regional lymph nodes). The total dose was 20 to 25 Gy (median, 25 Gy) in 5 Gy daily fractions. Results: The median follow-up duration was 12.2 months (range, 4 to 24 months). The median survival time was 7.8 months (range, 4 to 24 months). Vaginal bleeding was the most common presenting symptom followed by pelvic pain (9 patients). The overall response rates were 93.8% and 66.7% for vaginal bleeding control and pelvic pain, respectively. Nine patients did not have any acute side effects and 7 patients showed minor gastrointestinal toxicity. Only 1 patient had grade 3 diarrhea 1 week after completion of treatment, which was successfully treated conservatively. Late complications occurred in 4 patients; however, none of these were of grade 3 or higher severity. Conclusion: Short-course hypofractionated RT was effective and well tolerated as palliative treatment for uterine cervical cancer.

• Radiation Oncology Journal
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• v.37 no.2
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• pp.82-90
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• 2019

Purpose: To evaluate the results of hypofractionated radiotherapy (HFX) for early glottic cancer. Materials and Methods: Eighty-five patients with cT1-2N0M0 squamous cell carcinoma of the glottis who had undergone HFX, performed using intensity-modulated radiotherapy (IMRT, n = 66) and three-dimensional conformal radiotherapy (3D CRT, n = 19) were analyzed. For all patients, radiotherapy was administered at 60.75 Gy in 27 fractions. Forty-three patients received a simultaneous integrated boost (SIB) of 2.3-2.5 Gy per tumor fraction. Results: The median follow-up duration was 29.9 months (range, 5.5 to 76.5 months). All patients achieved complete remission at a median of 50 days after the end of radiotherapy (range, 14 to 206 days). The 5-year rates for locoregional recurrence-free survival was 88.1%, and the 5-year overall survival rate was 86.2%. T2 stage was a prognostic factor for locoregional recurrence-free survival after radiotherapy (p = 0.002). SIB for the tumor did not affect disease control and survival (p = 0.191 and p = 0.387, respectively). No patients experienced acute or chronic toxicities of ≥grade 3. IMRT significantly decreased the dose administered to the carotid artery as opposed to 3D CRT (V₃₅, p < 0.001; V₅₀, p < 0.001). Conclusions: Patients treated with HFX achieved acceptable locoregional disease control rates and overall survival rates compared with previous HFX studies. A fraction size of 2.25 Gy provided good disease control regardless of SIB administration.

• Proceedings of the Korean Geotechical Society Conference
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• 2008.03a
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• pp.1466-1483
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• 2008

This paper discusses the development of an up-to-date computerized CPT (Cone Penetration Test) based soil engineering classification system to provide geotechnical engineers with a handy tool for their daily design activities. Five CPT soil engineering classification systems are incorporated in this effort. They include the probabilistic region estimation and fuzzy classification methods, both developed by Zhang and Tumay, the Schmertmann, the Douglas and Olsen, and the Robertson et al. methods. In the probabilistic region estimation method, a conformal transformation is used to determine the soil classification index, U, from CPT cone tip resistance and friction ratio. A statistical correlation is established between U and the compositional soil type given by the Unified Soil Classification System (USCS). The soil classification index, U, provides a soil profile over depth with the probability of belonging to different soil types, which more realistically and continuously reflects the in-situ soil characterization, which includes the spatial variation of soil types. The CPT fuzzy classification on the other hand emphasizes the certainty of soil behavior. The advantage of combining these two classification methods is realized through implementing them into visual basic software with three other CPT soil classification methods for friendly use by geotechnical engineers. Three sites in Louisiana were selected for this study. For each site, CPT tests and the corresponding soil boring results were correlated. The soil classification results obtained using the probabilistic region estimation and fuzzy classification methods are cross-correlated with conventional soil classification from borings logs and three other established CPT soil classification methods.

• Journal of Radiation Protection and Research
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• v.40 no.3
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• pp.147-154
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• 2015

The scatter photons and photoneutrons from high energy photon beams (more than 10 MV) will increase the undesired dose to the patient and the staff working in linear accelerator room. This undesired dose which is found at out-of-field area can increase the probability of secondary malignancy. The purpose of this study is to determine the equivalent dose of scatter photons and neutrons generated by 3 different treatment techniques: 3D-conformal, intensity modulated radiation therapy (IMRT) and volumetric modulated arc therapy (VMAT). The measurement was performed using two types of the optically stimulation luminescence detectors (OSL and OSLN) in the Alderson Rando phantom that was irradiated by 3 different treatment techniques following the actual prostate cancer treatment plans. The scatter photon and neutron equivalent dose were compared among the 3 treatments techniques at the surface in the out-of-field area and the critical organs. Maximum equivalent dose of scatter photons and neutrons was found when using the IMRT technique. The scatter neutrons showed average equivalent doses of 0.26, 0.63 and $0.31mSv{\cdot}Gy^{-1}$ at abdominal surface region which was 20 cm from isocenter for 3D, IMRT and VMAT, respectively. The scattered photons equivalent doses were 6.94, 10.17 and $6.56mSv{\cdot}Gy^{-1}$ for 3D, IMRT and VMAT, respectively. For the 5 organ dose measurements, the scattered neutron and photon equivalent doses in out of field from the IMRT plan were highest. The result revealed that the scatter equivalent doses for neutron and photon were higher for IMRT. So the suitable treatment techniques should be selected to benefit the patient and the treatment room staff.

• Journal of the Korean Institute of Telematics and Electronics
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• v.27 no.10
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• pp.68-77
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• 1990

In this paper, a neural patten recognition method for the automatic circuit diagram reading system is proposed. The proposed procedure to recognize a deformed logic symbols is composed of three stages: feature detection, log mapping, and pattern classification. In the feature detection stage, a modified competitive learning algorithm where each pattern has the inhibition weight as well as the activation weight is developed. The global information of hand-written logic symbols is obtained by the feature detection neural network having both the inhibition and activation weights. The obtained global data is then transformed into a log space by the conformal mapping where according to the Schwartz's theory about the human visual signal process-ing, the degree of rotation and the scale change are mapped into the translation change. Logic symbols are finally classified by a three layer perceptron trained by the error back propagation algorithm. The computer simulation demonstrates that the proposed multistage neural network system can recognize well the deformed patterns of hand-written logic circuit diagrams.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.1
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• pp.15-22
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• 2007

A hybrid experimental-numerical method is presented for determining the stresses around a circular hole in a finite-width, tensile loaded plate. Measured fringe orders along straight lines provided the input information on the external boundary of the hybrid element. In order to see the effects of varying stress field, different numbers of terms in a power-series representation of the complex type conformal mapping stress function were tested. For qualitative comparison, actual isochromatic fringes were compared with reconstructed theoretical fringes using stress-optic law. For quantitative comparison, relative errors and standard deviations with respective to relative errors were analyzed for all measured points by changing the number of terms of stress function. The hybrid results are highly comparable with those predicted by FEA. The results show that this approach is effective and promising because isochromatic data along the straight lines in photoelasticity can be conveniently measured by use of phase shifting photoelasticity.

• Applied Chemistry for Engineering
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• v.29 no.1
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• pp.18-21
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• 2018

We report on the simple preparation method of large-scale structured catalysts by temperature-regulated chemical vapor deposition with a high cell-density ceramic honeycomb monolith. And the feasibility for dry reforming of methane catalysts was evaluated. The NiO/Cordierite (CDR) catalyst was prepared by controlling coating conditions at each temperature step, leading to a conformal deposition of NiO inside the cordierite honeycomb monolith with the cell density of 600 cpsi. The catalytic conversion of $CH_4$ and $CO_2$ for dry reforming of methane were about 83% and 90% with gas hourly space velocity of $10,000h^{-1}$ at $800^{\circ}C$, respectively. As a result, it exhibited that the temperature-regulated chemical vapor deposition method can be expedient for the preparation of large-scale structured catalysts.