• 제목/요약/키워드: concave structure

검색결과 98건 처리시간 0.024초

초미세 메모리 커패시터의 전극형성을 위한 식각 기술 (Patterning issues for the fabrication of sub-micron memory capacitors′ electrodes)

  • 김현우
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.160-160
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    • 2003
  • This paper describes some of the key issues associated with the patterning of metal electrodes of sub-micron (especially at the critical dimension (CD) of 0.15 $\mu\textrm{m}$) dynamic random access memory (DRAM) devices. Due to reactive ion etching (RIE) lag, the Pt etch rate decreased drastically below the CD of 0.20 $\mu\textrm{m}$ and thus the storage node electrode with the CD of 0.15 $\mu\textrm{m}$ could not be fabricated using the Pt electrodes. Accordingly, we have proposed novel techniques to surmount the above difficulties. The Ru electrode for the stack-type structure is introduced and alternative schemes based on the introduction of the concave-type structure using Pt or Ru as an electrode material are outlined.

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영역기반 해쉬구조를 이용한 효율적 삼각형 자동 요소망 생성 알고리듬 개발 (An Efficient Triangular Mesh Generation Algorithm using Domain-wise Hash Structure)

  • 김태주;조진연
    • 한국항공우주학회지
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    • 제32권9호
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    • pp.41-48
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    • 2004
  • 본 논문에서는 빠른 요소망 자료 처리를 위해 영역기반 해쉬구조를 개발하고 이에 기반한 효율적 삼각형 자동 요소망 생성 알고리듬을 제안하였다. 제안된 알고리듬에서는 신속하게 최적의 절점을 생성하고 삼각형 생성시 예외처리를 줄일 수 있도록 Advancing layer method 와 Delaunay 삼각화 방법이 함께 이용되었다. 본 알고리듬의 성능을 검증하기 위하여 개발된 2차원 자동 요소망 생성 프로그램을 이용하여 볼록한 모델, 오목한 모델 및 복잡한 형태의 모델에 대한 요소망 생성 테스트를 수행하고, 그 성능을 상용 소프트웨어와 비교하였다.

시내버스 노선망 위계구조의 효율성 분석 (대전시 사례분석을 중심으로) (Efficiency of the Hierarchical Structure for a Bus Network)

  • 이범규;장현봉
    • 대한교통학회지
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    • 제27권3호
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    • pp.49-58
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    • 2009
  • 대전시를 사례로 위계수준을 달리한 4개의 노선망 대안(대안 1은 위계가 없는 노선망, 대안 2, 대안 3, 대안 4는 각각 초급, 중급, 상급 수준의 위계를 가진 노선망)을 작성하고, 평가지표(차내통행시간비용, 대기시간비용, 환승페널티비용)를 산출하여 대안간 비교를 통해 효율성을 분석하였다. 차내통행시간비용은 위계가 높은 대안일수록 감소하다가 위계가 매우 높아지면 다시 증가하는 것으로나타났다. 대기시간 비용은 위계가 높은 대안일수록 큰폭으로 감소하며, 환승페널티비용은 위계가 높은 대안일수록 증가하는 것으로 나타났다. 종합적으로 볼 때 총통행비용은 위계가 있는 노선망이 위계가 없는 노선망에 비하여 낮은 것으로 나타나 위계구조를 가진 노선망의 효율성이 높은 것으로 나타났다. 위계가 있는 노선망 중에서는 위계가 높을수록 총통행비용이 감소하다가 위계가 지나치게 높아지게 되면 오히려 증가하는 특성을 보임으로써 중급수준의 위계를 가진 노선망이 가장 효율성이 높은 것으로 분석되었다.

다중 사용자 Massive MIMO 시스템의 파일럿 오버헤드를 고려한 최적 기지국 안테나 수 및 사용자 수 분석 (Optimal Numbers of Base Station Antennas and Users in Multiuser Massive MIMO Systems with Pilot Overhead)

  • 정민채;최수용
    • 한국통신학회논문지
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    • 제41권11호
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    • pp.1630-1638
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    • 2016
  • 본 논문에서는 다중 사용자(multiuser)가 다수의 기지국 안테나(MIMO, Multiple-Input and Multiple-Output)를 동시에 사용하는 다중 사용자 massive MIMO 시스템 환경을 고려한다. 다중 사용자를 동시에 지원하기 위해 기지국에서는 ZFBF(Zero-Forcing Beamforming) 기법을 고려하고 수신 신호 검출을 위해 파일럿 신호를 고려한 하향 링크 프레임 구조를 적용하여 평균 셀 용량을 도출한다. 평균 셀 용량은 기지국 안테나 수 및 사용자 수에 대해 오목 함수 (concave function)임을 수식적으로 증명하고, 오목 함수 특징을 통해 최적의 기지국 안테나 수 및 사용자 수를 도출한다. 실험 결과를 통해 수식적으로 도출한 최적 값을 검증하고, 최적값 기반의 평균 셀 용량은 송신 SNR(Signal to Noise Ratio)에 비례하여 증가함을 확인할 수 있다.

Kinetics and Mechanism of the Anilinolysis of Ethylene Phosphorochloridate in Acetonitrile

  • Barai, Hasi Rani;Lee, Hai-Whang
    • Bulletin of the Korean Chemical Society
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    • 제32권12호
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    • pp.4185-4190
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    • 2011
  • The nucleophilic substitution reactions of ethylene phosphorochloridate (1c) with substituted anilines ($XC_6H_4NH_2$) and deuterated anilines ($XC_6H_4ND_2$) are investigated kinetically in acetonitrile at $5.0^{\circ}C$. The anilinolysis rate of 1c involving a cyclic five-membered ring is four thousand times faster than its acyclic counterpart (1a: diethyl chlorophosphate) because of great positive value of the entropy of activation of 1c (${\Delta}S^{\neq}=+30\;cal\;mol^{-1}K^{-1}$ compared to negative value of 1a (${\Delta}S^{\neq}=-45\;cal\;mol^{-1}K^{-1}$) over considerably unfavorable enthalpy of activation of 1c (${\Delta}H^{\neq}=27.7\;kcal\;mol^{-1}$) compared to 1a (${\Delta}H^{\neq}=8.3\;kcal\;mol^{-1}$). Great enthalpy and positive entropy of activation are ascribed to sterically congested transition state (TS) and solvent structure breaking in the TS. The free energy correlations exhibit biphasic concave upwards for substituent X variations in the X-anilines with a break point at X = 3-Me. The deuterium kinetic isotope effects are secondary inverse ($k_H/k_D$ < 1) with the strongly basic anilines and primary normal ($k_H/k_D$ > 1) with the weakly basic anilines and rationalized by the TS variation from a dominant backside attack to a dominant frontside attack, respectively. A concerted $S_N2$ mechanism is proposed and the primary normal deuterium kinetic isotope effects are substantiated by a hydrogen bonded, four-center-type TS.

Effects of 3D contraction on pebble flow uniformity and stagnation in pebble beds

  • Wu, Mengqi;Gui, Nan;Yang, Xingtuan;Tu, Jiyuan;Jiang, Shengyao
    • Nuclear Engineering and Technology
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    • 제53권5호
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    • pp.1416-1428
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    • 2021
  • Pebble flow characteristics can be significantly affected by the configuration of pebble bed, especially for HTGR pebble beds. How to achieve a desired uniform flow pattern without stagnation is the top priority for reactor design. Pebbles flows inside some specially designed pebble bed with arc-shaped contraction configurations at the bottom, including both concave-inward and convex-outward shapes are explored based on discrete element method. Flow characteristics including pebble retention, residence-time frequency density, flow uniformity as well as axial velocity are investigated. The results show that the traditionally designed pebble bed with cone-shape bottom is not the most preferred structure with respect to flow pattern for reactor design. By improving the contraction configuration, the flow performance can be significantly enhanced. The flow in the convex-shape configuration featured by uniformity, consistency and less stagnation, is much more desirable for pebble bed design. In contrast, when the shape is from convex-forward to concave-inward, the flow shows more nonuniformity and stagnation in the corner although the average cross-section axial velocity is the largest due to the dominant middle pebbles.

N-polar면의 선택적 에칭 방법을 통한 Free-standing GaN 기판의 Bowing 제어 (Control of Bowing in Free-standing GaN Substrate by Using Selective Etching of N-polar Face)

  • 김진원;손호기;임태영;이미재;김진호;이영진;전대우;황종희;이혜용;윤대호
    • 한국전기전자재료학회논문지
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    • 제29권1호
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    • pp.30-34
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    • 2016
  • In this paper, we report that selective etching on N-polar face by EC (electro-chemical)-etching effect on the reduction of bowing and strain of FS (free-standing)-GaN substrates. We applied the EC-etching to concave and convex type of FS-GaN substrates. After the EC-etching for FS-GaN, nano porous structure was formed on N-polar face of concave and convex type of FS-GaN. Consequently, the bowing in the convex type of FS-GaN substrate was decreased but the bowing in the concave type of FS-GaN substrate was increased. Furthermore, the FWHM (full width at half maximum) of (1 0 2) reflection for the convex type of FS-GaN was significantly decreased from 601 to 259 arcsec. In the case, we confirmed that the EC-etching method was very effective to reduce the bowing in the convex type of FS-GaN and the compressive stress in N-polar face of convex type of FS-GaN was fully released by Raman measurement.

AAO를 이용한 나노 패턴 마스터 제작에 관한 연구 (Study on Fabrication of Highly Ordered Nano Patterned Master by Using Anodic Aluminum Oxidation)

  • 신홍규;권종태;서영호;김병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 춘계학술대회 논문집
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    • pp.368-370
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    • 2007
  • AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. The resulting good filled uniform nano molded structure through hot embossing molding process shows the validity of the fabricated nano pattern masters.

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Probabilistic analysis of seismically isolated elevated liquid storage tank using multi-phase friction bearing

  • Moeindarbari, Hesamaldin;Malekzadeh, Masoud;Taghikhany, Touraj
    • Earthquakes and Structures
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    • 제6권1호
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    • pp.111-125
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    • 2014
  • Multiple level performance of seismically isolated elevated storage tank isolated with multi-phase friction pendulum bearing is investigated under totally 60 records developed for multiple level seismic hazard analysis (SLE, DBE and MCE). Mathematical formulations involving complex time history analysis have been proposed for analysis of typical storage tank by multi-phase friction pendulum bearing. Multi-phase friction pendulum bearing represent a new generation of adaptive friction isolation system to control super-structure demand in different hazard levels. This isolator incorporates four concave surfaces and three independent pendulum mechanisms. Pendulum stages can be set to address specific response criteria for moderate, severe and very severe events. The advantages of a Triple Pendulum Bearing for seismic isolation of elevated storage tanks are explored. To study seismic performance of isolated elevated storage tank with multi-phase friction pendulum, analytical simulations were performed with different friction coefficients, pendulum radii and slider displacement capacities.

Nano-Second Periodically Poled Lithium Niobate Optical Parametric Oscillator with Planar Cavity Mirrors

  • Kim, Hong-Ki;Rhee, Bum--Ku
    • Journal of the Optical Society of Korea
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    • 제5권4호
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    • pp.136-139
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    • 2001
  • We investigated a high-output ower, periodically poled lithium niobate(PPLN) optical parametric oscillator(OPO) pumped by a Q-switched Nd:YAG laser. Given the low optical damage threshold and the limited aperture (0.5mm thick) of PPLN, we tried to maximize the signal output power in a linear cavity consisting of two flat mirrors with a loosely focused pump beam. It is found that this simple cavity structure allowed a robust OPO operation, which was not sensitive to alignment compared with the conventional ones using concave mirrors. A maximum energy of 100$\mu$J/pulse was achieved for the signal at 1.36${\mu}{\textrm}{m}$, while the oscillation threshold was 0.3 mJ/pulse for the pump at 1064 nm.