Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2003.11a
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- Pages.160-160
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- 2003
Patterning issues for the fabrication of sub-micron memory capacitors′ electrodes
초미세 메모리 커패시터의 전극형성을 위한 식각 기술
Abstract
This paper describes some of the key issues associated with the patterning of metal electrodes of sub-micron (especially at the critical dimension (CD) of 0.15
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