• Journal of the Korean Vacuum Society
• /
• v.5 no.4
• /
• pp.359-364
• /
• 1996

$SrTiO_3$ thin films were deposited on Pt/Ti/$SiO_2$/Si substrates at low temperatures below $300^{\circ}C$ by r.f. magnetron sputtering. The materials and the electrical properties of the deposited films were investigated with controlling deposition parameters such as substrate temperature(T_s) and positive substrate d.c. bias voltage. Stoichiometric $SrTiO_3$ films were obtained at Ts of $300^{\circ}C$, but Sr content in the film was less than that of a target when Ts was lower than $300^{\circ}C$, resulting in poor electrical properties. By introducing a positive substrate d.c. bias during deposition, the crystallinity and the dielectric properties of the films were markedly improved. 400 nm thick $SrTiO_3$, films deposited at $300^{\circ}C$ with a positive substrate d.c. bias of 20V showed a columnar structure with <211> crystallographic direction and a dielectric constant of 98.

• Maxillofacial Plastic and Reconstructive Surgery
• /
• v.33 no.2
• /
• pp.176-179
• /
• 2011

Adenomatoid odontogenic tumors represent 3 to 7 percent of all odontogenic tumors. These tumors are more common in the maxilla than the mandible and usually include the anterior region. Clinically, the most common symptom is painless swelling and the tumor is associated with an unerupted tooth, typically a maxillary or mandibular cuspid. The adenomatoid odontogenic tumor appears radiographically as a unilocular radiolucency around the crown of an impacted tooth, resembling a dentigerous cyst. More often, it contains fine calcifications. Histopathologically, there is a thick wall cystic structure with a prominent intraluminal proliferation of the odontogenic epithelium. The most striking pattern is varying-sized solid nodules of spindle-shaped or cuboidal epithelial cells forming nests or rosette-like structures with minimal stromal connective tissues. Conspicuous within the cellular areas are structures of tubular or duct-like appearance. The duct-like spaces are lined with a single row of cuboidal or low columnar epithelial cells, of which the ovoid nuclei are polarized away from the luminal surface. Small foci of calcification may also be scattered throughout the tumor. These have been interpreted as abortive enamel formations. In some adenomatoid odontogenic tumors, the material has been interpreted as dentoid or cementum.

• Applied Microscopy
• /
• v.23 no.1
• /
• pp.109-124
• /
• 1993

The prenatal development of thoracic spinal cord was studied by electron microscope in human embryos and fetuses ranging from 9mm to 260mm crown-rump length (5-30 weeks of gestational age). Ependymal cells in all fetal ages had conspicuous junctional complexes close to the lumen of the central canal into which microvilli and cilia projected. The ependymal cells contained numerous longitudinally arranged mitochondria, flattened cisternae of endoplasmic reticulum and Golgi complex. At 20 mm embryo, the floor and roof plates were composed of ependymoglial cells and undifferentiated neuroepithelial cells. The neuroepithelia of the sacral spinal cord were delineated from central medullary cord. By 100 mm fetus few undifferentiated neuroepithelial cells remained in the floor and roof plates. At 150 mm fetus, the whole central canal was formed by ciliated columnar epithelial cells containing cilia with basal bodies. The microvilli became tangled and club-shaped and formed a matted surface. The canal was filled with areas of dark and pale amorphous materials bounded by membrane-like structure. These two types of material were found throughout the whole central canal from 100 mm fetus onwards. By 260 mm fetus, microfibrils were first observed in the ependymal cells. In conclusion, it seems that early development and differentiation of central canal ependyma are simlar to that in other part of the brain ventricular system although ependymoglial cells are more prominent.

• Applied Microscopy
• /
• v.26 no.3
• /
• pp.305-313
• /
• 1996

Acinous gland cells (A, B, C, D and E-type cells) and duct cell (G-type cell) are observed in acinus and in duct of salivary gland of Korean Slug respectively by electron microscope. The type-A gland cells are numerous and are packed with medium electron dense granules (diameter, $3{\mu}m$) in cytoplasm. The circular shaped nucleolus and evenly developed chromatins are observed in the nucleus of type-B cell, and cytoplasm includes medium electron dense granules (diameter, $2.5X3.7{\mu}m$). The type-C gland cell has a round nucleus, and thin elongated-shaped heterochromatins are evenly distributed in the nucleoplasm and many net shaped endoplasmic reticulums and oval serous granules of middle electron density (diameter, $3.5X5{\mu}m$) fill the cytoplasm. The type-D gland cell is the largest and the most numerous of the gland cells consisting the salivary gland and heterochromatins in nucleus are well developed in the nucleoplasm. Most of granules (diameter, $0.8X2.5{\mu}m$) in cytoplasm are round, and look dark for the high electron density, and cytoplasm is filled with net-shaped endoplasmic reticulums. The type-E gland cells are rarely existent around the salivary gland, and the granules of those cells are irregular in shape and size and are vacuolized in cytoplasm. Intralobular salivary duct is composed of the high electron dense squamus endotheliums, while the other interlobular salivary duct is filled with irregular columnar epitheliums. The interlobular duct cell contains the high electron dense granules (size, $0.3{\sim}1.5{\mu}m$) in cytoplasm and those granules are secreted into cilia of salivary lumen.

• Journal of Veterinary Clinics
• /
• v.18 no.2
• /
• pp.116-123
• /
• 2001

This study was undertaken to find out the effect of Korean safflower seed powder on histopathological changes of cadmium toxicity in mice. Fifty BALB/c mice were divided into a control group(A) and four experimental groups(B, C, D, E) : group A received tap water and basal diet, group B received tap water and diet supplemented with 3% Korean safflower seed powder alone, group C received basal diet and 300 $\mu\textrm{g}$/g of cadmium, group D and E received basal diet supplemented with 3% and 10% Korean safflower seed powder and 300$\mu\textrm{g}$/g of cadmium respectively. Cadmium dissolved in tap water was used, and the Korean safflower seed powder were mixed with feed. All mice were dissected on the 56th day. Histopathological changes in liver, kidney, lung, cortical osseous tissue of femoral shaft, bone trabecular of femur, and epiphyseal cartilage plate of femur were observed. Group B showed no significant changes compared with the control group. But group C showed the unclearness of specific cells in liver, the loss of architecture and focal necrosis of hepatocyte, the glomerular swelling, degeneration and necrosis of convoluted tubules, desquamation and vacuolization of the greater part of the renal tubular epithelium, the marked congestion and thickness of the wall of alveolus in lung, slightly thinning of the cortical osseous tissue in femoral shaft, reduction of cancellous bone volume and marked narrowness of bone trabecular, marked thinning of epiphyseal cartilage plate and irregular arrangement of columnar structure of cartilage cells. On the other hand, Korean safflower seed powder-treated group showed a little convalescent changes and maintained their normal architectures in liner, kidney, lung, cortical osseous tissue of femoral shaft, bone trabecular of femur and epiphyseal cartilage plate of femur.

• Korean Journal of Materials Research
• /
• v.7 no.8
• /
• pp.654-659
• /
• 1997

HMDS[Si$_{2}$(CH$_{3}$)$_{6}$]단일 선구체를 이용하여 화학증착 방법으로 성장된 3C-SiC/Si(001) 이종접합박막의 특성을 XRD, 라만 스펙트럼 및 투과전자현미경(TEM)등을 이용하여 조사하였으며 시판되고 있는 상용 3C-SiC/Si 시편을 같은 방법으로 분석하여 특성을 비교검토하였다. $C_{3}$H$_{8}$-SiH$_{4}$-H$_{2}$혼합가스를 선구체로 이용하여 5$\mu\textrm{m}$두께로 성장된 상용 3C-SiC/Si 이종접합박막 시료의 XRD스펙트럼에서는 강한 3C-SiC(002)피크 만이 관찰되었으며, 라만 스펙트럼의 LO피크는 970nm$^{-1}$ 정도에서 강하게 나타났다. TEM 관찰 결과 다수의 전위, 쌍정, 적층결함 및 APB와 같은 결정결함들이 3C-SiC/Si 계면 근처에 집중적으로 분포되어 있었으며 성장된 박막은 단결정임을 확인할 수 있었다. 선구체로 HMDS를 사용하여 0.3$\mu\textrm{m}$ 및 2$\mu\textrm{m}$ 두께로 성장시킨 3C-SiC/Si 박막 시료의 XRD 스펙트럼은 다소 완만한 3C-SiC(002) 피크와 함께 3C-SiC(111)피크가 관찰되었으며, TEM으로 확인한 결과 소경각 결정립들이 약 5˚-10˚ 정도 방위차를 가지고 성장하여 기둥구조(columnar structure)를 이루고 있기 때문임을 알 수 있었다. 라만 스펙트럼 분석 결과 박막의 LO 피크가 967-969nm$^{-1}$정도로 다소 낮은 wavenumber쪽으로 이동되어 박막 내에 상당한 응력이 존재함을 확인할 수 있었다. 이와 같은 HMDS 3C-SiC박막의 특성은 성장 온도가 낮고 박막 성장용 가스로 사용한 HMDS 선구체에서 탄소가 과잉으로 공급되기 때문으로 제안되었다.다.

• Journal of the Korean Ceramic Society
• /
• v.31 no.12
• /
• pp.1429-1436
• /
• 1994

We have prepared Ba0.5Sr0.5TiO3 thin films on Si substrate without buffer layer. Deposition was carried out by off-axis rf magnetron sputtering method using Ba0.5Sr0.5TiO3 stoichiometric target. The substrate temperature was changed from 40$0^{\circ}C$ to $700^{\circ}C$ during deposition. As the substrate temperature increased, relative intensity of (110) peak increased up to $600^{\circ}C$, however preferred orientation changed from (110) to (h00) beyond $650^{\circ}C$ of substrate temperature. Deposited films showed microstructures with fine grains whose diameters are less than 100 nm, and columnar structure was observed in the cross-sectional SEM micrograph. AES depth profile showed no significant diffusion at the interfacial reaction area. The effective dielectric constant of films showed maximum value at $600^{\circ}C$, and the leakage current increased with increasing substrate temperature, which may be ascribed to the crystallization of amorphous phases at grain boundary.

• The Korean Journal of Ceramics
• /
• v.3 no.4
• /
• pp.263-268
• /
• 1997

RuO$_3$ thin films were deposited on Si(100) substrate at low temperatures by hot-wall metalorganic chemical vapor deposition. Bis(cyclopentadienyl) ruthenium, Ru$(C_5H_5)_2$, was used as the precursor RuO$_2$single phase was obtained at a low deposition temperature of 25$0^{\circ}C$ and the crystallinity of RuO$_2$thin films improved with increasing deposition temperature. RuO$_2$thin films grow perpendicularly to the substrate and show the columnar structure. The grain size of RuO$_2$films drastically increases with increasing the deposition temperature. The resistivity of the 180 nm-thick RuO$_2$thin films deposited at 27$0^{\circ}C$ was 136 $\mu$$\Omega$-cm and increased with decreasing film thickness. SrBi$_2Ta_2O_4$ thin films deposited by rf magnetron sputtering on the RuO$_2$bottom electrodes showed a fatigue-free characteristics up to ~10$^10$ cycles under 5 V bipolar square pulses and the remanent polarization, 2 P$_r$ and the coercive field, 2 E, were 5.2$\mu$C/$\textrm{cm}^2$ and 76.0 kV/cm, respectively, for an applied voltage of 5 V The leakage current density was about 7.0$\times$10$^{-6}$ A/$\textrm{cm}^2$ at 150 kV/cm.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.17 no.12
• /
• pp.1356-1361
• /
• 2004

High temperature superconducting coated conductor has a structure of ///. The buffer layer consists of multi-layer, this study reports the deposition method and optimal deposition conditions of YSZ(Yttria-stabilized zirconia) layer which plays a important part in preventing the elements of substrate from diffusing into the superconducting layer. YSZ layer was deposited by DC reactive sputtering technique using water vapor for oxidizing deposited elements on substrate. To investigate optimal thickness of YSZ film, four YSZ/CeO$_2$/Ni samples with different YSZ thickness(130 nm, 260 nm, 390 nm, and 650 nm) were prepared. The SEM image showed that the surface of YSZ layer was getting to be rougher as YSZ layer was getting thicker and the growth mode of YSZ layer was columnar grain growth. After CeO$_2$ layer was deposited with the same thickness of 18.3 nm on each four samples, YBCO layer was deposited by PLD method with the thickness of 300 nm. The critical currents of four samples were 0, 6 A, 7.5 A, and 5 A respectively. This shows that as YSZ layer is getting thicker, YSZ layer plays a good role as a diffusion barrier but the surface of YSZ layer is getting rougher.

• Journal of the Korean Magnetics Society
• /
• v.10 no.2
• /
• pp.54-61
• /
• 2000

The structural and magnetic properties of sputtered CoNbZr alloy films were investigated. In the as-deposited $Co_{87.0}$N $b_{8.5}$Z $r_{4.5}$ film deposited at 2 mTorr and 130 W, we observed the minimum coercivity of 1.75 Oe, the maximum resistivity of 3000 $\mu$Ω.cm and permeability of 1095 at 100 MHz. As the Ar pressure or the RF input power increased, the permeability of films at 100 MHz decreased and the coercivity increased because of the development of columnar structure and the formation of unstable amorphous phase. Permeability lower than 100 and coercivity of 60 Oe were observed in film deposited at 1 mTorr or 190 W due to the formation of crystalline phase. Magnetic anisotropy field of as-deposited films could be reduced by rotating field annealing for 120 minutes at 30$0^{\circ}C$. After the annealing, the anisotropy field (Hk) decreased from 1.43 Oe to 0.3 Oe and the permeability increased from 1095 to 1345 because defects in as-deposited films were eliminated by the annealing.aling.