Browse > Article
http://dx.doi.org/10.4313/JKEM.2004.17.12.1356

Study on Depositing Oxide Films on Ni Substrate for Superconducting Tape  

Kim, Ho-Sup (한국전기연구원 초전도재료연구그룹)
Shi, Dongqui (한국전기연구원 초전도재료연구그룹)
Ko, Rock-Kil (한국전기연구원 초전도재료연구그룹)
Chung, Jun-Ki (한국전기연구원 초전도재료연구그룹)
Ha, Hong-Soo (한국전기연구원 초전도재료연구그룹)
Song, Kyu-Jeong (한국전기연구원 초전도재료연구그룹)
Park, Chan (한국전기연구원 초전도재료연구그룹)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.17, no.12, 2004 , pp. 1356-1361 More about this Journal
Abstract
High temperature superconducting coated conductor has a structure of ///. The buffer layer consists of multi-layer, this study reports the deposition method and optimal deposition conditions of YSZ(Yttria-stabilized zirconia) layer which plays a important part in preventing the elements of substrate from diffusing into the superconducting layer. YSZ layer was deposited by DC reactive sputtering technique using water vapor for oxidizing deposited elements on substrate. To investigate optimal thickness of YSZ film, four YSZ/CeO$_2$/Ni samples with different YSZ thickness(130 nm, 260 nm, 390 nm, and 650 nm) were prepared. The SEM image showed that the surface of YSZ layer was getting to be rougher as YSZ layer was getting thicker and the growth mode of YSZ layer was columnar grain growth. After CeO$_2$ layer was deposited with the same thickness of 18.3 nm on each four samples, YBCO layer was deposited by PLD method with the thickness of 300 nm. The critical currents of four samples were 0, 6 A, 7.5 A, and 5 A respectively. This shows that as YSZ layer is getting thicker, YSZ layer plays a good role as a diffusion barrier but the surface of YSZ layer is getting rougher.
Keywords
Buffer layer; YSZ; YBCO; DC reactive sputtering;
Citations & Related Records
연도 인용수 순위
  • Reference
1 A. Goyal, D. P. Norton, J. D. Budai, M. Paranthaman, E. D. Specht, D. M. Kroeger, D. K. Christen, Q. He, B. Saffian, F. A. List, D. F. Lee, P. M. Martin, C. E. Klabunde, E. Hartfield, and V. K. Sikka, 'High Critical Current Density Superconducting Tapes by Epitaxial Deposition of $YBa_2Cu_3Ox$ Thick Films on Biaxially Textured Metals', Appl. Phys. Lett., Vol. 69, No. 12, p. 1795, 1996.   DOI   ScienceOn
2 Nicolas Martin, Christophe Rousselot, 'Use of a theoretical model to investigate RF and DC reactive sputtering of titanium and chromium oxide coatings', Surface and Coatings Technology, Vol. 110, p, 158, 1998   DOI   ScienceOn
3 T. J. Jackson, B. A. Glowacki, and J. E. Evetts, 'Oxidation thermodynamics of metal substrates during the deposition of buffer layer oxides', Physica C, Vol. 296, p. 215, 1998   DOI   ScienceOn
4 고락길, 정준기, 김호섭, 하홍수, Dongqi Shi, 송규정, 박찬, 유상임, 문승현, 김영철, '연속 공정 PVD 방법에 의한 Coated conductor 제조', 전기전자재료학회논문지, 17권, 11호, p. 1241, 2004
5 D. P. Norton, A. Goyal, J. D. Budai, D. K. Christen, D. M. Kroeger, E. D. Specht, Q. He, B. Saffian, M. Paranthman, C. E. Klabunde, D. F. Lee, B. C. Sales, and F. A. List, 'Epitaxial $YBa_2Cu_3O_7$ on biaxially tex-tured (001): An approach to superconducting tapes with high critical current density', Science, Vol. 274, p. 755, 1996   DOI   ScienceOn
6 Y. Iijima, N. Tanabe, O. Kohno, and Y. Ikeno, 'In-plane Aligned $YBa_2Cu_3O_7-x$Thin Films Deposited on Polycrystalline Metallic Substrates', Appl. Phys. Lett., Vol. 60(6), p. 769, 1992   DOI