• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• Steel and Composite Structures
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• v.39 no.1
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• pp.65-80
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• 2021

Irregularities of a building in plan and elevation, which results in the change in stiffness on different floors highly affect the seismic performance and resistance of a structure. This study motivated to investigate the seismic responses of high-rise steel-frame buildings of twelve stories with various stiffness irregularities. The building has five spans of 3200 mm distance in both X- and Z-directions in the plan. The design package SAP2000 was adopted for the design of beams and columns and resulted in the profile IPE500 for the beams of all floors and box sections for columns. The column cross-section dimensions vary concerning the number of the story; one to three: 0.50×0.50×0.05m, four to seven: 0.45×0.45×0.05 m, and eight to twelve: 0.40×0.40×0.05 m. Real recorded ground accelerations obtained from the Vrancea earthquake in Romania together with dead and live loads corresponding to each story were considered for the applied load. The model was validated by comparing the results of the current method and literature considering a three-bay steel moment-resisting frame of eight-story height subject to seismic load. To investigate the seismic performance of the buildings, the time-history analysis was performed using ABAQUS. Deformed shapes corresponding to negative and positive peaks were provided followed by the story drifts and fragility curves which were used to examine the probability of collapse of the building. From the results, it was concluded that regular buildings provided a seismic performance much better than irregular buildings. Furthermore, it was observed that building with torsional irregularity was more vulnerable to seismic failure.

• Journal of The Korean Astronomical Society
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• v.33 no.2
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• pp.111-121
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• 2000

Many models of globular cluster formation assume the presence of cold dense clouds in early universe. Here we re-examine the Fall & Rees (1985) model for formation of proto-globular cluster clouds (PGCCs) via thermal instabilities in a protogalactic halo. We first argue, based on the previous study of two-dimensional numerical simulations of thermally unstable clouds in a stratified halo of galaxy clusters by Real et al. (1991), that under the protogalactic environments only nonlinear (${\delta}{\ge}1$) density inhomogeneities can condense into PGCCs without being disrupted by the buoyancy-driven dynamical instabilities. We then carry out numerical simulations of the collapse of overdense douds in one-dimensional spherical geometry, including self-gravity and radiative cooling down to T = $10^4$ K. Since imprinting of Jeans mass at $10^4$ K is essential to this model, here we focus on the cases where external UV background radiation prevents the formation of $H_2$ molecules and so prevent the cloud from cooling below $10^4$ K. The quantitative results from these simulations can be summarized as follows: 1) Perturbations smaller than $M_{min}\~(10^{5.6}\;M{\bigodot})(nh/0.05cm^{-3})^{-2}$ cool isobarically, where nh is the unperturbed halo density, while perturbations larger than $M_{min}\~(10^8\;M{\bigodot})(nh/0.05cm^{-3})^{-2}$ cool isochorically and thermal instabilities do not operate. On the other hand, intermediate size perturbations ($M_{min} < M_{pgcc} < M_{max}$) are compressed supersonically, accompanied by strong accretion shocks. 2) For supersonically collapsing clouds, the density compression factor after they cool to $T_c = 10^4$ K range $10^{2.5} - 10^6$, while the isobaric compression factor is only $10^{2.5}$. 3) Isobarically collapsed clouds ($M < M_{min}$) are too small to be gravitationally bound. For supersonically collapsing clouds, however, the Jeans mass can be reduced to as small as $10^{5.5}\;M_{\bigodot}(nh/0.05cm^{-3})^{-1/2}$ at the maximum compression owing to the increased density compression. 4) The density profile of simulated PGCCs can be approximated by a constant core with a halo of $p{\infty} r^{-2}$ rather than a singular isothermal sphere.

• International Journal of High-Rise Buildings
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• v.10 no.4
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• pp.345-364
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• 2021

Developments in the understanding of fire behaviour for large open-plan spaces typical of tall buildings have been greatly outpaced by the rate at which these buildings are being constructed and their characteristics changed. Numerous high-profile fire-induced failures have highlighted the inadequacy of existing tools and standards for fire engineering when applied to highly-optimised modern tall buildings. With the continued increase in height and complexity of tall buildings, the risk to the occupants from fire-induced structural collapse increases, thus understanding the performance of complex structural systems under fire exposure is imperative. Therefore, an accurate representation of the design fire for open-plan compartments is required for the purposes of design. This will allow for knowledge-driven, quantifiable factors of safety to be used in the design of highly optimised modern tall buildings. In this paper, we review the state-of-the-art experimental research on large open-plan compartment fires from the past three decades. We have assimilated results collected from 37 large-scale compartment fire experiments of the open-plan type conducted from 1993 to 2019, covering a range of compartment and fuel characteristics. Spatial and temporal distributions of the heat fluxes imposed on compartment ceilings are estimated from the data. The complexity of the compartment fire dynamics is highlighted by the large differences in the data collected, which currently complicates the development of engineering tools based on physical models. Despite the large variability, this analysis shows that the orders of magnitude of the thermal exposure are defined by the ratio of flame spread and burnout front velocities (V_S / V_BO), which enables the grouping of open-plan compartment fires into three distinct modes of fire spread. Each mode is found to exhibit a characteristic order of magnitude and temporal distribution of thermal exposure. The results show that the magnitude of the thermal exposure for each mode are not consistent with existing performance-based design models, nevertheless, our analysis offers a new pathway for defining thermal exposure from realistic fire scenarios in large open-plan compartments.