• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.114-114
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• 2008

반도체 device의 성능을 향상시키기 위하여 패턴은 더욱 더 고 집적화 되고 배선 또한 다층배선 구조를 가지게 되었으며 요구되는 선폭 또한 더욱 미세화 되어 CMP 공정이 도입되게 되었다. 이러한 CMP 공정에 사용되는 소모품으로는 크게 세 가지의 중요한 부분으로 나눌 수 있다. 그것은 slurry와 pad, conditioner이다. 그중에 pad conditioning 공정은 CMP 공정시 pad의 마모에 따라 감소하는 removal rate(RR)값을 회복시키기 위한 공정으로 마모된 pad의 표면을 활성화 시켜주는 중요한 공정이다. 하지만 pad conditioning 공정을 장시간 진행하게 되면 conditioner 표면에 오염물이 발생하게 되며, 오염물로 인하여 wafer표면에 scratch 및 defect을 발생시키는 원인이 될 수 있다. 이러한 문제점을 보완하기 위하여 conditioner의 표면을 변화시켜 공정중의 오염이 발생하지 않도록 하는 것이 중요하다. 본 논문에서는 oxide CMP 실험을 통하여 conditioner표면에 오염물이 발생함을 확인하였으며 energy dispersive spectroscopy(EDS) 분석을 통하여 주오염물의 성분이 oxide slurry중 silica임을 확인하였다. Conditioner의 표면을 소수성으로 만들기 위하여 self assembled monolayer(SAM) 방법을 이용하여 표면에 코팅을 하였으며, 소수성 박막이 코팅된 conditioner와 코팅되지 않은 conditioner의 비교 실험을 통하여 오염 정도를 비교하였다.

• Membrane and Water Treatment
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• v.8 no.4
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• pp.311-321
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• 2017

Hydrophilic and high modulus PPTA molecules were incorporated into PVDF matrix via the in situ polymerization of PPD and TPC in PVDF solution. PPTA/PVDF/NWF blend membrane was prepared through the immersion precipitation phase inversion method and nonwoven coating technique. The membrane integrated technology including PPTA/PVDF/NWF blend membrane and reverse osmosis (RO) membrane was employed to treat the polyester/viscose spunlace nonwoven process wastewater. During the consecutive running of six months, the effects of membrane integrated technology on the COD, ammonia nitrogen, suspended substance and pH value of water were studied. The results showed that the removal rate of COD, ammonia nitrogen and suspended substance filtered by PPTA/PVDF blend membrane was kept above 90%. The pH value of the permeate water was about 7.1 and the relative water flux of blend membrane remained above 90%. After the deep treatment of RO membrane, the permeate water quality can meet the water circulation requirement of spunlace process.

• Applied Chemistry for Engineering
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• v.19 no.3
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• pp.270-276
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• 2008

$N_2$ doped $TiO_2$ nano-sized powder was prepared using a DC arc plasma jet and investigated with XRD, BET, SEM, TEM, and photo-catalytic decomposition. Recently the research interest about the nano-sized $TiO_2$ powder has been increased to improve its photo-catalytic activity for the removal of environmental pollutants. Nitrogen gas, reacting gas, and titanium tetrachloride ($TiCl_4$) were used as the raw materials and injected into the plasma reactor to synthesize the $N_2$ doped $TiO_2$ power. The particle size and XRD peaks of the synthesized powder were analyzed as a function of the flow rate of the nitrogen gas. Also, the characteristics of the photo-catalytic decomposition using the prepared powder were studied. For comparing the photo-catalytic decomposition performance of $TiO_2$ powder with that of $TiO_2$ coating, $TiO_2$ thin films were prepared by the spin coating and the pulsed laser deposition. For the results of the acetaldehyde decomposition, the photo-catalytic activity of $TiO_{2-x}N_x$ powder was higher than that of the pure $TiO_2$ powder in the visible light region. For the methylene blue decomposition, the decomposition efficiency of $TiO_2$ powder was also higher than that of $TiO_2$ film.

• Journal of the Korean institute of surface engineering
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• v.53 no.6
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• pp.271-279
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• 2020

Non-ferrous metals, widely used in the mechanical industry, are difficult to machine, particularly by drilling and tapping. Since non-ferrous metals have a strong tendency to adhere to the cutting tool, the tool life is greatly deteriorated. Diamond-like carbon (DLC) is one of the promising candidates to improve the performance and life of cutting tool due to their low frictional property. In this study, a sacrificial DLC layer is applied on the hard nitride coated drill tool to improve the durability. The DLC coatings are fabricated by controlling the acceleration voltage of the linear ion source in the range of 0.6~1.8 kV. As a result, the optimized hardness(20 GPa) and wear resistance(1.4 x 10-8 ㎣/N·m) were obtained at the 1.4 kV. Then, the optimized DLC coating is applied as an sacrificial layer on the hard nitride coating to evaluate the performance and life of cutting tool. The Vickers hardness of the composite coatings were similar to those of the nitride coatings (AlCrN, AlTiSiN), but the friction coefficients were significantly reduced to 0.13 compared to 0.63 of nitride coatings. The drilling test were performed on S55C plate using a drilling machine at rotation speed of 2,500 rpm and penetration rate of 0.25 m/rev. The result showed that the wear width of the composite coated drills were 200 % lower than those of the AlCrN, AlTiSiN coated drills. In addition, the cutting forces of the composite coated drills were 13 and 15 % lower than that of AlCrN, AlTiSiN coated drills, respectively, as it reduced the aluminum clogging. Finally, the application of the DLC sacrificial layer prevents initial chipping through its low friction property and improves drilling quality with efficient chip removal.

• Korean Journal of Weed Science
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• v.12 no.3
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• pp.200-222
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• 1992

The results of recent researches for improvement of seedling stand in direct seeded rice on the dry paddy in Korea were summarized as the following ; a variety to be cultivated should be chosen the characteristics of high percentage germination under low temperature, shorter period of shoot emergence, and better growth of the mesocotyl and shoots. Meanwhile, there was 40% increase in seedling stand at the treatment of removal of the seed awn under using the drill seeder. After seeding the rice seed covered with soil of 3cm depth was better seedling emergence and also there was the hightest seedling emergence at the 70% of moisture content of the soil. In addition, the application of the Release containing GA 10% enabled to increase the seedling stand and furthermore it was effective under deep seeding depth. The optimum seeding date should be seeded around May 10 when mean air temperature is above 12-13$^{\circ}C$ so that may establish more less 70% in seedling stand. Based on an appropriate seedling stand of 150/$m^2$, the optimum seeding rate was 5kg/10a. It was the best in seeding method using drill seeder and the most desirable recommended seeding method was the drill seeder in terms of seedling stand. In order to improve seedling stand water management was more effective in canal irrigation and in drainage at 6hr after irrigation following by the seeding process. On the other hand, for the increase of seedling stand under flooded condition a variety might have characters being better germination at low concentration of dissolved oxygen and vertically deeper growing of the crown root. Also, seedling stand was able to increase with the seed coating of $CaO_2$in the flooded soil. It was possible to be seeded on the early part of May being mean air temperature of avove 10$^{\circ}C$ and the optimum seeding rate was 5kg/10a. For an effective water management water would be flooded up to 3cm depth for 2-3 weeks after seeding. The rice plant grown under the direct seeded cultivation might be not so much strong in lodging resistance compared to that grown under the transplanting and moreover direct seeded rice cultivation under flooded condition would be more weak growth of the rice plant than that on dry paddy. Meanwhile, the lodging would be affected by the seeding rate, the soil depth after seeding. and seeding method even in the same variety. In particular, roots in the lodging pattern of direct seeded rice cultivation under flooded condition were largely distributed on the soil surface so that resulted easily in the lodging. In general, the lodging resistance would be greater as seeding rate and amount of N fertilizer application are lower and soil depth after seeding is higher. Among the introduction of different seeding method the high ridged drill seeding method on dry paddy soil resulted in the lowest in the lodging index and also it was lower in the drill seeding method than in the scattering seeding method under flooded condition. In case of more than 150 seedlings per $m^2$ there was a severe lodging due to high lodging index at the 3rd and 4th internodes. The effective lodging prevention was able to at the treatment of the Inabenfide at 45 days before heading and the Uniconazol at 15 days before heading which caused the shortage by 10-15cm in culm length. Also, fertilizer management using split application of nitrogen would be contributed the reduction of lodging at the rate of 20-30-20-20-10%(basal-5th leaf stage-7th leaf stage-panicle initiation stage-heading stage) on the dry paddy soil.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.2
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• pp.95-101
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• 2017

In this paper, the sizing removal condition for the pretreatment of composite materials is obtained numerically by applying an image processing algorithm and nickel-plated carbon fiber is fabricated by a dry process method to enhance its electromagnetic shielding performance. Sizings that are wrapped in a polymer type material during the manufacturing of carbon fiber should be removed for dry coating. A numerical value, that is the correlation, can be obtained by determining the regular pattern of the carbon fiber in the image taken by a scanning electron microscope (SEM) after the sizing is removed. The application of the proposed numerical method to the SEM image of the fiber after the sizing is removed with solution, compressed air, solution and compressed air (hybrid), showed that this method of eliminating the sizing is superior to the hybrid method. Then, by spreading the carbon fiber roll with the sizing removed, we were able to produce nickel plated carbon fiber by the roll-to-roll sputtering method. The electromagnetic shielding performance of the fabricated 30, 40 and 100 nickel coated carbon fibers was measured. The Korea Advanced Institute of Science and Technology evaluated the electromagnetic shielding performance of the 100 nickel-coated carbon fiber to have a maximum value of 73.2 (dB) and a minimum value of 66.7 (dB). This is similar to the electromagnetic shielding rate of copper and shows that this material can be used as a cable for EV / HEV automobiles.

• Journal of Environmental Health Sciences
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• v.47 no.6
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• pp.540-547
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• 2021

Background: Indoor air pollutants are caused by a number of factors, such as coming in from the outside or being generated by internal activities. Typical indoor air pollutants include nitrogen dioxide and carbon monoxide from household items such as heating appliances and volatile organic compounds from building materials. In addition there is carbon dioxide from human breathing and bacteria from speaking, coughing, and sneezing. Objectives: According to recent research results, most indoor air pollution is known to be greatly affected by internal factors such as burning (biomass for cooking) and various pollutants. These pollutants can have a fatal effect on the human body due to a lack of ventilation facilities. Methods: We fabricated a polydopamine (PDA) layer with Ti substrates as a coating on supported glass fiber fabric to enhance its photo-activity. The PDA layer with TiO₂ was covalently attached to glass fiber fabric using the drop-casting method. The roughness and functional groups of the surface of the Ti substrate/PDA coated glass fiber fabric were verified through infrared imaging microscopy and field emission scanning electron microscopy (FE-SEM). The obtained hybrid Ti substrate/PDA coated glass fiber fabric was investigated for photocatalytic activity by the removal of ammonia and an epidermal Staphylococcus aureus reduction test with lamp (250 nm, 405 nm wavelength) at 24℃. Results: Antibacterial properties were found to reduce epidermal staphylococcus aureus in the Ti substrate/PDA coated glass fiber fabric under 405 nm after three hours. In addition, the Ti substrate/PDA coated glass fiber fabric of VOC reduction rate for ammonia was 50% under 405 nm after 30 min. Conclusions: An electron-hole pair due to photoexcitation is generated in the PDA layer and transferred to the conduction band of TiO₂. This generates a superoxide radical that degrades ammonia and removes epidermal Staphylococcus aureus.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.