• 대한기계학회논문집
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• 제14권2호
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• pp.430-439
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• 1990

Steady state turbulent airflow and unsteady characteristics of generation, transportation, and recovery behavior of contaminate particles in the simplified 2 dimensional Vertical Laminar Flow (VLF) type clean room was numerically simulated using the low Reynolds number k-over bar.epsilon- turbulent model. Characteristics of airflow in VLF type clean room are greatly affected by the recirculation zone around working surface. The recirculation zone must be considered at the time of clean room design because the recirculation zone whose area increases with increment of inlet velocity exerts bad influence upon the performance of clean room in terms of particle contamination. The location of maximum particle concentration changes from the location of particle source to the recirculation zone, while averaged particle concentration is reduced exponentially with time. Recovery time of clean room with spontaneous particle generation source is inversely proportional to inlet velocity. We introduce nondimensionalized recovery time through the dimensional analysis, which can indicates the general performance of clean room with design structure change. It was identified that .tau. is independent of inlet velocity and background concentration. Therefore .tau. can be the simple factor to compare the different structure of clean room in terms of dynamic response to contamination and becomes larger with better structure of clean room.

• 대한안전경영과학회:학술대회논문집
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• 대한안전경영과학회 2006년도 추계공동학술대회
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• pp.325-336
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• 2006

This research analyzes clean room major fire prevention standard of clean Room (FM, IRI, and NFPA Code), the structure of Performance-Based Fire Safety Design (PBD) applied the korean fire industry situation. Performance-Based Fire Safety can operate effectively the performance of fire protection equipment & building design, so the fitness of fire safety system can be embodied by operating this. moreover, cost to be consume fire safety of real building can reduce and Performance-Based Fire Safety is considered to important technique in fire protection field. A fire in a clean room may cause a serious loss by spreading smoke particles. We will be investigated by using a computational fluid dynamics, for loss prevention by smoke spreading from one fire area to another for clean room and compared the Performance-Based Fire Safety Design with the prescriptive code design. The methodology of fire safety performance-based fire safety design and guarantee of many kinds design skill of fire system and developing design procedure will be very serious one in order to improve efficiency of domestic system. Therefore, This research will be contributing to secure safety of clean room and to set up the performance-based fire safety design in Korea by regulation for the performance-based fire safety design effectively.

• 대한안전경영과학회지
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• 제8권5호
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• pp.211-229
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• 2006

This research analyzes clean room major fire prevention standard of clean Room(FM, IRI, and NFPA Code), the structure of Performance-Based Fire Safety Design(PBD) applied the korean fire industry situation. Performance-Based Fire Safety can operate effectively the performance of fire protection equipment & building design, so the fitness of fire safety system can be embodied by operating this. moreover, cost to be consume fire safety of real building can reduce and Performance-Based Fire Safety is considered to important technique in fire protection field. A fire in a clean room may cause a serious loss by spreading smoke particles. We will be investigated by using a computational fluid dynamics, for loss prevention by smoke spreading from one fire area to another for clean room and compared the Performance-Based Fire Safety Design with the prescriptive code design. The methodology of fire safety performance-based fire safety design and guarantee of many kinds design skill of fire system and developing design procedure will be very serious one in order to improve efficiency of domestic system. Therefore, This research will be contributing to secure safety of clean room and to set up the performance-based fire safety design in Korea by regulation for the performance-based fire safety design effectively.

• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.25-30
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• 2003

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. This high technology equipments require very strict environmental vibration criteria in proportion to the accuracy of the manufacturing. In this paper, the dynamic analysis and modal test were performed to evaluate the dynamic properties of the constructing clean room structure. Based on these results, a structural dynamic modification(SDM) were required to satisfiy the vibration allowable limit for pression machine. Therefore, in order to improve the dynamic stiffness of clean room structure, the VSD system which can control the force applied on structure, were adopted and its utility were proved from dynamic test results of the improved structure after a modification work.

• 산업경영시스템학회지
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• 제19권40호
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• pp.341-349
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• 1996

In this paper, we deal with the problem of maintenance policies for an air filter system in clean room. Two types of maintenance policies are considered, one based on the reliability of equipment and the other one determined by the total cost including minimal repair cost. For these models, we obtain the structure of the optimal maintenance Policy which minimize the total cost. Finally we give the numerical example.

• 한국가스학회지
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• 제25권6호
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• pp.35-44
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• 2021

반도체 공정 중 PR (Photo Resist) 공정은 여러 인화성 물질을 혼합하여 사용하는 공정으로, 공정 장비가 Clean Room 내 설치되어 인화성 물질이 누출되는 경우 질식, 화재, 폭발 사고로 이어질 위험성이 크므로, 물질 누출시 발생할 수 있는 사고에 대한 영향을 분석하고, 작업자들의 안전을 보장할 수 있는지 평가하는 것이 필요하다. 본 연구는 FLACS CFD - Fire Module을 이용하여 10개의 누출, 화재 시나리오에 대한 CFD Simulation을 통해 Clean Room 내부 가상으로 설정한 Monitor Point에서의 복사열 및 온도 변화 값을 확인하였다. Clean Room 내부에서 발생한 화재는 층간 구조물에 높은 복사열을 전달하지만, 그 범위가 상당히 제한적이며, 단일 화재 사고로 인해 붕괴될 가능성이 희박하다. 화재 사고로 인해 탈출구로 이어지는 2 곳의 계단이 동시에 높은 복사열에 노출되는 시나리오는 없어, 화재 발생시 작업자가 탈출 가능하였다. 또한 복사열 및 온도 상승의 수준은 아래층으로 이동하면서 급격하게 낮아지는 것을 확인하였으며, API 520의 기준에 따라 작업자가 30초 동안 버틸 수 있는 복사열인 6.31 kW/m²에 노출된 작업자도 화재가 발생한 Clean Room 내부에서 충분히 탈출할 수 있음을 확인하였다.

• 한국산업보건학회지
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• 제25권2호
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• pp.202-210
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• 2015

Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

• 제어로봇시스템학회논문지
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• 제17권6호
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• pp.566-572
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• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• 대한기계학회논문집A
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• 제26권6호
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• pp.1178-1186
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• 2002

Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker. Up to now, stockers typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker. This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, in order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and experiment was also conducted using actual clean stocker for TFT-LCD manufacturers and CFDesign, was used for simulating airflow in stocker. As a result, open ratios of exits can be obtained by the analysis of static pressure regain and was verified by experiment and simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.

• 청정기술
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• 제26권4호
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• pp.257-262
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• 2020

Two-dimensional (2D) metal organic framework (MOF) nanosheets (NSs) have recently gained considerable interest owing to their structural advantages, such as large surface area and exposed active sites. Two different types of 2D MOF NSs have been reported, including inherently layered MOFs and non-layered ones. Although several studies on inherently layered 2D MOFs have been reported, non-layered 2D MOFs have been rarely studied. This may be because the non-layered MOFs have a strong preference to form three-dimensionality intrinsically. Furthermore, the non-layered MOFs are typically synthesized in the presence of the surfactant or modulator, and thus developing facile and clean synthetic routes is highly pursued. In this study, a facile and clean synthetic methodology to grow non-layered 2D cobalt-based zeolitic imidazolate framework (ZIF-67) NSs is suggested, without using any surfactant and modulator at room temperature. This is achieved by directly converting ultrathin α-Co(OH)2 layered hydroxide salt (LHS) NSs into non-layered 2D ZIF-67 NSs. The comprehensive characterizations were conducted to elucidate the conversion mechanism, structural information, thermal stability, and chemical composition of the non-layered 2D ZIF-67. This facile and clean approach could produce a variety of non-layered 2D MOF NS families to extend potential applications of MOF materials.