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An Assessment of Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms (반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 평가)

Kim, Ki-Cheol;Song, Gen-Soo;Kim, Hyung-Tae;Yoo, Kyung-Hoon;Shin, Dae-Kun;Park, Dug-Jun
- Korean Journal of Air-Conditioning and Refrigeration Engineering
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- v.25 no.2
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- pp.55-63
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- 2013
For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type outdoor air conditioning system, an air washer is often introduced instead of the steam generator in the outdoor air conditioning system, which can be called a water spray humidification type outdoor air conditioning system. Therefore, the assessment and comparison of the annual energy consumed in the steam humidification type and the water spray humidification type outdoor air conditioning systems deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the comparison of the numerical results that the water spray humidification type outdoor air conditioning system can reduce about 30% of annual electric power consumption of the steam humidification type outdoor air conditioning system.
https://doi.org/10.6110/KJACR.2013.25.2.055 인용 PDF KSCI

Development of virtual reality contents for vocational education Research on Semiconductor production line Clean Room Tour (직업교육을 위한 가상현실 콘텐츠 구현 반도체 생산라인 클린룸 투어 VR 중심으로)

Lee, Sun-Min
- The Journal of the Convergence on Culture Technology
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- v.9 no.1
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- pp.191-197
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- 2023
The purpose of the study was to provide an educational environment for designing and producing virtual reality practice contents that can be used in semiconductor production lines and clean rooms. Through this process, the user can acquire practical knowledge through experiences close to reality, such as experiencing the main semiconductor solar cell manufacturing facilities as well as procedural knowledge before and after entering the clean room.. In particular, it provides users with an immersion experience close to reality by creating an environment for experiential content necessary for semiconductor and solar cell manufacturing processes and clean room entrance procedure experiential content, which is expected to improve education immersion, realism, cost, efficiency, and education satisfaction. Depending on the characteristics of Dangerous, Impossible, Counter-productive etc, immersive content makes learners immersed in the learning content, induces proactive/active learning, and embodies the learning content, resulting in positive results in the field of improving educational effectiveness.
https://doi.org/10.17703/JCCT.2023.9.1.191 인용 PDF