• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.25-30
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• 2003

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. This high technology equipments require very strict environmental vibration criteria in proportion to the accuracy of the manufacturing. In this paper, the dynamic analysis and modal test were performed to evaluate the dynamic properties of the constructing clean room structure. Based on these results, a structural dynamic modification(SDM) were required to satisfiy the vibration allowable limit for pression machine. Therefore, in order to improve the dynamic stiffness of clean room structure, the VSD system which can control the force applied on structure, were adopted and its utility were proved from dynamic test results of the improved structure after a modification work.

• KIEAE Journal
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• 제4권3호
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• pp.187-194
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• 2004

In many other buildings, hospital is very important because of its function and purpose. A proper building service systems including heating, cooling, ventilation and plumbing systems is required in hospial. Besides, a special systems like medical gas, vacuum cleaning systems are required to prevent contamination as well as cure a patient in hospital. Ventilation is very important method to keep the indoor pressure and clean class. There are some specific rooms to consider clean class and indoor pressure in the general hospital. In this article, specific rooms were set to operating room, laboratory, ICU, isolation unit, and sterilizer room. In this case study, design factors of ventilation system, including air changes of OA and TA, indoor pressure, clean class, filter, and material of system, of specific rooms in hospital were proposed through a literature research and a design examples review.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2006년도 하계학술발표대회 논문집
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• pp.988-992
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• 2006

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.

• 산업경영시스템학회지
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• 제19권40호
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• pp.341-349
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• 1996

In this paper, we deal with the problem of maintenance policies for an air filter system in clean room. Two types of maintenance policies are considered, one based on the reliability of equipment and the other one determined by the total cost including minimal repair cost. For these models, we obtain the structure of the optimal maintenance Policy which minimize the total cost. Finally we give the numerical example.

• 설비공학논문집
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• 제4권2호
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• pp.72-81
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• 1992

Experimental study on air ionization phenomena has been conducted to analyze the propagation behavior and dischargeability of polarity air ions under the super clean room environments with the operation of prototype of Air Ionization System. Varying humidity and air velocity, the distribution of air ion density and the discharge time are measured and analyzed.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2007년도 동계학술발표대회 논문집
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• pp.382-386
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• 2007

In this study, the qualitative prediction and evaluation of clean room being utilized for mass production of electrronic components have been performed with the help of flow simulation. Compared to the experimental analysis based on measurements of the number of particles, concentration of contaminants and flow characteristics, the numerical analysis used in this study is much cost-effective.

• 한국화재소방학회논문지
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• 제26권5호
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• pp.41-47
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• 2012

첨단산업기술인 반도체, LCD 등 제조의 핵심공정인 클린룸은 생산제품의 성능 및 품질에 절대적인 영향을 미치는 가장 중요한 공정이다. 그러나 국내는 방화공학적인 측면에서 과학적이고 종합안전대책에 대한 체계적인 연구가 제대로 이루어지지 않고 있다. 본 연구는 LCD 제조공정 클린룸에 설치하는 제연시스템의 성능 및 문제점을 파악하여 이에 대한 개선방안을 도출하기 위하여 여러 시나리오를 고려한 화재시뮬레이션과 피난시뮬레이션을 통하여 분석하였다. LCD 제조공정의 클린룸 화재 및 연기확산에 대하여 분석한 결과 화재시 공조기의 연동정지는 반드시 필요하며 연기의 부력을 고려하여 FAB 상부에 배연을 할 수 있도록 하여야 한다. 또한 대규모 클린룸의 경우 화재특성상 스프링클러헤드의 집열 성능이 떨어지므로, 조기반응형 헤드의 설치 및 작동시간을 빠르게 하기 위한 보조장치를 설치하여야 한다. 특히, 대공간 클린룸은 자동화 공정으로 거주밀도가 낮지만, 복잡한 생산장비의 배치와 방진복을 착용하고 근무해야하는 환경특성 때문에 화재시 피난안전성능 확보가 어렵기 때문에 공정 내 위험요소의 철저한 관리 및 주기적인 교육과 훈련이 필요하며, 방재선진국의 기준에 준하는 수준의 국내 관련기술 기준을 정립할 필요가 있다.

• 공기청정기술
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• 제10권3호통권38호
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• pp.61-74
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• 1997

• 공기청정기술
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• 제10권3호통권38호
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• pp.50-60
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• 1997

• 공기청정기술
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• 제2권4호통권8호
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• pp.22-26
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• 1990