Fire Science and Engineering (한국화재소방학회논문지)

Korean Institute of Fire Science and Engineering (한국화재소방학회)
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A Study on Measures to Improve Smoke Control Performance in Case of Fire in a Clean room as an LCD Manufacturing Process

LCD 제조공정 클린룸의 화재시 CFD를 이용한 제연성능 개선대책에 관한 연구

  • Son, Bong-Sei (Dept. of Fire & Disaster Protection Engineering, Gachon Univ.) ;
  • Jang, Chan-Hee (Graduate School of Environment and Design Gachon University)
  • 손봉세 (가천대학교 소방방재공학과) ;
  • 장찬희 (가천대학교 환경.디자인대학원 소방방재공학과)
  • Received : 2012.07.26
  • Accepted : 2012.10.02
  • Published : 2012.10.31
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Abstract

As a core process in the manufacture of state-of-the-art industrial technologies such as semiconductor and LCD, a clean room is the most important process which can affect the performance and quality of products drastically. Nevertheless, scientific research on comprehensive safety measures from a fire protection standpoint is not being carried out in Korea. This study aims to derive measures to improve smoke control systems by identifying performance and problems of smoke systems installed in clean rooms as an LCD manufacturing process and analyzing fire and evacuation simulations considering several scenarios. As a result of analysis of fires and smoke in a clean roomas an LCD manufacturing process, it is found to be necessary to stop air handling units through interlocking in case of a fire and exhaust smoke out of the room through the top of FAB in consideration of buoyancy of smoke. It is also found to be necessary to install quick response sprinkler heads and accessories to accelerate the response time, because the heat-accumulating performance of sprinkler heads decreases in this application. Despite its low density of dwelling due to the automation process, clean room is characterized by an array of complex production equipment and working environment requiring dustproof clothes, which makes it difficult to acquire evacuation safety performance. Thus, thorough control of danger factors in processes and periodic education and training are required. It is also necessary to establish a level of domestic technologies equivalent to the level of standards of advanced countries in fire protection.

첨단산업기술인 반도체, LCD 등 제조의 핵심공정인 클린룸은 생산제품의 성능 및 품질에 절대적인 영향을 미치는 가장 중요한 공정이다. 그러나 국내는 방화공학적인 측면에서 과학적이고 종합안전대책에 대한 체계적인 연구가 제대로 이루어지지 않고 있다. 본 연구는 LCD 제조공정 클린룸에 설치하는 제연시스템의 성능 및 문제점을 파악하여 이에 대한 개선방안을 도출하기 위하여 여러 시나리오를 고려한 화재시뮬레이션과 피난시뮬레이션을 통하여 분석하였다. LCD 제조공정의 클린룸 화재 및 연기확산에 대하여 분석한 결과 화재시 공조기의 연동정지는 반드시 필요하며 연기의 부력을 고려하여 FAB 상부에 배연을 할 수 있도록 하여야 한다. 또한 대규모 클린룸의 경우 화재특성상 스프링클러헤드의 집열 성능이 떨어지므로, 조기반응형 헤드의 설치 및 작동시간을 빠르게 하기 위한 보조장치를 설치하여야 한다. 특히, 대공간 클린룸은 자동화 공정으로 거주밀도가 낮지만, 복잡한 생산장비의 배치와 방진복을 착용하고 근무해야하는 환경특성 때문에 화재시 피난안전성능 확보가 어렵기 때문에 공정 내 위험요소의 철저한 관리 및 주기적인 교육과 훈련이 필요하며, 방재선진국의 기준에 준하는 수준의 국내 관련기술 기준을 정립할 필요가 있다.

Keywords

References

  1. W. H. Kim, Michael J. Ferreira and B. K. An, "A Smoke Management System Design For Semiconductor Fabrication Facilities", Journal of Korean Institute of Fire Science & Engineering, Vol. 14. No. 4. pp. 23-28 (2000).
  2. D. Ho Min and B. S. Son, "A Numerical Study on the Fire Propagation Phenomena in The Clean Room of the Semi-conductor Factory", Proceedings of the Korea Institute of Fire Science and Engineering Conference Korea Institute of Fire Science and Engineering Semiannual, pp. 23-29 (2000).
  3. J. C. Lee, J. H. Cho, J. H. Yoon, H. W. Dan, W. K. Kim, H. J. Kim and S. K. Lee. "A Study On the Emergency Exhaust Venting System in Clean Room", Proceedings of the Korea Institute of Fire Science and Engineering Conference Korea Institute of Fire Science and Engineering Semiannual, pp. 10-18 (2004).
  4. W. C. Park, "Simulation of a Clean Room Fire I. Effects of Smoke Curtain", Proceedings of the Korea Institute of Fire Science and Engineering Conference Korea Institute of Fire Science and Engineering Semiannual, pp. 200- 205 (2004).
  5. W. C. Park, M. G. Lee and H. S. Park, "Simulation of a Clean Room Fire II. Needs of Smoke Control System and Sprinkler System", Journal of Korean Institute of Fire Science and Engineering, Vol. 20, No. 2, pp. 8-13 (2006).
  6. W. S. Sim, "A Study on Evacuation Safety Performance design on HVAC mode in the Clean Room of Semiconductor Industry", The University of Seoul, The Graduate School of Urbal Sciences (2009).
  7. Y. W. Joo, "A Study on Fire Protection Performance Evaluation Model for Semiconductor Fabrication Plants", The University of Seoul, The Graduate School of Urbal Sciences (2010).
  8. J. H. Lee, S. M. Hwang and I. S. Woo, "A Study on the As Low As Reasonably Practicable (ALARP)-Concept Risk Assessment of Silane in Semiconductor and LCD Process", Korea Safety Management & Science (2010).
  9. "Performance-Based Fire Protesction Design and Analysis", Departmnet of Safety & Fire Protection Reseach Center, Seoul Nnational University (2006).
  10. SFPE Handbook of Fore Protection Engineering, 3rd, NFPA, Quincy (2002).