• 대한설비공학회지:설비저널
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• 제19권4호
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• pp.225-232
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• 1990

• 대한설비공학회지:설비저널
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• 제8권1호
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• pp.29-42
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• 1979

• 한국산업보건학회지
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• 제25권2호
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• pp.202-210
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• 2015

Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

• 대한기계학회논문집A
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• 제26권6호
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• pp.1178-1186
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• 2002

Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker. Up to now, stockers typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker. This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, in order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and experiment was also conducted using actual clean stocker for TFT-LCD manufacturers and CFDesign, was used for simulating airflow in stocker. As a result, open ratios of exits can be obtained by the analysis of static pressure regain and was verified by experiment and simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.

• 대한기계학회논문집
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• 제16권3호
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• pp.547-554
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• 1992

본 연구에서는 Climet사의 백색광원 OPC인 CI226와 PMS사의 laser 광원 OPC인 LAS-X 및 HS-LAS의 응답특성을 측정하여 제작사가 제시한 응답특성과 비교하여 그 정 확성을 논하였으며 아울러 고유량(high flow rate) Clean Room용 OPC인 Climet CI- 7300, Met One 200, Hiac/Royco5120 등 3가지 장치에 관한 오계수의 원인을 박히고자 하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.993-999
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• 2007

반도체나 TFT-LCD등을 생산하는 정밀산업 공장구조물에는 진동에 민감한 수많은 정밀장비(검사 및 생산용 장비)가 청정실(Clean Room)에 설치되어 운용된다. 정밀장비는 정상운용을 위하여 주변에 각종 유틸리티 설비가 설치된다. 이러한 수많은 유틸리티 설비들과 그 밖의 많은 장비들로 인하여 공장 내 청정실에는 각종 수 많은 소음/진동원들이 산재해 있다. 이러한 소음/진동원으로 인하여 청정실 내에는 소음/진동의 환경을 저하시킨다. 이에, 본 연구에서는 정밀장비 주변에 설치 된 유틸리티의 가동으로 인하여 발생하는 진동으로 인하여 간헐적으로 정밀장비에 영향을 미치는 과도진동의 현상을 확인하고, 과도진동 현상에 대하여 정밀장비에서 제시한 진동허용규제치와 비교/평가하고, 진동허용규제치의 유효성에 대하여 확인하였다.

• 한국소음진동공학회논문집
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• 제12권1호
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• pp.65-72
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• 2002

Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

• International Journal of Fuzzy Logic and Intelligent Systems
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• 제4권2호
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• pp.172-175
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• 2004

Generally, the yield rate of semiconductors is the major factor that affects directly the price of semiconductors. For a high yield rate of semiconductors, the air inside clean room is needed to be purified and high efficient filters are used for this. The filter are made of super-fine fiber and certain pinholes can be easily produced on the filter's surface by inadvertent manufacturing. As these pinholes are not easily detected with the bare sight, these pinholes exert a negative impact to filtration performance of the filter. In this research, not only the automatic test equipment for detecting pinholes is proposed, but also inverse modeling scheme based on artificial neural network is applied for tuning of its important parameters.

• 대한안전경영과학회:학술대회논문집
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• 대한안전경영과학회 2008년도 추계학술대회
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• pp.641-647
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• 2008

Since korea must get 5.2% reduction of green gas emission and insecurity of economic impact is on the increase due to unstable oil market, the demands of energy saving techniques are increasing. In this paper, we investigate necessity of development of enormous energy used cleanroom energy saving techniques furthermore we also investigate the adoption of dependability management system to develop the energy saving cleanroom development process.

• 의료ㆍ복지 건축 : 한국의료복지건축학회 논문집
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• 제8권1호
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• pp.7-12
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• 2002

The air ventilation system of operation rooms has been studied to prevent the cross infection during the operation. Operation rooms and air ventilation systems of three University hospitals were investigated. The distribution of microbe was measured by cultivating air samples in the operation room. A two-dimensional model for the cross-section of an operation room was developed for the CFD(Computational Fluid Dynamics) analysis. The characteristics of air flow in the empty operation room and in occupied operation room were calculated by using a CFD program. The current diffuser location of an old hospital did not deliver the clean air to the operation part efficiently. A new method to locate diffusers that improve air venting with little increase of the cost of equipment was suggested.