• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2000년도 추계학술대회 논문집
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• pp.101-102
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• 2000

반도체 생산에서 암모니아는 정밀성을 요구하는 공정 특히, 광증폭 공정에서 산과 반응하여 불량을 일으키는 주 원인이며, 고메모리로 갈수록 청정도 기준이 엄격해져서 1 ppbv 이하의 농도를 검출할 수 있는 기술이 요구되고 있다. 현재 반도체 회사에서의 암모니아 분석은 임핀저를 이용하여 가스를 포집한 후 이온크로마토그래피로 분석 하고 있으나, 이는 많은 시간과 인력이 요구되며, 실시간 분석이 어렵기 때문에 반도체 클린룸의 관리에 어려움이 있다. (중략)

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2003년도 하계학술대회 논문집
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• pp.195-195
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• 2003

• 한국막학회:학술대회논문집
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• 한국막학회 1991년도 추계 총회 및 학술발표회
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• pp.17-26
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• 1991

It can be said that the current ULSI technology has been supported and/or accomplished by a major challenge to the clean room environment and the ultrapure water equipment manufacturers as to contamination control. The required improvement in ultrapure water quality, which is shown in Figure 1, would not have been possible without significant improvements in membrane performance and enhancements in analytical capabilities.

• 한국화재소방학회:학술대회논문집
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• 한국화재소방학회 2010년도 추계학술발표회 자료집
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• pp.136-139
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• 2010

본 연구에서는 일반 건물에 적용되는 스프링클러시스템에 비해 보다 높은 신뢰도를 요구하는 클린룸에서의 스프링클러시스템에 대해 국내 L사, S사 클린룸 건설 현장의 방문 조사를 통하여 최적의 소화효과를 발휘하며 신뢰도 향상을 위한 설계 및 시공기술 실태조사를 분석하여 클린룸 화재로부터 안전성을 확보 하고자 한다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1444-1447
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• 2004

The vacuum-cleaner had made the burden of house chore lighten but the operation labour of a vacuum-cleaner had been so severe. Recently, the cleaning robot was producted to perfectly solve the cleaning labour of a house but it also was not successful because it still had a problem of mess-cleaning, which is the clean-up of big trash and the arrangement of newspapers, clothes, etc. The cleaning robot is to just vacuum dust and small trash and has no function to arrange and take away before the automatic vacuum-cleaning. For this reason, the market for the cleaning robot is not yet built up. So, we need a design method and technological algorithm of new automatic machine to solve the problem of mess-cleanup in house. In this paper, a Home Mess-Cleanup Robot(HMR), which has a practical function of the automatic mess-cleanup, is developed. It need functions of agile automatic navigation, novel manipulation system for mess-cleanup. The automatic navigation system has to be controlled for the full scanning of living room, to recognize the absolute position and orientation of the self, the precise tracking of the desired path, and to distinguish the mess object to clean-up from obstacle object to just avoid. The manipulation system, which is not needed in the vacuum-cleaning robot, must have the functions, how to distinguish big trash to clean from mess objects to arrange, how to grasp in according to the form of mess objects, how to move to the destination in according to mess objects and arrange them. Then, it should be an intelligent system so that the mess cleaning task can be autonomously performed in a wide variety of situations and environments. It need to also has the entertainment functions for the good communication between the human and HMR. Therefore, the Home Mess-cleanup Robot with Entertainmental Human Interface is developed in this paper. Finally, the good performance of the designed machine, HMR'4, is confirmed through the results of the mess clean-up and arrangement.

• 한국입자에어로졸학회지
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• 제6권2호
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• pp.51-59
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• 2010

ZnO quantum dots embedded in a silica matrix without agglomeration were synthesized from $TEOS:Zn(NO_3)_2$ solutions in one-step process by aerosol-gel method. It was successfully demonstrated that the size of ZnO Q-dots could be controlled from 2 to 7 mm verified by a high resolution transmission electron microscope observation. The line scanning energy dispersive X-ray spectroscopy(EDS) revealed that the Q-dots existed preferentially inside SiO2 sphere when Zn/Si < 0.5. However, the Q-dots distributed homogeneously all over the sphere when Zn/Si > 1.0. Blue-shifted UV/Vis absorption peak observation confirmed the quantum size effect on the optical properties. The photoluminescence(PL) emission peaks of the powders at room temperature were consistent with previous reports in the following aspects: 1) PL characteristics are dominated by two peaks of deep-level defect-related emissions at 2.4 - 2.8 eV, 2) the first defect-related peak at 2.4 eV was blue shifted due to the quantum size effect with decreasing the concentration of $Zn(NO_3)_2$(decreasing the size of ZnO q dots). More interestingly, the existence of surface-exposed ZnO q dots affects greatly the second defect PL peak at 2.8 eV.

• 제어로봇시스템학회논문지
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• 제11권12호
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• pp.1011-1019
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• 2005

In this paper, Ubiquitous Home Mess-Cleanup Robot(UHMR), which has a practical function of the automatic mess-cleanup, is developed. The vacuum-cleaner had made the burden of house chore lighten but the operation labour of a vacuum-cleaner had been so severe. Recently, the cleaning robot was producted to perfectly solve the cleaning labour of a house but it also was not successful because it still had a problem of mess-cleaning, which was the clean-up of big trash and the arrangement of newspapers, clothes, etc. The cleaning robot is to just vacuum dust and small trash but has no function to arrange and take away before the automatic vacuum-cleaning. For this reason, the market for the cleaning robot is not yet built up. So, we need a design method and technological algorithm of new automatic machine to solve the problem of mess-cleanup in house. It needs functions of agile automatic navigation, novel manipulation system for mess-cleanup. The automatic navigation system has to be controlled for the full scanning of living room, to recognize the absolute position and orientation of tile self, the precise tracking of the desired path, and to distinguish the mess object to clean-up from obstacle object to just avoid. The manipulate,, which is not needed in the vacuum-cleaning robot, must have the functions, how to distinguish big trash to clean from mess objects to arrange, how to grasp in according to the form of mess objects, how to move to the destination in according to mess objects and arrange them. We use the RFID system to solve the problems in this paper and propose the reading algorithm of RFID tags installed in indoor objects and environments. Then, it should be an intelligent system so that the mess cleaning task can be autonomously performed in a wide variety of situations and environments. It needs to also has the entertainment functions for the good communication between the human and UHMR. Finally, the good performance of the designed UHMR is confirmed through the results of the mess clean-up and arrangement.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1612-1616
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• 2005

In this paper, a Home Mess-Cleanup Robot(HMR), which has a practical function of the automatic mess-cleanup, is developed. The vacuum-cleaner had made the burden of house chore lighten but the operation labour of a vacuum-cleaner had been so severe. Recently, the cleaning robot was producted to perfectly solve the cleaning labour of a house but it also was not successful because it still had a problem of mess-cleaning, which was the clean-up of big trash and the arrangement of newspapers, clothes, etc. The cleaning robot is to just vacuum dust and small trash but has no function to arrange and take away before the automatic vacuum-cleaning. For this reason, the market for the cleaning robot is not yet built up. So, we need a design method and technological algorithm of new automatic machine to solve the problem of mess-cleanup in house. It needs functions of agile automatic navigation, novel manipulation system for mess-cleanup. The automatic navigation system has to be controlled for the full scanning of living room, to recognize the absolute position and orientation of the self, the precise tracking of the desired path, and to distinguish the mess object to clean-up from obstacle object to just avoid. The manipulator, which is not needed in the vacuum-cleaning robot, must have the functions, how to distinguish big trash to clean from mess objects to arrange, how to grasp in according to the form of mess objects, how to move to the destination in according to mess objects and arrange them. We use the RFID system to solve the problems in this paper and propose the reading algorithm of RFID tags installed in indoor objects and environments. Then, it should be an intelligent system so that the mess cleaning task can be autonomously performed in a wide variety of situations and environments. It needs to also has the entertainment functions for the good communication between the human and HMR. Finally, the good performance of the designed HMR is confirmed through the results of the mess clean-up and arrangement.

• 환경위생공학
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• 제17권3호
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• pp.115-120
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• 2002

This study was performed on a questionnaire survey of 500 people about their awareness for indoor air pollution, and measured efficiency of air cleaner which can remove the CO and air-borne particulate of ETS(Environmental Tobacco Smoke) in air clean chamber. The room-size cleaner for measuring indoor air contaminants has been applied to evaluation of two different air cleaner such as the mechanic air cleaner with hepafilter(HPA) and the electrostatic air cleaner with metal plate. The measuring experiment was carried out in a chamber by sampling the air. The results obtained were as follows; As respondents are having their 90% of daytime indoors a day, and 38% of them can feel indoor air pollutions degrees directly by their sense of smell, For the installation of indoor pollution control equipment, 34% of all respondents installed air cleaner because of the problem of economical charge and almost respondents was not satisfied the trust of ability purified indoor air pollutants. In the experimental results, it was found that more than 95% of CD and air-borne particulate of ETS were removed within 20 minutes. The reaction kinetics of removal pollutants was verified as the pseudo-first order, Finally, it appeared that the room-sire air cleaner can be applied to new technology for removing indoor air contaminants.

• 한국산학기술학회논문지
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• 제1권2호
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• pp.33-40
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• 2000

본 연구는 반도체 크린룸에서 VOC(volatile organic compound)과 수분을 제거하기 위한 흡착로타에 관한 것이다. 흡착로타는 세라믹 페이퍼 허니컴 기질에 NaX 제올라이트와 TS-1 제올라이트로 만들어졌다. NaX 제올라이트는 수열합성법으로 합성되어졌으며, NaX 제올라이트 결정(2∼3 ㎛)을 seed로 합성 조성에 3∼5 wt%까지 첨가하여 5 ㎛의 균일한 NaX 제올라이트를 성장시켰다. Seed의 첨가는 seed를 첨가하지 않은 합성용액과 비교하여 결정의 크기가 크며, 균일한 NaX 제올라이트 결정을 성공적으로 합성하였다. TS-1 제올라이트는 초기 반응액의 pH를 변화시켜 합성하였다. 반응물의 pH는 10.0에서 11.5 까지의 범위를 가지며, PH 10.4에서 큰 기공(8∼10 (equation omitted))을 가진 TS-1 제올라이트(ETS-10)가 합성되는 반면 pH가 11.5에서는 작은 기공 (3∼5 (equation omitted))을 갖는 TS-1 제올라이트(ETS-4)가 합성되었다.