• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.25-30
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• 2003

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. This high technology equipments require very strict environmental vibration criteria in proportion to the accuracy of the manufacturing. In this paper, the dynamic analysis and modal test were performed to evaluate the dynamic properties of the constructing clean room structure. Based on these results, a structural dynamic modification(SDM) were required to satisfiy the vibration allowable limit for pression machine. Therefore, in order to improve the dynamic stiffness of clean room structure, the VSD system which can control the force applied on structure, were adopted and its utility were proved from dynamic test results of the improved structure after a modification work.

• KIEAE Journal
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• v.4 no.3
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• pp.187-194
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• 2004

In many other buildings, hospital is very important because of its function and purpose. A proper building service systems including heating, cooling, ventilation and plumbing systems is required in hospial. Besides, a special systems like medical gas, vacuum cleaning systems are required to prevent contamination as well as cure a patient in hospital. Ventilation is very important method to keep the indoor pressure and clean class. There are some specific rooms to consider clean class and indoor pressure in the general hospital. In this article, specific rooms were set to operating room, laboratory, ICU, isolation unit, and sterilizer room. In this case study, design factors of ventilation system, including air changes of OA and TA, indoor pressure, clean class, filter, and material of system, of specific rooms in hospital were proposed through a literature research and a design examples review.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.988-992
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• 2006

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.19 no.40
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• pp.341-349
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• 1996

In this paper, we deal with the problem of maintenance policies for an air filter system in clean room. Two types of maintenance policies are considered, one based on the reliability of equipment and the other one determined by the total cost including minimal repair cost. For these models, we obtain the structure of the optimal maintenance Policy which minimize the total cost. Finally we give the numerical example.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.4 no.2
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• pp.72-81
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• 1992

Experimental study on air ionization phenomena has been conducted to analyze the propagation behavior and dischargeability of polarity air ions under the super clean room environments with the operation of prototype of Air Ionization System. Varying humidity and air velocity, the distribution of air ion density and the discharge time are measured and analyzed.

• Proceedings of the SAREK Conference
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• 2007.11a
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• pp.382-386
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• 2007

In this study, the qualitative prediction and evaluation of clean room being utilized for mass production of electrronic components have been performed with the help of flow simulation. Compared to the experimental analysis based on measurements of the number of particles, concentration of contaminants and flow characteristics, the numerical analysis used in this study is much cost-effective.

• Fire Science and Engineering
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• v.26 no.5
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• pp.41-47
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• 2012

As a core process in the manufacture of state-of-the-art industrial technologies such as semiconductor and LCD, a clean room is the most important process which can affect the performance and quality of products drastically. Nevertheless, scientific research on comprehensive safety measures from a fire protection standpoint is not being carried out in Korea. This study aims to derive measures to improve smoke control systems by identifying performance and problems of smoke systems installed in clean rooms as an LCD manufacturing process and analyzing fire and evacuation simulations considering several scenarios. As a result of analysis of fires and smoke in a clean roomas an LCD manufacturing process, it is found to be necessary to stop air handling units through interlocking in case of a fire and exhaust smoke out of the room through the top of FAB in consideration of buoyancy of smoke. It is also found to be necessary to install quick response sprinkler heads and accessories to accelerate the response time, because the heat-accumulating performance of sprinkler heads decreases in this application. Despite its low density of dwelling due to the automation process, clean room is characterized by an array of complex production equipment and working environment requiring dustproof clothes, which makes it difficult to acquire evacuation safety performance. Thus, thorough control of danger factors in processes and periodic education and training are required. It is also necessary to establish a level of domestic technologies equivalent to the level of standards of advanced countries in fire protection.

• Air Cleaning Technology
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• v.10 no.3 s.38
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• pp.61-74
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• 1997

• Air Cleaning Technology
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• v.10 no.3 s.38
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• pp.50-60
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• 1997

• Air Cleaning Technology
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• v.2 no.4 s.8
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• pp.22-26
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• 1990