• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1306-1311
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• 2009

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is therefore useful for reducing the outdoor air conditioning load for a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. In the present study, numerical analysis and experiment was conducted to simulate the amount of energy reduction of exhaust air heat recovery type air washer system. The present numerical results showed good agreement with the results of the experimental data.

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.16 no.5
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• pp.441-452
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• 1987

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.22 no.10
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• pp.697-703
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• 2010

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.844-849
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• 2008

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. From the energy saving point of view, heat recovery is useful for the reduction of air conditioning energy consumption for clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. However, so far there have not been sufficient studies of analyzing the comparison of the amounts of energy consumption and saving. In the present study, an experiment was conducted to investigate the energy consumption and heat recovery of a fin-coil type air washer system for semiconductor manufacturing clean rooms.

• Journal of Advanced Marine Engineering and Technology
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• v.19 no.4
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• pp.27-33
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• 1995

The turbulent flow and heat transfer in the tunnel laminar flow type clean room is investigated by a numerical simulation. The model clean room is assumed to be a rectngular $5m\times3m$, in which a worktable of 0.75m hight, and 1.5m or 3m long at the floor. Major parameters are the inlet flow velocity, inlet hole size and worktable surface distance. The mean Nusselt number is increased by increasing Reynolds number and can be expressed by the correlation equation.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.231-235
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• 2005

Recently, some semiconductor and LCD manufacturers require equipment suppliers to serve the data of composite noise for clean room. In this study, we evaluate the composite noise of clean room by numerically and experimentally. The value of experimental result is more higher than calculated one as much as 1$\sim$2dB(A).

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.17 no.3
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• pp.217-223
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• 1988

• Proceedings of the Korea Institute of Fire Science and Engineering Conference
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• 2003.10a
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• pp.19-27
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• 2003

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.14 no.4
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• pp.300-316
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• 1985

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.16 no.3
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• pp.232-242
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• 1987