• Proceedings of the Korea Air Pollution Research Association Conference
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• 2000.11a
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• pp.101-102
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• 2000

반도체 생산에서 암모니아는 정밀성을 요구하는 공정 특히, 광증폭 공정에서 산과 반응하여 불량을 일으키는 주 원인이며, 고메모리로 갈수록 청정도 기준이 엄격해져서 1 ppbv 이하의 농도를 검출할 수 있는 기술이 요구되고 있다. 현재 반도체 회사에서의 암모니아 분석은 임핀저를 이용하여 가스를 포집한 후 이온크로마토그래피로 분석 하고 있으나, 이는 많은 시간과 인력이 요구되며, 실시간 분석이 어렵기 때문에 반도체 클린룸의 관리에 어려움이 있다. (중략)

• Proceedings of the SAREK Conference
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• 2003.07a
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• pp.195-195
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• 2003

• Proceedings of the Membrane Society of Korea Conference
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• 1991.10a
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• pp.17-26
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• 1991

It can be said that the current ULSI technology has been supported and/or accomplished by a major challenge to the clean room environment and the ultrapure water equipment manufacturers as to contamination control. The required improvement in ultrapure water quality, which is shown in Figure 1, would not have been possible without significant improvements in membrane performance and enhancements in analytical capabilities.

• Proceedings of the Korea Institute of Fire Science and Engineering Conference
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• 2010.10a
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• pp.136-139
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• 2010

본 연구에서는 일반 건물에 적용되는 스프링클러시스템에 비해 보다 높은 신뢰도를 요구하는 클린룸에서의 스프링클러시스템에 대해 국내 L사, S사 클린룸 건설 현장의 방문 조사를 통하여 최적의 소화효과를 발휘하며 신뢰도 향상을 위한 설계 및 시공기술 실태조사를 분석하여 클린룸 화재로부터 안전성을 확보 하고자 한다.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1444-1447
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• 2004

The vacuum-cleaner had made the burden of house chore lighten but the operation labour of a vacuum-cleaner had been so severe. Recently, the cleaning robot was producted to perfectly solve the cleaning labour of a house but it also was not successful because it still had a problem of mess-cleaning, which is the clean-up of big trash and the arrangement of newspapers, clothes, etc. The cleaning robot is to just vacuum dust and small trash and has no function to arrange and take away before the automatic vacuum-cleaning. For this reason, the market for the cleaning robot is not yet built up. So, we need a design method and technological algorithm of new automatic machine to solve the problem of mess-cleanup in house. In this paper, a Home Mess-Cleanup Robot(HMR), which has a practical function of the automatic mess-cleanup, is developed. It need functions of agile automatic navigation, novel manipulation system for mess-cleanup. The automatic navigation system has to be controlled for the full scanning of living room, to recognize the absolute position and orientation of the self, the precise tracking of the desired path, and to distinguish the mess object to clean-up from obstacle object to just avoid. The manipulation system, which is not needed in the vacuum-cleaning robot, must have the functions, how to distinguish big trash to clean from mess objects to arrange, how to grasp in according to the form of mess objects, how to move to the destination in according to mess objects and arrange them. Then, it should be an intelligent system so that the mess cleaning task can be autonomously performed in a wide variety of situations and environments. It need to also has the entertainment functions for the good communication between the human and HMR. Therefore, the Home Mess-cleanup Robot with Entertainmental Human Interface is developed in this paper. Finally, the good performance of the designed machine, HMR'4, is confirmed through the results of the mess clean-up and arrangement.

• Particle and aerosol research
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• v.6 no.2
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• pp.51-59
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• 2010

ZnO quantum dots embedded in a silica matrix without agglomeration were synthesized from $TEOS:Zn(NO_3)_2$ solutions in one-step process by aerosol-gel method. It was successfully demonstrated that the size of ZnO Q-dots could be controlled from 2 to 7 mm verified by a high resolution transmission electron microscope observation. The line scanning energy dispersive X-ray spectroscopy(EDS) revealed that the Q-dots existed preferentially inside SiO2 sphere when Zn/Si < 0.5. However, the Q-dots distributed homogeneously all over the sphere when Zn/Si > 1.0. Blue-shifted UV/Vis absorption peak observation confirmed the quantum size effect on the optical properties. The photoluminescence(PL) emission peaks of the powders at room temperature were consistent with previous reports in the following aspects: 1) PL characteristics are dominated by two peaks of deep-level defect-related emissions at 2.4 - 2.8 eV, 2) the first defect-related peak at 2.4 eV was blue shifted due to the quantum size effect with decreasing the concentration of $Zn(NO_3)_2$(decreasing the size of ZnO q dots). More interestingly, the existence of surface-exposed ZnO q dots affects greatly the second defect PL peak at 2.8 eV.

• Journal of Institute of Control, Robotics and Systems
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• v.11 no.12
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• pp.1011-1019
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• 2005

In this paper, Ubiquitous Home Mess-Cleanup Robot(UHMR), which has a practical function of the automatic mess-cleanup, is developed. The vacuum-cleaner had made the burden of house chore lighten but the operation labour of a vacuum-cleaner had been so severe. Recently, the cleaning robot was producted to perfectly solve the cleaning labour of a house but it also was not successful because it still had a problem of mess-cleaning, which was the clean-up of big trash and the arrangement of newspapers, clothes, etc. The cleaning robot is to just vacuum dust and small trash but has no function to arrange and take away before the automatic vacuum-cleaning. For this reason, the market for the cleaning robot is not yet built up. So, we need a design method and technological algorithm of new automatic machine to solve the problem of mess-cleanup in house. It needs functions of agile automatic navigation, novel manipulation system for mess-cleanup. The automatic navigation system has to be controlled for the full scanning of living room, to recognize the absolute position and orientation of tile self, the precise tracking of the desired path, and to distinguish the mess object to clean-up from obstacle object to just avoid. The manipulate,, which is not needed in the vacuum-cleaning robot, must have the functions, how to distinguish big trash to clean from mess objects to arrange, how to grasp in according to the form of mess objects, how to move to the destination in according to mess objects and arrange them. We use the RFID system to solve the problems in this paper and propose the reading algorithm of RFID tags installed in indoor objects and environments. Then, it should be an intelligent system so that the mess cleaning task can be autonomously performed in a wide variety of situations and environments. It needs to also has the entertainment functions for the good communication between the human and UHMR. Finally, the good performance of the designed UHMR is confirmed through the results of the mess clean-up and arrangement.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1612-1616
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• 2005

In this paper, a Home Mess-Cleanup Robot(HMR), which has a practical function of the automatic mess-cleanup, is developed. The vacuum-cleaner had made the burden of house chore lighten but the operation labour of a vacuum-cleaner had been so severe. Recently, the cleaning robot was producted to perfectly solve the cleaning labour of a house but it also was not successful because it still had a problem of mess-cleaning, which was the clean-up of big trash and the arrangement of newspapers, clothes, etc. The cleaning robot is to just vacuum dust and small trash but has no function to arrange and take away before the automatic vacuum-cleaning. For this reason, the market for the cleaning robot is not yet built up. So, we need a design method and technological algorithm of new automatic machine to solve the problem of mess-cleanup in house. It needs functions of agile automatic navigation, novel manipulation system for mess-cleanup. The automatic navigation system has to be controlled for the full scanning of living room, to recognize the absolute position and orientation of the self, the precise tracking of the desired path, and to distinguish the mess object to clean-up from obstacle object to just avoid. The manipulator, which is not needed in the vacuum-cleaning robot, must have the functions, how to distinguish big trash to clean from mess objects to arrange, how to grasp in according to the form of mess objects, how to move to the destination in according to mess objects and arrange them. We use the RFID system to solve the problems in this paper and propose the reading algorithm of RFID tags installed in indoor objects and environments. Then, it should be an intelligent system so that the mess cleaning task can be autonomously performed in a wide variety of situations and environments. It needs to also has the entertainment functions for the good communication between the human and HMR. Finally, the good performance of the designed HMR is confirmed through the results of the mess clean-up and arrangement.

• Journal of environmental and Sanitary engineering
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• v.17 no.3
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• pp.115-120
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• 2002

This study was performed on a questionnaire survey of 500 people about their awareness for indoor air pollution, and measured efficiency of air cleaner which can remove the CO and air-borne particulate of ETS(Environmental Tobacco Smoke) in air clean chamber. The room-size cleaner for measuring indoor air contaminants has been applied to evaluation of two different air cleaner such as the mechanic air cleaner with hepafilter(HPA) and the electrostatic air cleaner with metal plate. The measuring experiment was carried out in a chamber by sampling the air. The results obtained were as follows; As respondents are having their 90% of daytime indoors a day, and 38% of them can feel indoor air pollutions degrees directly by their sense of smell, For the installation of indoor pollution control equipment, 34% of all respondents installed air cleaner because of the problem of economical charge and almost respondents was not satisfied the trust of ability purified indoor air pollutants. In the experimental results, it was found that more than 95% of CD and air-borne particulate of ETS were removed within 20 minutes. The reaction kinetics of removal pollutants was verified as the pseudo-first order, Finally, it appeared that the room-sire air cleaner can be applied to new technology for removing indoor air contaminants.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.1 no.2
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• pp.33-40
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• 2000

The present invention relates to a absorption rotor for removed VOC(volatile organic compound) and humidity in semiconductor clean room system. A absorption rotor medium is made by NaX zeolite and TS-1 zeolite formed on a honeycomb matrix of ceramic papers. The crystallization of NaX zeolite was hydrothermal reaction, and NaX zeolite crystals of a uniform particle size of 5$\mu$m were synthesized that NaX zeolite seed crystals (2~3$\mu$m) added in a batch composition at levels of 3~15 wt$\%$. The seeding resulted in an increase in the fraction of large crystals compared with unseeded batches and successfully led to a uniform NaX zeolite crystal. The microporous zeolite-type titanosilicate(TS-1) was synthesized by different of the reactant solution pH. The pH range of reactant solution has been changed from 10.0 to 11.5 TS-1 zeolite (ETS-10), having a large pore(8~10 $\AA$), was synthesized at 10.4 of pH, since TS-1 zeolite (ETS-4), having a small pore(3~5$\AA$), was synthesized at 11.5 of pH.