• 제목/요약/키워드: clean시스템

검색결과 611건 처리시간 0.025초

반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지절감에 관한 실험적 연구 (An Experimental Study on Energy Reduction of an Exhaust Air Heat Recovery Type Outdoor Air Conditioning System for Semiconductor Manufacturing Clean Rooms)

  • 송근수;유경훈;강신영;손승우
    • 설비공학논문집
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    • 제21권5호
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    • pp.273-281
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    • 2009
  • In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

외부 수증기 연계 SOEC 시스템의 공급 스팀 온도 및 열교환기 유용도에 따른 시스템 BOP 및 운전 특성 분석 (Operation Characteristics According to Steam Temperature and Effectivenss of External Steam-Related SOEC System)

  • 김영상;이영덕;안국영;이동근;이상민;최은정
    • 한국수소및신에너지학회논문집
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    • 제31권6호
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    • pp.596-604
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    • 2020
  • Solid oxide electrolysis cell (SOEC) attracts much attention because of its high energy efficiency among many water-electrolysis technologies. SOEC operates at temperatures above 700℃, so that the water required for water-electrolysis must be supplied in the form of steam. When the steam to be supplied to the SOEC is generated by the SOEC system itself, an enormous amount of latent heat is required to vaporize the water, so additional energy must be supplied to the SOEC system. On the other hand, if the steam can be supplied from the outside, a small amount of energy is required to raise the temperature of the low temperature steam, so that the SOEC system can be operated without additional energy supply from outside, which enables efficient water-electrolysis. In this study, we figure out the size of heat exchanger for various steam temperature and effectiveness of heat exchanger, and propose the energy efficiency of the system.

대구의 여름철 도로 열 환경과 클린로드 시스템의 효과 조사를 위한 관측연구 (Observational Study to Investigate Thermal Environment and Effect of Clean- Road System over a Broad Way of Daegu in Summer)

  • 김성락;정응호;김해동
    • 한국환경과학회지
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    • 제24권9호
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    • pp.1171-1180
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    • 2015
  • To investigate thermal environment and effect of clean-road system over a broad way, we conducted the filed meteorological observation during 12~13 August 2014. The clean-road system was employed over a part of the broad way of Dalgubul(Dalgubul-Daero) by Daegu Metropolitan city in 2011. The clean-road system in general is operated two times(4 am, 2 pm) during summertime. In case of scorching alert, the system is operated 3 times a day(4 am, 2 pm and 4 pm). To evaluate the present thermal condition and the improvement effects due to the system, we analyzed the time variation of discomfort index and WBGT(wet-bulb and globe temperature). WBGT was more than 25 during 8 a.m. ~ 9 p.m. And discomfort index was more than 75 during 8 a.m. ~ 11 p.m. The thermal improvement effect of the clean-road system was restrictive during daytime.

반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 비교연구 (Comparative Study on Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air-Conditioning Systems for Semiconductor Manufacturing Clean Rooms)

  • 김형태;송근수;김기철;유경훈;손승우;신대건;박덕준;권오명
    • 대한기계학회논문집B
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    • 제35권12호
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    • pp.1249-1255
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    • 2011
  • 최근의 반도체 제조용 대규모 클린룸에서는 도입 외기를 가열가습 및 냉각감습하는 외기공조시스템의 에너지소비량이 클린룸 환경을 유지하기 위해 필요한 전체 공조에너지의 약 45 %를 차지하고 있다. 특히 동기(겨울철)의 경우 외기를 가습하기 위한 에너지소비량은 매우 높다. 따라서 에너지절감을 통한 제조비용 절감 및 온실가스 감축을 위해 외기부하와 관계되는 공조에너지의 사용효율 증대 및 철저한 사용합리화가 요구되고 있다. 따라서 반도체 클린룸용 외기공조시스템의 핵심 가습방식인 증기가습과 수분무가습 방식에 대한 소비전력량을 분석하는 것은 에너지절약적 측면에서 상당히 가치가 있다고 판단된다. 본 연구에서는 전극봉식 가습기에 의한 증기가습방식 및 에어와셔에 의한 수분무가습방식 외기공조시스템들의 공조프로세스 및 소비전력량을 외기량 1000 $m^3$/h의 경우 기흥지역의 동기 및 하기의 피크부하에 대해 비교하는 실험을 수행하였다. 실험결과들로부터 에어와셔 수분무가습 외기공조시스템이 전극봉식 증기가습 외기공조시스템보다 연간 소비전력량이 적어서 에너지절약적임을 보여주었다.

대구의 클린로드 시스템 운영에 따른 대기 질 개선효과 평가 (Evaluation on the Effect of Air Quality Improvement Due to the Employment of Clean-Road System in Daegu)

  • 김성락;정응호;김해동
    • 한국환경과학회지
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    • 제23권12호
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    • pp.2029-2034
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    • 2014
  • To improve air quality around a broad way, Daegu Metropolitan city employed the clean-road system at a part of the broad way of Dalgubul (Daigubul-daero) in 2011. The clean-road system in general is operated two times (4 am, 2 pm) during summertime. In case of scorching alert, the system is operated 3 times a day (4 am, 2 pm and 4 pm). To evaluate the effect of air quality improvement due to the system, we analyzed the time variation of monthly mean particulate matter (PM10) concentration in recent 3 years (2011-2013). The improvement of air quality was estimated at about 5~15 % under the system.

반도체 클린룸용 직접분무식 에어와셔 시스템의 성능평가실험 (An Experiment on Performance Evaluation of a Direct Atomization Type Air Washer System for Semiconductor Clean Rooms)

  • 여국현;유경훈;태경웅
    • 대한설비공학회:학술대회논문집
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    • 대한설비공학회 2006년도 하계학술발표대회 논문집
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    • pp.988-992
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    • 2006
  • In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.

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청정수소 생산 방식 도입에 따른 LCA 기반 탄소중립 기여도 평가 (An Evaluation of Net-zero Contribution by Introducing Clean Hydrogen Production Using Life Cycle Assessment)

  • 장소정;정대웅;김정열;황용우;안희경
    • 한국수소및신에너지학회논문집
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    • 제35권2호
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    • pp.175-184
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    • 2024
  • This study focuses on investigating the importance of managing greenhouse gas emissions from global energy consumption, specifically examining domestic targets for clean hydrogen production. Using life cycle assessment, we evaluated reductions in global warming potential and assessed the carbon neutrality contribution of the domestic hydrogen sector. Transitioning from brown or grey hydrogen to blue or green hydrogen can significantly reduce emissions, potentially lowering CO2 equivalent levels by 2030 and 2050. These research findings underscore the effectiveness of clean hydrogen as an energy management strategy and offer valuable insights for technology development.

고출력 SOEC 시스템의 매개변수 연구 (Parametric Study on High Power SOEC System)

  • 뚜안앵;김영상;잡반티엔;이동근;안국영
    • 한국수소및신에너지학회논문집
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    • 제32권6호
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    • pp.470-476
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    • 2021
  • In the near future, with the urgent requirement of environmental protection, hydrogen based energy system is essential. However, at the present time, most of the hydrogen is produced by reforming, which still produces carbon dioxide. This study proposes a high-power electrolytic hydrogen production system based on solid oxide electrolysis cell with no harmful emissions to the environment. Besides that, the parametric study and optimization are also carried to examine the effect of individual parameter and their combination on system efficiency. The result shows that the increase in steam conversion rate and hydrogen molar fraction in incoming stream reduces system efficiency because of the fuel heater power increase. Besides, the higher Faraday efficiency does not always result a higher system efficiency.