• 제목/요약/키워드: chip self-assembly

검색결과 29건 처리시간 0.027초

3-D Hetero-Integration Technologies for Multifunctional Convergence Systems

  • 이강욱
    • 마이크로전자및패키징학회지
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    • 제22권2호
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    • pp.11-19
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    • 2015
  • Since CMOS device scaling has stalled, three-dimensional (3-D) integration allows extending Moore's law to ever high density, higher functionality, higher performance, and more diversed materials and devices to be integrated with lower cost. 3-D integration has many benefits such as increased multi-functionality, increased performance, increased data bandwidth, reduced power, small form factor, reduced packaging volume, because it vertically stacks multiple materials, technologies, and functional components such as processor, memory, sensors, logic, analog, and power ICs into one stacked chip. Anticipated applications start with memory, handheld devices, and high-performance computers and especially extend to multifunctional convengence systems such as cloud networking for internet of things, exascale computing for big data server, electrical vehicle system for future automotive, radioactivity safety system, energy harvesting system and, wireless implantable medical system by flexible heterogeneous integrations involving CMOS, MEMS, sensors and photonic circuits. However, heterogeneous integration of different functional devices has many technical challenges owing to various types of size, thickness, and substrate of different functional devices, because they were fabricated by different technologies. This paper describes new 3-D heterogeneous integration technologies of chip self-assembling stacking and 3-D heterogeneous opto-electronics integration, backside TSV fabrication developed by Tohoku University for multifunctional convergence systems. The paper introduce a high speed sensing, highly parallel processing image sensor system comprising a 3-D stacked image sensor with extremely fast signal sensing and processing speed and a 3-D stacked microprocessor with a self-test and self-repair function for autonomous driving assist fabricated by 3-D heterogeneous integration technologies.

Real-Time Detection of DNA Hybridization Assay by Using Evanescent Field Microscopy

  • Kim, Do-Kyun;Choi, Yong-Sung;Murakami, Yuji;Tamiya, Eiichi;Kwon, Young-Soo
    • KIEE International Transactions on Electrophysics and Applications
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    • 제11C권3호
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    • pp.85-90
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    • 2001
  • The determination of DNA hybridization reaction can apply the molecular biology research, clinic diagnostics, bioengineering, environment monitoring, food science and other application area. So, the improvement of DNA detection system is very important for the determination of this hybridization reaction. In this study, we report the characterization of the probe and target oligonucleotide hybridization reaction using the evanescent field microscopy. First, we have fabricated DNA chip microarray. The particles which were immobilized oligonucleotides were arranged by the random fluidic self-assembly on the pattern chips, using hydrophobic interaction. Second, we have detected DNA hybridization reaction using evanescent field microscopy. The 5'-biotinylated probe oligonucleotides were immobilized on the surface of DNA chip microarray and the hybridization reaction with the Rhodamine conjugated target oligonucleotide was excited fluorescence generated on the evanescent field microscopy. In the foundation of this result, we could be employed as the basis of a probe olidonucleotide, capable of detecting the target oligonucleotide and monitoring it in a large analyte concentration range and various mismatching condition.

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Anisotropic Superomniphobic Wettability on Hierarchical Structures of Micro Line Array Combined with Fluorinated Wax (C24F50)

  • 전덕진
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.209.2-209.2
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    • 2014
  • In recent years, researches about hydrophobic and hydrophilic surfaces have been executed however their other effects have not been researched enough. In this paper, the fabrication method of hierarchical structures of micro line array combined with fluorinated wax for anisotropic superomniphobic wettability is presented. We have achieved anisotropic and superomniphobic surface via simple two step methods, which are maskless photolithography and wax deposition. In order to prove how to provide those characteristics, SEM, contact angle measurement tool and X-ray diffraction are used. Fluorinated wax is crystalized self-assembly and it is subordinated on micro line array so that it is able to display anisotropic wettability. Understanding on anisotropic superomniphobic surface and simple fabrication method has been attracted to apply for lots of applications which range from self-cleaning surface, microfluidic chip, to directionally fluid control device, even in oily fluid.

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표면 미세 가공기술을 이용한 마이크로 캔틸레버의 제작과 바이오센서로의 응용 (Fabrication of Microcantilever-based Biosensor Using the Surface Micromachining Technique)

  • 유경아;정승룡;강치중;김용상
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권1호
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    • pp.11-15
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    • 2006
  • We propose an optical and an electrical detection methods for detecting various bio-molecules effectively with microcantilevers. The microcantilevers were fabricated employing surface micromachining technique that has attractive advantages in terms of cost efficiency, simplicity and ability of fabricating in array. The fluid cell system for injection of bio-molecular solution is fabricated using polydimethylsiloxane (PDMS) and a fused silica glass. The microcantilever is deflected with respect to the difference of the surface stress caused by the formation of self-assembled bio-molecules on the gold coated side of the microcantilever. It detected cystamine dihydrochloride and glutaraldehyde molecules and analyzed individual concentrations of the cystamine dihydrochloride solution. We confirm that the deflections of bending-up or bending-down are occurred by the bio-molecule adsorption and microcantilever can be widely used to a ${\mu}-TAS$ and a lab-on-a-chip for a potential detection of various bio-molecules.

A Capillary Electrochromatographic Microchip Packed with Self-Assembly Colloidal Carboxylic Silica Beads

  • Jeon, In-Sun;Kim, Shin-Seon;Park, Jong-Man
    • Bulletin of the Korean Chemical Society
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    • 제33권4호
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    • pp.1135-1140
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    • 2012
  • An electrochromatographic microchip with carboxyl-group-derivatized mono-disperse silica packing was prepared from the corresponding colloidal silica solution by utilizing capillary action and self-assembly behavior. The silica beads in water were primed by the capillary action toward the ends of cross-patterned microchannel on a cyclic olefinic copolymer (COC) substrate. Slow evaporation of water at the front of packing promoted the self-assembled packing of the beads. After thermally binding a cover plate on the chip substrate, reservoirs for sample solutions were fabricated at the ends of the microchannel. The packing at the entrances of the microchannel was silver coated to fix utilizing an electroless silver-plating technique to prevent the erosion of the packed structure caused by the sudden switching of a high voltage DC power source. The electrochromatographic behavior of the microchip was explored and compared to that of the microchip with bare silica packing in basic borate buffer. Electrophoretic migration of Rhodamine B was dominant in the microchip with the carboxyl-derivatized silica packing that resulted in a migration approximated twice as fast, while the reversible adsorption was dominant in the bare silica-packed microchip. Not only the faster migration rates of the negatively charged FITC-derivatives of amino acids but also the different migration due to the charge interaction at the packing surface were observed. The electrochromatographic characteristics were studied in detail and compared with those of the bare silica packed microchip in terms of the packing material, the separation potential, pH of the running buffer, and also the separation channel length.

DNA Hybridization 검출 센서를 이용한 매치 및 미스매치 DNA hybridization 특성 연구 (A Study on Match and Mismatch DNA Hybridization properties Using DNA Hybridization Detection Sensor)

  • 김도균;권영수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.89-91
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    • 2003
  • The determination of DNA hybridization reaction can apply the molecular biology research, clinic diagnostics, bioengineering, environment monitoring, food science and other application area. So, the improvement of DNA detection system is very important for the determination of this hybridization reaction. In this study, we report the characterization of the probe and target oligonucleotide hybridization reaction using the evanescent field microscopy. First, we have fabricated DNA chip microarray. The particles which were immobilized oligonucleotides were arranged by the random fluidic self-assembly on the pattern chips, using hydrophobic interaction. Second, we have detected DNA hybridization reaction using evanescent field microscopy. The 5'-biotinylated probe oligonucleotides were immobilized on the surface of DNA chip microarray and the hybridization reaction with the Rhodamine conjugated target oligonucleotide was excited fluorescence generated on the evanescent field microscopy. In the foundation of this result, we could be employed as the basis of a probe olidonucleotide, capable of detecting the target oligonucleotide and monitoring it in a large analyte concentration range and various mismatching condition.

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표면 미세 가공기술을 이용한 마이크로 캔틸레버의 제작과 바이오션서로의 응용 (Microcantilever-based biosensor using the surface micromachining technique)

  • 유경아;정승룡;강치중;김용상
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.2407-2409
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    • 2005
  • 본 논문에서는 다양한 생물분자 감지를 위한 센서로 마이크로캔틸레버를 제안하였고 이것을 이용해 여러 생물 분자들을 광학적, 전기적으로 분석하였다. 마이로캔틸레버는 표면 미세 가공 기술로 제작되었고, 이러한 제작 방식은 공정이 간단하고 비용이 적게 들며 센서 array가 가능하다는 장점을 갖는다. 생물분자를 포함하는 용액을 주입하기 위하여 PDMS와 fused silica glass를 이용해 fluid cell system을 제작하였다. 마이크로캔틸레버 상단의 gold가 코팅된 부분에서 생물분자의 자기조립 (self assembly)현상이 일어나고 이는 마이크로캔틸레버 상, 하단의 표면 스트레스 차이를 야기 시킨다. 이로 인해 마이크로캔틸레버 자체의 휘어짐 현상이 일어나게 되고 이러한 휘어진 정도를 측정함으로써 마이크로캔틸레버의 생물분자 감지능을 확인할 수 있었다. Cystamine dihydrochloride와 glutaraldehyde 분자를 분석하였고 각기 다른 농도의 cystamine dihydrochloride 용액에서도 실험함으로써 농도별 감지능 또한 확인하였다. 이러한 생물분자 감지를 위한 마이크로캔틸레버의 센서로써의 성능은 u-TAS 와 lab-on-a-chip에서 유용히 이용될 수 있으리라 확신한다.

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살모넬라와 면역글로블린(hIgG)의 항원-항체반응 감지를 위한 표면 플라즈몬 공명형 센서시스템의 특성 (Characteristics of Constructed SPR (Surface Plasmon Resonance) Sensor System for the Detection of Salmonella and hIgG Antigen-Antibody Reaction.)

  • 엄년식;고광락;함성호;김재호;이승하;강신원
    • 센서학회지
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    • 제7권4호
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    • pp.263-270
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    • 1998
  • 본 연구에서는 특정한 생물학적 의미를 갖는 물질들간의 결합 및 분리과정을 실시간에 측정하기 위해 빠른 응답특성과 높은 감도를 갖는 표면 플라즈몬 공명 (Surface Plasmon Resonance, SPR) 현상을 이용한 센서 시스템을 제작하였다. SPR 시스템의 프리즘 표면에 일정 두께의 금 박막이 진공증착된 센서칩을 두고 이 아래에 위치한 시료충전셀에 살모넬라 (salmonella) 항체를 주입시켜 항체가 센서칩 표면에서 자기집합 (self-assembly) 함에 따라 공명각이 변화하는 현상을 측정하였다. 이후 분석대상물질인 살모넬라 항원을 주입하여 항체와의 결합 상태를 일정 시간 간격을 두고 공명각의 변화로서 측정하고 이 결과를 분석하였다. 또한 human Immunglobulin G (hIgG)를 항원으로 한 항원-항체 반응 역시 살모넬라의 경우와 같은 방법으로 측정하였다. 그 결과 살모넬라의 항체는 센서칩 표면에서 약 10분 동안 자기집합하고 반응이 포화됨을 공명각의 변화를 통해 볼 수 있었으며, hIgG의 항체의 경우는 약 60분 동안 반응을 하고 포화됨을, 그리고 살모넬라와 hIgG의 항원 (분석대상물질) 은 모두 각각의 항체에 대해서 약 1분 이내에 결합하고 포화됨을 볼 수 있었다.

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실리콘 광학벤치를 사용한 수동정렬형 광송수신기용 광부모듈의 제작 (Fabrication of passive-aligned optical sub-assembly for optical transceiver using silicon optical bench)

  • 이상환;주관종;황남;문종태;송민규;편광의;이용현
    • 한국광학회지
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    • 제8권6호
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    • pp.510-515
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    • 1997
  • 광모듈에서는 반도체소자와 광섬유간의 복잡한 정렬에 필요한 패키지비용이 제조단가의 많은 비중을 차지하고 있어 수동정렬방식으로 광정렬절차를 제거하여 패키지비용을 절감하는데 대한 많은 연구가 행해지고 있다. 본 연구에서는 단일 모드 광섬유와 레이저 및 광검출기를 수동적으로 광결합시킬 수 있는 실리콘 광학벤치를 제작하고 이를 사용하여 광송수신기용의 광부모듈을 제작하였다. 기판의 구조에 있어서 V-홈에 정렬된 광섬유와 플립칩 본딩되는 LD간의 위치 정밀도를 개선하기 위하여 V-홈 식각패턴과 자기정렬된 정렬마크와 솔더댐을 사용하고 레이저의 높이조절 및 열방출을 위하여 도금된 금 받침대를 도입하였다. 실리콘 광학벤치를 이용하여 수동정렬방식으로 조립된 송신기용 광부모듈은 평균 -11.75.+-.1,75 dB의 광결합효율을 나타내었고 수신기용 광부모듈은 평균 -35.0.+-.1.5 dBm의 수신감도를 나타내었다.

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