Fabrication of Microcantilever-based Biosensor Using the Surface Micromachining Technique

We propose an optical and an electrical detection methods for detecting various bio-molecules effectively with microcantilevers. The microcantilevers were fabricated employing surface micromachining technique that has attractive advantages in terms of cost efficiency, simplicity and ability of fabricating in array. The fluid cell system for injection of bio-molecular solution is fabricated using polydimethylsiloxane (PDMS) and a fused silica glass. The microcantilever is deflected with respect to the difference of the surface stress caused by the formation of self-assembled bio-molecules on the gold coated side of the microcantilever. It detected cystamine dihydrochloride and glutaraldehyde molecules and analyzed individual concentrations of the cystamine dihydrochloride solution. We confirm that the deflections of bending-up or bending-down are occurred by the bio-molecule adsorption and microcantilever can be widely used to a ${\mu}-TAS$ and a lab-on-a-chip for a potential detection of various bio-molecules.

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