• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.46-49
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• 2003

Chemical mechanical polishing (CMP) is an essential dielectric planarization in multilayer microelectronic device fabrication. In the CMP process it is necessary to minimize the extent of surface defect formation while maintaining good planarity and optimal material removal rates. The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on W passivation layer, in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5% hydrogen peroxide such as $Fe(NO_3)_3$, $H_2O_2$, and $KIO_3$. The difference in removal rate and roughness of W in stable and unstable slurries are believed to caused by modification in the mechanical behavior of $Al_3O_3$ particles in presence of surfactant stabilizing the slurry.

• Applied Chemistry for Engineering
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• v.20 no.5
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• pp.557-560
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• 2009

In this study, a new wet etching method and the solution for thinning the glass with the thickness below $100{\mu}m$ were investigated. For the preparation of etching solution with low hydrofluoric acid, it was effective to use $NH_4F$ or $NH_4HF_2$ as a main ingredient with the addition of sulfuric acid or nitric acid. Influence of the composition of mixed acid solution and the temperature on the etching rate was investigated. The addition of anionic surfactant provides the function to prevent the adhesion of sludge generated by the etching reaction. A new wet etching pilot device equipped with streaming generation parts was used to test etching of commercial non-alkali glass and soda lime glass. The non-alkali glass with the thickness of 640 ${\mu}m$ and soda lime glass with the thickness of $500{\mu}m$ were etched to $45{\mu}m$ and $100{\mu}m$, respectively, by using the pilot device. After the etching by pilot device, the roughness degree of the glass surface was maintained at $0.01{\sim}0.02{\mu}m$.

• Journal of the Korean Chemical Society
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• v.48 no.3
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• pp.236-242
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• 2004

The critical micelle concentration (CMC) and the counterion binding constant (B) in a mixed micellar state of the Dodecylpyridinium chloride (DPC) with the Cetyldimethylethylammonium bromide (CDEAB) at 25$^{\circ}C$ in aqueous solutions of n-butanol were determined as a function of ${\alpha}_1$ (the overall mole fraction of DPC) by the use of electric conductivity method. Various thermodynamic parameters (($X_i,\;{\gamma}_i,\;C_i,\;a^M_i,\;{\beta},\;and {\Delta}H_{mix})$were calculated by means of the equations derived from the nonideal mixed micellar model. The effect of n-butanol on the mixed micellization of the DPC/CDEAB mixtures has been also studied by analyzing the measured and calculated thermodynamic parameters (CMC, B 및 $;{\Delta}G_o\;^m$).

• Clean Technology
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• v.13 no.2
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• pp.127-133
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• 2007

Celite with enormous pore space inside can hold small molecules and can be well blended with polyethylene (PE) to make a Celite-PE film. Two types of Celite-PE film were prepared, one with Celite surface-treated with surfactant to reduce the hydrophilicity and another with plain Celite. The anti-rust chemical such as dicyclohexylamine, dicyclohexylamine nitrite, or diisopropylamine was allowed to permeate into celite pore in the film, and slowly evaporated to protect the packaged steel material from the rust for a long period of time. The chemical concentration in the different packaging film bags was analyzed by a gas chromatography for a month, and the anti-rust effect on iron labware was compared for a six month period. The Celite film was superior to PE film in anti-rust effect and the long-term anti-rust chemical evaporation.

• Journal of the Korean Chemical Society
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• v.32 no.3
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• pp.186-194
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• 1988

The electrochemical reduction of O,O-dimethyl-O-(3-methyl-4-nitrophenyl)-phosphorothioate (Fenitrothion) has been studied in acetonitrile solution containing surfactant micelle by direct current (DC)-differential pulse (DP) polarography, cyclic voltammetry (CV) and controlled potential coulometry (CPC). The partially reversible electron transfer-chemical reaction(EC, EC mechanism) of fenitrothion reduction proceeded by four electron transfer to form O,O-dimethyl-O-(3-methyl-4-hydroxyaminophenyl)-phosphorothioate which undergoes single bond of the phosphorus atom and phenoxy group cleaves to give p-amino-m-cresol and dimethyl thiophosphinic acid as major product by two electron transfer-protonation at higher negative potential. The polarograpic reduction waves shown to suppressed due to inhibitory effect of sodium lauryl sulfate micelle solution and split up on selectivity of anionic micelle effect in two step at the first reduction peak.

• Journal of Adhesion and Interface
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• v.3 no.4
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• pp.27-36
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• 2002

The organic/organic core-shell composite polymer for nonwomen binder were synthesized by stage polymerization of methyl methacrylate and styrene with ammonium persulfate after preparing monomer pre-emulsion in the presence of anionic surfactant. We study the effect of initiator concentration, $0.79{\times}10^{-3}{\sim}3.16{\times}10^{-3}mol/L$ for core polymer, $2.0{\times}10^{-4}{\sim}8.0{\times}10^{-4}mol/L$ for shell polymer, sulfactant concentration, $1.45{\times}10^{-5}{\sim}4.15{\times}10^{-5}mol/L$ for core polymer, $0.73{\times}10^{-5}{\sim}2.91{\times}10^{-5}mol/L$ for shell polymer on core-shell structure of polymethyl methacrylate/polystyrene and polystyrene/polymethyl methacrylate. Emulsion stability was major test method, particle size and particle size distribution were measured using particle size analyzer and the morphology of the core-shell composite polymer was determined using transmission electron microscope, glass temperature was also measured using differential scanning calorimeter.

• Korean Chemical Engineering Research
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• v.53 no.3
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• pp.302-308
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• 2015

Isothermal vapor liquid equilibria for the binary system of 3-methylpentane with ethylene glycol monopropyl ether ($C_3E_1$) and ethylene glycol isopropyl ether ($iC_3E_1$) were measured at 303.15, 318.15, and 333.15K. In our previous work, phase equilibria for the binary system of $C_3E_1$ mixtures were investigated according to the chain length of alkane, alcohol or those isomer. But in this study, we discussed the different effect of $C_3E_1$ and its isomer, $iC_3E_1$, on the phase equilibria. The measured systems were correlated with a Peng-Robinson equation of state (PR EOS) combined with Wong-Sandler mixing rule for the vapor phase, and NRTL, UNIQUAC, and Wilson activity coefficient models for the liquid phase. All the measured systems showed good agreement with the correlation results. And it was found that the phase equilibria showed very little difference between the $iC_3E_1$ mixture system and the $C_3E_1$ mixture system.

• Korean Chemical Engineering Research
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• v.50 no.4
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• pp.684-689
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• 2012

Poly(acrylic acid) (PAA) microspheres is one of the widely-used polymeric materials for the bio-field application and the electric materials. For the synthesis of PAA microspheres, the polymerization technique using surfactants is applied. After the synthesis, the purification and separation processes are required for the removal of surfactant. When general organic solvents were used, many problems, such as huge amount of waste solvent, additional separation processes, and the possibility of residual media, were occurred. Thus, High-pressure Soxhlet extraction using liquid $CO_2$ was developed to solve these problems. In this study, High-pressure Soxhlet extraction of the synthesized PAA microspheres using liquid $CO_2$ was conducted for the removal of Monasil PCA which is used for the dispersion polymerization of acrylic acid in compressed liquid Dimethyl ether (DME). The morphology of the extracted PAA particles was checked by field emission scanning electron microscopy (FE-SEM) and the residual concentration of Monasil PCA was analyzed by inductively coupled plasma - Optical Emission Spectrometer (ICP-OES). For studying the effect of the solvent effect, Soxhlet extraction was conducted using n-hexane, liquid DME, and liquid $CO_2$. In case of n-hexane, some extracted PAA microspheres were produced. However, deformation was also occurred due to the high thermal energy of n-hexane vapor. Liquid DME could not remove Monasil PCA. When using liquid $CO_2$, the extracted PAA microspheres which were free for the residual solvent were produced without deformation. For finding the optimum operating condition, high-pressure Soxhlet extraction was conducted for 8 hours with changing the temperature of reboiler and condenser. When the extractor temperature is $19.6{\pm}0.2^{\circ}C$ and the pressure is $51.5{\pm}0.5$ bar, the best removal efficiency was obtained.

• The Korean Journal of Pesticide Science
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• v.5 no.2
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• pp.51-57
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• 2001

Controlling effect of several surfactants on barley powdery mildew (pathogen : Erysiphae graminis) and those influence on fungicidal activity by tank-mixing with commercialized fungicides were investigated in greenhouse test with barley seedlings. While protective activity of PNPP showed 90% at $1,000{\mu}g/mL$, that of LN 13.0 91.2%, tile best among 8 surfactants used in curative test. With $500{\mu}g/mL$, LN 13.0 showed 4% of disease percentage on the first leaf of narley continuously 4 days after the curative application. Excent for PNPP, the other surfactants, including NP 13.0, LN 13.0, and PAS, showed good inhibitory activity against spore germination in water agar medium amended with those surfactants. PAS, which showed very poor effect against barley powdery mildew in greenhouse test, strongly inhibited spore germination. Fungicide of triadimefon and triforine showed no controlling activity against Erysiphae graminis in narley seedlings, but they highly controlled powdery mildew in case of addition with $500{\mu}g/mL$ of LN 13.0 and Tween 20. SP 13.0, NP 13.0, LN 13.0 and DBC showed severe phytotoxicity in first leaf of barley seedlings, but Tween 20, SLIS, PAS, and PNPP not at $1,000{\mu}g/mL$.

• Journal of the Korean Society of Safety
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• v.19 no.2
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• pp.47-53
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• 2004

Emulsion polymerization ws carried out using Alkyl methacrylate(RMA) like MMA, EMA, BMA and Styrene Monomer(SM) for core-shell latex preparation. It was synthesized at $80^{\circ}C$ in the presence of anionic surfactant SLS(Sodium Lauryl Sulfate). FT-IR and DSC analysis are used to confirm the synthesized core-shell emulsion latexes. Moreover DSC and TGA were used to investigate the thermal characterisitcs of them. The differences of the decomposition rate and the activation energy from TGA and DSC analysis are not so big. It considers that the pendent group is not affect of the thermal characteristics and stability on core-shell latexes, which is synthesized with RMA and Styrene. For investigating combustion products, LC50 values were calculated by FED(Fractional Effective Dose)from the Pyrolyzer-Mass sepctrometer.