• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.10
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• pp.812-816
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• 2000

It is very important to understand the correlation of between inter dielectric(ILD) CMP process and various facility factors supplied to equipment to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD-CMP process was studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyze various facilities supplied at supply system. With facility shortage of D.I water(DIW) pressure, we introduced an adding purified $N_2$(P$N_2$)gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and P$N_2$gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and P$N_2$gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

• Bulletin of the Korean Chemical Society
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• v.22 no.12
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• pp.1375-1379
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• 2001

Monte Carlo simulations of hard-spheres confined in parallel hard walls have been carried out extensively at various densities and for various wall distances. The compressibility factors in the directions parallel and normal to the wall have been calculated from the radial free space distribution function (RFSDF) with the results showing that the compressibility factors normal to the wall are smaller than those in parallel direction and that a solid phase is formed in the direction normal to the wall while a fluid phase remains in the parallel direction. An order parameter is found to classify the phases whether a system (or a molecule) is in a fluid or a solid state. The compressibility factors of narrow wall are very small compared to those when the wall is put away. A plausible mechanism of the rise of sap in xylem vessel has been proposed.

• 한국생물공학회:학술대회논문집
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• 2005.10a
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• pp.911-911
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• 2005

• Korean Journal of Environmental Biology
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• v.29 no.2
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• pp.98-106
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• 2011

In order to investigate water quality factors controlling chlorophyll-$a$ concentrations, the by-daily monitoring was conducted from February to November 2010 in 4 stations of Masan Bay. Seasonal variability in physico-chemical factors was mainly controlled by freshwater loading as a result of precipitation: chemical oxygen demand, suspended solids and nutrient concentrations rapidly increase during the heavy rainy season, whereas they decrease in the dry season. From late winter to mid spring, phosphorus and silica sources relative to Redfield ratio were probably functioned as limiting factor for phytoplankton flourishing in surface waters, but nitrogen concentration during mid-spring to autumn might be responsible for the increase of phytoplankton biomass. The multiple regression analysis revealed that variations in chlorophyll-$a$ concentration may be strongly correlated with changes of water temperature, chemical oxygen demand, dissolved inorganic phosphorus in spring, and salinity, chemical oxygen demand and precipitation in summer. Consequently, in the Masan Bay, a heavy rainfall event is an important factor to determine changes of biotic and abiotic factors, and in addition the dynamics of chlorophyll-$a$ concentration are strongly affected by changes of hydrological factors, especially water temperature, precipitation and nutrients.

• Journal of the Korean Society of Tobacco Science
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• v.26 no.1
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• pp.17-26
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• 2004

This study was conducted to get the informations for reducing the variation of chemical contents of leaf tobacco. The contents and variations of some chemical constituents of leaf(Leaf, Grade 2) produced in various growing areas from 1999 to 2003 and the effects of meteorological factors on the chemical constituents of leaf were analysed. The contents of analysed constituents of leaf showed high significant differences among crop years in flue-cured and burley, particularly the variation among crop years were higher in chlorine and nicotine contents while lower in total nitrogen content. There were significant differences among growing areas in nicotine and total sugar contents of flue-cured leaf and chlorine content of burley leaf. The total sugar content were negatively correlated to the nicotine and total nitrogen contents in flue-cured leaf. The average air temperature in June and July were positively correlated to the nicotine content of leaf while negatively to total sugar, and the precipitation in May were negatively correlated to the nicotine while positively to total sugar.

• Journal of Aquaculture
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• v.18 no.3
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• pp.196-199
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• 2005

Farmed red sea breams, Pagrus major, were fed for 60 days with pellets containing different concentrations of benzo(a)pyrene (0, 0.2, 2, 20 mg/kg) to generate a biomarker of the chemical toxicity in the fish. The fish exposed to the chemical concentrations did not show any significant difference in the weight gain, conditioning, factor, and hepatosomatic index. However, some haematological parameters, such as glucose, calcium, magnesium, GOT (glutamic oxalate transaminase), and GPT (glutamic pyruvate transaminase) were influenced by the chemical exposure. Of them, two enzymes, GOT and GPT, increased significantly 60 days after the exposure in a way of concentration dependence (P<0.05). In the study of ecotoxicological biomarker, sensitivity to adverse environments is one of the key available factors. The fish changes in GOT and GPT were an earlier and reliable sign of the fish response against the chemical exposure, rendering the two enzymatic factors as a useful biomarker at least to benzo(a)pyrene exposure in the farming waters.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.1038-1043
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• 1997

To adapt the neural network proess for the purpose of determination of optimal utting onditions (optimal cutting speed and feed rate), some selection strategies for the machining factors are necessary, which is considered planning cutting process. In this case, factors that have both nonlinearity and strong relationship must be selected. Although tool grade and chemical properties of workpiece material have strong effect to cutting speed, it's not easy to find a analytic relation between them. In this paper, a mathematical method for determining the optimal amount of cutting (depth of cut, feed rate) is presented by tool goemetry and heat generation during cutting process. And various tool grade and workpiece material groups ase classified based on its chemical properties. Thier chemical composition and hardness are used as input pattern for neural network learnig. The result of learning shows the relationship between tool grade and workpiece material and it is proved that it can be used as a sub-system for automatic process planning system.

• Safety and Health at Work
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• v.8 no.2
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• pp.206-211
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• 2017

Background: Self-reported low back pain (LBP) has been evaluated in relation to material handling lifting tasks, but little research has focused on relating quantifiable stressors to LBP at the individual level. The National Institute for Occupational Safety and Health (NIOSH) Composite Lifting Index (CLI) has been used to quantify stressors for lifting tasks. A chemical exposure can be readily used as an exposure metric or stressor for chemical risk assessment (RA). Defining and quantifying lifting nonchemical stressors and related adverse responses is more difficult. Stressor-response models appropriate for CLI and LBP associations do not easily fit in common chemical RA modeling techniques (e.g., Benchmark Dose methods), so different approaches were tried. Methods: This work used prospective data from 138 manufacturing workers to consider the linkage of the occupational stressor of material lifting to LBP. The final model used a Bayesian random threshold approach to estimate the probability of an increase in LBP as a threshold step function. Results: Using maximal and mean CLI values, a significant increase in the probability of LBP for values above 1.5 was found. Conclusion: A risk of LBP associated with CLI values > 1.5 existed in this worker population. The relevance for other populations requires further study.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.196-203
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• 2002

Generally, non-uniformity and removal rate are important factors on measurements of both wafer and die scale. In this study, we verify the effects of the pressure and relative velocity on the results of the chemical mechanical polishing and the effect of pattern density on inter layer dielectric chemical mechanical polishing of patterned wafer. We suggest an appropriate modeling equation, transformed from Preston\`s equations which was used in glass polishing, and simulate the removal rate of patterned wafer in chemical mechanical polishing. Results indicate that the pressure and relative velocity are dominant factors for the chemical mechanical polishing and pattern density effects on removal rate of pattern wafers in die scale. The modeling is well agreed to middle and low density structures of the die. Actually, the die used in Fab. was designed to have an appropriate density, therefore the modeling will be suitable for estimating the results of ILD CMP.

• Journal of the Korean institute of surface engineering
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• v.49 no.4
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• pp.363-367
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• 2016

For the industrial application of electropolishing process, we investigated electropolishing characteristics of stainless steel through increasing the specimen size or electrode gap. In this study, we performed a set of experiment with the specimen size of $10cm{\times}10cm$ and the electrode gap of 1 cm or more. In the view of the electropolishing process, the electrolyte temperature and the polishing time were most important factors compared with the current density and the electrode gap. Especially, the electrolyte temperature most importantly affected surface roughness and current efficiency on electropolishing characteristics. For the industrial application of electropolishing process, it should be considered for important factors such as electrolyte temperature, polishing time, current density and electrode gap, etc.